CN102437286A - Large-area flexible film solar cell and manufacturing method thereof - Google Patents
Large-area flexible film solar cell and manufacturing method thereof Download PDFInfo
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- CN102437286A CN102437286A CN2011104035415A CN201110403541A CN102437286A CN 102437286 A CN102437286 A CN 102437286A CN 2011104035415 A CN2011104035415 A CN 2011104035415A CN 201110403541 A CN201110403541 A CN 201110403541A CN 102437286 A CN102437286 A CN 102437286A
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a large-area flexible film solar cell and a manufacturing method thereof. The method comprises the following steps: providing a flexible film; forming a plurality of holes which are distributed uniformly or non-uniformly on a flexible film surface; pasting the flexible film on a rigid substrate surface and taking the flexible film as a diastasis protection film; carrying out heating stabilization processing to the diastasis protection film; forming a transparent conductive front electrode on the surface of the diastasis protection film; depositing series of strata of the film solar cell on the front electrode surface and making the series of strata of the film solar cell possess a cascade structure; forming a packaging layer on the surface of the series of strata of the film solar cell; separating the diastasis protection film, the series of strata of the film solar cell and an integral body of the packaging layer from the rigid substrate.
Description
Technical field
The present invention relates to technical field of solar batteries, particularly relate to a kind of manufacturing approach of large area flexible thin-film solar cells.
Background technology
The energy is the power of human social development, is the important substance basis that the national economic development and living standards of the people improve.Present widely used conventional energy resource (mainly being fossil energies such as coal, oil, natural gas) is limited, and excessive for many years development and use have caused serious environmental problem, is restricting development economic and society.Therefore, the exploitation regenerative resource is one of key measure that is related to the national sustainable development strategy.
In various regenerative resources, solar photovoltaic technology is a technology with fastest developing speed in the last few years, that application is the widest.The focus that wherein thin-film solar cells is few because of its consumptive material, low cost of manufacture becomes research.Present thin-film solar cells can be divided into rigid substrate (like glass substrate) and flexible substrate (like plastics, resinous polymer, aluminium foil, steel band) two big classes by substrate.
The flexible substrate film solar cell is because characteristic in light weight, that can curl; Have being easy to carry, be convenient to install, be prone to and building is integrated and the advantage of high power/weight ratio; Thereby have a good application prospect in a plurality of fields, greatly expanded the application space of solar cell.The flexible substrate film solar cell adopts the successive sedimentation technology of volume to volume (roll-to-roll) traditionally, though the higher serialization production in enormous quantities of production cost.Make the power station if adopt lighter weight and not breakable flexible solar battery; Not only can reduce the cost of transportation of battery and the construction and the installation cost in power station greatly; And be convenient to, and need not increase the load-bearing requirement of building in the top of existed building and installation all around.Can produce the solar power station that can move freely in addition, and portable, popular solar cell, utilize solar energy to greatest extent, satisfy panoramic energy demand.
Present flexible thin-film solar cell all is directly on the equipment that uses the special disposal flexible parent metal on the flexible substrate, to make basically.But; Directly use flexible substrate as substrate carry out thin film deposition production equipment and existing, widely used, production cost is low relatively, incompatible at rigid substrate such as the equipment of deposition on glass film; And very expensive, technology is also comparatively complicated.Other method is for example utilizing interim substrate to make in the method for flexible thin-film solar cell as flexible transfer substrate, and existing interim substrate needs etching removal, not reproducible utilization and be unfavorable for the problems such as industrialization that large tracts of land is produced.And; Existing in the technology that directly forms thin-film solar cells on the flexible substrate because the opaqueness of the electrode on substrate or the substrate; Cascade (monolithic integration) in the large tracts of land be can not realize, thereby the raising of large tracts of land photovoltaic module cost and the decline of reliability caused.
