CN102455301A - Laser coherence detection device for ceramic product surface defect - Google Patents

Laser coherence detection device for ceramic product surface defect Download PDF

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Publication number
CN102455301A
CN102455301A CN2011100872177A CN201110087217A CN102455301A CN 102455301 A CN102455301 A CN 102455301A CN 2011100872177 A CN2011100872177 A CN 2011100872177A CN 201110087217 A CN201110087217 A CN 201110087217A CN 102455301 A CN102455301 A CN 102455301A
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China
Prior art keywords
ceramic product
laser
product surface
fiber coupler
frequency
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Pending
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CN2011100872177A
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Chinese (zh)
Inventor
湛群
杜兆芳
冯广东
黄晨
陆小彪
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Anhui Agricultural University AHAU
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Anhui Agricultural University AHAU
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Priority to CN2011100872177A priority Critical patent/CN102455301A/en
Publication of CN102455301A publication Critical patent/CN102455301A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a laser coherence detection device for ceramic surface defect. According to the device, a single-frequency laser outputs the laser by an optical fiber coupler, a loop device, and a receiving and transmitting telescope to detect the ceramic product surface; the detection echo passes through the loop device, a polarizing beam splitter and the optical fiber coupler, and is subjected to frequency mixing coherence with the intrinsic light on the surface of a detector; the coherent signal is amplified and sampled by filtering, and the structure size of the ceramic product surface defect is calculated by extracting the superposition modulation signal amplitude of the continuous echo Doppler frequency shift signals.

