CN102513797B - Sealing method of degassing tube - Google Patents
Sealing method of degassing tube Download PDFInfo
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- CN102513797B CN102513797B CN201110460311.2A CN201110460311A CN102513797B CN 102513797 B CN102513797 B CN 102513797B CN 201110460311 A CN201110460311 A CN 201110460311A CN 102513797 B CN102513797 B CN 102513797B
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- deaeration pipe
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- deaeration
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Abstract
The invention provides a sealing method of a degassing tube. The sealing method comprises the steps that a first end of the degassing tube is connected with vacuum equipment, and a second end of the degassing tube is connected with a vacuum sheath; after the degassing tube is vacuumized in a heating environment, the sealing method is executed; the first end of the degassing tube is separated from the vacuum equipment and cooled; the cooled first end of the degassing tube is flattened, so as to form a flattened area; and the flattened area is cut off. The sealing method of the degassing tube, which is provided by the invention, can solve the technical problems that the vacuum degree in the vacuum sheath cannot be maintained, gaps and gas leakage phenomena occur in the follow-up sheath cooling, storage and transportation process, and the like, has the advantages of simple process and good sealing effect, and is convenient to operate.
Description
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate in sputtering target material manufacturing process the encapsulating method of the deaeration pipe used when carrying out application of vacuum.
Background technology
Large scale integrated circuit uses sputtering target material to carry out vacuum splashing and plating.When making sputtering target material by the method for powder metallurgy, easily there is oxidative phenomena during powder isostatic compaction, need powder be loaded in jacket, through degassed process, then jacket is sealed, then put into isostatic pressed stove and carry out densified; Sputtering target material and backboard, when carrying out Diffusion Welding, also need first to make corresponding jacket and carry out anti-oxidation, through degassed process, then are sealed by jacket, then put into isostatic pressed stove and weld.
Above-mentioned degassed process is load in a jacket welded by powder or metal derby (metal derby comprises sputtering target material to be welded and backboard), jacket is connected with vacuum system by deaeration pipe, described powder or metal derby are heated to assigned temperature, general more than at least 200 DEG C, insulation 3h ~ 5h, keep vacuum system to be in opening all the time simultaneously, so inner for vacuum canning all gas and lower boiling liquid (as aqueous vapor etc.) are discharged, for building a vacuum in vacuum canning, dry, clean space, thus successfully realize the welding of the densified of follow-up powder and target.
For realizing degassed function, jacket need be connected with vacuum equipment, and general adopted method is punched on jacket, and at punching place welding deaeration pipe, deaeration pipe is connected with vacuum equipment by flange again.To be de-gassed complete after, process that deaeration pipe is held one's breath, described in process of holding one's breath be that deaeration pipe is sealed.
And in prior art, relate to less to the encapsulation process technique of deaeration pipe, therefore, how deaeration pipe is carried out encapsulation process and become one of current problem demanding prompt solution.
Summary of the invention
The technical problem that the present invention solves is to provide a kind of deaeration pipe encapsulating method, can not maintain and in the cooling of follow-up jacket, storage and transport process, occur the technical problem of gap and gas leak phenomenon with the vacuum solved in vacuum canning.
For solving the problems of the technologies described above, the invention provides a kind of encapsulating method of deaeration pipe, the first end of described deaeration pipe connects vacuum equipment, and the second end connects vacuum canning; Carry out vacuumizing process in heating environment after, perform described encapsulating method; Described encapsulating method comprises:
The first end of described deaeration pipe is departed from vacuum equipment;
Cooling processing is carried out to the first end of described deaeration pipe;
Flattening process is carried out to the first end of the described deaeration pipe after cooling processing, is formed and flatten district;
Truncation is carried out to described flattening district.
Optionally, in 30 minutes after truncation, soldering is carried out to the incision position that truncation is formed.
Optionally, the material of described vacuum canning is aluminium.
Optionally, the material of described deaeration pipe is aluminium.
Optionally, the target temperature of described cooling processing is 80 DEG C ~ 150 DEG C.
Optionally, the length in described flattening district is 150mm ~ 250mm.
Optionally, the width in described flattening district increases to the widest part from the junction of vacuum canning and deaeration pipe gradually along deaeration pipe.
Optionally, the one-tenth-value thickness 1/10 of described the widest part is 3mm ~ 5mm.
The present invention has the following advantages:
(1) the described vacuum equipment end (first end) of the technical program to the described deaeration pipe after cooling processing carries out flattening process, is formed and flattens district; Then carry out to described flattening district the effect that truncation just can reach deaeration pipe sealing, therefore the technical program has simple, the easy to operate advantage of technique.