At rigid substrate surface sticking flexible substrates such as glass; Accomplish the manufacturing of flexible thin-film solar cell again in flexible substrate surface deposition film series of strata; The problem that such method can run into comprises the harsh requirement to flexible substrate material; For example the uncontamination property of temperature tolerance, vacuum chamber, the light transmission after the pyroprocess and pliability, and the temperature performance coupling of coupling, flexible substrate and the rigid substrate of substrate and device series of strata thermal coefficient of expansion etc.In addition, the large area flexible substrate is easy to peeling off of flexible substrate after being difficult to guarantee in the entire device manufacture process, keep being laid on rigid substrate surface and technology completion from start to finish open and flatly under the prerequisite of not damaging battery.Even this material is arranged, for example be considered to the best polyimides of performance, also can not on rigid substrate, keep all open and flat from start to finish, in the battery manufacture process, still be easy to produce serious convexity or fold.Particularly in the manufacture process of large area flexible thin-film solar cells; This convexity of can not ignore or the fold of flexible substrate; Not only greatly influence uniformity of thin film deposition and consistency, and the laser scribe process of cascade in forming also can't be reliably, satisfy the realization of performance requirement ground.
The inventor is through concentrating on studies and trying to explore; In application number is 201010501502.4 and 201010288863.5 one Chinese patent application, proposed a kind of novel flexible optoelectronic device, particularly flexible thin-film solar cell and manufacturing approach thereof, its aim is rigid manufacturing, flexible formation.Promptly directly on rigid support plates such as glass, form and break away from diaphragm; On breaking away from diaphragm, form the thin-film solar cells series of strata of electrode (TCO) before comprising electrically conducting transparent, unijunction or series of strata structures such as many pn junction p ns photoelectric conversion unit (for example p-i-n laminated construction) and back electrode then; And make it have interior cascade structure; Again flexible carrier (flexible bearing bed) being combined in battery layers securely fastens; Utilize then flexible carrier with the battery series of strata, comprise that breaking away from diaphragm breaks away from from rigid support plate surface on globality ground together; Through further sensitive surface protectiveness encapsulation, thus the flexible thin-film solar cell and the assembly thereof of formation low cost, large tracts of land, highly integrated interior cascade.
In technique scheme; The disengaging diaphragm of flexible thin-film solar cell requires to have good transparency, light scattering rate, heat-resisting quantity, tensile strength and dimensional stability; The uniformity of stress distribution when particularly being heated, and need after deposition is accomplished, to be easy to peel off from rigid substrate.Form the method that breaks away from diaphragm is in even adhesive stripe-coated of rigid substrate surface such as glass in the past; The full wafer plastic film is sticked on rigid substrate surface; The dimensional stability when though formed disengaging diaphragm has the spreading that guarantees to adhere to and subsequent deposition; But if will guarantee when being heated, still to have dimensional stability preferably; Particularly under the situation of using the rigid substrate that does not have strain relief, make the disengaging diaphragm be easy to integrally peel off after the battery manufacturing is accomplished, also need on technology, do structural processing breaking away from diaphragm itself from rigid substrate.
Summary of the invention
The invention provides a kind of manufacturing approach of large area flexible thin-film solar cells; The plastic film that adopts moulding is as breaking away from diaphragm; Directly on rigid substrate; Utilize the equipment and the technology of existing, the ripe rigid thin-film solar cells of manufacturing to make large tracts of land, have the flexible thin-film solar cell of interior cascade, and can guarantee to break away from diaphragm and when being heated, have dimensional stability preferably, the battery manufacturing is accomplished back disengaging diaphragm and is easy to peel off from rigid substrate.
The manufacturing approach of large area flexible thin-film solar cells of the present invention comprises step:
A provides fexible film;
B forms evenly or a plurality of holes of uneven distribution on said fexible film surface;
C sticks on rigid substrate surface as breaking away from diaphragm with said fexible film;
D adds heat stabilisation process to said disengaging diaphragm;
E is electrode before said disengaging diaphragm surface forms electrically conducting transparent;
F each series of strata of electrode surface deposit film solar cell and make it have interior cascade structure before said;
G forms encapsulated layer on each series of strata surface of said thin-film solar cells;
H separates said disengaging diaphragm, each series of strata of thin-film solar cells and encapsulated layer integral body with said rigid substrate.