Description

Ceramic product surface imperfection coherent detection of laser light device
Affiliated technical field
The present invention relates to a kind of ceramic product surface defect detection apparatus, especially based on the ceramic product surface defect detection apparatus of laser coherence mode.
Background technology
Can crack in process of production at ceramic product, surface imperfection such as pore, these defectives directly have influence on the quality of ceramic product, must realize quick defects detection through technological means, and then product quality is control effectively.
For the ceramic product surface defects detection, traditional method is to use the manual detection mode, judges defective locations, quantity and degree through the method for Direct observation and utility appliance (like magnifier) observation.This mode exists inefficiency, to technician's level shortcoming such as have relatively high expectations.In the automatic context of detection of ceramic product surface imperfection, many employings is the ultrasound examination means at present, and these means can realize the nondestructive examination on ceramic product surface is detected.Its main deficiency is: conventional low-frequency ultrasonic waves system or conventional x ray system, though can both the structure on ceramic product surface be detected, general resolution is not high.Little focus x rays method, it can detect little crackle to 10 μ m, but the orientation of crackle should be consistent with x beam direction, and relatively poor to the adaptability of various forms surface imperfection.
Summary of the invention
The present invention provides a kind of ceramic product surface imperfection coherent detection of laser light device in order to overcome the deficiency of existing ceramic product surface defects detection technological means, can realize the harmless high Precision Detection to the ceramic product surface imperfection.
The present invention realizes through following technical scheme:
Single-frequency laser is connected with circulator through fiber coupler A; Circulator one end is connected with the transmitting-receiving telescope, and the other end is connected with polarization beam apparatus B input end, and polarization beam apparatus B output terminal is connected with the input end of fiber coupler B, C respectively; The transmitting-receiving telescope is connected with scan module; Another road output of fiber coupler A is connected with the frequency shifter input end, and the frequency shifter output terminal is connected with polarization beam apparatus A input end, and polarization beam apparatus A output terminal is connected with the input end of fiber coupler B, C respectively; The output of optical fiber coupling B is connected with photodetector A input section; The output of optical fiber coupling C is connected with photodetector B input section, and the output terminal of photodetector A, B amplifies the sample circuit input end with filtering and is connected, and amplifies sample circuit with filtering and is connected with the data processing and control system.
Among the present invention, single-frequency laser output single-frequency continuous laser through circulator and the output of transmitting-receiving telescope, and is realized scanning probe on the ceramic product surface under scan module drives.Exploring laser light produces reflection echo at ceramic surface, after being received by the transmitting-receiving telescope, through being divided into the polar echo light of two-way quadrature behind the circulator access polarization beam apparatus B, is input to fiber coupler B and C respectively.Emission laser a road as intrinsic light, behind fiber coupler A and frequency shifter, produce shift frequency light, through being divided into the polarized light of two-way quadrature behind the polarization beam apparatus A, also incoming fiber optic coupling mechanism B and fiber coupler C respectively.After the echo light of two-way quadrature and intrinsic light pass through fiber coupler B and fiber coupler C, realize coherent detection through photodetector A and photodetector B respectively.Photodetector output is amplified sample circuit through filtering and is realized the collection to the coherent detection signal; And the two-way orthogonal signal are carried out a square summation; Elimination polarization variations influence is carried out spectrum analysis by the data processing and control system to sampled signal, can obtain echoed signal spectrum distribution information since scan module by the data processing and control system according to the special style uniform speed scanning; The location changes continuously between corresponding ceramic product surface and the detector; The Doppler frequency of consequent laser echo signal changes, but exists under the situation of defective at ceramic surface, and the micro-structure reacting condition on surface is in echoed signal; Will on the Doppler scanning line, produce modulation, modulation amplitude is directly proportional with the size of surface imperfection.The data processing and control system calculates the physical dimension data of ceramic product surface imperfection through extracting this modulation signal amplitude.
The present technique invention compared with prior art; Its significant advantage is: (1) adopts high coherence's laser to carry out the ceramic product probing surface as the detectable signal source; Utilize coherent detection to extract the modulation of the defect sturcture on ceramic product surface to echoed signal Doppler, detection resolution can improve greatly.(2) adopt the coherent detection means, reduce background signal greatly and disturb, improved system and surveyed signal to noise ratio (S/N ratio) and sensitivity.(3) optical system of going the same way is received and dispatched in employing, offers convenience for in-plant ceramic product surface defect detection.(4) adopt the polarization beam splitting collect means, eliminated the polarization change effect of different ceramic surfaces laser signal.(5) device adopts all solid state laser and optical fibre device, and system architecture is simple, and reliability is high, and volume and energy consumption are less, have the convenient in application flexible characteristic.
Description of drawings
Fig. 1 is the structured flowchart of this device.
Embodiment
In Fig. 1, single-frequency laser 1 is connected with fiber coupler A2, and fiber coupler A2 is connected with circulator 3, and circulator 3 one ends are connected with transmitting-receiving telescope 4, and the other end is connected with polarization beam apparatus B8.Fiber coupler A2 is connected with frequency shifter 6, and frequency shifter 6 is connected with polarization beam apparatus A7.Scan module 5 is connected with transmitting-receiving telescope 4, and data processing and control system 14 is connected with scan module 5.Polarization beam apparatus A7 is connected with fiber coupler B9, fiber coupler C10 respectively, and polarization beam apparatus B8 is connected with fiber coupler B9, fiber coupler C10 respectively.Fiber coupler B9 is connected with photodetector A11, and fiber coupler C10 is connected with photodetector B12.Photodetector A11, photodetector B12 amplify employing circuit 13 with filtering and are connected, and filtering is amplified employing circuit 13 and is connected with data processing and control system 14.
Particularly, produce the single-frequency continuous laser by single-frequency laser 1, be divided into two-way through fiber coupler 2, the one tunnel as detectable signal light, and input circulator 3, a tunnel is imported frequency shifter 6 as intrinsic light.Circulator 3 is input to transmitting-receiving telescope 4 with detectable signal light, and the 14 control motor scannings of data processing and control system drive transmitting-receiving telescope 4 by scan module 5, and ceramic surface is carried out detection scanning.The return laser beam light that ceramic surface produces gets into polarization beam apparatus B8 through circulator 3 after being received by transmitting-receiving telescope 4, echo light is divided into the two-way polarized light signal of quadrature by polarization beam apparatus B8.Simultaneously, after 6 pairs of intrinsic light signals of frequency shifter carry out shift frequency, get into polarization beam apparatus A7, intrinsic light is divided into the two-way polarized light signal of quadrature.Polarization beam apparatus A7 and polarization beam apparatus B8 will output to photodetector A11, photodetector B12 surface respectively more respectively with the polarized light signal input optical fibre coupling mechanism B9 and the fiber coupler C10 of correspondence, realize that the mixing of echo light and intrinsic light is relevant.The relevant electric signal of photodetector A11, photodetector B12 output amplifies employing circuit 13 with filtering and is connected; After signal carried out filtering amplification and data acquisition; Be input in the data processing and control system 14, obtain laser echo signal data with the corresponding ceramic surface of scanning sequence.
Since scan module by the data processing and control system according to the special style uniform speed scanning; The location changes continuously between corresponding ceramic product surface and the detector; The Doppler frequency of consequent laser echo signal changes, but exists under the situation of defective at ceramic surface, and the micro-structure reacting condition on surface is in echoed signal; Will on the Doppler scanning line, produce modulation, modulation amplitude is directly proportional with the size of surface imperfection.The data processing and control system calculates the physical dimension data of ceramic product surface imperfection through extracting this modulation signal amplitude.