(2) length in the flattening district of described deaeration pipe is 150mm ~ 250mm, and described flattening district is widened gradually, and there is a widest part in described flattening district.Its effect makes hammer shape thing not easily repeat to strike to unexpected fracture at deaeration pipe one place on the one hand, on the other hand, strikes the flat sealing that vacuum canning is good of can guaranteeing gently.The thickness of described the widest part is 3mm ~ 5mm, if be less than 3mm, then in the process of beaing, aluminium deaeration pipe is too thin, easy jackknifing; If be greater than 5mm, then aluminium deaeration pipe is too thick, easily produces gas leak phenomenon.
(3) in 30 minutes after truncation, soldering is carried out to the incision position that truncation is formed, the basis can held one's breath is strengthened the sealing effectiveness of deaeration pipe at physics.
Accompanying drawing explanation
Fig. 1 is the flow chart of the encapsulating method of deaeration pipe provided by the invention.
Fig. 2 is the schematic cross-section of the present embodiment deaeration pipe.
Fig. 3 to Fig. 5 is the schematic diagram of flow process according to Fig. 1.
Detailed description of the invention
The invention provides a kind of deaeration pipe encapsulating method, specifically as shown in Figure 1, can not maintain with the vacuum solved in vacuum canning and in the cooling of follow-up jacket, storage and transport process, occur the technical problem of gap and gas leak phenomenon, and it is simple, easy to operate to have technique, the advantage of good sealing effect.
The encapsulating method of described deaeration pipe comprises:
Step S11, provides deaeration pipe, and one end of described deaeration pipe connects vacuum equipment, and the other end connects vacuum canning.
Step S12, departs from vacuum equipment by deaeration pipe.
Step S13, carries out cooling processing to the vacuum equipment end of described deaeration pipe.
Step S14, carries out flattening process to the described vacuum equipment end after described cooling processing, is formed and flatten district.
Step S15, carries out truncation to described flattening district.
For enabling above-mentioned purpose of the present invention, feature and advantage more become apparent, and are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.
First, perform step S11, provide deaeration pipe, one end of described deaeration pipe connects vacuum equipment, and the other end connects vacuum canning.
As shown in Figure 2 and Figure 3, provide deaeration pipe 20, in the present embodiment, the external diameter R1 of deaeration pipe 20 is 10 ~ 15mm, and thickness h is 3 ~ 5mm.One end of deaeration pipe 20 is vacuum equipment 24, and deaeration pipe 20 is connected with vacuum equipment 24 by vacuum valve 23 (flange); The other end is vacuum canning 22, and deaeration pipe 20 is welded on punching place 21 of vacuum canning 22.
The material of jacket depends on the actual requirement of applied environment, production equipment, can be metal or alloy.The present embodiment is preferably aluminium, and the heating-up temperature of aluminium jacket is less than 600 DEG C.It is to be noted, deaeration pipe is welded on punching place of vacuum canning, consider the welding effect of jacket and deaeration pipe, therefore the material of vacuum canning and the material require of deaeration pipe as far as possible same or similar, like this, the sealing of the jacket that same or similar material is welded and deaeration pipe can be got well, and can bear the mal-condition such as high temperature, high pressure, and the deaeration pipe that therefore aluminium jacket uses is aluminium.
Described powder or metal derby are put into jacket 22, then put together with jacket 22 and be heated to assigned temperature to heating furnace, general more than at least 200 DEG C, insulation 3h ~ 5h, keep vacuum system to be in opening all the time simultaneously, so inner for vacuum canning all gas and lower boiling liquid (as aqueous vapor etc.) could be discharged.
Then, perform step S12, one end of deaeration pipe is departed from vacuum equipment.
As shown in Figure 4, after the vacuum of jacket 22 reaches vacuum requirement, close vacuum valve 23, one end of jacket 22 now and deaeration pipe 20 departs from vacuum equipment 24, but one end of deaeration pipe 20 is still connected with vacuum valve 23.
Then, perform step S13, cooling processing is carried out to the vacuum equipment end of described deaeration pipe.
Then jacket 22 is cooled to 80 DEG C ~ 150 DEG C together with deaeration pipe 20 is in heating furnace, from heating furnace, takes out jacket, prepare encapsulation process.In this temperature range, carry out encapsulation process, the plasticity of jacket is better, more easily carries out follow-up encapsulation process.Finished product scrappage is lower, if namely temperature is too high, aluminium is too soft, too sticky, too thin easy fracture in follow-up encapsulation process, if temperature is too low, aluminium is too hard, in follow-up process, easily occur crackle.
