CN102507156A - Device for measuring size of spot focused by focusing optical system and using method for device - Google Patents
Device for measuring size of spot focused by focusing optical system and using method for device Download PDFInfo
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- CN102507156A CN102507156A CN2011103521276A CN201110352127A CN102507156A CN 102507156 A CN102507156 A CN 102507156A CN 2011103521276 A CN2011103521276 A CN 2011103521276A CN 201110352127 A CN201110352127 A CN 201110352127A CN 102507156 A CN102507156 A CN 102507156A
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Abstract
The invention belongs to the technical field of precision measurement of focused spots, and in particular relates to a device for measuring the size of a spot focused by a focusing optical system and a using method for the device. The device comprises a collimation laser source, a reflection and transmission switching unit, a beam splitter, a condenser, a laser power detector, a first linear motion unit, a second linear motion unit, a double slit, a focusing lens, a charge coupled device (CCD) camera, and a computer, wherein the collimation laser source, the beam splitter, the reflection and transmission switching unit, the double slit, the focusing lens, and the CCD camera are arranged in the same optical path in turn; the reflection and transmission switching unit is arranged on the first linear motion unit; the double slit and the focusing lens are arranged on the second linear motion unit; the condenser and the laser power detector are arranged in a reflecting optical path of the beam splitter in turn; the laser power detector, the first linear motion unit, the second linear motion unit and the CCD camera are connected with a computer; and the using method solves the problem that the prior art cannot be used for analyzing and measuring the size of the focused spot.
Description
Technical field
The invention belongs to focal beam spot Technology of Precision Measurement field, be specifically related to a kind of device and method of application thereof that the Focused Optical system focused spot size is measured.
Background technology
Fast development along with laser technology; In numerous practical applications relevant with laser; Size to through focal beam spot behind the lens has proposed certain requirement; For example in laser processing procedure, the size of focal beam spot has been represented the resolution and the machining precision of manufacturing process, is one of important indicator of technological processs such as cut, laser bonding; In the laser fiber coupling,, cause the waste of energy if focal beam spot then can reduce the coupling efficiency of laser greater than the optical fiber core diameter behind the laser process coupled lens; For precision plate-making photoetching camera lens, the yardstick of focal beam spot is undoubtedly most important index in the photoetching technique; In the laser marking process, if hot spot focusing is meticulous inadequately, the power density of laser descends very fast, is unfavorable for processing and carries out.It is thus clear that in these fields, the yardstick of estimating or detect focal spot accurately is very important.
The size of focal beam spot receives influence of various factors, and wherein most important factor has light-emitting mode, light wave diffraction, and the aberration of focusing system etc. of laser.Zlasing mode is mainly by laser instrument and the decision of beam Propagation system, and back two kinds of factors are mainly determined by the geometric parameter and the optical parametric of lens.Because the focus point yardstick is laser instrument and optical system results of interaction, and relevant with the manufacturing procedure and the environment for use of mirror group, thus the physical size of focal beam spot with design according to correlation theory and the software emulation result has certain difference.At present; Receive the needs of correlation engineering area research; The measuring method that some laser spot sizes, pattern have occurred; People such as Wang Hu " method of a kind of CCD subsidiary basic mode (TEM00) laser spot size " in " photon journal ", delivered in calendar year 2001 for example, people such as Zhao Degang have applied for " a kind of method of measuring small luminous spot dimension " in 2006, the research that utilizes knife-edge method Laser Measurement spot size in addition is comparative maturity also.But these methods mainly all are research laser to distribute at the hot spot that directly advances in the process, all can not be used for the yardstick of focal beam spot is carried out analysis to measure.
Technology contents
The purpose of this invention is to provide a kind of device and method of application thereof that the Focused Optical system focused spot size is measured, can not carry out analysis to measure to the yardstick of focal beam spot with what overcome that prior art exists.
In order to overcome the problem that prior art exists; Technical scheme provided by the invention is: a kind of device that the Focused Optical system focused spot size is measured comprises collimation laser light source, reflection and transmission switch unit, spectroscope, condenser, optical power detector, the first rectilinear motion unit, the second rectilinear motion unit, double slit, condenser lens, CCD camera, computing machine.Wherein collimation laser light source, spectroscope, reflection and transmission switch unit, double slit, condenser lens, CCD camera are total to light path and set gradually; Reflection is arranged on the first rectilinear motion unit with the transmission switch unit; Double slit and condenser lens are arranged on the second rectilinear motion unit; Be disposed with condenser and optical power detector on said spectroscopical reflected light path, optical power detector 5, rectilinear motion unit, the second rectilinear motion unit, CCD camera all are connected with computing machine.
