CN102528803A - Robot system for substrate moving, substrate deviation detection and modification method - Google Patents

Robot system for substrate moving, substrate deviation detection and modification method Download PDF

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Publication number
CN102528803A
CN102528803A CN2011104030619A CN201110403061A CN102528803A CN 102528803 A CN102528803 A CN 102528803A CN 2011104030619 A CN2011104030619 A CN 2011104030619A CN 201110403061 A CN201110403061 A CN 201110403061A CN 102528803 A CN102528803 A CN 102528803A
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CN
China
Prior art keywords
substrate
centre
board carrying
gravity
difference
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Pending
Application number
CN2011104030619A
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Chinese (zh)
Inventor
塚本克则
末吉智
原田修
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Publication of CN102528803A publication Critical patent/CN102528803A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/1633—Programme controls characterised by the control loop compliant, force, torque control, e.g. combined with position control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

The invention provides a manipulator for substrate moving which can detect the deviation of a substrate, a robot system for substrate moving and a substrate deviation detection method. A substrate position modification method is also provided. The robot system for substrate moving comprises a robot for substrate moving, comprising a contact part contacting the lower part of the substrate and a manipulator for substrate moving for detecting a plurality of sensors contacting with the gravity center of the substrate; a first control device having a differential operation part and a first judging part. The differential operation part respectively calculates the differential between the detection value of each sensor. The first judging part determines the position deviation direction of the substrate based on each differential.

Description

Board carrying detects and modification method with robot system, substrate positional misalignment
Technical field
The present invention relates to a kind of board carrying with hand, board carrying with robot system, substrate positional misalignment detection method and substrate position modification method.
Background technology
Be provided with the optical sensor that detects glass substrate in the past board carrying on hand with robot.Judge through this optical sensor whether the glass substrate that is supported on hand is positioned at (for example with reference to patent documentation 1) on the position that is predetermined.
Following at large at this, board carrying with robot in, use optical sensor to keep watch on departing from of substrate position in the carrying.But for example the difference owing to the substrate kind exists optical sensor can't detect the situation of glass substrate.
Patent documentation 1: the spy of Japan opens the 2006-318975 communique
Summary of the invention
The board carrying that the object of the present invention is to provide a kind of position deviation that can detect substrate with hand, board carrying with robot system, substrate positional misalignment detection method.In addition, with the purpose of the substrate position modification method that the substrate position that can correction position departs from is provided as other.
It is following with robot system to invent the board carrying that relates to according to the 1st of said purpose; Possess: board carrying is used robot, and the board carrying with a plurality of sensors of the position of centre of gravity that is provided with the contact site below the contact substrate and is used to detect this substrate that is contacted with this contact site is used hand:
And the 1st control device; Have calculus of differences portion and the 1st judging part; Said calculus of differences portion respectively the said substrate of computing be supported on said board carrying with on hand become the position of benchmark the time the difference of detected value of detected value a reference value and present said each sensor of said each sensor, said the 1st judging part is judged the position deviation direction of said substrate according to this each difference.
The 1st board carrying that relates to of invention with hand in, can be following, a plurality of said contact sites are set,
Said each sensor is arranged on the bottom of said each contact site, is the load sensor from the load of said substrate that detects that this contact site bears.
The 1st board carrying that relates to of invention with robot system in; Can be following; Said the 1st control device have store in advance said substrate the carrying direction and practically with the direction of this carrying direction quadrature on the pattern reservoir of increase and decrease Mode A of said each difference when departing from
Said the 1st judging part to said each difference be stored in said Mode A in the said pattern reservoir and contrast and judge said position deviation direction.
The 1st board carrying that relates to of invention with robot system in, also can be following, said the 1st control device also has the 2nd judging part of offset direction of judging the position of rotation of said substrate according to said each difference.