Said a plurality of hole is the pin hole that utilizes laser or needle-punching method to form.
The diameter of said pin hole is 0.1～1.5mm.
Said fexible film is transparent, heatproof, thermal coefficient of expansion is lower, dimensional stability is good and the plastic film of tension.
The preferred thickness of said fexible film is 6～100 μ m.
Said fexible film comprises polyimides PI, PEI PEI, polyether-ether-ketone resin PEEK, PEN PEN, polyethylene terephtalate or polyvinyl fluoride ETFE.
The said heat stabilisation process that adds is the clipping heat stabilisation process that adds, and carries out the clipping step that adds heat stabilisation process and comprises:
Apply on said disengaging diaphragm surface to make and break away from diaphragm unlikely grip block of heaving in heating process;
Add heat stabilisation process.
The material of said grip block is quartz, glass or graphite.
Said grip block is pasted with the rigid substrate that breaks away from diaphragm for another piece.
The clamping face that said method also is included in grip block forms adherent layer, and/or
At the clamping face of grip block and break away from the step of laying the heatproof adhesive between the diaphragm.
Substrate maximum temperature when the said temperature that adds heat stabilisation process is higher than each series of strata of deposit film solar cell.
Said maximum temperature comprises 180 ℃～220 ℃ scope.
The said step that adds heat stabilisation process, electrode carries out afterwards before breaking away from the diaphragm surface to form electrically conducting transparent.
Said rigid substrate surface has stress guiding releasing structure.
Said stress guiding releasing structure comprises the surface texture of being made up of a plurality of crisscross grooves and/or fin; And said surface texture comprise a plurality of for the laser scribing of cascade structure in forming strip that provides and the flat site that is parallel to each other, and said flat site with break away from diaphragm and after adding heat stabilisation process, fit tightly.
The formation method of said surface texture comprises roll-in, mechanical scratching, mask wet etching or silk screen printing.
The execution sequence of said step b, c and d is adjustable.
The shape of described hole comprises circle, square, strip, rhombus.
Large area flexible thin-film solar cells provided by the invention comprises:
Break away from diaphragm, said disengaging diaphragm has evenly or a plurality of holes of uneven distribution, is pasting during fabrication at rigid substrate surface;
Electrode before the electrically conducting transparent that said disengaging diaphragm surface forms;
Electrode surface forms before said electrically conducting transparent have in each series of strata of thin-film solar cells of cascade structure; And
The encapsulated layer that forms on each series of strata surface of said thin-film solar cells.
Said disengaging diaphragm together with electrically conducting transparent before electrode and each series of strata of thin-film solar cells have on the whole and the corresponding surface relief structure of said stress guiding releasing structure.
Advantage of the present invention:
The manufacturing approach of large area flexible thin-film solar cells of the present invention, the plastic film that adopts moulding be as breaking away from diaphragm, and form a plurality of pin holes on the diaphragm breaking away from, and it pasted at rigid substrate surface, and carrying out follow-up thin film deposition.Air was got rid of when these pin holes not only helped heating, and under the situation that adopts thicker disengaging diaphragm, made and break away from that diaphragm is more flat, dimensional stability is better, can not rely on the rigid substrate that the surface has stress guiding releasing structure.
