CN102445152A - Nano displacement measuring sensor - Google Patents
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- CN102445152A CN102445152A CN2011102753882A CN201110275388A CN102445152A CN 102445152 A CN102445152 A CN 102445152A CN 2011102753882 A CN2011102753882 A CN 2011102753882A CN 201110275388 A CN201110275388 A CN 201110275388A CN 102445152 A CN102445152 A CN 102445152A
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Abstract
The invention relate to the technical field of nano metering, in particular to a sensing device. The nano displacement measuring sensor comprises a laser, an optical prism, a grating, a photoelectric detector, a signal processing circuit and a microprocessor system, wherein the optical prism comprises a reflecting mirror, a first rectangular prism, a second rectangular prism, a first quarter wave plate, a second quarter wave plate, an unpolarized dispersion prism, a first polarized dispersion prism and a second polarized dispersion prism; and the photoelectric detector comprises a first photoelectric detector and a second photoelectric detector. In the invention, a nano measuring optical path is established based on diffraction grating by using a micro nano metering system of a semiconductor laser light source, the influence of an environmental light source is lowered to minimum extent by using nano measuring optical path, and the tolerance of grating deflection is increased, so that the influence of a grating movement straightness error is restrained, a compact and small optical path structure is realized, the optical length of the measuring optical path is shortened, and the environmental disturbance resistance of the system is improved.
Description
Technical field
The present invention relates to the nanometer field of measuring techniques, be specifically related to a kind of displacement measurement sensing device.
Background technology
(1nm～100nm) technology is an important branch of nano science to nano measurement.Sub-micron has become the problem that presses for solution in current industrial development and the scientific development to the measurement of nano-precision.
Existing high-precision laser interferometer becomes the instrument of the widespread use of present nanometer accuracy measurement; But the most volume of these measuring equipments is bigger, takies bigger space in the use, is unfavorable for measure practice; Be difficult to realize exquisite integrated with pick-up unit; Do not meet the theory of modern precision mechanical precision design, and interfere measurement technique receives the influence of measurement environment easily, adjustment process is comparatively loaded down with trivial details during use.
Simultaneously, along with the continuous progress of grating process technology, nanometer grating becomes the developing direction of delicate metering grating, and the grating measuring method of stable accuracy and widespread use can be realized the measurement of nano-precision.Optical grating measuring system resolution has reached nanoscale at present, and measurement performance can match in excellence or beauty with laser interferometer basically, and optical grating measuring system has the adaptability stronger than laser interferometer in practical application.
Therefore, develop the grating interference survey sensor of miniature nano-precision, for the development of nanosecond science and technology at present provides necessary exquisite measurement mechanism, the nano measurement basic theory wherein and the research of practical approach also are the common problems that the nanosecond science and technology development needs to be resolved hurrily.
Summary of the invention
The objective of the invention is to, a kind of surface nanometer-displacement sensor is provided, solve above technical matters.
The technical matters that the present invention solved can adopt following technical scheme to realize:
The surface nanometer-displacement sensor; Comprise the laser instrument, optical prism, grating, photodetector, signal processing circuit, the microprocessor system that are used to produce laser beam; It is characterized in that said optical prism comprises catoptron, first right-angle prism, second right-angle prism, first quarter-wave plate, second quarter-wave plate, unpolarized Amici prism, first polarization splitting prism, second polarization splitting prism;
Said photodetector comprises first photodetector, second photodetector, and said first photodetector, said second photodetector connect said signal processing circuit respectively, and said signal processing circuit connects said microprocessor system;
Light-emitting window the place ahead of said laser instrument is provided with said catoptron, and the laser beam that said catoptron produces said laser instrument reflexes on any of said grating, produces diffraction for the first time;
Diffracted beam is two bundles, is respectively+1 order diffraction light ,-1 order diffraction light, and said+1 order diffraction light is injected in the inclined-plane of said first right-angle prism, after total reflection is carried out in the said first right-angle prism inside, gets back on another aspect of said grating; Said-1 order diffraction light is injected in the inclined-plane of said second right-angle prism through said first quarter-wave plate;, the said second right-angle prism inside gets back to after carrying out total reflection on another aspect of said grating; The diffracted beam of said first right-angle prism and the reflection of said second right-angle prism is positioned on the same point of grating, produces diffraction for the second time;
Two-beam behind said grating produces second time diffraction is divided into two-beam through said unpolarized Amici prism; A branch of light is injected said first photodetector through said first polarization splitting prism, and another Shu Guang injects said second polarization splitting prism through said second quarter-wave plate, and then injects said second photodetector;
After the sine wave signal that said first photodetector, said second photodetector receive is handled through said signal processing circuit respectively, send to said microprocessor system, analyze through said microprocessor system.
