CN102446686A - Two-channel fast aerating air channel - Google Patents
Two-channel fast aerating air channel Download PDFInfo
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- CN102446686A CN102446686A CN2010105140556A CN201010514055A CN102446686A CN 102446686 A CN102446686 A CN 102446686A CN 2010105140556 A CN2010105140556 A CN 2010105140556A CN 201010514055 A CN201010514055 A CN 201010514055A CN 102446686 A CN102446686 A CN 102446686A
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- valve
- gas circuit
- diaphragm valve
- ultra
- pure
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Abstract
The invention relates to a two-channel fast aerating air channel which comprises a reducing valve (1), an air filter (2), a throttling valve (3), an ultra-pure diaphragm valve (4) and a high flow capacity diaphragm valve (5), wherein the reducing valve (1) is connected with the beginning end of the air channel and the air filter (2); the air channel behind the air filter (2) is divided into two branch channels; the throttling valve (3) and the ultra-pure diaphragm valve (4) are connected with the one branch channel; the high flow capacity diaphragm valve (5) is connected with the other one branch channel; and then the two branch channels are combined into one air channel. Different aerating speeds are realized by controlling switches of the ultra-pure diaphragm valve (4) and the high flow capacity diaphragm valve (5), thereby meeting the inflating requirements under different conditions.
Description
Technical field
The present invention relates to a kind of binary channels fast aeration gas circuit, be applied to the vacuum gas filling of ion implantor, belong to field of manufacturing semiconductor devices.
Background technology
In ion implantation technology, production capacity has become an important indicator.Concerning ion implantor, because wafer will carry out the valut inflation before leaving valut, so the vacuum state of valut also just becomes a factor that influences production capacity to the atmospheric condition conversion speed.Binary channels fast aeration gas circuit is equipped with two kinds of diaphragm valves, can inflate the target cavity with friction speed.According to mission requirements, only need the diaphragm valve in control two gas circuits just can control, thereby satisfy the various index requests of equipment aeration speed.
Summary of the invention
The present invention disclose a kind of simply, binary channels fast aeration gas circuit efficiently.Realize through following technical approach:
A kind of binary channels fast aeration gas circuit comprises: pressure-reducing valve (1); Pneumatic filter (2); Choke valve (3); Ultra-pure diaphragm valve (4); High flow capacity diaphragm valve (5).Described pressure-reducing valve (1) is connected the gas circuit initiating terminal; Be connected with pneumatic filter (2); Gas circuit behind the gas pneumatic filter (2) is divided two branch roads; Described choke valve (3) and ultra-pure diaphragm valve (4) are connected a branch, and described high flow capacity diaphragm valve (5) is connected another branch, and so to remerge be a gas circuit to latter two branch road.Through controlling the switch of ultra-pure diaphragm valve (4) and high flow capacity diaphragm valve (5), realize different aeration speeds, thereby satisfy the inflation requirement of different situations.
When needs low speed is inflated, open ultra-pure diaphragm valve (4), the charge air conditioning flow is regulated through choke valve (3); In the time of need inflating at a high speed, open high flow capacity diaphragm valve (5), the charge air conditioning flow is regulated the blowing pressure control through pressure-reducing valve (1), and two branch roads are at the port of export and be one the tunnel.
Description of drawings
Description of drawings embodiment of the present invention.In the drawings, identical Reference numeral is represented identical parts.
Fig. 1 is the principle schematic of one embodiment of the present invention.
Fig. 2 is one embodiment of the present invention gas circuit assembly sketch map
Embodiment:
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further introduction, but not as the qualification to patent of the present invention.
Fig. 2 is a gas circuit assembly sketch map, and parts comprise: pressure-reducing valve (6), pneumatic filter (7), choke valve (8), ultra-pure diaphragm valve (9), high flow rate diaphragm valve (10), cavity inflation inlet (11), adapter (12), cutting ferrule are taken over (13)
Said pressure-reducing valve (6), air inlet termination high-pressure air source, the outlet side uses adapter (12) and cutting ferrule adapter (13) to link to each other.
Said cutting ferrule is taken over (13) other termination pneumatic filter (7) and is linked to each other, and pneumatic filter (7) gas outlet is divided into two gas circuits.
Said ultra-pure diaphragm valve (9) and choke valve (8) are installed in same the gas circuit, and other one gas circuit is installed high flow rate diaphragm valve (10).
Said ultra-pure diaphragm valve (9) gas outlet links to each other with cavity inflation inlet (11) with high flow rate diaphragm valve (10) gas outlet.