Preferably; Stress guiding releasing structure through rigid substrate surface; And add heat stabilisation process, and make the surface stress that breaks away from diaphragm be confined to equably discharge in stress guiding each specific scope that releasing structure limited, make the release of stress reach the degree of homogeneous and controllable; Even fold occurs also is to appear at the stress guiding corresponding position of each particular range that releasing structure limited; And fold is small and homogeneous and controllable, and the dimensional stability peace latitude of emulsion has all obtained large increase, has particularly avoided fold occurring in the laser scribing zone.Therefore; Just evenly and reliably each series of strata of deposit film battery and utilize laser scribe process to form the interior cascade between a plurality of batteries of diaphragm surface can broken away from; Make and adopt method of the present invention can fundamentally realize utilizing equipment and the technology that has the ripe rigid thin-film solar cells of manufacturing now; For example but the patent No. is 200810084627.4 the described large tracts of land of Chinese patent, low cost, simple relatively, the in enormous quantities PECVD consersion unit that deposits, and makes the large area flexible thin-film solar cells.
Description of drawings
Through the more specifically explanation of the preferred embodiments of the present invention shown in the accompanying drawing, above-mentioned and other purpose, characteristic and advantage of the present invention will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing in proportion, focus on illustrating purport of the present invention.For clarity sake, amplified the thickness of layer.
Fig. 1 a to Fig. 1 b is the sketch map of distortion of explanation flexible substrate and foaming phenomenon;
Fig. 2 to Figure 12 is the structural representation of explanation large area flexible thin-film solar cells manufacturing approach of the present invention;
Figure 13 is the structural representation of large area flexible thin-film solar cells of the present invention.
Said diagrammatic sketch is schematically, and nonrestrictive, can not excessively limit protection scope of the present invention at this.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, does detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.A lot of details have been set forth in the following description so that make much of the present invention.But the present invention can implement much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of intension of the present invention.Therefore the present invention does not receive the restriction of following disclosed specific embodiment.
Fig. 1 a to Fig. 1 b is the sketch map of distortion of explanation flexible substrate and foaming phenomenon.Shown in Fig. 1 a and Fig. 1 b; Paste disengaging diaphragm 200 on glass substrate 100 surfaces; The material that breaks away from diaphragm 200 is engineering plastics; Its coefficient of expansion is much larger than rigid substrate, and intensification by a relatively large margin can make and break away from the bigger stress of diaphragm 200 generations, and this stress can be released through breaking away from diaphragm 200 random, unpredictable modes of texturing own.Particularly deposited after the battery series of strata 600 such as preceding electrode of transparent conductive zinc oxide and silica-base film; Because the internal stress of these retes itself; Particularly break away from the inevitable difference between the thermal coefficient of expansion of diaphragm 200 and rigid substrate 100; After variations in temperature is big, internal stress and variation of temperature make comprise the series of strata that break away from diaphragm produce uncontrollable, at random, serious heaving and fold, to such an extent as to some regional disengaging substrate.Glass substrate 100 and break away from the local residual micro-bubble that has between the diaphragm 200 in addition; When vacuum coating, can make disengaging diaphragm 200 significantly serious deformation such as bubbling and fold phenomenon occur; Follow-up uniformity of thin film deposition, particularly laser scribing caused seriously influence.
Fig. 2 to Figure 12 is the structural representation of explanation large area flexible thin-film solar cells manufacturing approach of the present invention.Method of the present invention is a fexible film 200 at first; Utilize methods such as laser 10 or acupuncture then; Shown in Fig. 2 a, before stickup, form evenly or a plurality of holes 201 of uneven distribution on fexible film 200 surfaces, the diameter of hole is 0.1～1.5mm; Like Fig. 2 b and shown in Figure 3, Fig. 3 be Fig. 2 b along A-A to profile.Hole 201 also can be after sticking on glass 100 surfaces, to utilize laser to form.The eliminating of air when these pin holes not only help heating, and can make and break away from that diaphragm 200 is more flat, dimensional stability is better.Adopt thicker disengaging diaphragm, the disengaging diaphragm of 100 μ m for example, effect is more obvious.Said fexible film 200 is transparent, heatproof, thermal coefficient of expansion is lower and the plastic film of tension, and its thickness is preferably 6～100 μ m.Said fexible film comprises polyimides PI, PEI PEI, polyether-ether-ketone resin PEEK, PEN PEN, polyethylene terephtalate or polyvinyl fluoride ETFE.
