CN102528300A - Sucker-type clamping device - Google Patents

Sucker-type clamping device Download PDF

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Publication number
CN102528300A
CN102528300A CN2011104486091A CN201110448609A CN102528300A CN 102528300 A CN102528300 A CN 102528300A CN 2011104486091 A CN2011104486091 A CN 2011104486091A CN 201110448609 A CN201110448609 A CN 201110448609A CN 102528300 A CN102528300 A CN 102528300A
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China
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mentioned
cavity
laser light
film material
guide channel
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CN2011104486091A
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CN102528300B (en
Inventor
陈涛
申雪飞
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Beijing University of Technology
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Beijing University of Technology
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Abstract

A sucker-type clamping device comprises a clamping body, an adsorption panel and a gas suction device. An elongated laser light outlet is arranged on the clamping body in a through manner, an elongated grooved cavity is arranged near the laser light outlet along the length direction, and the clamping body is further provided with a gas guide channel communicated with the cavity. The adsorption panel is arranged on the upper surface of the clamping body and covers the laser light outlet and the cavity of the clamping body, a suction hole array consisting of a plurality of small through holes is arranged on a portion of the adsorption panel corresponding to the cavity, and an elongated opening is formed on a portion of the adsorption panel corresponding to the laser light outlet. The gas suction device is connected with the gas guide channel through a gas pipe, and gas in the cavity and the gas guide channel can be sucked out. According to the structure, a film material can be neatly placed on the adsorption panel in a clinging manner, deformation of the film material is avoided, and machining precision and machining efficiency are improved.

