CN216817172U - Upper cover and vacuum drying device - Google Patents
Upper cover and vacuum drying device Download PDFInfo
- Publication number
- CN216817172U CN216817172U CN202220390442.1U CN202220390442U CN216817172U CN 216817172 U CN216817172 U CN 216817172U CN 202220390442 U CN202220390442 U CN 202220390442U CN 216817172 U CN216817172 U CN 216817172U
- Authority
- CN
- China
- Prior art keywords
- upper cover
- base
- vacuum drying
- cavity
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model relates to the technical field of display panel manufacturing equipment, and discloses an upper cover and a vacuum drying device. The vacuum drying device comprises an upper cover and a base, wherein the upper cover is buckled on the base and provided with a processing groove, a processing cavity is formed by enclosing after the upper cover is arranged on the base, the upper cover is also provided with a pressure balance cavity, the pressure balance cavity and the processing groove at least share one wall plate, and the pressure balance cavity and the processing cavity keep the same pressure. The wall plate of the processing cavity in the upper cover does not generate concave deformation, so that the shape stability and the uniform pressure change of the processing cavity are ensured, the yield of the glass substrate is further ensured, the deformation of the wall plate of the processing cavity is fundamentally avoided, the periodic detection and replacement are not needed, the production efficiency is improved, the manpower requirement is reduced, and the production cost is reduced. Vacuum drying device is through adopting above-mentioned upper cover, and the yields is high, production efficiency is high, with low costs, and the manpower demand is few.
Description
Technical Field
The utility model relates to the technical field of display panel manufacturing equipment, in particular to an upper cover and a vacuum drying device.
Background
In the manufacturing process of the display panel, photolithography is an indispensable process. The photolithography process includes coating a photoresist on a glass substrate and Vacuum Drying (VCD) the photoresist. The vacuum drying process is to volatilize the solvent in the photoresist by using a vacuum environment so that the photoresist has a certain hardness.
Fig. 1 is a schematic structural diagram of a vacuum drying apparatus provided in the prior art, and as shown in fig. 1, the vacuum drying apparatus includes a base 1 ', an upper cover 2' and a vacuum pump 3 ', the upper cover 2' can be covered on the base 1 'to form a process chamber 4', the process chamber 4 'is used for accommodating a glass substrate 5' coated with a photoresist, and the vacuum pump 3 'is communicated with the process chamber 4'. During the vacuum drying process, the vacuum pump 3 ' gradually vacuums the process chamber 4 ' from atmospheric pressure to a vacuum state (or a state close to vacuum), and finally releases the pressure of the process chamber 4 ' to complete the vacuum drying process. Since the external atmospheric pressure is higher than the pressure in the process chamber 4 ', the atmospheric pressure will press the upper lid 2' and deform the upper lid 2 '(especially the side wall with larger surface area), and the upper lid 2' will have poor deformation resistance and concave middle part after long-term use. In the process of gradually vacuumizing the process chamber 4 ' by the vacuum pump 3 ', the pressure change at different positions in the process chamber 4 ' is not uniform due to the deformation of the upper cover 2 ', so that the volatilization speed of the solvent in the photoresist at different positions is not uniform, and the yield of the glass substrate 5 ' is further influenced.
In the prior art, in order to ensure the yield of the glass substrate, the shape precision of the upper cover needs to be detected at intervals of a certain time, and when the deformation of the upper cover exceeds a certain range, a new upper cover needs to be replaced. The regular detection not only increases the manpower requirement, but also affects the production efficiency, and the replacement of the upper cover can increase the production cost of the glass substrate.
Therefore, a need exists for a cover and a vacuum drying apparatus to solve the above problems.
SUMMERY OF THE UTILITY MODEL
One objective of the present invention is to provide an upper cover, which is not easily deformed in a portion constituting a process chamber, so as to ensure uniform pressure change in the process chamber and improve yield.
Another objective of the present invention is to provide a vacuum drying apparatus, which has high yield, low production cost and less manpower required for maintenance process by using the above-mentioned upper cover.
In order to achieve the purpose, the utility model adopts the following technical scheme:
an upper cover is used for being matched with a base of a vacuum drying device, a processing groove is formed in the upper cover, so that a processing cavity is formed after the upper cover is arranged on the base in a surrounding mode, a pressure balance cavity is further formed in the upper cover, the pressure balance cavity and the processing groove share at least one wall plate, and the pressure balance cavity and the processing cavity keep the same pressure.
Preferably, the upper cover is used for being provided with a positioning groove on the surface matched with the base, the positioning groove is annularly arranged on the processing groove, and the positioning groove is matched with the sealing strip on the base in a concave-convex mode.