In one embodiment, suede property can also be processed in the surface that breaks away from diaphragm 200, so that better during dispersed-heated and the stress that produced of film deposition process, helps diaphragm and in the battery production process, remains open and flat.
The fexible film 200 that will have hole 201 sticks on rigid substrate, and for example glass 100 surfaces are as shown in Figure 4.When sticking flexible film 200, the binding agent on glass substrate 100 surfaces can be evenly coating continuously, also can be to be coated with discontinuously, for example point-like spraying, and the glue point can be even distribution, also can be uneven distribution.The mode that also can adopt lamination is with fexible film 200 sticking glass substrate 100 surfaces that are posted on.
Method of the present invention can adopt the glass of flat surfaces aspect the selection of glass substrate 100 fully, and needn't adopt the surface to have the rigid substrate that stress guides releasing structure, further to reduce cost.Method of the present invention also can adopt the rigid substrate with stress guiding releasing structure, and effect can be better under the thicker situation of fexible film 200.As Fig. 5 and shown in Figure 6 according to the present invention the structural representation of rigid substrate surface stress guiding releasing structure embodiment, Fig. 6 be Fig. 5 along A-A to profile.As shown in the figure; The stress guiding releasing structures on glass substrate 100 surface comprise the surface texture of being made up of a plurality of crisscross grooves 110 and/or fin 111; And said surface texture comprise a plurality of for the laser scribing 10 of cascade structure in forming strip that provides and the flat site that is parallel to each other, and said flat site with break away from diaphragm and fit tightly after adding heat stabilisation process clipping.Groove 110 has certain degree of depth, for example between 0.1 to 0.5 millimeter.In length and breadth or the surface mesh structure can be diversified, groove 110 can be vertical arrangement; Also can be crisscross, perforation each other, only be to enumerate typical example at this.The form of this network is not limit; So long as these laterally and/or longitudinally groove form vertical, the horizontal stroke or the network of certain figure; And reserve the position of drawing laser rays; Just comprise a plurality of strips of reserving for the laser scribing of cascade structure in forming and the flat site that is parallel to each other, carry out laser scribing in these zones.In a word, the stress of rigid substrate surface guiding releasing structure need not influence laser scribing.These have the flat site of certain area between the groove, and break away from diaphragm 200 and fit tightly after adding heat stabilisation process clipping.These fitting areas and area that account for whole base plate are such as greater than 50%; Promptly can make glass substrate 100 with this groove structure and the contact area that breaks away from diaphragm 200 greater than 50%; All can be used as substrate surface stress guiding releasing structure of the present invention, all in protection scope of the present invention.
The formation method of the groove 110 of above-mentioned groove network comprises roll-in, laser grooving and scribing, mechanical scratching or mask wet etching.
Then said disengaging diaphragm 200 is added heat stabilisation process.As a preferred embodiment; The said heat stabilisation process that adds is the clipping heat stabilisation process that adds; Specifically; Carry out the clipping heat stabilisation process that adds and apply earlier to make and break away from diaphragm unlikely grip block of heaving in heating process, add heat stabilisation process then on said disengaging diaphragm 200 surfaces.The material of grip block is quartz, glass or graphite.Grip block also can be that another piece is pasted with the rigid substrate that breaks away from diaphragm.
In order to prevent grip block and to break away from the diaphragm adhesion, the clamping face that method of the present invention also is included in grip block forms adherent layer, and/or at the clamping face and the step that breaks away from laying heatproof adhesive between the diaphragm of grip block.
Substrate maximum temperature when the above-mentioned temperature that adds heat stabilisation process is higher than each series of strata of deposit film solar cell for example comprises 180 ℃～220 ℃ scope.