The 1st board carrying that relates to of invention with robot system in, also can be following, the increase and decrease Mode B of said each difference when position of rotation that said pattern reservoir also is stored in said substrate departs from,
Said the 2nd judging part to said each difference with being stored in that said Mode B in the said pattern reservoir contrasts the offset direction of judging said position of rotation.
The 1st board carrying that relates to of invention with robot system in, also can be following, alternative said the 1st control device and possess the 2nd control device,
Said the 2nd control device has: reference table reservoir, detected value that makes said each sensor and the corresponding reference table of this position of centre of gravity when being stored in the position of centre of gravity that changes said substrate;
The position of centre of gravity determination section with reference to said reference table, is obtained the position of centre of gravity of said substrate from the detected value of said each sensor.
The 1st board carrying that relates to of invention with robot system in, also can be following, alternative said the 1st control device and possess the 3rd control device,
Said the 3rd control device has the position of centre of gravity operational part, according to the detected value of said each sensor and the position of centre of gravity of the said substrate of computing.
It is following with hand to invent the board carrying that relates to according to the 2nd of said purpose, possesses: the contact site below the contact substrate;
And be used to detect a plurality of sensors of the position of centre of gravity of the said substrate that is contacted with said contact site.
The 3rd substrate positional misalignment detection method that relates to of invention according to said purpose is following, comprising:
Substrate is positioned on the position that becomes benchmark on hand that is arranged in the robot, with being arranged on the step that the load from this substrate that this contact site that is contacted with this substrate on hand bears stores as a reference value;
The step of obtaining that said contact site bears during the said substrate of said robot transport from the difference of the load of this substrate and said a reference value;
Reach the step of obtaining the position deviation direction of said substrate according to said difference.
It is following to invent the substrate position modification method that relates to according to the 4th of said purpose, comprising:
Store the step of following reference table, be arranged on each position on hand in the robot and make and be arranged on this on hand and to be contacted with the load from this substrate that the contact site of substrate bears corresponding with the position of centre of gravity of said substrate;
During the said substrate of said robot transport, the step that load and the said reference table from this substrate that bears according to said contact site obtained the position of centre of gravity of said substrate;
And said robot moves the step of said hand with the mode of revising the position deviation of said substrate according to said position of centre of gravity.
The board carrying that the present invention relates to hand, board carrying with robot system, substrate positional misalignment detection method in, can detect the position deviation of substrate.
In addition, in the substrate position modification method that the present invention relates to, can revise the position of substrate.
Description of drawings
Fig. 1 is the sketch map of the board carrying that relates to of the 1st embodiment of the present invention with robot system.
Fig. 2 board carrying that to be this board carrying possess with robot system is with the three-view diagram of the hand of robot.
Fig. 3 is the A portion enlarged drawing of hand shown in Figure 2.
The functional block diagram of Fig. 4 robot controller that to be this board carrying possess with robot system.
Fig. 5 is that expression is arranged on board carrying that this board carrying possesses with the robot system sketch map with the offset direction of the detected state of the load sensor on hand of robot and glass substrate.
The functional block diagram of Fig. 6 robot controller that to be the board carrying that relates to of the 2nd embodiment of the present invention possess with robot system.
The functional block diagram of Fig. 7 robot controller that to be the board carrying that relates to of the 3rd embodiment of the present invention possess with robot system.
The functional block diagram of Fig. 8 robot controller that to be the board carrying that relates to of the 4th embodiment of the present invention possess with robot system.
Symbol description
The 10-board carrying is used robot system; The 20-board carrying is used robot; The 30-robot controller; The 42-fixed pedestal; The 44-lower arm; The 46-upper arm; The 48-top base; The 50-arm; The 50a-left arm; The 50b-right arm; The 60-hand; The 60a-left hand; The 65-chest; 66-left side frame; The 66a-lower box; The 66b-upper box; The 66c-coupling member; 68a-the 1st supporting member; 68b-the 2nd supporting member; 70-calculus of differences portion; 72-the 1st judging part; 74-a reference value reservoir; 76-pattern reservoir; The 80-robot controller; 82-the 2nd judging part; The 90-robot controller; 92-reference table reservoir; 94-position of centre of gravity determination section; The 100-robot controller; 102-position of centre of gravity operational part; P BL, P BR, P FL, P FR-supporting pin; S BL, S BR, S FL, S FR-load sensor; The W-glass substrate.
