CN102515239B - 一种微波辅助液相还原法制备硫化钐薄膜的方法 - Google Patents
一种微波辅助液相还原法制备硫化钐薄膜的方法 Download PDFInfo
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- CN102515239B CN102515239B CN201110375279.8A CN201110375279A CN102515239B CN 102515239 B CN102515239 B CN 102515239B CN 201110375279 A CN201110375279 A CN 201110375279A CN 102515239 B CN102515239 B CN 102515239B
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- KKZKWPQFAZAUSB-UHFFFAOYSA-N samarium(iii) sulfide Chemical compound [S-2].[S-2].[S-2].[Sm+3].[Sm+3] KKZKWPQFAZAUSB-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000007791 liquid phase Substances 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 239000010408 film Substances 0.000 claims abstract description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000002243 precursor Substances 0.000 claims abstract description 19
- 239000008367 deionised water Substances 0.000 claims abstract description 15
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- NWZSZGALRFJKBT-KNIFDHDWSA-N (2s)-2,6-diaminohexanoic acid;(2s)-2-hydroxybutanedioic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O.NCCCC[C@H](N)C(O)=O NWZSZGALRFJKBT-KNIFDHDWSA-N 0.000 claims abstract description 8
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine monohydrate Substances O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 claims abstract description 8
- YUKQRDCYNOVPGJ-UHFFFAOYSA-N thioacetamide Chemical compound CC(N)=S YUKQRDCYNOVPGJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- DLFVBJFMPXGRIB-UHFFFAOYSA-N thioacetamide Natural products CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000003756 stirring Methods 0.000 claims description 28
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 21
- 150000003376 silicon Chemical class 0.000 claims description 16
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 14
- 238000007306 functionalization reaction Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 14
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000009466 transformation Effects 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 7
- 230000033444 hydroxylation Effects 0.000 claims description 7
- 238000005805 hydroxylation reaction Methods 0.000 claims description 7
- NICDRCVJGXLKSF-UHFFFAOYSA-N nitric acid;trihydrochloride Chemical compound Cl.Cl.Cl.O[N+]([O-])=O NICDRCVJGXLKSF-UHFFFAOYSA-N 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 7
- -1 octadecyl trichlorosilane alkane Chemical class 0.000 claims description 7
- 230000010355 oscillation Effects 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- 235000011121 sodium hydroxide Nutrition 0.000 claims description 7
- 238000001291 vacuum drying Methods 0.000 claims description 7
- 238000011946 reduction process Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 5
- 230000008021 deposition Effects 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 abstract description 2
- 239000002120 nanofilm Substances 0.000 abstract 3
- 238000005516 engineering process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000013545 self-assembled monolayer Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 239000002094 self assembled monolayer Substances 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
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- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
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CN201110375279.8A CN102515239B (zh) | 2011-11-23 | 2011-11-23 | 一种微波辅助液相还原法制备硫化钐薄膜的方法 |
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CN201110375279.8A CN102515239B (zh) | 2011-11-23 | 2011-11-23 | 一种微波辅助液相还原法制备硫化钐薄膜的方法 |
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CN102515239A CN102515239A (zh) | 2012-06-27 |
CN102515239B true CN102515239B (zh) | 2014-03-12 |
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CN108069393A (zh) * | 2016-11-14 | 2018-05-25 | 中国科学院上海硅酸盐研究所 | 一种氢化铜薄膜及其制备方法 |
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US4575464A (en) * | 1984-07-18 | 1986-03-11 | Arthur D. Little, Inc. | Method for producing thin films of rare earth chalcogenides |
CN100359340C (zh) * | 2006-03-09 | 2008-01-02 | 陕西科技大学 | 一种硫化钐全息记录光学薄膜的制备方法 |
CN101486483B (zh) * | 2009-02-19 | 2010-11-10 | 陕西科技大学 | 一种微波水热法制备SmS薄膜的方法 |
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Effective date of registration: 20201117 Address after: 226200 Binjiang fine chemical industry park, Nantong, Jiangsu, Qidong Patentee after: Qidong Binhua water supply Co.,Ltd. Address before: 808, floor 8, building B, business center, gangzhilong science and Technology Park, No. 6, Qinglong Road, Qinghua community, Longhua street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Pengbo Information Technology Co.,Ltd. Effective date of registration: 20201117 Address after: 808, floor 8, building B, business center, gangzhilong science and Technology Park, No. 6, Qinglong Road, Qinghua community, Longhua street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Pengbo Information Technology Co.,Ltd. Address before: 710021 Shaanxi province Xi'an Weiyang University Park No. 1 Patentee before: SHAANXI University OF SCIENCE & TECHNOLOGY |
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