In addition, the above-mentioned step that adds heat stabilisation process can also be carried out by electrode before breaking away from the diaphragm surface to form electrically conducting transparent afterwards.For example; As shown in Figure 8; Electrode 300 before said disengaging diaphragm 200 surface deposition doping zinc-oxides form electrically conducting transparent, preferred, adherent layer 400 is laid on electrode 300 surfaces before electrically conducting transparent; The material of adherent layer 400 is preferably the glass fabric that scribbles teflon Teflon, advantages such as physicochemical property is stable, high temperature resistant, dimensionally stable that it has.Then, carry out the clipping thermally-stabilised Stress Release process that adds.Apply grip block 500 on separator 400 surfaces.Does not limit the position of grip block 500; As long as (face that folds with electrode before the electrically conducting transparent 300) can be clamped and break away from diaphragm 200 and both can clamping face; Keep open and flat so that the surface has the disengaging diaphragm 200 of the preceding electrode 300 of electrically conducting transparent, break away from diaphragm 200 when preventing to heat and produce heaving perpendicular to substrate surface.The material of grip block 500 is preferably quartz, glass or graphite.Except before grip block 500 and electrically conducting transparent, laying the adherent layer 400 between the electrode 300, also can carry out release treatment to the clamping face (face that contacts with electrode before the electrically conducting transparent 300) of grip block 500, for example plate one deck adhesive layer.
In a preferred embodiment, as shown in Figure 9, grip block also can be that lower surface has stress guiding releasing structure and is pasted with and breaks away from diaphragm 200 and break away from another rigid substrate 100 that diaphragm 200 surfaces have electrode 300 before the electrically conducting transparent.Electrode 300 relative clampings before the electrically conducting transparent on two substrates.Lay adherent layer 400 between the electrode 300 before the preferred electrically conducting transparent on two substrates, it prevents when heating before grip block 500 and the electrically conducting transparent between the electrode 300, or the adhesion between the electrode 300 before two electrically conducting transparents.
In embodiment shown in figure 10, carry out the process of clipping Stress Release and before depositing zinc oxide forms electrically conducting transparent, carry out before the electrode 300.Apply grip block 500 on disengaging diaphragm 200 surfaces.Grip block 500 last, down, all can tilt to place, break away from diaphragm 200 and keep open and flat as long as can make, produce heaving when preventing to heat perpendicular to substrate surface.Preferably, breaking away from diaphragm 200 surface laying adherent layers 400.Equally, grip block also can be that lower surface has stress guiding releasing structure and is pasted with another the rigid substrate 100 that breaks away from diaphragm 200.Disengaging diaphragm 200 relative clampings on two substrates, shown in figure 11.Adherent layer 400 prevents grip block 500 and breaks away between the diaphragm 200 when heating, or two adhesions that break away between the diaphragm 200.
The intact diaphragm 200 that breaks away from of sticking card perhaps applies after the grip block 500, and under the maximum temperature that is higher than each series of strata of deposit film solar cell, for example temperature is carried out heated baking under 200～230 ℃.In the process of heating; Stress guiding releasing structure not only can be got rid of the air that breaks away between diaphragm 200 and the substrate from groove; And can the surface stress that break away from diaphragm 200 be confined to discharge in each the specific scope between the groove or between the fin or between the hole; Make the release of stress reach even, controlled degree, excessive very big bubbling and the fold of local size fluctuating that causes of local stress can not occur.Through the process of this heat stabilisation process, the open and flat degree and the dimensional stability that break away from diaphragm 200 have all obtained large increase.
Adding heat stabilisation process makes the surface stress that breaks away from diaphragm be confined to equably discharge in stress guiding each specific scope that releasing structure limited; Make the release of stress reach the degree of homogeneous and controllable; Even fold occurs also is to appear at the stress guiding corresponding position of each particular range that releasing structure limited; And fold is small and homogeneous and controllable, and the dimensional stability peace latitude of emulsion has all obtained large increase.Particularly avoided fold occurring in the laser scribing zone.Like this, just evenly and reliably each series of strata of deposit film battery and utilize laser scribe process to form the interior cascade between a plurality of batteries of diaphragm surface can broken away from.Feasible employing method of the present invention; Can fundamentally realize utilizing equipment and the technology that has the ripe rigid thin-film solar cells of manufacturing now; For example but the patent No. is 200810084627.4 the described large tracts of land of Chinese patent, low cost, simple relatively, the in enormous quantities PECVD consersion unit that deposits, and makes the large area flexible thin-film solar cells.