The measuring method of said apparatus comprises the steps: successively
Measured lens is arranged between spectroscope and reflection and the transmission switch unit; The collimation laser that laser instrument sends is focused to the hot spot of a dimensioning through measured lens; Make and reflect switch unit and be operated in reflective condition, and the tally function record reflecting surface current location A1 and the double slit current location B1 that utilize the first rectilinear motion unit and the second rectilinear motion unit to be had;
Calculation control unit drives the first rectilinear motion unit, drives reflecting surface, along optical axis direction from lens defocused push away sweep to Jiao before; Reflected light focuses on optical power detector by condenser behind spectroscope, and by the optical power value of computer recording reflecting surface when the diverse location;
Confirm the reflection line position A2 that the powertrace vertex position is corresponding through computational analysis, make and reflect switch unit and be operated in transmissive state;
Computer drives rectilinear motion unit pushes away to sweep before and after doing along optical axis direction and moves, and CCD camera collection difference pushes away the interference pattern of sweeping the position; Utilize computing machine that the interference pattern that collects is carried out filtering and noise reduction and handle, the contrast of the interference pattern that the analytical calculation double slit is gathered at diverse location is drawn the contrast change curve; Utilize Computer Analysis contrast change curve, calculated curve pushes away in difference and sweeps the corresponding slope in position, and former contrast curves is divided into slope variation district and slope fixed area, and confirms the intersection points B 2 in two zones;
The focal beam spot and the distance between the double slit of measured lens are:
L?=?︱︱B2-B1︱-︱A2-A1︱︱
The spacing of the double slit of being selected for use is d, and the wavelength of LASER Light Source is λ, and then the diameter D of tested focal beam spot is:
D?=?λ*L/d
The two-way or the multichannel light that satisfy coherent condition can interfere, and the contrast of interference pattern is to describe the main foundation that interference field distributes, and optical interference has temporal coherence and spatial coherence.Basic thought of the present invention is to utilize the spatial coherence of optical interference to measure the size of focal beam spot, is assembling the double slit of placing a determining deviation on the hot spot direction of propagation, confirms the size of hot spot according to the contrast of two-slit interference style.
Compared with prior art, advantage of the present invention is:
1. the spatial coherence of focal beam spot yardstick and light wave is got in touch, realized the quantitative measurment of focal beam spot yardstick through the spatial coherence width of measuring light wave;
2. laser co-focusing has the vertical resolution of pattern of sub-micron level, and the present invention utilizes the laser co-focusing method to realize the focus point positioning function, has improved bearing accuracy greatly, has also improved measuring accuracy simultaneously;
3. the setting of two rectilinear motion unit can be measured the lens focus ability of different focal, has expanded the usable range of this device.
4. the size that can be used for focal beam spot in the high resolving power, the high precision course of work in fields such as Laser Measurement processing, optical fiber coupling, laser marking and biomedicine.
Description of drawings:
Fig. 1 is a focused spot size measurement mechanism synoptic diagram of the present invention.
Embodiment:
Specify specific embodiments of the present invention below in conjunction with accompanying drawing.
Referring to Fig. 1; A kind of device that the Focused Optical system focused spot size is measured provided by the invention comprises collimation laser light source 1, reflection and transmission switch unit 2, spectroscope 3, condenser 4, optical power detector 5, the first rectilinear motion unit 6, the second rectilinear motion unit 7, double slit 9, condenser lens 10, CCD camera 11, computing machine 12.Wherein collimation laser light source 1, spectroscope 3, reflection and transmission switch unit 2, double slit 9, condenser lens 10, CCD camera 11 are total to light path and set gradually; Reflection is arranged on the first rectilinear motion unit 6 with transmission switch unit 2; Double slit 9 is arranged on the second rectilinear motion unit 7 with condenser lens 10; Be disposed with condenser 4 and optical power detector 5 on the reflected light path of said spectroscope 3, optical power detector 5, rectilinear motion unit 6, the second rectilinear motion unit 7, CCD camera 11 all are connected with computing machine 12.