Preferably, the upper cover is provided with a first air exhaust channel, one end of the first air exhaust channel is communicated with the pressure balance chamber, and the other end of the first air exhaust channel is communicated with the vacuum pump.
Preferably, the upper cover includes a supporting portion having a cross section in a shape of "", the supporting portion surrounds the process groove, and the pressure balance chamber is disposed on an upper side of the supporting portion and shares a wall plate at a top of the supporting portion with the process groove.
Preferably, the upper cover includes a supporting portion having a cross section in a shape of "", the supporting portion surrounds the process groove, and the pressure balance chamber surrounds the supporting portion and shares a plurality of wall plates of the supporting portion with the process groove.
The vacuum drying device comprises a base and an upper cover, wherein the upper cover can be covered on the base to form a process chamber in a surrounding mode, and the process chamber and the pressure balance chamber keep the same pressure.
Preferably, the vacuum drying apparatus further comprises a vacuum pump, and the vacuum pump respectively vacuums the process chamber and the pressure balance chamber.
Preferably, a second pumping channel is arranged on the base, one end of the second pumping channel is communicated with the process chamber, and the other end of the second pumping channel is communicated with the vacuum pump.
Preferably, the base is provided with a plurality of second pumping channels, and the plurality of second pumping channels are uniformly distributed on the base at positions opposite to the process chamber.
Preferably, a sealing strip is arranged on the base, clamped between the upper cover and the base and annularly arranged in the processing groove.
The utility model has the beneficial effects that:
the upper cover is covered on the base to form the processing cavity, when vacuum drying is carried out, the glass substrate is placed in the processing cavity, the processing cavity and the pressure balance cavity are vacuumized, the pressure balance cavity and the processing cavity share at least one wall plate, and the pressure of the two cavities is the same, so that the wall plate shared by the two cavities is stressed in balance, and the wall plate of the processing cavity cannot be sunken and deformed in the process of vacuumizing the processing cavity from atmospheric pressure, so that the shape stability and the uniform pressure change of the processing cavity are ensured, the uniform solvent volatilization rate of each position of the glass substrate is ensured, and the yield of the glass substrate is improved. The upper cover of the utility model fundamentally avoids the deformation of the wall plate of the processing chamber, so the upper cover does not need to be periodically detected and replaced, thereby improving the production efficiency, reducing the manpower requirement and lowering the production cost.
By adopting the upper cover, the vacuum drying device has the advantages of high yield, high production efficiency, less manpower requirement and low production cost.
Drawings
Fig. 1 is a sectional view of a vacuum drying apparatus provided in the prior art;
FIG. 2 is a cross-sectional view of a cover according to an embodiment of the present invention;
fig. 3 is a sectional view of a vacuum drying apparatus according to an embodiment of the present invention;
fig. 4 is a sectional view of a vacuum drying apparatus according to a second embodiment of the present invention.
In the figure:
1' -a base; 2' -an upper cover; 3' -a vacuum pump; 4' -a process chamber; 5' -a glass substrate;
1-covering the upper cover; 11-processing the groove; 12-a pressure equalization chamber; 13-a first pumping channel; 14-positioning grooves; 15-a support portion; 16-a fastening portion;
2-a base; 21-a second pumping channel;
3-a process chamber;
4-a vacuum pump;
5-sealing strips;
6-glass substrate.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
Example one
The embodiment provides an upper cover and a vacuum drying device, wherein the vacuum drying device is used for performing vacuum drying on a glass substrate coated with a photoresist, namely after the glass substrate is placed in the vacuum drying device, a solvent in the photoresist is volatilized in a vacuum environment. Fig. 2 is a sectional view of the upper cover provided in this embodiment, and fig. 3 is a sectional view of the vacuum drying apparatus provided in this embodiment, and as shown in fig. 2 and 3, the vacuum drying apparatus includes a base 2, an upper cover 1, and a vacuum pump 4. The base 2 is used to support a glass substrate 6 to be vacuum-dried. The upper cover 1 is provided with a processing groove 11, after the upper cover 1 is covered on the base 2, the processing groove 11 and the base 2 are surrounded to form a processing cavity 3, the upper cover 1 is also provided with a pressure balance cavity 12, the pressure balance cavity 12 and the processing groove 11 at least share one wall plate, the vacuum pump 4 is respectively communicated with the pressure balance cavity 12 and the processing cavity 3, and the vacuum pump 4 can vacuumize the pressure balance cavity 12 and the processing cavity 3 and enable the pressure balance cavity 12 and the processing cavity 3 to keep the same pressure.