Next; To shown in Figure 13, remove grip block 500 and adherent layer 400 (under the situation of embodiment as shown in the figure) like Figure 12, each series of strata 600 of electrode 300 surface deposition thin-film solar cells before the electrically conducting transparent that breaks away from diaphragm 200; And the laser scribe process of being correlated with; Form encapsulation layer 700 then, for example use weather-proof, the flexible material of multilayer, utilize EVA (ethylene-vinyl acetate copolymer) to combine securely through each series of strata 600 of laminating technology and thin-film solar cells.With electrode 300 before encapsulated layer 700, each series of strata 600 of thin-film solar cells, the electrically conducting transparent and disengaging diaphragm 200, separate to globality then with glass substrate 100.
Aforesaid grip block with break away from that the surface of electrode clamping also can have the surface texture of being made up of groove and/or fin before diaphragm or the electrically conducting transparent.
In other embodiments, method of the present invention also comprises the sensitive surface to thin-film solar cells 600, just forms encapsulated layer at the lower surface that breaks away from diaphragm 200, and for example laminating layer or several layers of transparent weatherability material carry out the step that protectiveness encapsulates.
In other embodiments, step b: form evenly or a plurality of holes of uneven distribution on said fexible film surface; Step c: said fexible film is sticked on rigid substrate surface as breaking away from diaphragm; And steps d: said disengaging diaphragm is added heat stabilisation process; The execution sequence of these three steps is adjustable.
The shape of hole comprises circle, square, strip, rhombus.
Figure 13 is the structural representation of large area flexible thin-film solar cells of the present invention.Large area flexible thin-film solar cells of the present invention comprises disengaging diaphragm 200, and it is pasting at the rigid substrate surface that has stress guiding releasing structure like above-mentioned surface during fabrication; Breaking away from diaphragm 200 has evenly or a plurality of holes 201 of uneven distribution.Electrode 300 before the electrically conducting transparent that said disengaging diaphragm 200 surfaces form; Each series of strata 600 of thin-film solar cells of cascade structure in electrode 300 surperficial the having of forming before electrically conducting transparent; And the encapsulation layer 700 that forms on each series of strata surface of said thin-film solar cells.
Above-mentioned rigid substrate surface preferably has stress guiding releasing structure.This moment, large area flexible thin-film solar cells of the present invention was from cross section; Break away from diaphragm 200 together with electrode before the electrically conducting transparent 300 and each series of strata 600 of thin-film solar cells, have on the whole and the corresponding surface relief structure of said stress guiding releasing structure.
The above only is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Any those of ordinary skill in the art are not breaking away under the technical scheme scope situation of the present invention, and all the technology contents of above-mentioned announcement capable of using is made many possible changes and modification to technical scheme of the present invention, or is revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical scheme of the present invention, all still belongs in the protection range of technical scheme of the present invention any simple modification, equivalent variations and modification that above embodiment did according to technical spirit of the present invention.
Claims (20)
1. the manufacturing approach of a large area flexible thin-film solar cells comprises step:
A provides fexible film;
B forms evenly or a plurality of holes of uneven distribution on said fexible film surface;
C sticks on rigid substrate surface as breaking away from diaphragm with said fexible film;
D adds heat stabilisation process to said disengaging diaphragm;
E is electrode before said disengaging diaphragm surface forms electrically conducting transparent;
F each series of strata of electrode surface deposit film solar cell and make it have interior cascade structure before said;
G forms encapsulated layer on each series of strata surface of said thin-film solar cells;
H separates said disengaging diaphragm, each series of strata of thin-film solar cells and encapsulated layer integral body with said rigid substrate.