Then, perform step S14, flattening process is carried out to the described vacuum equipment end after described cooling processing, is formed and flatten district.
Within the scope of 80 DEG C ~ 150 DEG C, by aluminium deaeration pipe plain cushion on block object, then slowly knock aluminium deaeration pipe, until strike flat by aluminium deaeration pipe with hammer shape thing.
When hammer shape thing slowly knocks aluminium deaeration pipe, described block object plays a supportive role, another of block object act as and aluminium deaeration pipe is carried out deformation process with hammering into shape together with shape object, therefore the hardness of block object and hammer shape object is needed at least to be greater than the hardness of aluminium, and the hammer shape thing surface to contact with aluminium deaeration pipe and block surface all need smooth, corner angle or protrusion can not be had.The hammer shape thing surface contacted with aluminium deaeration pipe and block surface area are as far as possible large, can reduce impulsive force and the pressure of the process of knocking.In the present embodiment, described block can be iron block, and hammer shape thing can be iron hammer.
When aluminium deaeration pipe forms flattening district, just can stopped knocking of aluminium deaeration pipe.As shown in Figure 5, the flattening district 10 of described aluminium deaeration pipe extends to 150mm ~ 250mm from the junction of jacket 22 and deaeration pipe 20 along deaeration pipe direction, i.e. length L150mm ~ 250mm is.The width in described flattening district increases to the widest part of 150 ~ 250mm gradually from the junction of jacket and deaeration pipe along deaeration pipe direction, the thickness h 1 of described the widest part is minimum, and in the present embodiment, h1 is 3mm ~ 5mm.The effect that described flattening district is widened gradually makes hammer shape thing not easily repeat to strike to unexpected fracture in certain of deaeration pipe on the one hand, on the other hand, strikes flat described deaeration pipe gently and can guarantee the sealing that vacuum canning is good; Ensure that h1 is 3mm ~ 5mm, if be less than 3mm, aluminium deaeration pipe is too thin, easy jackknifing; If be greater than 5mm, then aluminium deaeration pipe is too thick, easily produces gas leak phenomenon.
It should be noted that and need to use high-temperature infrared temperature measurer measuring tempeature, carry out real time temperature monitoring.If after described deaeration pipe turns cold, heating can be continued until to 80 DEG C ~ 150 DEG C to it.
Then, perform step S15, truncation is carried out to described flattening district.
Sharp instruments is used to be blocked by the widest part in described flattening district.The thickness of the aluminium deaeration pipe of described the widest part is the thinnest.Described sharp instruments can be cutter, clipper or other can make the instrument of metal fracture, be steel knife at the present embodiment.The present invention uses steel knife to carry out truncation to the widest part flattening district, has technique simple, the advantage of operation operation.
Comparatively optimize, the incision position after described truncation carried out soldering in 30 minutes.
In order to strengthen the sealing effectiveness of jacket deaeration pipe further, can also carry out soldering to the pinch off place of described deaeration pipe, the present embodiment is preferably argon arc welding.
Argon arc welding technology is on the basis of the principle of conventional arc weldering; the incision position of argon gas to deaeration pipe is utilized to protect; logical excessive current makes the incision position of deaeration pipe be melted into liquid formation bath; the incision position of deaeration pipe and wlding reach a kind of solder technology of metallurgical binding; owing to constantly serving argon gas in high-temperature fusion welding; the incision position of deaeration pipe can not be contacted with the oxygen in air, thus prevent the oxidation of the incision position of deaeration pipe.
In the present embodiment, in 30 minutes after truncation, soldering is carried out to the incision position that truncation is formed.
In 30 minutes after truncation, soldering is carried out to the incision position that truncation is formed.As early as possible described incision position is welded, can welding efficiency be improved.Described welding current is preferably 100A ~ 150A, and the flow of argon gas is 6L/min ~ 10L/min, can reach good welding effect under the condition of above-mentioned argon arc welding, the sealing effectiveness of deaeration pipe can be made better simultaneously.