The specific embodiment
Next,, supply the embodiment that the present invention specializes with reference to description of drawings in understanding the present invention.And, in each figure, have the irrelevant illustrated situation that is coupled to the part of explanation of omitting.
The board carrying that the 1st embodiment of the present invention relates to possesses with robot system 10: the board carrying of carrying glass substrate (example of substrate) W is with robot 20; And robot controller (example of the 1st control device) 30.
For example shown in Figure 1, board carrying possesses with robot 20: be fixed on the fixed pedestal 42 on the face of setting; An end can center on the lower arm 44 that trunnion axis AX1 is provided with being rotated on fixed pedestal 42; One end, the other end in lower arm 44 can center on the upper arm 46 that trunnion axis AX2 is provided with being rotated; Reach in the other end of upper arm 46 and can center on the top base 48 that trunnion axis AX3 and axle of the plummet AX4 are provided with being rotated.Board carrying also has with machine 20: left arm 50a and right arm 50b (below, have the situation that is referred to as " arm 50 " simply), be arranged on the top base 48,2 arm bodies are flexible through being rotated around rotating shaft AX5, AX6 respectively; And left hand 60a and the right hand (board carrying is with an example of hand, below, existence is referred to as the situation of " arm 60 " simply.With reference to Fig. 5), be separately positioned on the top ends of left arm 50a and right arm 50b.And, in Fig. 1, omitted the right hand (top ends of right arm 50b).
Board carrying with robot 20 through making lower arm 44, upper arm 46 and top base 48 respectively around in fact being rotated and can be with moving up at upper and lower under hand 60 state that in fact level is kept with the trunnion axis AX1 that the face level is set, trunnion axis AX2 and trunnion axis AX3.In addition, board carrying can be through telescopic arm 50 with hand 60 (Y forwards with robot 20 FDirection) reaches (Y rearward BDirection) carrying.
Thereby, board carrying with robot 20 through being supported on glass substrate W on the hand 60 at above-below direction and fore-and-aft direction (Y FDirection and Y BDirection) upward moves, and can be housed in the chest 65 glass substrate W or taking-up from chest 65.
Below, specify hand 60.
Like Fig. 1, shown in Figure 2, left hand 60a possesses: left frame 66 is arranged on the top ends of left arm 50a; Reach the 1st and the 2nd supporting member 68a, 68b, extend from left frame 66 respectively.
Left side frame 66 has: lower box 66a, and length direction intersects with the flexible direction of left arm 50a; Upper box 66b is arranged on the upside of lower box 66a, and length direction intersects with the flexible direction of left arm 50a; And coupling member 66c, the end of binding lower box 66a and upper box 66b.
The the 1st and the 2nd supporting member 68a, 68b are configured to as follows, extend in the flexible direction of left arm 50a respectively across the interval from upper box 66b.
At the 1st and the 2nd supporting member 68a, last 2 supporting pins (example of contact site) that respectively are provided with of 68b, this supporting pin contacts the following of glass substrate W and support glass substrate W.When overlooking board carrying, be arranged on the supporting pin P on the 1st supporting member 68a with robot 20 BL, P FLWith the supporting pin P that is arranged on the 2nd supporting member 68b BR, P FRBe configured to as follows, for trunnion axis AX1 quadrature and through axle of the plummet AX4 the axle in fact be the symmetry.