The measuring method of said apparatus comprises the steps: successively
Measured lens 8 is arranged between spectroscope 3 and reflection and the transmission switch unit 2; The collimation laser that laser instrument 1 sends is focused to the hot spot of a dimensioning through measured lens; Make and reflect switch unit 2 and be operated in reflective condition, and the tally function record reflecting surface 12 current location A1 and the double slit 9 current location B1 that utilize the first rectilinear motion unit 6 and the second rectilinear motion unit 7 to be had;
Calculation control unit 12 drives the first rectilinear motion unit 6, drives reflecting surface 12, along optical axis direction from lens 8 defocused push away sweep to Jiao before; Reflected light focuses on optical power detector 5 by condenser 4 behind spectroscope 3, and by the optical power value of computing machine 12 record reflectings surface when the diverse location;
Confirm the reflection line position A2 that the powertrace vertex position is corresponding through computational analysis, make and reflect switch unit 2 and be operated in transmissive state;
Computing machine 12 drives rectilinear motion unit 7 and moves along pushing away to sweep before and after optical axis direction is done, and CCD camera collection difference pushes away the interference pattern of sweeping the position; Utilize 12 pairs of interference patterns that collect of computing machine to carry out filtering and noise reduction and handle, the contrast of the interference pattern that the analytical calculation double slit is gathered at diverse location is drawn the contrast change curve; Utilize computing machine 12 to analyze the contrast change curve, calculated curve pushes away in difference and sweeps the corresponding slope in position, and former contrast curves is divided into slope variation district and slope fixed area, and confirms the intersection points B 2 in two zones;
Distance between the focal beam spot of measured lens 8 and the double slit 9 is:
L?=?︱︱B2-B1︱-︱A2-A1︱︱
The spacing of the double slit of being selected for use is d, and the wavelength of LASER Light Source is λ, and then the diameter D of tested focal beam spot is:
D?=?λ*L/d
In apparatus of the present invention; Optical power detector 5 wherein, condenser 4, spectroscope 3, measured lens 13 and the reflecting surface 2 common laser co-focusing positioning functions of accomplishing, double slit 9, condenser lens 10, rectilinear motion unit 7 and the CCD camera 11 common spatial coherence focus point yardsticks of accomplishing are measured.
Claims (2)
1. device that the Focused Optical system focused spot size is measured; It is characterized in that: comprise collimation laser light source (1), reflection and transmission switch unit (2), spectroscope (3), condenser (4), optical power detector (5), the first rectilinear motion unit (6), the second rectilinear motion unit (7), double slit (9), condenser lens (10), CCD camera (11), computing machine (12); Wherein collimation laser light source (1), spectroscope (3), reflection and transmission switch unit (2), double slit (9), condenser lens (10), CCD camera (11) are total to light path and set gradually; Reflection is arranged on the first rectilinear motion unit (6) with transmission switch unit (2); Double slit (9) and condenser lens (10) are arranged on the second rectilinear motion unit (7); Be disposed with condenser (4) and optical power detector (5) on the reflected light path of said spectroscope (3), optical power detector (5), rectilinear motion unit (6), the second rectilinear motion unit (7), CCD camera (11) all are connected with computing machine (12).