The invention provides a kind of deaeration pipe encapsulating method, can not maintain with the vacuum solved in vacuum canning and in the cooling of follow-up jacket, storage and transport process, occur the technical problem of the technical problem of gap and gas leak phenomenon, in sum.The technical program has the following advantages:
(1) the vacuum equipment end of the technical program to the described deaeration pipe after cooling processing carries out flattening process, is formed and flattens district; Then carry out to described flattening district the effect that truncation just can reach deaeration pipe sealing, therefore the technical program has simple, the easy to operate advantage of technique.
(2) length in the flattening district of described deaeration pipe is 150mm ~ 250mm, and described flattening district is widened gradually, and there is a widest part in described flattening district.Its effect makes hammer shape thing not easily repeat to strike to unexpected fracture at deaeration pipe one place on the one hand, on the other hand, strikes the flat sealing that vacuum canning is good of can guaranteeing gently.The thickness of described the widest part is 3mm ~ 5mm, if be less than 3mm, then in the process of beaing, aluminium deaeration pipe is too thin, easy jackknifing; If be greater than 5mm, then aluminium deaeration pipe is too thick, easily produces gas leak phenomenon.
(3) in 30 minutes after truncation, soldering is carried out to the incision position that truncation is formed, the basis can held one's breath is strengthened the sealing effectiveness of deaeration pipe at physics.
Although the present invention discloses as above with preferred embodiment, the present invention is not defined in this.Any those skilled in the art, without departing from the spirit and scope of the present invention, all can make various changes or modifications, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (2)
1. an encapsulating method for deaeration pipe, the material of described deaeration pipe is aluminium, and the external diameter of described deaeration pipe is 10mm ~ 15mm, and thickness is 3mm ~ 5mm, and the first end of described deaeration pipe connects vacuum equipment, and the second end connects vacuum canning; Carry out vacuumizing process in heating environment after, perform described encapsulating method; It is characterized in that, described encapsulating method comprises:
The first end of described deaeration pipe is departed from vacuum equipment;
Carry out cooling processing to the first end of described deaeration pipe, the temperature of described cooling processing is 80 DEG C ~ 150 DEG C;
Hammer shape thing is adopted slowly to carry out flattening process to the first end of the described deaeration pipe after cooling processing, formed and flatten district, the described hammer shape thing surface contacted with aluminium deaeration pipe is plane, the width in described flattening district increases to the widest part from the junction of vacuum canning and deaeration pipe gradually along deaeration pipe, the length in described flattening district is 150mm ~ 250mm, and the one-tenth-value thickness 1/10 of described the widest part is 3mm ~ 5mm;
Steel knife is used to carry out truncation to described flattening district the widest part;
In 30 minutes after truncation, carry out argon arc welding process to the incision position that truncation is formed, the welding current of described argon arc welding is 100A ~ 150A, and argon flow amount is 6L/min ~ 10L/min.
2. the encapsulating method of deaeration pipe according to claim 1, is characterized in that, the material of described vacuum canning is aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110460311.2A CN102513797B (en) | 2011-12-31 | 2011-12-31 | Sealing method of degassing tube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110460311.2A CN102513797B (en) | 2011-12-31 | 2011-12-31 | Sealing method of degassing tube |
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| Publication Number | Publication Date |
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| CN102513797A CN102513797A (en) | 2012-06-27 |
| CN102513797B true CN102513797B (en) | 2015-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110460311.2A Active CN102513797B (en) | 2011-12-31 | 2011-12-31 | Sealing method of degassing tube |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111438362A (en) * | 2020-05-18 | 2020-07-24 | 湖南金马铝业有限责任公司 | Hot extrusion sheath and method for producing preformed piece by using same |
| CN113579655A (en) * | 2021-08-04 | 2021-11-02 | 宁波江丰电子材料股份有限公司 | Air-tight method for aluminum-clad degassing pipe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4240189A (en) * | 1976-12-25 | 1980-12-23 | Ricoh Company, Ltd. | Method of producing heat pipe roller |
| CN1147438A (en) * | 1996-09-12 | 1997-04-16 | 西北有色金属研究院 | Vacuum welding method for composite metal jacket |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4191402B2 (en) * | 2001-10-05 | 2008-12-03 | 竹内工業株式会社 | Processing method of laminated metal material and storage member of storage container such as cosmetics |
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- 2011-12-31 CN CN201110460311.2A patent/CN102513797B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4240189A (en) * | 1976-12-25 | 1980-12-23 | Ricoh Company, Ltd. | Method of producing heat pipe roller |
| CN1147438A (en) * | 1996-09-12 | 1997-04-16 | 西北有色金属研究院 | Vacuum welding method for composite metal jacket |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2003-117735A 2003.04.23 * |
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