As shown in Figure 3, at supporting pin P BL, P FLThe bottom, be provided with and can detect from being supported on supporting pin P BL, P FLOn load sensor (example of the sensor) S of load of glass substrate W BL, S FLEqually, at supporting pin P BR, P FRThe bottom, be provided with and can detect from being supported on supporting pin P BR, P FROn the load sensor S of load of glass substrate W BR, S FRFor example can be with these load sensors S BL, S FL, S BR, S FRMake force cell.
For fear of interfering with left hand 60a, the right hand (not shown) is between upper box 66b that is configured in left hand 60a on the short transverse and lower box 66a.Thereby the shape of the right frame (not shown) of the right hand is different with the shape of the left frame 66 of left hand 60a, but other structure is identical.
Below, the explanation of omitting the content that is associated with the right hand, only explanation is about the part of left hand 60a.
As shown in Figure 1, robot controller 30 is connected with robot 20 with board carrying, can control the action of board carrying with robot 20.As shown in Figure 4, robot controller 30 has calculus of differences portion 70 and the 1st judging part 72.
Be connected with each load sensor S in calculus of differences portion 70 BL, S FL, S BR, S FR, import each load sensor S BL, S FL, S BR, S FROutput.In calculus of differences portion 70, be connected with a reference value reservoir 74.Each load sensor S when store glass substrate W is positioned at the normal position that is predetermined (reference position) on the left hand 60a in this a reference value reservoir 74 BL, S FL, S BR, S FRDetected value (a reference value).Calculus of differences portion 70 can each load sensor S of computing BL, S FL, S BR, S FRPresent detected value be stored in each the load sensor S in a reference value reservoir 74 BL, S FL, S BR, S FRThe difference of a reference value.
The difference of 72 pairs of calculus of differences portion 70 computings of the 1st judging part be stored in the pattern reservoir 76 for each load sensor S BL, S FL, S BR, S FRThe increase and decrease pattern (Mode A of afterwards stating) of difference compare, judge the position deviation direction of glass substrate W.
Below, the detection method of board carrying with the substrate positional misalignment of robot system 10 described.
Position (the Y that glass substrate W is determined in its position in advance FDirection and Y BThe position of direction and X LDirection and X RThe position of direction) is housed in the chest 65 (with reference to Fig. 1).But, have the situation of its position deviation.
In addition, when board carrying stretches arm 50 with robot 20, then because supporting pin P BL, P FL, P BR, P FRThe situation that has the position deviation of the glass substrate W that is supported on the left hand 60a with the Frotteurism of glass substrate W.For example, when arm 50 stretches, exist glass substrate W at carrying direction (Y FDirection) on or at the rightabout (Y that carries direction BSituation about departing from direction).And, for example, when top base 48 clockwise directions rotations (around axle of the plummet AX4 rotation), exist glass substrate W at left to (X LSituation about departing from direction).
When glass substrate W is placed on the left hand 60a, can the position deviation of in fact symmetrical glass substrate W be regarded as the departing from of position of centre of gravity (with reference to Fig. 5) of glass substrate W.Thereby, can depart from the detection position through the position of centre of gravity of obtaining glass substrate W.
Can be through being arranged on the load sensor S on the left hand 60a BL, S FL, S BR, S FRObtain the position of centre of gravity of glass substrate W.
At this, glass substrate W is at Y FWhen departing from the direction (forwards to), position of centre of gravity departs from equidirectional.Therefore, compare when being positioned at the normal position (reference position) that is predetermined, by load sensor S with glass substrate W FL, S FRThe load that detects increases.On the contrary by load sensor S BL, S BRThe load that detects reduces.
In addition, glass substrate W is at Y BWhen departing from the direction (backward directions), position of centre of gravity departs from equidirectional.Therefore, compare when being positioned at the reference position, by load sensor S with glass substrate W BL, S BRThe load that detects increases.On the contrary by load sensor S FL, S FRThe load that detects reduces.