2. a kind of device that the Focused Optical system focused spot size is measured according to claim 1, it is characterized in that: the measuring method of said apparatus comprises the steps: successively
Measured lens (8) is arranged between spectroscope (3) and reflection and the transmission switch unit (2); The collimation laser that laser instrument (1) sends is focused to the hot spot of a dimensioning through measured lens; Make and reflect switch unit (2) and be operated in reflective condition, and tally function record reflecting surface (12) the current location A1 and double slit (9) the current location B1 that utilize the first rectilinear motion unit (6) and the second rectilinear motion unit (7) to be had;
Calculation control unit 12 drives the first rectilinear motion unit (6), drives reflecting surface (12), along optical axis direction from lens (8) defocused push away sweep to Jiao before; Reflected light focuses on optical power detector (5) by condenser (4) behind spectroscope (3), and by the optical power value of computing machine (12) record reflecting surface when the diverse location;
Confirm the reflection line position A2 that the powertrace vertex position is corresponding through computational analysis, make and reflect switch unit 2 and be operated in transmissive state;
Computing machine (12) drives rectilinear motion unit (7) and moves along pushing away to sweep before and after optical axis direction is done, and CCD camera collection difference pushes away the interference pattern of sweeping the position; Utilize computing machine (12) that the interference pattern that collects is carried out filtering and noise reduction and handle, the contrast of the interference pattern that the analytical calculation double slit is gathered at diverse location is drawn the contrast change curve; Utilize computing machine (12) to analyze the contrast change curve, calculated curve pushes away in difference and sweeps the corresponding slope in position, and former contrast curves is divided into slope variation district and slope fixed area, and confirms the intersection points B 2 in two zones;
Distance between the focal beam spot of measured lens (8) and the double slit (9) is:
L?=?︱︱B2-B1︱-︱A2-A1︱︱
The spacing of the double slit of being selected for use is d, and the wavelength of LASER Light Source is λ, and then the diameter D of tested focal beam spot is:
D?=?λ*L/d。
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| CN201110352127.6A CN102507156B (en) | 2011-11-09 | 2011-11-09 | Device for measuring size of spot focused by focusing optical system and using method for device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104019963A (en) * | 2014-05-28 | 2014-09-03 | 上海理工大学 | Plane light source virtual image distance measurement device and method thereof |
| CN104034268A (en) * | 2014-07-01 | 2014-09-10 | 西安工业大学 | Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof |
| CN104143495A (en) * | 2013-05-07 | 2014-11-12 | 许洋 | Automatic control system of mass spectrometer core component |
| CN105842145A (en) * | 2016-04-26 | 2016-08-10 | 上海小糸车灯有限公司 | Sunlight focusing analysis device for automobile lamp lens and use method thereof |
| CN107138854A (en) * | 2017-07-12 | 2017-09-08 | 上海柏楚电子科技有限公司 | The adjustable laser Machining head of a kind of spot diameter and focal position and its control method |
| WO2017185534A1 (en) * | 2016-04-26 | 2017-11-02 | 上海小糸车灯有限公司 | Sunlight focusing analysis device for vehicle lamp lens, and method for using same |
| CN112981310A (en) * | 2021-01-20 | 2021-06-18 | 中国工程物理研究院材料研究所 | Laser strengthening working module suitable for workpiece surface nitriding modification |
| CN114838819A (en) * | 2022-04-26 | 2022-08-02 | 珠海光库科技股份有限公司 | Emergent light spot measuring device and method of optical chip |
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| CN104143495A (en) * | 2013-05-07 | 2014-11-12 | 许洋 | Automatic control system of mass spectrometer core component |
| CN104143495B (en) * | 2013-05-07 | 2017-09-01 | 许洋 | A kind of automatic control system of mass spectrograph core component |
| CN104019963A (en) * | 2014-05-28 | 2014-09-03 | 上海理工大学 | Plane light source virtual image distance measurement device and method thereof |
| CN104034268A (en) * | 2014-07-01 | 2014-09-10 | 西安工业大学 | Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof |
| CN105842145A (en) * | 2016-04-26 | 2016-08-10 | 上海小糸车灯有限公司 | Sunlight focusing analysis device for automobile lamp lens and use method thereof |
| WO2017185534A1 (en) * | 2016-04-26 | 2017-11-02 | 上海小糸车灯有限公司 | Sunlight focusing analysis device for vehicle lamp lens, and method for using same |
| CN105842145B (en) * | 2016-04-26 | 2018-10-30 | 上海小糸车灯有限公司 | A kind of lens of car light solar light focusing analytical equipment and its application method |
| DE112016006792B4 (en) | 2016-04-26 | 2023-03-09 | Hasco Vision Technology Co., Ltd. | Sunlight focusing analyzer for a vehicle lamp lens and associated method of use |
| CN107138854A (en) * | 2017-07-12 | 2017-09-08 | 上海柏楚电子科技有限公司 | The adjustable laser Machining head of a kind of spot diameter and focal position and its control method |
| CN112981310A (en) * | 2021-01-20 | 2021-06-18 | 中国工程物理研究院材料研究所 | Laser strengthening working module suitable for workpiece surface nitriding modification |
| CN112981310B (en) * | 2021-01-20 | 2023-03-10 | 中国工程物理研究院材料研究所 | Laser strengthening working module suitable for workpiece surface nitriding modification |
| CN114838819A (en) * | 2022-04-26 | 2022-08-02 | 珠海光库科技股份有限公司 | Emergent light spot measuring device and method of optical chip |
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