Description

The sucked type clamping device
Technical field
The present invention relates to technical field of laser processing, specifically, relate to a kind of sucked type clamping device that in the Laser Processing of thin-film material, uses.
Background technology
Along with society constantly develops, thin-film material has been applied in each item production and the life gradually.Because thin-film material self gauge is little, therefore rigidity, poor rigidity, and phenomenons such as easy generation is curled, fold can't utilize common machining mode that thin-film material is processed, and can adopt laser processing usually.Yet, utilize in the process that laser processes thin-film material, need to use various types of clamping devices.
At present, utilize laser that thin-film material is added man-hour, thin-film material relies on pressing plate to grip usually.When utilizing the pressing plate fixed film, can have following problem: thin-film material is easy to generate distortion, and difficulty of processing increases, and influences machining accuracy; Pressing plate damages thin-film material, causes the waste of thin-film material; Each processing need remove and install pressing plate again, and process is loaded down with trivial details and efficient is low.
In addition, the thin-film material of miniaturization is added man-hour, can't adopt pressing plate that the thin-film material of miniaturization is gripped.Though can adopt the fixedly thin-film material of miniaturization of gluing mode, may destroy the surface of thin-film material.Sometimes also can adopt getter device to adsorb the fixed film material, but the method can't guarantee the flatness of thin-film material, and then influence the precision of Laser Processing.
In addition, utilize laser that thin-film material is added man-hour, after the etching film by laser material,, can accumulate in the thin-film material bottom surface, and then influence machining accuracy if do not see through smoothly.
So; Be necessary the pressing plate clamping device that uses in the above-mentioned Laser Processing thin-film material is done further improvement defective such as, difficulty of processing yielding with the thin-film material of avoiding above-mentioned pressing plate clamping device to exist be big, be difficult to guarantee machining accuracy, damage thin-film material, waste resource, process are loaded down with trivial details.
Summary of the invention
The present invention provides a kind of sucked type clamping device that in the Laser Processing of thin-film material, uses, and utilizes the easily fixing processed thin-film material of suction type, makes that the loading and unloading of thin-film material are easy, and working (machining) efficiency is high.
To achieve these goals; A kind of sucked type clamping device provided by the invention; It comprises: the clamping main body; Connect the laser light-emitting window offer strip at the middle part, near above-mentioned laser light-emitting window, offer the cavity of the groove type of elongate in shape, also be provided with the air guide channel that is communicated with this cavity along its length direction; The absorption panel; Be arranged on the upper surface of this clamping main body; Cover the laser light-emitting window and the cavity of above-mentioned clamping main body, offer the suction hole array that constitutes by a plurality of perforation apertures, be formed with the peristome of strip in the part corresponding with the laser light-emitting window in the part corresponding with above-mentioned cavity; Getter device links to each other with above-mentioned air guide channel through tracheae, can above-mentioned cavity of sucking-off and the interior gas of air guide channel.
In addition, also can be, be formed with a plurality of above-mentioned cavitys and above-mentioned suction hole array, above-mentioned a plurality of cavitys be formed on the both sides of above-mentioned laser light-emitting window symmetrically, and above-mentioned a plurality of suctions hole array also is formed on the both sides of the peristome of above-mentioned absorption panel symmetrically.
In addition, also can be, above-mentioned tracheae midway perhaps the entrance side of above-mentioned air guide channel be provided with air valve.
According to said structure of the present invention, thin-film material to be processed entirely is close to is placed on the absorption panel, avoid the distortion of thin-film material, improved machining accuracy.In addition, the damage that can also avoid thin-film material to cause economizes on resources, and is simple to operate, increases work efficiency.
The sucked type clamping device that the present invention relates in addition has the cavity and suction hole array structure of symmetrical distribution, can guarantee suction equalization, and then guarantee the surperficial complete and machining accuracy of thin-film material.Laser light-emitting window on its absorption panel and the peristome on the clamping main body can make laser beam penetrate clamping device, thereby guarantee the quality of thin-film material.
Description of drawings
Through below in conjunction with accompanying drawing embodiment being described, above-mentioned characteristic of the present invention and technological merit will become apparent and understand easily.
Fig. 1 is the cutaway view of the concrete structure of the sucked type clamping device that the present invention relates to of expression;
Fig. 2 is the vertical view of the absorption panel concrete structure in the sucked type clamping device of representing the present invention relates to.
Description of reference numerals:
Figure BDA0000126122980000021
Figure BDA0000126122980000031
The specific embodiment
Below, in conjunction with accompanying drawing and specific embodiment the present invention is done further detailed description.
In the following description; Only some example embodiment of the present invention is described through the mode of explanation; Undoubtedly; Those of ordinary skill in the art can recognize, under situation without departing from the spirit and scope of the present invention, can revise described embodiment with various different modes.Therefore, accompanying drawing be described in just illustratively in essence, rather than be used to limit the protection domain of claim.In addition, in this manual, identical Reference numeral is represented identical part.
Fig. 1 is the cutaway view of the concrete structure of the sucked type clamping device that the present invention relates to of expression, and Fig. 2 is the vertical view of the absorption panel concrete structure in the sucked type clamping device that the present invention relates to of expression.Like Fig. 1 and shown in Figure 2; This sucked type clamping device comprises: clamping main body 1; Offer the laser light-emitting window 11 of strip in the middle perforation of this clamping main body 1, processing is passed with laser, and; Near laser light-emitting window 11, offer the cavity 12 of the groove type of elongate in shape, also be provided with the air guide channel 13 that is communicated with this cavity 12 along its length direction; Absorption panel 2; Be arranged on the upper surface of this clamping main body 1; Cover the laser light-emitting window 11 and cavity 12 of clamping main body 1; Offer the suction hole array 22 that constitutes by a plurality of perforation apertures in the part corresponding, and be formed with the peristome 21 of strip with laser light-emitting window 21 corresponding parts with above-mentioned cavity; Getter device 3 links to each other with air guide channel 12 through tracheae 5, can sucking-off cavity 12 and air guide channel 12 gas inside, for example can use vavuum pump etc.; Air valve 4, be arranged on tracheae 5 midway or the entrance side of air guide channel 12, be used to control the suction that getter device 3 produces.
In this embodiment; Bilateral symmetry ground at the laser light-emitting window 11 of clamping main body 1 is provided with cavity 12 respectively, and, on absorption panel 2; Also be provided with 2 accordingly and inhale hole array 22 with above-mentioned cavity 12; Such symmetrical distribution structure can guarantee the suction equalization in the generation of the both sides of laser light-emitting window 11, and then guarantees the steady of absorption panel 2, makes the thin-film material surface that is placed on the absorption panel 2 smooth.Unquestionable, cavity 12 is not limited to 2 with the quantity of inhaling hole array 22, so long as get final product with respect to laser light-emitting window 11 and peristome 21 symmetrical distributed architectures.
Below, the operation process of Laser Processing is carried out in simple declaration to thin-film material.At first, thin-film material to be processed entirely is placed on the upper surface that adsorbs panel 2, makes this thin-film material cover the peristome 22 and suction hole array 22 of absorption panel 2 fully.Then, open air valve 4, start getter device 3 and extract the air in cavity 12 and the air guide channel 13.At this moment, along with the air-flow that air-breathing work produces, thin-film material is attracted to the surface of absorption panel 2, thus occlusion of openings portion 22 and suction hole array 22, and the negative pressure in the final cavity 12 entirely is close to thin-film material and is adsorbed on the absorption panel 2.Then, make the laser beam that penetrates from laser instrument shine thin-film material to be processed and carry out Laser Processing, this laser beam sees through the laser light-emitting window 11 of break-through clamping main body 1 behind the thin-film material and the peristome 21 of absorption panel 2.Like this, can prevent the accumulation of laser energy on the thin-film material bottom surface, and then influence machining accuracy.After the Laser Processing of thin-film material is accomplished, close gas check valve 4, make to be full of air in the cavity 12 gradually to eliminate Negative Pressure Difference, unload the thin-film material that processes then, on absorption panel 2, place new thin-film material to be processed.
Under above-mentioned instruction of the present invention; Those skilled in the art can carry out various improvement and distortion on the basis of the foregoing description; And these improvement and distortion all drop in protection scope of the present invention, and those skilled in the art should be understood that; Above-mentioned specific descriptions are just explained the object of the invention better, and protection scope of the present invention is limited claim and equivalent thereof.