Said ultra-pure diaphragm valve (9) is used for the inflation of vacuum cavity low speed, and when system was in the low speed inflated condition, ultra-pure diaphragm valve (9) was opened, and high flow rate diaphragm valve (10) closes.
Said high flow rate diaphragm valve (10) is used for the inflation of vacuum cavity high speed, and when system was in the high speed inflated condition, ultra-pure diaphragm valve (9) closed, and high flow rate diaphragm valve (10) is opened.
Said high flow rate diaphragm valve (9) and ultra-pure diaphragm valve (10) reach maximum aeration speed simultaneously.
The above elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities.
Claims (4)
1. a binary channels fast aeration gas circuit comprises: pressure-reducing valve (1); Pneumatic filter (2); Choke valve (3); Ultra-pure diaphragm valve (4); High flow capacity diaphragm valve (5).Described pressure-reducing valve (1) is connected the gas circuit initiating terminal; Be connected with pneumatic filter (2); Gas circuit behind the gas pneumatic filter (2) is divided two branch roads; Described choke valve (3) and ultra-pure diaphragm valve (4) are connected a branch, and described high flow capacity diaphragm valve (5) is connected another branch, and so to remerge be a gas circuit to latter two branch road.
2. claim 1 described a kind of binary channels fast aeration gas circuit, it is characterized in that: the gas circuit inlet end is equipped with pressure-reducing valve (1) and pneumatic filter (2), and the pressure of scalable inflation keeps the pure of gas; Utilize two-way that the gas circuit control aeration speed of different diaphragm valves is housed.
3. claim 1 described a kind of binary channels fast aeration gas circuit; It is characterized in that: have two branch roads in the gas circuit; Wherein a branch road is equipped with choke valve (3), through the switch control aeration speed of ultra-pure diaphragm valve (4) in the control branch road and high flow capacity diaphragm valve (5).
4. claim 1 described a kind of binary channels fast aeration gas circuit, it is characterized in that: pressure-reducing valve in the gas circuit (1) is equipped with pneumatic filter (2) afterwards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105140556A CN102446686A (en) | 2010-10-13 | 2010-10-13 | Two-channel fast aerating air channel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105140556A CN102446686A (en) | 2010-10-13 | 2010-10-13 | Two-channel fast aerating air channel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102446686A true CN102446686A (en) | 2012-05-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105140556A Pending CN102446686A (en) | 2010-10-13 | 2010-10-13 | Two-channel fast aerating air channel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102446686A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103790885A (en) * | 2014-02-14 | 2014-05-14 | 哈尔滨工业大学 | Gas circuit structure with inflating and deflating speed controllable |
| CN113916464A (en) * | 2021-09-30 | 2022-01-11 | 广东利元亨智能装备股份有限公司 | Method for detecting gas leakage of electric pile, method for detecting external leakage and method for detecting gas tightness of electric pile |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851861A (en) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | Vacuum chamber gas-filling system |
| CN1873919A (en) * | 2006-04-24 | 2006-12-06 | 北京中科信电子装备有限公司 | Air supply system of shower in water cold plasma |
| US7189980B2 (en) * | 2003-05-09 | 2007-03-13 | Varian Semiconductor Equipment Associates, Inc. | Methods and systems for optimizing ion implantation uniformity control |
| CN101466445A (en) * | 2006-06-12 | 2009-06-24 | 山米奎普公司 | Vapor delivery to devices under vacuum |
-
2010
- 2010-10-13 CN CN2010105140556A patent/CN102446686A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7189980B2 (en) * | 2003-05-09 | 2007-03-13 | Varian Semiconductor Equipment Associates, Inc. | Methods and systems for optimizing ion implantation uniformity control |
| CN1851861A (en) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | Vacuum chamber gas-filling system |
| CN1873919A (en) * | 2006-04-24 | 2006-12-06 | 北京中科信电子装备有限公司 | Air supply system of shower in water cold plasma |
| CN101466445A (en) * | 2006-06-12 | 2009-06-24 | 山米奎普公司 | Vapor delivery to devices under vacuum |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103790885A (en) * | 2014-02-14 | 2014-05-14 | 哈尔滨工业大学 | Gas circuit structure with inflating and deflating speed controllable |
| CN113916464A (en) * | 2021-09-30 | 2022-01-11 | 广东利元亨智能装备股份有限公司 | Method for detecting gas leakage of electric pile, method for detecting external leakage and method for detecting gas tightness of electric pile |
| CN113916464B (en) * | 2021-09-30 | 2023-11-17 | 广东利元亨智能装备股份有限公司 | Pile gas leakage detection method and airtight detection method thereof |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120509 |