In addition, glass substrate W in fact with the X of carrying direction quadrature LWhen departing from the direction (left to), position of centre of gravity departs from equidirectional.Therefore, compare when being positioned at the reference position, by load sensor S with glass substrate W FL, S BLThe load that detects increases.On the contrary by load sensor S FR, S BRThe load that detects reduces.
In addition, glass substrate W in fact with the X of carrying direction quadrature RWhen departing from the direction (right-hand to), position of centre of gravity departs from equidirectional.Therefore, compare when being positioned at the reference position, by load sensor S with glass substrate W FR, S BRThe load that detects increases.On the contrary by load sensor S FL, S BLThe load that detects reduces.
That is, through keeping watch on (that is the position of centre of gravity of, keeping watch on glass substrate W) each load sensor S BL, S FL, S BR, S FRDetect the position deviation direction (Y of glass substrate W from the increase and decrease of a reference value FDirection, Y BDirection, X LDirection and X RDirection).
Below, according to concrete order the substrate positional misalignment detection method of board carrying with robot system 10 described.Carry out the substrate positional misalignment detection method of board carrying according to following order with robot system 10.
Step 1
Place glass substrate W leftward on the reference position on the 60a.Applied load sensor S BL, S FL, S BR, S FRCome to detect respectively supporting pin P BL, P FL, P BR, P FRThe load that bears from glass substrate W.These loads are stored in a reference value reservoir 74 that is arranged on the robot controller 30 as a reference value.And this step 1 is performed as preparing in advance.
Step 2
Use board carrying to come to carry out practically the transport operation of glass substrate W with robot 20.Glass substrate W be placed on the left hand 60a during, calculus of differences portion 70 obtains load sensor S respectively BL, S F L, S BR, S FRDetected value with in step 1, be stored in the difference of a reference value in a reference value reservoir 74.
Step 3
When each difference surpassed the threshold value that is predetermined, the 1st judging part 72 was judged into glass substrate W and has been departed from.At this moment, the 1st judging part 72 reference pattern reservoir 76 are to each load sensor S BL, S FL, S BR, S FRDifference contrast with being stored in Mode A in the pattern reservoir 76 (with reference to left-handed watch shown in Figure 5), when difference is consistent with Mode A, judge to have become on position deviation corresponding to the direction of this Mode A.
That is, at load sensor S BLDifference be negative (-), load sensor S BRDifference be negative (-), load sensor S FLDifference be just (+), load sensor S FRDifference during for just (+), the position of judging into glass substrate W is at Y FDeparted from the direction.
In addition, at load sensor S BLDifference be just (+), load sensor S BRDifference be just (+), load sensor S FLDifference be negative (-), load sensor S FRDifference during for negative (-), the position of judging into glass substrate W is at Y BDeparted from the direction.
In addition, at load sensor S BLDifference be just (+), load sensor S BRDifference be negative (-), load sensor S FLDifference be just (+), load sensor S FRDifference during for negative (-), the position of judging into glass substrate W is at X LDeparted from the direction.
In addition, at load sensor S BLDifference be negative (-), load sensor S BRDifference be just (+), load sensor S FLDifference be negative (-), load sensor S FRDifference during for just (+), the position of judging into glass substrate W is at X RDeparted from the direction.
Like this, according to this embodiment, can applied load sensor S BL, S FL, S BR, S FRDetect the position of centre of gravity of glass substrate W, can detect the position deviation direction of glass substrate W.
And, through further considering the action of board carrying, thereby can improve the detecting reliability of position deviation direction with robot 20.Particularly, board carrying judges whether to have carried out applying the action of the power as the position deviation that makes glass substrate W with robot 20, and during offset direction, considering should action in the detection position.For example, be only limited to board carrying in fact and carried out making under the situation of the flexible action of arm 50 with robot 20, the 1st judging part 72 is judged into glass substrate W at Y FDirection or Y BDeparted from the direction.Thereby, for example, when board carrying stretches arm 50 with robot 20, do not judge into glass substrate W at X LDirection or X RDeparted from the direction, improved the detecting reliability of position deviation direction.