The upper cover 1 of this embodiment covers and establishes constitution processing procedure cavity 3 behind base 2, when carrying out vacuum drying, place glass substrate 6 in processing procedure cavity 3, vacuum pump 4 evacuation to processing procedure cavity 3 and pressure balance cavity 12 simultaneously afterwards, because pressure balance cavity 12 and processing procedure cavity 3 at least share a wallboard, and the pressure of two cavities is the same, so the wallboard atress that two cavities share is balanced, in the process of the pressure in processing cavity 3 is taken out to the vacuum from atmospheric pressure, the wallboard of processing procedure cavity 3 can not take place sunken deformation, thereby guarantee that processing procedure cavity 3 shape is stable, pressure variation is even, and then guarantee that the solvent evaporation rate of glass substrate 6 each position department is even, the yields of glass substrate 6 has been improved. The upper cover 1 of the embodiment fundamentally avoids the deformation of the wall plate of the processing chamber 3, so that the regular detection and replacement are not needed, thereby improving the production efficiency, reducing the manpower requirement and lowering the production cost. The vacuum drying device of this embodiment, through adopting foretell upper cover 1, the yields is high, production efficiency is high, the manpower demand is few, low in production cost.
It should be noted that the placement and structure of the specific glass substrate 6 supported on the base 2 may be any one of the prior art, and is not limited herein. Alternatively, the vacuum pump 4 may be a mechanical vacuum pump such as a rotary vane pump, a reciprocating pump, etc., and may be set according to actual conditions, which is not limited herein.
In this embodiment, as shown in fig. 3, a first pumping channel 13 is disposed on the upper cover 1, one end of the first pumping channel 13 is communicated with the pressure balance chamber 12, and the other end of the first pumping channel 13 can be communicated with the vacuum pump 4 through a pipeline. The base 2 is provided with a second pumping channel 21, one end of the second pumping channel 21 is communicated with the process chamber 3, and the other end can be communicated with the vacuum pump 4 through a pipeline. Thereby enabling the vacuum pump 4 to communicate with the pressure equalization chamber 12 and the process chamber 3, respectively.
Preferably, as shown in fig. 3, the base 2 is provided with a plurality of second pumping channels 21, and the plurality of second pumping channels 21 are uniformly distributed on the base 2 at a position opposite to the process chamber 3, so as to ensure that the pressure change at each position in the process chamber 3 is more uniform during the vacuum pumping process. Optionally, in this embodiment, four second pumping channels 21 are disposed on the base 2, and in other embodiments, the number of the second pumping channels 21 may be flexibly set according to requirements, which is not specifically limited herein.
Preferably, in this embodiment, as shown in fig. 3, a plurality of first pumping channels 13 are provided on the upper cover 1, and the vacuum pump 4 is communicated with the pressure balance chamber 12 through the plurality of first pumping channels 13, so that the vacuum pumping can be performed more quickly and uniformly. The specific positions of the plurality of first pumping channels 13 can be flexibly set according to needs, and are not limited herein.
As shown in fig. 3, a sealing strip 5 is disposed on the base 2, and the sealing strip 5 is sandwiched between the upper cover 1 and the base 2 and is disposed around the process groove 11 (i.e., the process chamber 3). In the process of vacuum pump 4 to the evacuation of processing procedure cavity 3, the pressure in processing procedure cavity 3 is less than outside atmospheric pressure, and outside atmospheric pressure can press upper cover 1 whole to base 2, and 2 positions on the base are unchangeable, and upper cover 1 can extrude sealing strip 5 this moment to guarantee the good sealed effect of processing procedure cavity 3, also can guarantee the accurate nature of processing procedure cavity 3 internal pressure value. Alternatively, the sealing strip 5 may be a rubber strip. Further, the sealing strip 5 may be fixed to the base 2 by means of adhesion, fastening, or the like, and is not particularly limited herein.
Preferably, as shown in fig. 2 and fig. 3, a positioning groove 14 is provided on a surface of the upper cover 1 for cooperating with the base 2, the positioning groove 14 is annularly provided on the process groove 11, and when the upper cover 1 is covered on the base 2, the positioning groove 14 is in concave-convex cooperation with the sealing strip 5 on the base 2, so as to ensure the relative position accuracy of the upper cover 1 and the base 2, and further improve the sealing performance of the process chamber 3.