2. manufacturing approach according to claim 1 is characterized in that: said a plurality of holes are the pin hole that utilizes laser or needle-punching method to form.
3. manufacturing approach according to claim 2 is characterized in that: the diameter of said pin hole is 0.1～1.5mm.
4. manufacturing approach according to claim 1 is characterized in that: said fexible film is transparent, heatproof, thermal coefficient of expansion is lower, dimensional stability is good and the plastic film of tension.
5. manufacturing approach according to claim 4 is characterized in that: the preferred thickness of said fexible film is 6～100 μ m.
6. according to claim 4 or 5 described manufacturing approaches, it is characterized in that: said fexible film comprises polyimides PI, PEI PEI, polyether-ether-ketone resin PEEK, PEN PEN, polyethylene terephtalate or polyvinyl fluoride ETFE.
7. manufacturing approach according to claim 1 is characterized in that: the said heat stabilisation process that adds is the clipping heat stabilisation process that adds, and carries out the clipping step that adds heat stabilisation process and comprises:
Apply on said disengaging diaphragm surface to make and break away from diaphragm unlikely grip block of heaving in heating process;
Add heat stabilisation process.
8. manufacturing approach according to claim 7 is characterized in that: the material of said grip block is quartz, glass or graphite.
9. manufacturing approach according to claim 7 is characterized in that: said grip block is pasted with the rigid substrate that breaks away from diaphragm for another piece.
10. manufacturing approach according to claim 7 is characterized in that: the clamping face that said method also is included in grip block forms adherent layer, and/or
At the clamping face of grip block and break away from the step of laying the heatproof adhesive between the diaphragm.
11. manufacturing approach according to claim 7 is characterized in that: the substrate maximum temperature when the said temperature that adds heat stabilisation process is higher than each series of strata of deposit film solar cell.
12. manufacturing approach according to claim 11 is characterized in that: said maximum temperature comprises 180 ℃～220 ℃ scope.
13. according to claim 1 or 7 described manufacturing approaches, it is characterized in that: the said step that adds heat stabilisation process, electrode carries out afterwards before breaking away from the diaphragm surface to form electrically conducting transparent.
14. manufacturing approach according to claim 1 is characterized in that: said rigid substrate surface has stress guiding releasing structure.
15. manufacturing approach according to claim 14; It is characterized in that: said stress guiding releasing structure comprises the surface texture of being made up of a plurality of crisscross grooves and/or fin; And said surface texture comprise a plurality of for the laser scribing of cascade structure in forming strip that provides and the flat site that is parallel to each other, and said flat site with break away from diaphragm and after adding heat stabilisation process, fit tightly.
16. manufacturing approach according to claim 15 is characterized in that: the formation method of said surface texture comprises roll-in, mechanical scratching, mask wet etching or silk screen printing.
17. manufacturing approach according to claim 1 is characterized in that: the execution sequence of said step b, c and d is adjustable.
18. manufacturing approach according to claim 1 is characterized in that: the shape of described hole comprises circle, square, strip, rhombus.
19. a large area flexible thin-film solar cells is characterized in that, comprising:
Break away from diaphragm, said disengaging diaphragm has evenly or a plurality of holes of uneven distribution, is pasting during fabrication at rigid substrate surface;
Electrode before the electrically conducting transparent that said disengaging diaphragm surface forms;
Electrode surface forms before said electrically conducting transparent have in each series of strata of thin-film solar cells of cascade structure; And
The encapsulated layer that forms on each series of strata surface of said thin-film solar cells.
20. large area flexible thin-film solar cells according to claim 19 is characterized in that: said disengaging diaphragm together with electrically conducting transparent before electrode and each series of strata of thin-film solar cells have on the whole and the corresponding surface relief structure of said stress guiding releasing structure.
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| CN108550556A (en) * | 2018-05-31 | 2018-09-18 | 京东方科技集团股份有限公司 | Protective film and its display panel for flexible substrate |
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