Then, the board carrying that the 2nd embodiment of the present invention is related to describes with robot system.For the board carrying that relates to the 1st embodiment with identical identical symbol and the detailed of inscapes mark of robot system 10.
In this embodiment, board carrying can also detect the departing from of position of rotation of glass substrate W with robot system.
As shown in Figure 6, the robot controller 80 that this embodiment relates to also possesses the 2nd judging part 82.The 2nd judging part 82 with the difference of calculus of differences portion 70 computings with also be stored in the pattern reservoir 76 for each load sensor S BL, S FL, S BR, S FRThe increase and decrease Mode B (about the increase and decrease Mode B of the difference that departs from of the position of rotation of glass substrate W) of difference contrast, judge the offset direction of the position of rotation of glass substrate W.
Below, the substrate positional misalignment detection method of board carrying with robot system described.
In the step 3 of board carrying with the substrate positional misalignment detection method of robot system that the 1st embodiment relates to, when difference surpassed the threshold value that is predetermined, the 2nd judging part 82 was judged into glass substrate W and has been departed from.At this moment, the 2nd judging part 82 reference pattern reservoir 76 are to each load sensor S BL, S FL, S B R, S FRDifference contrast with being stored in Mode B in the pattern reservoir 76 (with reference to right side table shown in Figure 5), when difference is consistent with Mode B, judge to become that position of rotation has departed from corresponding to the direction of this Mode B.
That is, at load sensor S BLDifference be just (+), load sensor S BRDifference be negative (-), load sensor S FLDifference be negative (-), load sensor S FRDifference during for just (+), the position of rotation of judging into glass substrate W (R in the clockwise direction when overlooking RDirection) departed from.
In addition, at load sensor S BLDifference be negative (-), load sensor S BRDifference be just (+), load sensor S FLDifference be just (+), load sensor S FRDifference during for negative (-), the position of rotation of judging into glass substrate W (R in the counterclockwise direction when overlooking LDirection) departed from.
Like this, according to this embodiment, can applied load sensor S BL, S FL, S BR, S FRDetect the departing from of position of rotation of glass substrate W.
Then, the board carrying that the 3rd embodiment of the present invention is related to describes with robot system.For the board carrying that relates to the 1st embodiment with identical identical symbol and the detailed of inscapes mark of robot system 10.
In this embodiment, the shift detecting method of glass substrate W is different.
In the 1st embodiment, the position deviation direction of detectable glass substrate W is 4 direction (Y FDirection, Y BDirection, X LDirection and X RDirection), still in this embodiment, board carrying can detect the position deviation of whole directions with robot system.
As shown in Figure 7, the board carrying that this embodiment relates to possesses reference table reservoir 92 and position of centre of gravity determination section 94 with the robot controller (example of the 2nd control device) 90 of robot system.
Reference table reservoir 92 can store the detected load in each position that makes on the 60a leftward and the corresponding reference table of position of centre of gravity of glass substrate W.
Position of centre of gravity determination section 94 can be from each load sensor S with reference to being stored in the reference table in the reference table reservoir 92 BL, S FL, S BR, S FRThe detected value position of centre of gravity of obtaining glass substrate W be the size and the direction of the position deviation of glass substrate W.
Below, the board carrying that in order this embodiment is related to describes with the substrate positional misalignment detection method of robot system.Carry out the substrate positional misalignment detection method of board carrying according to following order with robot system.
Step 1
60a goes up and places glass substrate W leftward.Use each load sensor S BL, S FL, S BR, S FRCome to detect respectively supporting pin P BL, P FL, P BR, P FRThe load that bears from glass substrate W.Then, make the position deviation (position of centre of gravity of glass substrate W is departed from) of placing glass substrate W, reuse each load sensor S BL, S FL, S BR, S FRDetect supporting pin P BL, P FL, P BR, P FRThe load that bears from glass substrate W.And carry out this operation repeatedly.