Sensing principle of the present invention is following: the laser beam that laser instrument produces can produce the secondary diffraction on grating under the effect of optical prism.When grating produces for the first time diffraction because-1 order diffraction light beam is shifted to 90 ° by quarter-wave plate, so when getting back at second with 90 ° of the phasic differences mutually of+1 order diffraction light beam, can't produce interference.Two-beam behind the grating diffraction second time is divided into two bundles through unpolarized Amici prism; Again behind polarization splitting prism; Make the polarization direction rotate respectively+45 ° with-45 °; Thereby+1 grade has identical polarization direction with-1 order diffraction light beam, and produces and interfere, and is received by the photodetector in polarization splitting prism the place ahead.When grating relative light electric explorer does relative motion; Two-way has the output terminal output of the modulation signal of 180 ° of phase shifts at two polarization splitting prisms; Offset DC component through the backlight battery, thereby obtain the sine wave signal of 90 ° of symmetries of two-way phase differential at output terminal.The sine wave signal that photodetector receives is used for follow-up microprocessor system and is used for grating signal and handles and sub-circuit, and signal is carried out shaping counting and Subdividing Processing.
The present invention adopts the light path basic structure of secondary diffraction, has reduced the linearity requirement to tested motion to a certain extent.The utilization right-angle prism is realized the turnover of light path, and on this basis light path is optimized.Improvement is based on diffraction grating, and the nanosensor device of semiconductor laser light resource has made up the nano measurement light path that is easy to regulate compact.This measurement sensing device is easy to the adjustment location, and is lower to the relative laser interferometer of requirement on measurement environment, and can realize the micro mation system structure, and this measurement sensing device output pulse signal can be used for realizing the real-time closed-loop drive controlling to the planimetric position simultaneously.
The light-emitting window of said laser instrument left side is provided with said catoptron, and the reflecting surface of said catoptron is positioned at the right side, and the setting that is tilted to the right of said catoptron, and the below of said catoptron is provided with said grating, and the left side of said grating is provided with said first right-angle prism; The right side of said grating is provided with said second right-angle prism, and incidence surface the place ahead of said second right-angle prism is provided with first quarter-wave plate; Said first right-angle prism, said second right-angle prism are oppositely arranged, and hypotenuse is all towards said grating;
Said grating top is provided with said unpolarized Amici prism, and said unpolarized Amici prism is arranged on the left side of said catoptron; Said unpolarized Amici prism top is provided with said first polarization splitting prism, and the left side of said first polarization splitting prism is provided with said first photodetector; The right side of said unpolarized Amici prism is provided with said second quarter-wave plate, and the right side of said second quarter-wave plate is provided with second polarization splitting prism, and the right side of second polarization splitting prism is provided with second photodetector.
Consider the homogeneity and the periodicity of grating workplace, said grating preferably adopts holographic grating.Adopt holographic grating, the output orthogonal signal is higher than normal optical gate signal frequency, and signal does not exist drift, quadrature error and random disturbance.
Said laser instrument can adopt distributed feedback type semiconductor laser.The distributed feed-back formula has no mode hopping, the less advantage of output wavelength temperature varying coefficient.
Said laser instrument also can adopt quantum well formula semiconductor laser.So that reduce volume of the present invention.
Said microprocessor system adopts the microprocessor system based on CPLD (CPLD) framework, and said microprocessor system connects a display device.
The signal output part of said microprocessor system connects a pulse output end mouth so that in application to the control of outside driver part.
The signal that said microprocessor system sends said display device to is the chart signal, and said display device shows that chart is as displacement measurement.
Said signal processing circuit preferably adopts drift to suppress circuit, and carries out reducing based on microprocessor system software steady zero drift of grating signal.
When the signal that said microprocessor system transmits said signal processing circuit is analyzed, adopt the mode that signal is carried out shaping counting and Subdividing Processing to carry out signal Processing;
In Subdividing Processing, adopt phase place to segment: to be divided by sin and cos two-way orthogonal signal through amplitude and to try to achieve tangent value; Adopt positive cotangent linearity part preferably; Realize the high power segmentation through the anti-phase place of asking of tangent value, eliminated of the influence of orthogonal signal magnitude subdivision accuracy.
Beneficial effect: owing to adopted technique scheme, polarization light path design of the present invention reduces to minimum with the factor of environmental impact light source, and zeroth order diffraction light turns to the unlikely laser head of getting back to via polar biased; Secondary optical diffraction design, but the beat corner when the self-compensating grating moves improve the tolerance of grating beat greatly, suppress the influence of grating motion straightness error to measuring-signal; Integrated light path design reduces the volume of whole gauge head, realizes the light channel structure of compact, has shortened the light path of measuring light path, has improved the ability of the anti-environmental disturbances of system.
Description of drawings
Fig. 1 is a light channel structure synoptic diagram of the present invention.
Embodiment
For technological means, creation characteristic that the present invention is realized, reach purpose and effect and be easy to understand and understand, further set forth the present invention below in conjunction with concrete diagram.
With reference to Fig. 1; The surface nanometer-displacement sensor; Comprise the laser instrument 1, optical prism, grating 3, photodetector, signal processing circuit, the microprocessor system that are used to produce laser beam, optical prism comprises catoptron 21, first right-angle prism 22, second right-angle prism 12, first quarter-wave plate 13, second quarter-wave plate 23, unpolarized Amici prism 24, first polarization splitting prism 25, second polarization splitting prism 15.Photodetector comprises that first photodetector 42, second photodetector, 41, the first photodetectors 42, second photodetector 41 connect signal processing circuit respectively, and signal processing circuit connects the microprocessor system.
Light-emitting window the place ahead of laser instrument 1 is provided with catoptron 21, and catoptron 21 reflexes to the laser beam that laser instrument 1 produces on the O1 point of grating 3, produces diffraction for the first time.Diffracted beam is two bundles, is respectively+1 order diffraction light ,-1 order diffraction light, and+1 order diffraction light is injected in the inclined-plane of first right-angle prism 22, after total reflection is carried out in first right-angle prism, 22 inside, gets back on the O2 point of grating 3.-1 order diffraction light is injected in the inclined-plane of second right-angle prism 12 through first quarter-wave plate 13;, second right-angle prism, 12 inside get back to after carrying out total reflection on the O2 point of grating 3; The diffracted beam of first right- angle prism 22 and 12 reflections of second right-angle prism is positioned on the same point O2 point of grating 3, produces diffraction for the second time.
Two-beam behind grating 3 produces second time diffraction is divided into two-beam through unpolarized Amici prism 24.A branch of light is injected first photodetector 42 through first polarization splitting prism 25, and another Shu Guang injects second polarization splitting prism 15 through second quarter-wave plate 23, and then injects second photodetector 41.The sine wave signal that first photodetector 42, second photodetector 41 receive sends to the microprocessor system after handling through signal processing circuit respectively, and system analyzes through microprocessor.
Sensing principle of the present invention is following: the laser beam that laser instrument 1 produces can produce the secondary diffraction on grating 3 under the effect of optical prism.When grating 3 produces for the first time diffraction because-1 order diffraction light beam is shifted to 90 ° by quarter-wave plate, so when getting back at second with 90 ° of the phasic differences mutually of+1 order diffraction light beam, can't produce interference.Two-beam behind grating diffraction 3 second time is divided into two bundles through unpolarized Amici prism 24; Again behind polarization splitting prism; Make the polarization direction rotate respectively+45 ° with-45 °; Thereby+1 grade has identical polarization direction with-1 order diffraction light beam, and produces and interfere, and is received by the photodetector in polarization splitting prism the place ahead.When grating 3 relative light electric explorers do relative motion; Two-way has the output terminal output of the modulation signal of 180 ° of phase shifts at two polarization splitting prisms; Offset DC component through the backlight battery, thereby obtain the sine wave signal of 90 ° of symmetries of two-way phase differential at output terminal.The sine wave signal that photodetector receives is used for follow-up microprocessor system and is used for grating 3 signal Processing and sub-circuit, and signal is carried out shaping counting and Subdividing Processing.
The present invention adopts the light path basic structure of secondary diffraction, has reduced the linearity requirement to tested motion to a certain extent.The utilization right-angle prism is realized the turnover of light path, and on this basis light path is optimized.Improvement is based on diffraction grating 3, and the nanosensor device of semiconductor laser light resource has made up the nano measurement light path that is easy to regulate compact.This measurement sensing device is easy to the adjustment location, and is lower to the relative laser interferometer of requirement on measurement environment, and can realize the micro mation system structure, and this measurement sensing device output pulse signal can be used for realizing the real-time closed-loop drive controlling to the planimetric position simultaneously.
The left side of laser instrument 1 is provided with catoptron 21, and the reflecting surface of catoptron 21 is positioned at the right side, and catoptron 21 setting that is tilted to the right, and the below of catoptron 21 is provided with grating 3, and the left side of grating 3 is provided with first right-angle prism 22.Incidence surface the place ahead that the right side of grating 3 is provided with second right-angle prism, 12, the second right-angle prisms 12 is provided with first quarter-wave plate 13.First right-angle prism 22, second right-angle prism 12 are oppositely arranged, and hypotenuse is all towards grating 3.Grating 3 tops are provided with unpolarized Amici prism 24, and unpolarized Amici prism 24 is arranged on the left side of catoptron 21.The left side that unpolarized Amici prism 24 tops are provided with first polarization splitting prism, 25, the first polarization splitting prisms 25 is provided with first photodetector 42.The right side that the right side that the right side of unpolarized Amici prism 24 is provided with second quarter-wave plate, 23, the second quarter-wave plates 23 is provided with second polarization splitting prism, 15, the second polarization splitting prisms 15 is provided with second photodetector 41.
Consider the homogeneity and the periodicity of grating 3 workplaces, the grating 3 preferred holographic gratings that adopt.Adopt holographic grating, the output orthogonal signal is higher than normal optical gate signal frequency, and less drift, quadrature error and the random disturbance of existing of signal.
The microprocessor system adopts the microprocessor system based on CPLD (CPLD) framework, and the microprocessor system connects a display device.The signal that the microprocessor system sends display device to is the chart signal, and display device shows that chart is as displacement measurement.The signal output part of microprocessor system can also connect a pulse output end mouth so that in application to the control of outside driver part.
Signal processing circuit preferably adopts drift to suppress circuit, and carries out reducing based on microprocessor system software steady zero drift of grating 3 signals.When the signal that the microprocessor system transmits signal processing circuit was analyzed, employing was carried out signal Processing to the mode that signal carries out shaping counting and Subdividing Processing.In Subdividing Processing, adopt phase place to segment: to be divided by sin and cos two-way orthogonal signal through amplitude and to try to achieve tangent value; Adopt positive cotangent linearity part preferably; Realize the high power segmentation through the anti-phase place of asking of tangent value, eliminated of the influence of orthogonal signal magnitude subdivision accuracy.During practical implementation, through computed in software compensation quadrature error to the microprocessor system; Beginning and the bigger random disturbance signal of latter end influence to signal adopt least square method that Li Sa is carried out match like circle, thereby eliminate the influence of random disturbance to subdivision accuracy as far as possible.
In above-mentioned light path, the major technology parameter of whole measuring system is:
Range of displacement measurement: 25mm;
Measuring repeatability :≤30nm;
Resolution :≤10nm;
Measuring speed:＜50mm/sec;
Overall appearance size X * Y * Z (mm): 30 * 30 * 12.
The light intensity that photodetector detects is:
I
PD1∝A
2+B
2+2AB?sin2Δωt
I
PD2∝A
2+B
2+2AB?cos?2Δωt (1)
Wherein A, B are respectively the amplitude of left and right smooth arm.Can be known that by the Doppler shift principle Doppler shift of grating is directly proportional with speed v and the order of diffraction time m that grating moves, 3 constant d are inversely proportional to grating, that is: Δ ω=m (v/d).If adopt the light path of secondary diffraction, the frequency displacement of its symmetry ± 1 order diffraction light is:
The phase differential that can get interference fringe thus is:
When grating 3 moved 1/4th pitch, stripe signal had the phase change of one-period (2 π), and second photodetector 41, first photodetector 42 have orthogonality, utilized the appropriate signals disposal route can calculate the actual displacement amount.The native system employing cycle is about the one-dimensional grating of 0.8 μ m (1200l/mm), and then grating 3 whenever moves about 0.2um orthogonal signal variation one-period.Utilize subdivide technology can the displacement of grating 3 be resolved to the nm grade.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; The present invention is not restricted to the described embodiments; That describes in the foregoing description and the instructions just explains principle of the present invention; Under the prerequisite that does not break away from spirit and scope of the invention, the present invention also has various changes and modifications, and these variations and improvement all fall in the scope of the invention that requires protection.The present invention requires protection domain to be defined by appending claims and equivalent thereof.
Claims (9)
1. surface nanometer-displacement sensor; Comprise the laser instrument, optical prism, grating, photodetector, signal processing circuit, the microprocessor system that are used to produce laser beam; It is characterized in that said optical prism comprises catoptron, first right-angle prism, second right-angle prism, first quarter-wave plate, second quarter-wave plate, unpolarized Amici prism, first polarization splitting prism, second polarization splitting prism;
Said photodetector comprises first photodetector, second photodetector, and said first photodetector, said second photodetector connect said signal processing circuit respectively, and said signal processing circuit connects said microprocessor system;
Light-emitting window the place ahead of said laser instrument is provided with said catoptron, and the laser beam that said catoptron produces said laser instrument reflexes on any of said grating, produces diffraction for the first time;
Diffracted beam is two bundles, is respectively+1 order diffraction light ,-1 order diffraction light, and said+1 order diffraction light is injected in the inclined-plane of said first right-angle prism, after total reflection is carried out in the said first right-angle prism inside, gets back on another aspect of said grating; Said-1 order diffraction light is injected in the inclined-plane of said second right-angle prism through said first quarter-wave plate;, the said second right-angle prism inside gets back to after carrying out total reflection on another aspect of said grating; The diffracted beam of said first right-angle prism and the reflection of said second right-angle prism is positioned on the same point of grating, produces diffraction for the second time;
Two-beam behind said grating produces second time diffraction is divided into two-beam through said unpolarized Amici prism; A branch of light is injected said first photodetector through said first polarization splitting prism, and another Shu Guang injects said second polarization splitting prism through said second quarter-wave plate, and then injects said second photodetector;
After the sine wave signal that said first photodetector, said second photodetector receive is handled through said signal processing circuit respectively, send to said microprocessor system, analyze through said microprocessor system.
2. surface nanometer-displacement sensor according to claim 1; It is characterized in that: the light-emitting window left side of said laser instrument is provided with said catoptron; The reflecting surface of said catoptron is positioned at the right side; And the setting that is tilted to the right of said catoptron, the below of said catoptron is provided with said grating, and the left side of said grating is provided with said first right-angle prism; The right side of said grating is provided with said second right-angle prism, and incidence surface the place ahead of said second right-angle prism is provided with first quarter-wave plate; Said first right-angle prism, said second right-angle prism are oppositely arranged, and hypotenuse is all towards said grating;
Said grating top is provided with said unpolarized Amici prism, and said unpolarized Amici prism is arranged on the left side of said catoptron; Said unpolarized Amici prism top is provided with said first polarization splitting prism, and the left side of said first polarization splitting prism is provided with said first photodetector; The right side of said unpolarized Amici prism is provided with said second quarter-wave plate, and the right side of said second quarter-wave plate is provided with second polarization splitting prism, and the right side of second polarization splitting prism is provided with second photodetector.
3. surface nanometer-displacement sensor according to claim 1 and 2 is characterized in that: consider the homogeneity and the periodicity of grating workplace, said grating adopts holographic grating.
4. surface nanometer-displacement sensor according to claim 1 and 2 is characterized in that: said laser instrument adopts distributed feedback type semiconductor laser.
5. surface nanometer-displacement sensor according to claim 1 and 2 is characterized in that: said laser instrument adopts quantum well formula semiconductor laser.
6. surface nanometer-displacement sensor according to claim 1 is characterized in that: said microprocessor system adopts the microprocessor system based on the CPLD framework, and said microprocessor system connects a display device.
7. according to claim 1 or 6 described surface nanometer-displacement sensors, it is characterized in that: the signal output part of said microprocessor system connects a pulse output end mouth so that in application to the control of outside driver part.
8. surface nanometer-displacement sensor according to claim 6 is characterized in that: said signal processing circuit adopts drift to suppress circuit, and carries out reducing based on microprocessor system software steady zero drift of grating signal.
9. surface nanometer-displacement sensor according to claim 8; It is characterized in that: when the signal that said microprocessor system transmits said signal processing circuit is analyzed, adopt the mode that signal is carried out shaping counting and Subdividing Processing to carry out signal Processing;
In Subdividing Processing, adopt phase place to segment: to be divided by the two-way orthogonal signal through amplitude and to try to achieve tangent value; Adopt positive cotangent linearity part preferably; Realize the high power segmentation through the anti-phase place of asking of tangent value, eliminate of the influence of orthogonal signal magnitude subdivision accuracy.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103673892A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Symmetric-type grating heterodyne interference secondary diffraction measuring device |
| CN104567682A (en) * | 2015-01-14 | 2015-04-29 | 天津大学 | Particle three-dimensional position nanoscale resolving power measuring method under liquid state environment |
| CN105004273A (en) * | 2015-06-29 | 2015-10-28 | 华中科技大学 | Laser interference displacement measuring system |
| CN106931887A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | Dual-frequency grating measurement apparatus |
| CN111207673A (en) * | 2020-01-17 | 2020-05-29 | 中北大学 | Displacement sensor based on isosceles triangle blazed grating structure |
| CN111207674A (en) * | 2020-01-17 | 2020-05-29 | 中北大学 | Displacement sensor based on multiple diffraction of single-layer grating |
| CN112747826A (en) * | 2020-12-07 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high spectral resolution far ultraviolet spectrometer based on diffraction-interference mixing |
| CN113465514A (en) * | 2021-06-28 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
| CN117168311A (en) * | 2023-11-02 | 2023-12-05 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional relative motion measuring and detecting system |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103673892A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Symmetric-type grating heterodyne interference secondary diffraction measuring device |
| CN103673892B (en) * | 2013-11-21 | 2016-03-30 | 清华大学 | A kind of symmetrical expression grating difference interference re-diffraction measurement mechanism |
| CN104567682A (en) * | 2015-01-14 | 2015-04-29 | 天津大学 | Particle three-dimensional position nanoscale resolving power measuring method under liquid state environment |
| CN104567682B (en) * | 2015-01-14 | 2017-08-08 | 天津大学 | Particulate three-dimensional position nanoscale resolution measurement method under liquid environment |
| CN105004273A (en) * | 2015-06-29 | 2015-10-28 | 华中科技大学 | Laser interference displacement measuring system |
| CN105004273B (en) * | 2015-06-29 | 2017-06-16 | 华中科技大学 | A kind of laser interferometer displacement measuring system |
| CN106931887A (en) * | 2015-12-30 | 2017-07-07 | 上海微电子装备有限公司 | Dual-frequency grating measurement apparatus |
| CN106931887B (en) * | 2015-12-30 | 2019-11-26 | 上海微电子装备（集团）股份有限公司 | Dual-frequency grating measuring device |
| CN111207673A (en) * | 2020-01-17 | 2020-05-29 | 中北大学 | Displacement sensor based on isosceles triangle blazed grating structure |
| CN111207674A (en) * | 2020-01-17 | 2020-05-29 | 中北大学 | Displacement sensor based on multiple diffraction of single-layer grating |
| CN111207674B (en) * | 2020-01-17 | 2021-08-24 | 中北大学 | Displacement sensor based on multiple diffraction of single-layer grating |
| CN112747826A (en) * | 2020-12-07 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high spectral resolution far ultraviolet spectrometer based on diffraction-interference mixing |
| CN113465514A (en) * | 2021-06-28 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
| CN113465514B (en) * | 2021-06-28 | 2022-08-16 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
| CN117168311A (en) * | 2023-11-02 | 2023-12-05 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional relative motion measuring and detecting system |
| CN117168311B (en) * | 2023-11-02 | 2024-01-26 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional relative motion measuring and monitoring system |
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Application publication date: 20120509 |