It is understood that the specific shape and dimensions of the process chamber 3 may be selected according to the size of the glass substrate 6. As shown in fig. 2, in the present embodiment, the process chamber 3 has a rectangular parallelepiped shape. Specifically, the upper cover 1 includes a supporting portion 15, the supporting portion 15 is a plate-shaped structure, and one side of the plate-shaped structure is formed into the process groove 11 by milling or other processing methods, in this case, the supporting portion 15 includes a top wall plate and four side wall plates, i.e. the cross section is "". The support portion 15 is integrally formed in this embodiment, thereby ensuring good sealing performance of the process chamber 3. It can be understood that, in order to fit the shape of the glass substrate 6, the wall plate area at the top of the support portion 15 is large, and the wall plate area at the side is small, so that the wall plate at the top of the support portion 15 is easily deformed, and the wall plate at the side is not easily deformed.
Preferably, as shown in fig. 3, the pressure balance chamber 12 is disposed on the upper side of the support portion 15, and the pressure balance chamber 12 and the process groove 11 share a wall at the top of the support portion 15. Therefore, the pressure balance chamber 12 and the process chamber 3 maintain the same pressure, which can effectively prevent the wall plate at the top of the process groove 11 from deforming, thereby ensuring the stable shape and uniform pressure change of the process chamber 3 during the vacuum pumping process. Since the four side wall plates of the support portion 15 are less likely to be deformed, the pressures on both sides can be balanced without using the pressure balance chamber 12.
In this embodiment, as shown in fig. 2, the upper cover 1 further includes a fastening portion 16, the fastening portion 16 is also a plate-shaped structure, a groove is disposed on a side of the fastening portion 16 facing the supporting portion 15, the pressure balance chamber 12 can be formed by fastening the fastening portion 16 to the supporting portion 15, and the connection manner of the fastening portion 16 and the supporting portion 15 may be bonding, welding, or the like, which is not limited herein. It is understood that, in other embodiments, the fastening portion 16 may be formed by splicing a plurality of plates, which is not limited herein.
Example two
The embodiment provides an upper cover 1 and a vacuum drying device. Fig. 4 is a cross-sectional view of the vacuum drying apparatus provided in this embodiment, and as shown in fig. 4, the vacuum drying apparatus includes an upper cover 1, a base 2 and a vacuum pump 4. The general structure and operation principle of the vacuum drying apparatus in this embodiment are the same as those in the first embodiment, and the same points are not described herein again, but the differences are the shape of the pressure balance chamber 12 on the upper cover 1, which is as follows:
as shown in fig. 4, the top cover 1 includes a supporting portion 15 with a cross-section in the shape of "", the supporting portion 15 encloses the process groove 11, and the pressure balance chamber 12 encloses the supporting portion 15 and shares a plurality of walls of the supporting portion 15 with the process groove 11. Therefore, the plurality of wall plates of the processing groove 11 are all in a balanced state without being extruded and deformed (namely, the two sides of the wall plates are simultaneously subjected to the pressure of the processing chamber 3 and the pressure balance chamber 12), the shape stability and the uniform pressure change of the processing groove 11 in the vacuumizing process are further ensured, and the yield of the glass substrate 6 is improved.
Specifically, as shown in fig. 4, the supporting portion 15 of the present embodiment is the same as the first embodiment, i.e. the supporting portion 15 includes a top wall panel and four side wall panels, and has a cross-section of "". Further, in this embodiment, the upper cover 1 further includes a buckling part 16, the buckling part 16 is a cover body structure, the buckling part 16 covers the supporting part 15, a pressure balance chamber 12 is formed between the buckling part 16 and the supporting part 15, the pressure balance chamber 12 surrounds the top wall plate and the four side wall plates of the supporting part 15 simultaneously, and therefore all the wall plates of the supporting groove cannot deform in the vacuum-pumping process, and the yield of vacuum drying of the glass substrate 6 is ensured. Alternatively, the buckling part 16 and the supporting part 15 can be connected by welding, the structure is firm, and the formed pressure balance chamber 12 has good tightness.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the utility model and are not to be construed as limitations of the embodiments of the present invention, but may be modified in various embodiments and applications by those skilled in the art according to the spirit of the present invention, and the content of the present description should not be construed as a limitation of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The upper cover is used for being matched with a base (2) of a vacuum drying device and is characterized in that a processing groove (11) is formed in the upper cover, so that the upper cover is arranged on the base (2) and then surrounds to form a processing cavity (3), a pressure balance cavity (12) is further formed in the upper cover, the pressure balance cavity (12) and the processing groove (11) at least share one wall plate, and the pressure balance cavity (12) and the processing cavity (3) keep the same pressure.
2. The upper cover according to claim 1, characterized in that a positioning groove (14) is provided on the surface of the upper cover for matching with the base (2), the positioning groove (14) is annularly provided on the process groove (11), and the positioning groove (14) is in concave-convex fit with the sealing strip (5) on the base (2).