Making makes the corresponding reference table of position of centre of gravity of detected load and glass substrate W in each position, and this reference table is stored in the reference table reservoir 92 that is arranged on the robot controller 90.And this step 1 is performed as preparing in advance.
Step 2
Use board carrying to come to carry out practically the transport operation of glass substrate W with robot 20.After glass substrate W was placed on the left hand 60a, position of centre of gravity determination section 94 was from each load sensor S BL, S FL, S BR, S FRInput is loaded, and obtains the position of centre of gravity of corresponding glass substrate W according to reference table.Its result compares the size and the direction of the position deviation that can obtain glass substrate W in further detail with the 1st embodiment.
And, owing to can obtain the size and the direction of the position deviation of glass substrate W in further detail, therefore also can with the mode of the position of revising glass substrate W board carrying be moved with direction with robot 20 according to the size of this position deviation.
In addition, in this embodiment, in order to obtain position of centre of gravity, also can be with the quantity of load sensor as adding up to 3 (on the supporting members on 2, another supporting member 1).
Then, the board carrying that the 4th embodiment of the present invention is related to describes with robot system.For the board carrying that relates to the 1st embodiment with identical identical symbol and the detailed of inscapes mark of robot system 10.
In this embodiment, can obtain position of centre of gravity through computing.That is, board carrying passes through load sensor S with robot system under the state that is placed with glass substrate W BL, S FL, S BR, S FRDetection load according to each detected value, can be obtained the position of centre of gravity (that is, the size of the position deviation of glass substrate W and direction) of glass substrate W through computing.
As shown in Figure 8, the board carrying that this embodiment relates to possesses position of centre of gravity operational part 102 with the robot controller (example of the 3rd control device) 100 of robot system.
Position of centre of gravity operational part 102 can be from each load sensor S BL, S FL, S BR, S FRDetected value obtain the position of centre of gravity of glass substrate W through computing.That is, position of centre of gravity operational part 102 can be obtained the size and the direction of the position deviation of glass substrate W through computing.
And, because known each load sensor S BL, S FL, S BR, S FRThe position, the concrete operation ratio that is used to obtain the position of centre of gravity of glass substrate W is easier to, and therefore omits its explanation.
According to this embodiment, can obtain the size and the direction of the position deviation of glass substrate W in further detail.Owing to can obtain the size and the direction of the position deviation of glass substrate W in further detail, therefore also can with the mode of the position of revising glass substrate W board carrying be moved with direction with robot 20 according to the size of this position deviation.
And, in this embodiment, in order to obtain the position of centre of gravity of glass substrate W through computing, also can be with the quantity of load sensor as adding up to 3 (on the supporting members on 2, another supporting member 1).
And the present invention is not limited to aforesaid embodiment, in the scope that does not change purport of the present invention, can change.For example, the situation that makes up the part of aforesaid embodiment, variation or all constitute invention also belongs in the technical scope of the present invention.
Substrate is not limited to glass substrate W.In addition, contact site also can be an absorption layer.
Sensor is the sensor arbitrarily that can detect the position of centre of gravity of substrate.For example, can be the deflection sensor (for example foil gauge) of deflection that detects each contact member of substrate contacts.Can obtain the load that is applied to each contact site through this deflection sensor, can obtain the position of centre of gravity of glass substrate W.
In addition, sensor can not be set directly on the supporting member yet.That is, also can sensor be arranged on from supporting member to being different from the outstanding carriage of the direction of carrying direction.
Board carrying is not limited to the mode shown in the aforesaid embodiment with robot.For example, arm also can be single armed rather than both arms.In addition, the configuration of the mode of hand, contact site is not limited to the mode shown in the aforesaid embodiment.For example, hand also can have the supporting member more than 1 or 3.
In addition, also can contact site be configured to be asymmetric for the center line of the substrate that is in the reference position.

Claims (10)

1. a board carrying is used robot system, it is characterized by, and possesses:
Board carrying is used robot, and the board carrying with a plurality of sensors of the position of centre of gravity that is provided with the contact site below the contact substrate and is used to detect this substrate that is contacted with this contact site is used hand:
And the 1st control device; Have calculus of differences portion and the 1st judging part; Said calculus of differences portion respectively the said substrate of computing be supported on said board carrying with on hand become the position of benchmark the time the difference of detected value of detected value a reference value and present said each sensor of said each sensor, said the 1st judging part is judged the position deviation direction of said substrate according to this each difference.
2. board carrying according to claim 1 is used robot system, it is characterized by,
A plurality of said contact sites are set,
Said each sensor is arranged on the bottom of said each contact site, is the load sensor from the load of said substrate that detects that this contact site bears.
3. board carrying according to claim 1 and 2 is used robot system, it is characterized by,
Said the 1st control device have store in advance said substrate the carrying direction and practically with the direction of this carrying direction quadrature on the pattern reservoir of increase and decrease Mode A of said each difference when departing from,
Said the 1st judging part to said each difference be stored in said Mode A in the said pattern reservoir and contrast and judge said position deviation direction.
4. board carrying according to claim 3 is used robot system, it is characterized by,
Said the 1st control device also has the 2nd judging part of offset direction of judging the position of rotation of said substrate according to said each difference.
5. board carrying according to claim 4 is used robot system, it is characterized by,
The increase and decrease Mode B of said each difference when position of rotation that said pattern reservoir also is stored in said substrate departs from,
Said the 2nd judging part to said each difference with being stored in that said Mode B in the said pattern reservoir contrasts the offset direction of judging said position of rotation.
6. use robot system according to any described board carrying in the claim 1～5, it is characterized by,
Substitute said the 1st control device and possess the 2nd control device,
Said the 2nd control device has: reference table reservoir, detected value that makes said each sensor and the corresponding reference table of this position of centre of gravity when being stored in the position of centre of gravity that changes said substrate;
The position of centre of gravity determination section with reference to said reference table, is obtained the position of centre of gravity of said substrate from the detected value of said each sensor.
7. use robot system according to any described board carrying in the claim 1～5, it is characterized by,
Substitute said the 1st control device and possess the 3rd control device,
Said the 3rd control device has the position of centre of gravity operational part, according to the detected value of said each sensor and the position of centre of gravity of the said substrate of computing.
8. a board carrying is used hand, it is characterized by, and possesses:
Contact site below the contact substrate;
And be used to detect a plurality of sensors of the position of centre of gravity of the said substrate that is contacted with said contact site.
9. a substrate positional misalignment detection method is characterized by, and comprising:
Substrate is positioned on the position that becomes benchmark on hand that is arranged in the robot, with being arranged on the step that the load from this substrate that this contact site that is contacted with this substrate on hand bears stores as a reference value;
The step of obtaining that said contact site bears during the said substrate of said robot transport from the difference of the load of this substrate and said a reference value;
Reach the step of obtaining the position deviation direction of said substrate according to said difference.
10. a substrate position modification method is characterized by, and comprising:
Store the step of following reference table, be arranged on each position on hand in the robot and make and be arranged on this on hand and to be contacted with the load from this substrate that the contact site of substrate bears corresponding with the position of centre of gravity of said substrate;
During the said substrate of said robot transport, the step that load and the said reference table from this substrate that bears according to said contact site obtained the position of centre of gravity of said substrate;
And said robot moves the step of said hand with the mode of revising the position deviation of said substrate according to said position of centre of gravity.
CN2011104030619A 2010-12-08 2011-12-07 Robot system for substrate moving, substrate deviation detection and modification method Pending CN102528803A (en)

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JP2010273789A JP2012121680A (en) 2010-12-08 2010-12-08 Board conveyance hand, board conveyance robot system, board position departure detection method, and board position correction method

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