Claims (5)

1. ceramic product surface imperfection coherent detection of laser light device; It is characterized in that: single-frequency laser is connected with circulator through fiber coupler A; Circulator one end is connected with the transmitting-receiving telescope, and the other end is connected with polarization beam apparatus B input end, and polarization beam apparatus B output terminal is connected with the input end of fiber coupler B, C respectively; The transmitting-receiving telescope is connected with scan module; Another road output of fiber coupler A is connected with the frequency shifter input end, and the frequency shifter output terminal is connected with polarization beam apparatus A input end, and polarization beam apparatus A output terminal is connected with the input end of fiber coupler B, C respectively; The output of optical fiber coupling B is connected with photodetector A input section; The output of optical fiber coupling C is connected with photodetector B input section, and the output terminal of photodetector A, B amplifies the sample circuit input end with filtering and is connected, and amplifies sample circuit with filtering and is connected with the data processing and control system.
2. a kind of ceramic product surface imperfection coherent detection of laser light device according to claim 1, it is characterized in that: described single-frequency laser is fiber laser or semiconductor laser.
3. a kind of ceramic product surface imperfection coherent detection of laser light device according to claim 1, it is characterized in that: described photodetector is avalanche diode or PIN diode.
4. a kind of ceramic product surface imperfection coherent detection of laser light device according to claim 1, it is characterized in that: described photodetector is avalanche diode or PIN diode.
5. a kind of ceramic product surface imperfection coherent detection of laser light device according to claim 1, it is characterized in that: described frequency shifter is acousto-optic frequency shifters or electric light frequency shifter.
CN2011100872177A 2011-04-08 2011-04-08 Laser coherence detection device for ceramic product surface defect Pending CN102455301A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749884A (en) * 2012-07-03 2012-10-24 山东理工大学 Light transmission scanning-detecting controlling method for ceramic antenna cover
CN107421954A (en) * 2017-08-03 2017-12-01 合肥祥国电子商务有限公司 A kind of ceramic gift comes to the surface quality detecting system
CN108955857A (en) * 2018-06-29 2018-12-07 余姚舜宇智能光学技术有限公司 A kind of difference interference light channel structure and laser vibration measurer based on optical fiber

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JPH05118954A (en) * 1991-10-25 1993-05-14 Nippon Telegr & Teleph Corp <Ntt> Device for measuring reflection in optical frequency area
CN1448697A (en) * 2002-04-03 2003-10-15 中国科学技术大学 Self-injection locking fibre-optical laser circulator
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CN101144729A (en) * 2007-09-30 2008-03-19 南京大学 Brillouin optical time domain reflection measuring method based on quick fourier transform
CN101776760A (en) * 2010-02-09 2010-07-14 中国科学院上海技术物理研究所 Laser three-dimensional imaging device based on single-photon detector
CN102004255A (en) * 2010-09-17 2011-04-06 中国科学院上海技术物理研究所 Chirp amplitude laser infrared radar distance-Doppler zero-difference detection system
CN202166615U (en) * 2011-04-08 2012-03-14 安徽农业大学 Laser coherent detection device for surface blemishes of ceramic products

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05118954A (en) * 1991-10-25 1993-05-14 Nippon Telegr & Teleph Corp <Ntt> Device for measuring reflection in optical frequency area
CN1448697A (en) * 2002-04-03 2003-10-15 中国科学技术大学 Self-injection locking fibre-optical laser circulator
CN101082671A (en) * 2007-06-27 2007-12-05 中国科学院上海光学精密机械研究所 Method and device for detecting underwater acoustic signal by coherent laser remote sensing
CN101144729A (en) * 2007-09-30 2008-03-19 南京大学 Brillouin optical time domain reflection measuring method based on quick fourier transform
CN101776760A (en) * 2010-02-09 2010-07-14 中国科学院上海技术物理研究所 Laser three-dimensional imaging device based on single-photon detector
CN102004255A (en) * 2010-09-17 2011-04-06 中国科学院上海技术物理研究所 Chirp amplitude laser infrared radar distance-Doppler zero-difference detection system
CN202166615U (en) * 2011-04-08 2012-03-14 安徽农业大学 Laser coherent detection device for surface blemishes of ceramic products

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749884A (en) * 2012-07-03 2012-10-24 山东理工大学 Light transmission scanning-detecting controlling method for ceramic antenna cover
CN107421954A (en) * 2017-08-03 2017-12-01 合肥祥国电子商务有限公司 A kind of ceramic gift comes to the surface quality detecting system
CN108955857A (en) * 2018-06-29 2018-12-07 余姚舜宇智能光学技术有限公司 A kind of difference interference light channel structure and laser vibration measurer based on optical fiber
CN108955857B (en) * 2018-06-29 2024-03-26 余姚舜宇智能光学技术有限公司 Heterodyne interference light path structure and laser vibration meter based on optical fiber

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Application publication date: 20120516