3. The upper cover according to claim 1, wherein a first pumping channel (13) is formed on the upper cover, one end of the first pumping channel (13) is communicated with the pressure balance chamber (12), and the other end is communicated with a vacuum pump (4).
4. The overcap of any one of claims 1-3, wherein the overcap includes a cross-section of
The pressure balance chamber (12) is arranged on the upper side of the supporting part (15) and shares a wall plate at the top of the supporting part (15) with the processing groove (11).
5. The overcap of any one of claims 1-3, wherein the overcap includes a cross-section of
The pressure balance chamber (12) surrounds the supporting part (15), and shares a plurality of wall plates of the supporting part (15) with the processing groove (11).
6. Vacuum drying apparatus, comprising a base (2) and a cover according to any of claims 1-5, the cover being adapted to cover the base (2) to enclose a process chamber (3), the process chamber (3) and the pressure equalization chamber (12) being maintained at the same pressure.
7. The vacuum drying apparatus according to claim 6, further comprising a vacuum pump (4), wherein the vacuum pump (4) respectively evacuates the process chamber (3) and the pressure equalizing chamber (12).
8. The vacuum drying apparatus according to claim 7, wherein the base (2) is provided with a second pumping channel (21), one end of the second pumping channel (21) is connected to the process chamber (3), and the other end is connected to the vacuum pump (4).
9. The vacuum drying apparatus according to claim 8, wherein the base (2) is provided with a plurality of second pumping channels (21), and the plurality of second pumping channels (21) are uniformly distributed on the base (2) at a position opposite to the process chamber (3).
10. The vacuum drying apparatus according to claim 9, wherein a sealing strip (5) is disposed on the base (2), and the sealing strip (5) is sandwiched between the upper cover and the base (2) and is annularly disposed in the processing groove (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220390442.1U CN216817172U (en) | 2022-02-25 | 2022-02-25 | Upper cover and vacuum drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220390442.1U CN216817172U (en) | 2022-02-25 | 2022-02-25 | Upper cover and vacuum drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216817172U true CN216817172U (en) | 2022-06-24 |
Family
ID=82043299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220390442.1U Active CN216817172U (en) | 2022-02-25 | 2022-02-25 | Upper cover and vacuum drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216817172U (en) |
-
2022
- 2022-02-25 CN CN202220390442.1U patent/CN216817172U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1752281B (en) | RF grounding of cathode in process chamber | |
| US7140085B2 (en) | Process for manufacturing a capacitive vacuum measuring cell | |
| US7575220B2 (en) | Curved slit valve door | |
| JP3400415B2 (en) | Fuel cell seal structure | |
| JP4855276B2 (en) | Sample stand, sample to be measured, moisture permeability measuring device | |
| WO2002075893A3 (en) | Lightweight direct methanol fuel cell and supporting systems | |
| CN106654141B (en) | Electrolyte wetting enhancement device and electrolyte wetting enhancement method using same | |
| US20090304931A1 (en) | Mask, deposition apparatus using mask, deposition method using mask, and device manufacturing method using deposition apparatus | |
| US20230219120A1 (en) | Cover plate bearing device, cover plate cleaning device and cleaning method for cover plate | |
| CN216817172U (en) | Upper cover and vacuum drying device | |
| US20230402265A1 (en) | Process chamber and semiconductor process device | |
| KR20200135569A (en) | Holding arrangement for holding a substrate, carrier for supporting a substrate, vacuum processing system, method for holding a substrate, and method for releasing a substrate | |
| RU2663813C2 (en) | Getter pumping system | |
| CN100492105C (en) | Display panel manufacturing apparatus and display panel manufacturing method | |
| CN108474112B (en) | Film forming apparatus | |
| CN217009138U (en) | Semiconductor reaction device | |
| EP3654403A1 (en) | Gasket for secondary battery | |
| CN207135005U (en) | Piezo-activator and piezoelectric actuated plate | |
| CN108172531B (en) | Etching equipment | |
| Grzebyk et al. | Vacuum in microsystems–generation and measurement | |
| CN220693639U (en) | Vacuum pumping device suitable for silicon-based OLED micro-display device | |
| CN215217992U (en) | Testing arrangement of vacuum bag film high temperature leakproofness | |
| US20100151119A1 (en) | Vacuum vessel, vacuum processing apparatus including vacuum vessel, vacuum vessel manufacturing method, and electronic device manufacturing method | |
| JP6972386B2 (en) | Adsorption device and vacuum processing device | |
| CN214818084U (en) | Combined clamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |