CN102445151B - Image measuring instrument and non-linear error correcting method and correcting plate thereof - Google Patents
Image measuring instrument and non-linear error correcting method and correcting plate thereof Download PDFInfo
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- CN102445151B CN102445151B CN201110305004.7A CN201110305004A CN102445151B CN 102445151 B CN102445151 B CN 102445151B CN 201110305004 A CN201110305004 A CN 201110305004A CN 102445151 B CN102445151 B CN 102445151B
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Abstract
The invention discloses an image measuring instrument and a non-linear error correcting method and a correcting plate thereof. The correcting plate is provided with a plurality of standard circles and a plurality of concentric circles which are arranged in the form of a matrix, wherein the plurality of concentric circles are divided into two groups; in a first group of concentric circles, a standard circle at a leftmost lowermost corner is taken as a standard; in a second group of concentric circles, a standard circle at a rightmost uppermost corner is taken as a standard; and the plurality of concentric circles are arranged at intervals on the basis of the standard circles. In the correcting plate provided by the invention, the coordinate of a circle center is selected by measuring in a point taking way instead of aligning the edges of a line, so that a point taking error caused by the width factor of the line is reduced. In the non-linear error correcting method for the image measuring instrument provided, twice non-linear error correction is performed on a workbench, and two non-linear error correcting values are averaged, so that the measuring accuracy is increased; and moreover, non-linear error correction is performed along longitudinal and transverse directions at the intervals of 10 millimeters in the measuring range of the workbench, so that mechanical errors are effectively eliminated or reduced.
Description
Technical field
The present invention relates to image measurer, be specifically related to image measurer and nonlinearity erron modification method thereof and correction plate.
Background technology
Image measurer, in production and assembling process, because the factor such as machine error and microscopical distortion can cause measuring error, therefore, in order to reduce measuring error, improving the measuring accuracy of image measurer, all can do nonlinearity erron correction.The process of the whole nonlinearity erron correction of existing image measurer adopts manual hand manipulation, a glass linear scale is put on the table, lines on glass linear scale are measured, again measurement result is input in image measuring system, then image measuring system does nonlinearity erron correction to measurement result.Concrete grammar utilizes a gauge to select a line to revise to X-axis and Y-axis respectively, utilized the mode of the justified margin image area cross curve of gauge strain line to get a little by image zoom.The mode of getting a little adopts the method at the edge of snap line, make because the strain line of gauge is photoetching corrosion, the line width that this technique makes has certain error, so precision is not high, and the process of whole nonlinear error compensation approximately needs just can complete for one hour, efficiency is low, also add the error that artificial factor produces.
Summary of the invention
Technical matters to be solved by this invention solves low, the inefficient problem of image measurer nonlinearity erron correction precision.
In order to solve the problems of the technologies described above, the technical solution adopted in the present invention is to provide a kind of non-linear error correcting plate of image measurer, described correction plate is provided with multiple standard round in matrix arrangements and multiple concentric circles, described multiple concentric circles is divided into two groups, first group of concentric circles with the standard round in the most lower left corner for benchmark, second group of concentric circles is with the standard round in the most upper right corner for benchmark, and described multiple concentric circles interval based on described standard round is arranged.
On the basis of above-mentioned correction plate technical scheme, it is the standard round of 0.5mm that described correction plate is provided with 5084 diameters, and described 5084 standard rounds are by 82 × 62 arranged in arrays and array pitch is 5mm; Described correction plate is also provided with 126 concentric circless, is eachly concentrically ringedly made up of 5 circles and diameter is descending is respectively 2.5mm, 2.0mm, 1.5mm, 1.0mm, 0.5mm, be eachly concentrically ringedly equipped with cross curve around; Described 126 concentric circless are divided into two groups of layouts, and first group of 63 concentric circles makes benchmark with the standard round in the most lower left corner, by 9 × 7 arranged in arrays and array pitch is 50mm; Second group of 63 concentric circles makes benchmark with the standard round in the most upper right corner, by 9 × 7 arranged in arrays and array pitch is 50mm.
Present invention also offers a kind of nonlinearity erron modification method of image measurer, it is characterized in that, adopt correction plate as claimed in claim 2 to revise, concrete steps are as follows:
A10, travelling table, the measurement update plate lower left corner the 1st row, the standard round of the 1st row, and using the relative origin of the central coordinate of circle of this circle as worktable;
A20, interlacing, standard round on leu time measurement update plate;
A30, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 1st nonlinearity erron correction;
A40, travelling table, the measurement update plate lower left corner the 2nd row, the standard round of the 2nd row, using the relative origin of the central coordinate of circle of this circle as worktable;
A50, interlacing, standard round on leu time measurement update plate;
A60, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 2nd nonlinearity erron correction;
A70, twice nonlinearity erron modified value is comprehensively average, final nonlinearity erron modified value is kept in the file of an encryption, in measurement afterwards, is automatically loaded into nonlinearity erron modified value.
In the above-mentioned methods, in steps A 10, the worktable of image measurer is first made first to look for the initial point of X/Y/Z axle, then microscope is automatically rotated to high magnification, travelling table again, allows the standard round in the most lower left corner of correction plate be positioned at the center of worktable, and makes auto-focusing.
In the above-mentioned methods, described steps A 20 comprises the following steps;
A201, be (0,0) to coordinate on correction plate successively along X-direction; (10,0); (20,0); (30,0) ... the circle of (400,0) is measured, and completes the measurement to correction plate the 1st row 41 standard rounds;
A202, be (0,10) to coordinate on correction plate successively along X-direction again; (10,10); (20,10); (30,10) ... the circle of (400,10) is measured, and completes the measurement to correction plate the 3rd row 41 standard rounds;
A203, according to this order respectively to the 5th row of correction plate; 7th row; 9th row ... to the 61st row, the often measurement of row 41 standard rounds, completing capable 1271 diameters of odd number on correction plate is the measurement of the circle of 0.5; On correction plate, the coordinate of the 61st row 41 standard rounds is (0,300) respectively; (10,300); (20,300); (30,300) ... (400,300).
In the above-mentioned methods, described steps A 50 comprises the following steps;
A501, be (5,5) to coordinate on correction plate successively along X-direction; (15,5); (25,5); (35,5) ... the standard round of (405,5) is measured, and completing correction plate the 2nd row 41 diameters is the measurement of the circle of 0.5;
A502, be (5,15) to coordinate on correction plate successively along X-direction again; (15,15); (25,15); (35,15) ... the standard round of (405,15) is measured, and completes the measurement to correction plate the 4th row 41 standard rounds;
A503, according to this order respectively to the 6th row of correction plate; Eighth row; 10th row ... to the 62nd row, the often measurement of row 41 standard rounds, completes the measurement to totally 1271 standard rounds of even numbers row on correction plate, obtains the center of circle surving coordinate value of 1271 circles, on correction plate, the 62nd row 41 diameters are the circle coordinates of 0.5 is (5,305) respectively; (15,305); (25,305); (35,305) ... (405,305).
Present invention also offers a kind of image measurer, comprise control system, described control system adopts above-mentioned modification method to carry out nonlinearity erron correction.
Correction plate provided by the invention, the mode of getting a little chooses central coordinate of circle by measurement, instead of the method at the edge of employing snap line, thus decreases because the width factor of line causes the error of getting limit (point).
The nonlinearity erron modification method of image measurer provided by the invention, does twice nonlinearity erron correction to worktable, by average for twice nonlinearity erron modified value, makes measurement data more stable, improves and measure measuring accuracy; In addition, carried out nonlinearity erron correction at interval of 10mm in length and breadth in the measurement range of worktable, effectively eliminate or reduced machine error.
Image measurer provided by the invention, is run automatically by controller, saves time, and increases work efficiency.
Accompanying drawing explanation
Fig. 1 is a kind of specific embodiment structural representation of correction plate provided by the invention;
Fig. 2 is the partial enlarged drawing in the lower left corner in Fig. 1;
Fig. 3 is the scheme of installation of correction plate.
Embodiment
The invention provides a kind of non-linear error correcting plate of image measurer, described correction plate is provided with multiple standard round in matrix arrangements and multiple concentric circles, described multiple concentric circles is divided into two groups, first group of concentric circles with the standard round in the most lower left corner for benchmark, second group of concentric circles is with the standard round in the most upper right corner for benchmark, and described multiple concentric circles interval based on described standard round is arranged.
Fig. 1 is a kind of specific embodiment structural representation of correction plate, and Fig. 2 is the partial enlarged drawing in the lower left corner in Fig. 1, is described in detail the present invention below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, it is the standard round of 0.5mm that correction plate is provided with 5084 diameters, described 5084 standard rounds are by 82 × 62 arranged in arrays and array pitch is 5mm, the home position of each standard round adopts horizontal, ordinate to represent, as (0,0) represents the standard round in the most lower left corner, (5,0) represent that the standard round that bottom 1 row (the 1st row) the 2nd arranges, (405,305) represent the standard round in the most upper right corner.Correction plate is also provided with 126 concentric circless, is eachly concentrically ringedly made up of 5 circles and diameter is descending is respectively 2.5mm, 2.0mm, 1.5mm, 1.0mm, 0.5mm, be eachly concentrically ringedly equipped with cross curve around; Described 126 concentric circless are divided into two groups of layouts, and first group of 63 concentric circles makes benchmark with the standard round (0,0) in the most lower left corner, by 9 × 7 arranged in arrays and array pitch is 50mm; Second group of 63 concentric circles makes benchmark with the standard round (405,305) in the most upper right corner, by 9 × 7 arranged in arrays and array pitch is 50mm.
Present invention also offers and a kind ofly utilize above-mentioned correction plate to carry out the method for nonlinearity erron correction to image measurer, comprise the following steps:
First make the worktable of image measurer first look for the initial point of X/Y/Z axle, then microscope is automatically rotated to high magnification, then travelling table, allow the standard round (0,0) in the most lower left corner of correction plate be positioned at the center of worktable, and auto-focusing.
A10, travelling table, the measurement update plate lower left corner the 1st row, the standard round of the 1st row, and using the relative origin of the central coordinate of circle of this circle as worktable;
A20, interlacing, standard round on leu time measurement update plate;
A30, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 1st nonlinearity erron correction;
A40, travelling table, the measurement update plate lower left corner the 2nd row, the standard round of the 2nd row, using the relative origin of the central coordinate of circle of this circle as worktable;
A50, interlacing, standard round on leu time measurement update plate;
A60, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 2nd nonlinearity erron correction;
A70, twice nonlinearity erron modified value is comprehensively average, final nonlinearity erron modified value is kept in the file of an encryption, in measurement afterwards, is automatically loaded into nonlinearity erron modified value.
Wherein, steps A 20 comprises the following steps;
A201, be (0,0) to coordinate on correction plate successively along X-direction; (10,0); (20,0); (30,0) ... the circle of (400,0) is measured, and completes the measurement to correction plate the 1st row 41 standard rounds;
A202, be (0,10) to coordinate on correction plate successively along X-direction again; (10,10); (20,10); (30,10) ... the circle of (400,10) is measured, and completes the measurement to correction plate the 3rd row 41 standard rounds;
A203, according to this order respectively to the 5th row of correction plate; 7th row; 9th row ... to the 61st row, the often measurement of row 41 standard rounds, completing capable 1271 diameters of odd number on correction plate is the measurement of the circle of 0.5; On correction plate, the coordinate of the 61st row 41 standard rounds is (0,300) respectively; (10,300); (20,300); (30,300) ... (400,300).
Steps A 50 comprises the following steps;
A501, be (5,5) to coordinate on correction plate successively along X-direction; (15,5); (25,5); (35,5) ... the standard round of (405,5) is measured, and completing correction plate the 2nd row 41 diameters is the measurement of the circle of 0.5;
A502, be (5,15) to coordinate on correction plate successively along X-direction again; (15,15); (25,15); (35,15) ... the standard round of (405,15) is measured, and completes the measurement to correction plate the 4th row 41 standard rounds;
A503, according to this order respectively to the 6th row of correction plate; Eighth row; 10th row ... to the 62nd row, the often measurement of row 41 standard rounds, completes the measurement to totally 1271 standard rounds of even numbers row on correction plate, obtains the center of circle surving coordinate value of 1271 circles, on correction plate, the 62nd row 41 diameters are the circle coordinates of 0.5 is (5,305) respectively; (15,305); (25,305); (35,305) ... (405,305).
Present invention also offers a kind of image measurer, comprise control system, described control system adopts above-mentioned modification method to carry out nonlinearity erron correction.
Correction plate 3 is fixed on worktable 1 by unit clamp 2, this unit clamp 2 is square aluminium blocks, there is a square hole centre of aluminium block, the surrounding of square hole is square step, for putting correction plate 3, correction plate 3 there are 4 pressing plates 4, can screw locking be used, correction plate 3 is fixed in the step of fixture 2.Unit clamp there are 4 through holes, corresponding with the hole for subsequent use on the worktable of image measurer, (as shown in Figure 3) on the worktable 1 of image measurer can be fixed on 4 key screw unit clamps 2 and correction plate 3.
The present invention is not limited to above-mentioned preferred forms, and anyone should learn the structure change made under enlightenment of the present invention, and every have identical or close technical scheme with the present invention, all falls within protection scope of the present invention.
Claims (5)
1. the non-linear error correcting plate of image measurer, it is characterized in that, described correction plate is provided with multiple standard round in matrix arrangements and multiple concentric circles, and described multiple concentric circles is divided into two groups, first group of concentric circles with the standard round in the most lower left corner for benchmark, and in matrix arrangements; Second group of concentric circles with the standard round in the most upper right corner for benchmark, described multiple concentric circles interval based on described standard round is arranged, and in matrix arrangements, it is the standard round of 0.5mm that described correction plate is provided with 5084 diameters, and described 5084 standard rounds are by 82 × 62 arranged in arrays and array pitch is 5mm; Described correction plate is also provided with 126 concentric circless, described 126 concentric circless are divided into two groups of layouts, and first group of 63 concentric circles makes benchmark with the standard round in the most lower left corner, by 9 × 7 arranged in arrays and array pitch is 50mm; Second group of 63 concentric circles makes benchmark with the standard round in the most upper right corner, by 9 × 7 arranged in arrays and array pitch is 50mm.
2. the non-linear error correcting plate of image measurer as claimed in claim 1, it is characterized in that, eachly concentrically ringedly to be made up of 5 circles and diameter is descending is respectively 2.5mm, 2.0mm, 1.5mm, 1.0mm, 0.5mm, to be eachly concentrically ringedly equipped with cross curve around.
3. the nonlinearity erron modification method of image measurer, is characterized in that, adopt correction plate as claimed in claim 2 to revise, concrete steps are as follows:
A10, travelling table, the measurement update plate lower left corner the 1st row, the standard round of the 1st row, and using the relative origin of the central coordinate of circle of this circle as worktable;
A20, the interlacing standard round successively on measurement update plate;
A30, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 1st nonlinearity erron correction;
A40, travelling table, the measurement update plate lower left corner the 2nd row, the standard round of the 2nd row, using the relative origin of the central coordinate of circle of this circle as worktable;
A50, the interlacing standard round successively on measurement update plate;
A60, by the center of circle surving coordinate value of all standard rounds that obtains respectively with corresponding actual coordinate value comparison on correction plate, obtain error amount, complete the 2nd nonlinearity erron correction;
A70, twice nonlinearity erron modified value is comprehensively average, final nonlinearity erron modified value is kept in the file of an encryption, in measurement afterwards, is automatically loaded into nonlinearity erron modified value;
Wherein, described steps A 20 comprises the following steps;
A201, be (0,0) to coordinate on correction plate successively along X-direction; (10,0); (20,0); (30,0) ... the circle of (400,0) is measured, and completes the measurement to correction plate the 1st row 41 standard rounds;
A202, be (0,10) to coordinate on correction plate successively along X-direction again; (10,10); (20,10); (30,10) ... the circle of (400,10) is measured, and completes the measurement to correction plate the 3rd row 41 standard rounds;
A203, according to this order respectively to the 5th row of correction plate; 7th row; 9th row ... to the 61st row, the often measurement of row 41 standard rounds, completing capable 1271 diameters of odd number on correction plate is the measurement of the circle of 0.5; On correction plate, the coordinate of the 61st row 41 standard rounds is (0,300) respectively; (10,300); (20,300); (30,300) ... (400,300);
Described steps A 50 comprises the following steps;
A501, be (5,5) to coordinate on correction plate successively along X-direction; (15,5); (25,5); (35,5) ... the standard round of (405,5) is measured, and completing correction plate the 2nd row 41 diameters is the measurement of the circle of 0.5;
A502, be (5,15) to coordinate on correction plate successively along X-direction again; (15,15); (25,15); (35,15) ... the standard round of (405,15) is measured, and completes the measurement to correction plate the 4th row 41 standard rounds;
A503, according to this order respectively to the 6th row of correction plate; Eighth row; 10th row ... to the 62nd row, the often measurement of row 41 standard rounds, completes the measurement to totally 1271 standard rounds of even numbers row on correction plate, obtains the center of circle surving coordinate value of 1271 circles, on correction plate, the 62nd row 41 diameters are the circle coordinates of 0.5 is (5,305) respectively; (15,305); (25,305); (35,305) ... (405,305).
4. the nonlinearity erron modification method of image measurer as claimed in claim 3, it is characterized in that, in steps A 10, first the worktable of image measurer is made first to look for the initial point of X/Y/Z axle, then microscope is automatically rotated to high magnification, travelling table again, allows the standard round in the most lower left corner of correction plate be positioned at the center of worktable, and makes auto-focusing.
5. image measurer, it is characterized in that comprising control system, correction plate and worktable, described control system adopts the modification method as described in any one of claim 3-4 item to carry out nonlinearity erron correction, and described correction plate is fixing on the table by unit clamp; Described unit clamp is a square aluminium block, and there is a square hole centre of aluminium block, and the surrounding of square hole is square step; Described correction plate there are 4 pressing plates, by screw locking, described correction plate are fixed in the step of described unit clamp; Described unit clamp there are 4 through holes, corresponding with the hole for subsequent use on the worktable of image measurer, by being fixed on the worktable of image measurer with 4 key screw unit clamps and correction plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110305004.7A CN102445151B (en) | 2011-10-10 | 2011-10-10 | Image measuring instrument and non-linear error correcting method and correcting plate thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110305004.7A CN102445151B (en) | 2011-10-10 | 2011-10-10 | Image measuring instrument and non-linear error correcting method and correcting plate thereof |
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| CN102445151A CN102445151A (en) | 2012-05-09 |
| CN102445151B true CN102445151B (en) | 2015-03-18 |
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| CN104034259B (en) * | 2014-05-21 | 2016-11-02 | 同济大学 | A kind of image measurer bearing calibration |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175151A (en) * | 2011-02-16 | 2011-09-07 | 珠海市怡信测量科技有限公司 | Image measurement instrument |
| CN202255287U (en) * | 2011-10-10 | 2012-05-30 | 珠海市怡信测量科技有限公司 | Image measuring instrument and non-linear error correcting plate thereof |
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| JP3410779B2 (en) * | 1993-09-28 | 2003-05-26 | 株式会社ソキア | Calibration method of moving stage in image input device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175151A (en) * | 2011-02-16 | 2011-09-07 | 珠海市怡信测量科技有限公司 | Image measurement instrument |
| CN202255287U (en) * | 2011-10-10 | 2012-05-30 | 珠海市怡信测量科技有限公司 | Image measuring instrument and non-linear error correcting plate thereof |
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