Claims (3)

1. a sucked type clamping device is characterized in that, comprising:
The clamping main body connects the laser light-emitting window offer strip, near above-mentioned laser light-emitting window, offers the cavity of the groove type of elongate in shape along its length direction, also is provided with the air guide channel that is communicated with this cavity;
The absorption panel; Be arranged on the upper surface of this clamping main body; Cover the laser light-emitting window and the cavity of above-mentioned clamping main body, offer the suction hole array that constitutes by a plurality of perforation apertures, be formed with the peristome of strip in the part corresponding with the laser light-emitting window in the part corresponding with above-mentioned cavity;
Getter device links to each other with above-mentioned air guide channel through tracheae, can above-mentioned cavity of sucking-off and the interior gas of air guide channel.
2. according to the described sucked type clamping device of claim 1, it is characterized in that,
Be formed with a plurality of above-mentioned cavitys and above-mentioned suction hole array,
Above-mentioned a plurality of cavity is formed on the both sides of above-mentioned laser light-emitting window symmetrically, and above-mentioned a plurality of suctions hole array also is formed on the both sides of the peristome of above-mentioned absorption panel symmetrically.
3. according to the described sucked type clamping device of claim 1, it is characterized in that,
Above-mentioned tracheae midway perhaps the entrance side of above-mentioned air guide channel be provided with air valve.
CN201110448609.1A 2011-12-28 2011-12-28 Sucker-type clamping device Expired - Fee Related CN102528300B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN102528300A true CN102528300A (en) 2012-07-04
CN102528300B CN102528300B (en) 2015-08-19

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108995200A (en) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 Gas extraction formula film laying apparatus and method
CN109520814A (en) * 2018-10-08 2019-03-26 广东凯文印刷有限公司 A kind of method of quick detection layer of ink water mist
CN112171343A (en) * 2020-01-15 2021-01-05 段芳利 Accessory of flexible clamping mechanism for machine tool
CN113511568A (en) * 2021-05-24 2021-10-19 张美洁 Medical treatment disease control device for preventing virus cross infection

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990000952A1 (en) * 1988-07-20 1990-02-08 Kabushiki Kaisha Komatsu Seisakusho Product withdrawing apparatus of laser processing machine
CN1669720A (en) * 2004-03-17 2005-09-21 株式会社迪斯科 Chuck table for use in a laser beam processing machine
CN101687281A (en) * 2007-06-28 2010-03-31 松下电器产业株式会社 Laser processing apparatus
CN101895176A (en) * 2010-08-19 2010-11-24 中国航空工业第六一八研究所 Adhesive filling and grinding processing method for stator-rotor iron core component of motor
CN201895176U (en) * 2010-10-15 2011-07-13 北京工业大学 Special fixture for laser bonding of glass-kovar alloy
CN202571613U (en) * 2011-12-28 2012-12-05 北京工业大学 Sucker type clamping device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990000952A1 (en) * 1988-07-20 1990-02-08 Kabushiki Kaisha Komatsu Seisakusho Product withdrawing apparatus of laser processing machine
CN1669720A (en) * 2004-03-17 2005-09-21 株式会社迪斯科 Chuck table for use in a laser beam processing machine
CN101687281A (en) * 2007-06-28 2010-03-31 松下电器产业株式会社 Laser processing apparatus
CN101895176A (en) * 2010-08-19 2010-11-24 中国航空工业第六一八研究所 Adhesive filling and grinding processing method for stator-rotor iron core component of motor
CN201895176U (en) * 2010-10-15 2011-07-13 北京工业大学 Special fixture for laser bonding of glass-kovar alloy
CN202571613U (en) * 2011-12-28 2012-12-05 北京工业大学 Sucker type clamping device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108995200A (en) * 2018-08-28 2018-12-14 莱芜钢铁集团有限公司 Gas extraction formula film laying apparatus and method
CN109520814A (en) * 2018-10-08 2019-03-26 广东凯文印刷有限公司 A kind of method of quick detection layer of ink water mist
CN112171343A (en) * 2020-01-15 2021-01-05 段芳利 Accessory of flexible clamping mechanism for machine tool
CN113511568A (en) * 2021-05-24 2021-10-19 张美洁 Medical treatment disease control device for preventing virus cross infection

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