CN102528300B - Sucker-type clamping device - Google Patents

Sucker-type clamping device Download PDF

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Publication number
CN102528300B
CN102528300B CN201110448609.1A CN201110448609A CN102528300B CN 102528300 B CN102528300 B CN 102528300B CN 201110448609 A CN201110448609 A CN 201110448609A CN 102528300 B CN102528300 B CN 102528300B
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China
Prior art keywords
mentioned
cavity
sucker
laser output
output mouth
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Expired - Fee Related
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CN201110448609.1A
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Chinese (zh)
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CN102528300A (en
Inventor
陈涛
申雪飞
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Beijing University of Technology
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Beijing University of Technology
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Abstract

A kind of sucker-type clamping device, comprising: clamping main body, the through Laser output mouth offering strip, offers the cavity of the groove type of elongate in shape near above-mentioned Laser output mouth along its length direction, be also provided with the air guide channel with this cavity connects; Absorption panel, be arranged on the upper surface of this clamping main body, cover Laser output mouth and the cavity of above-mentioned clamping main body, offer the sucker array be made up of multiple through aperture in the part corresponding with above-mentioned cavity, be formed with the opening portion of strip in the part corresponding with Laser output mouth; Getter device, is connected with above-mentioned air guide channel by tracheae, can gas in the above-mentioned cavity of sucking-off and air guide channel.According to said structure, thin-film material can be made entirely to be close to and to be placed on absorption panel, avoid the distortion of thin-film material, improve machining accuracy and working (machining) efficiency.

Description

Sucker-type clamping device
Technical field
The present invention relates to technical field of laser processing, specifically, relate to a kind of sucker-type clamping device used in the Laser Processing of thin-film material.
Background technology
Along with social development, thin-film material has been applied in every production and life gradually.Because thin-film material its thickness size is little, rigidity, poor rigidity, and the phenomenons such as easy generation is curling, fold, therefore cannot utilize common machining mode to process thin-film material, usually can adopt laser processing.But, in the process utilizing laser to process thin-film material, need to use various types of clamping device.
At present, utilize laser to add man-hour to thin-film material, thin-film material relies on pressing plate to grip usually.When utilizing pressing plate fixed film, can there is following problem: thin-film material easily produces distortion, difficulty of processing increases, and affects machining accuracy; Pressing plate damages thin-film material, causes the waste of thin-film material; Each processing needs again to remove and install pressing plate, and process is loaded down with trivial details and efficiency is low.
In addition, added to the thin-film material of miniaturization man-hour, the thin-film material of pressing plate to miniaturization cannot be adopted to grip.Although gluing mode can be adopted to fix miniaturized thin-film material, the surface of thin-film material may be destroyed.Sometimes getter device also can be adopted to adsorb fixed film material, but the method cannot ensure the flatness of thin-film material, and then affect the precision of Laser Processing.
In addition, utilize laser to add man-hour to thin-film material, after etching film by laser material, if do not have smooth through, in the accumulation of thin-film material bottom surface, and then machining accuracy can be affected.
So, defects such as being necessary that the pressing plate clamping device to using in above-mentioned Laser Processing thin-film material does further improvement, difficulty of processing yielding with the thin-film material avoiding above-mentioned pressing plate clamping device to exist be large, be difficult to ensure machining accuracy, damage thin-film material, waste resource, process are loaded down with trivial details.
Summary of the invention
The invention provides a kind of sucker-type clamping device used in the Laser Processing of thin-film material, utilize suction type easily to fix processed thin-film material, make the handling of thin-film material easy, working (machining) efficiency is high.
To achieve these goals, a kind of sucker-type clamping device provided by the invention, it comprises: clamping main body, the through Laser output mouth offering strip at middle part, near above-mentioned Laser output mouth, offer the cavity of the groove type of elongate in shape along its length direction, be also provided with the air guide channel with this cavity connects; Absorption panel, be arranged on the upper surface of this clamping main body, cover Laser output mouth and the cavity of above-mentioned clamping main body, offer the sucker array be made up of multiple through aperture in the part corresponding with above-mentioned cavity, be formed with the opening portion of strip in the part corresponding with Laser output mouth; Getter device, is connected with above-mentioned air guide channel by tracheae, can gas in the above-mentioned cavity of sucking-off and air guide channel.
In addition, also can be that be formed with multiple above-mentioned cavity and above-mentioned sucker array, above-mentioned multiple cavity is formed in the both sides of above-mentioned Laser output mouth symmetrically, and above-mentioned multiple sucker array be also formed in the both sides of the opening portion of above-mentioned absorption panel symmetrically.
In addition, also can be that the entrance side of the midway of above-mentioned tracheae or above-mentioned air guide channel is provided with air valve.
According to said structure of the present invention, thin-film material to be processed can be made entirely to be close to and to be placed on absorption panel, avoid the distortion of thin-film material, improve machining accuracy.In addition, the damage that thin-film material can also be avoided to cause, economizes on resources, simple to operate, increases work efficiency.
The sucker-type clamping device that the present invention relates in addition has symmetrical cavity and sucker array structure, can ensure suction equalization, and then the surface of guarantee thin-film material is complete and machining accuracy.Laser output mouth on its absorption panel and the opening portion in clamping main body, can make laser beam penetrate clamping device, thus ensure the quality of thin-film material.
Accompanying drawing explanation
By being described embodiment below in conjunction with accompanying drawing, above-mentioned characteristic sum technological merit of the present invention will become apparent and easy understand.
Fig. 1 is the sectional view of the concrete structure representing the sucker-type clamping device that the present invention relates to;
Fig. 2 is the top view of the absorption panel concrete structure represented in the sucker-type clamping device that the present invention relates to.
Description of reference numerals:
Detailed description of the invention
Below, with specific embodiment, further detailed description is done to the present invention by reference to the accompanying drawings.
In the following description, mode only by illustrating is described some example embodiment of the present invention, undoubtedly, those of ordinary skill in the art can recognize, when without departing from the spirit and scope of the present invention, can revise described embodiment with various different modes.Therefore, accompanying drawing and be described in just illustrative in essence, instead of for limiting the protection domain of claim.In addition, in this manual, identical Reference numeral represents identical part.
Fig. 1 is the sectional view of the concrete structure representing the sucker-type clamping device that the present invention relates to, and Fig. 2 is the top view of the absorption panel concrete structure represented in the sucker-type clamping device that the present invention relates to.As shown in Figures 1 and 2, this sucker-type clamping device comprises: clamping main body 1, the through Laser output mouth 11 offering strip in this clamping main body 1, processing laser can be made to pass, and, near Laser output mouth 11, offer the cavity 12 of the groove type of elongate in shape along its length direction, be also provided with the air guide channel 13 be communicated with this cavity 12; Absorption panel 2, be arranged on the upper surface of this clamping main body 1, cover Laser output mouth 11 and the cavity 12 of clamping main body 1, offer the sucker array 22 be made up of multiple through aperture in the part corresponding with above-mentioned cavity, and be formed with the opening portion 21 of strip in the part corresponding with Laser output mouth 21; Getter device 3, is connected with air guide channel 12 by tracheae 5, can the gas of sucking-off cavity 12 and air guide channel 12 inside, such as, can use vavuum pump etc.; Air valve 4, is arranged on the midway of tracheae 5 or the entrance side of air guide channel 12, for controlling the suction that getter device 3 produces.
In the present embodiment, the Laser output mouth 11 of clamping main body 1 bilateral symmetry be provided with cavity 12 respectively, and, on absorption panel 2, also 2 sucker arrays 22 are provided with accordingly with above-mentioned cavity 12, symmetrical structure like this can ensure the suction equalization produced in the both sides of Laser output mouth 11, and then ensures the steady of absorption panel 2, makes to be placed on the thin-film material surface adsorbed on panel 2 smooth.Unquestionable, the quantity of cavity 12 and sucker array 22 is not limited to 2, as long as relative to the symmetrical distributed architecture of Laser output mouth 11 and opening portion 21.
Below, the operation process of Laser Processing is carried out in simple declaration to thin-film material.First, thin-film material to be processed is entirely placed on the upper surface of absorption panel 2, makes this thin-film material cover opening portion 22 and the sucker array 22 of absorption panel 2 completely.Then, open air valve 4, startup getter device 3 extracts the air in cavity 12 and air guide channel 13.Now, the air-flow produced along with air-breathing work, thin-film material is attracted to the surface of absorption panel 2, thus occlusion of openings portion 22 and sucker array 22, and the negative pressure in final cavity 12 makes thin-film material entirely be close to be adsorbed on absorption panel 2.Then, make to carry out Laser Processing from the laser beam irradiation of laser instrument injection to thin-film material to be processed, the Laser output mouth 11 of break-through clamping main body 1 and the opening portion 21 of absorption panel 2 after this laser beam transparent thin-film material.Like this, the accumulation of laser energy on thin-film material bottom surface can be prevented, and then affect machining accuracy.After the Laser Processing of thin-film material is completed, close gas check valve 4, make to be full of air in cavity 12 gradually to eliminate Negative Pressure Difference, then unload the thin-film material processed, new thin-film material to be processed placed by absorption panel 2.
Under above-mentioned instruction of the present invention; those skilled in the art can carry out various improvement and distortion on the basis of above-described embodiment; and these improve and distortion; all drop in protection scope of the present invention; those skilled in the art should be understood that; above-mentioned specific descriptions just explain object of the present invention better, and protection scope of the present invention is by claim and equivalents thereof.

Claims (3)

1. a sucker-type clamping device, is characterized in that, comprising:
Clamping main body, the through Laser output mouth offering strip, offers the cavity of the groove type of elongate in shape near above-mentioned Laser output mouth along its length direction, be also provided with the air guide channel with this cavity connects;
Absorption panel, be arranged on the upper surface of this clamping main body, cover Laser output mouth and the cavity of above-mentioned clamping main body, the sucker array be made up of multiple through aperture is offered in the part corresponding with above-mentioned cavity, be formed with the opening portion of strip in the part corresponding with Laser output mouth, described opening portion comprises two strip openings;
Getter device, is connected with above-mentioned air guide channel by tracheae, can gas in the above-mentioned cavity of sucking-off and air guide channel, and the negative pressure in above-mentioned cavity makes thin-film material to be processed entirely be close to be adsorbed on absorption panel.
2., according to sucker-type clamping device according to claim 1, it is characterized in that,
Be formed with multiple above-mentioned cavity and above-mentioned sucker array,
Above-mentioned multiple cavity is formed in the both sides of above-mentioned Laser output mouth symmetrically, and above-mentioned multiple sucker array is also formed in the both sides of the opening portion of above-mentioned absorption panel symmetrically.
3., according to sucker-type clamping device according to claim 1, it is characterized in that,
The entrance side of the midway of above-mentioned tracheae or above-mentioned air guide channel is provided with air valve.
CN201110448609.1A 2011-12-28 2011-12-28 Sucker-type clamping device Expired - Fee Related CN102528300B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110448609.1A CN102528300B (en) 2011-12-28 2011-12-28 Sucker-type clamping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110448609.1A CN102528300B (en) 2011-12-28 2011-12-28 Sucker-type clamping device

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CN102528300A CN102528300A (en) 2012-07-04
CN102528300B true CN102528300B (en) 2015-08-19

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108995200B (en) * 2018-08-28 2023-06-30 莱芜钢铁集团有限公司 Gas extraction type film laying device and method
CN109520814A (en) * 2018-10-08 2019-03-26 广东凯文印刷有限公司 A kind of method of quick detection layer of ink water mist
CN111203737B (en) * 2020-01-15 2021-07-06 江苏金沃伺服冲床有限公司 Accessory of flexible clamping mechanism for machine tool
CN113511568A (en) * 2021-05-24 2021-10-19 张美洁 Medical treatment disease control device for preventing virus cross infection

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990000952A1 (en) * 1988-07-20 1990-02-08 Kabushiki Kaisha Komatsu Seisakusho Product withdrawing apparatus of laser processing machine
CN1669720A (en) * 2004-03-17 2005-09-21 株式会社迪斯科 Chuck table for use in a laser beam processing machine
CN101687281A (en) * 2007-06-28 2010-03-31 松下电器产业株式会社 Laser processing apparatus
CN201895176U (en) * 2010-10-15 2011-07-13 北京工业大学 Special fixture for laser bonding of glass-kovar alloy
CN202571613U (en) * 2011-12-28 2012-12-05 北京工业大学 Sucker type clamping device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101895176B (en) * 2010-08-19 2012-04-25 中国航空工业第六一八研究所 Adhesive filling and grinding processing method for stator-rotor iron core component of motor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990000952A1 (en) * 1988-07-20 1990-02-08 Kabushiki Kaisha Komatsu Seisakusho Product withdrawing apparatus of laser processing machine
CN1669720A (en) * 2004-03-17 2005-09-21 株式会社迪斯科 Chuck table for use in a laser beam processing machine
CN101687281A (en) * 2007-06-28 2010-03-31 松下电器产业株式会社 Laser processing apparatus
CN201895176U (en) * 2010-10-15 2011-07-13 北京工业大学 Special fixture for laser bonding of glass-kovar alloy
CN202571613U (en) * 2011-12-28 2012-12-05 北京工业大学 Sucker type clamping device

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Granted publication date: 20150819

Termination date: 20191228