CN102433536A - Preparation method of high-bonding-strength titanium nitride (TIN) ceramic membrane on surface of low-carbon steel - Google Patents
Preparation method of high-bonding-strength titanium nitride (TIN) ceramic membrane on surface of low-carbon steel Download PDFInfo
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- CN102433536A CN102433536A CN2011103978296A CN201110397829A CN102433536A CN 102433536 A CN102433536 A CN 102433536A CN 2011103978296 A CN2011103978296 A CN 2011103978296A CN 201110397829 A CN201110397829 A CN 201110397829A CN 102433536 A CN102433536 A CN 102433536A
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Abstract
The invention belongs to the technical field of surface treatment, which is characterized by disclosing a technology for preparing titanium nitride (TIN) ceramic membranes by a high-energy beam flow compounding method. The high-energy beam flow compounding method is characterized in that firstly, pulse electronic beams are used for surface cleaning and bombardment, and then, the multi-arc ion plating is used for preparing the TIN ceramic membranes on the the surface of low-carbon steel. The method comprises the steps that: the surface of the low-carbon steel is ground, impurities such as oil stain, dust and the like on the surface are cleared away, and the bombardment treatment is carried out on the strong-flow pulse electronic beam surface; and then, the multi-arc ion plating technology is adopted for preparing the TIN ceramic membranes on the surface of the low-carbon steel. The method can be used for preparing the TIN ceramic membranes with high hardness, good abrasion resistance performance, high bonding strength and good mechanical performance on the surface of the low-carbon steel.
Description
Technical field
The invention belongs to technical field of surface, relate to the technology that the soft steel metallic surface prepares the TIN ceramic membrane, specially refer to the preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane.
Background technology
Along with the develop rapidly of sufacing, new coating technology emerges in an endless stream.The improvement of technology, the adjustment of structure, the continuous introducing of modern detection method improves constantly coating performance.With TiN is the hard unitary film of representative, owing to obviously improve the mechanical property and the frictional behaviour of material surface, and be widely used in fields such as machinery, metallurgy, electronics
The pulsed electron beam technique functions comes from the sixties in 20th century.Up to the eighties in 20th century, the low energy high-current pulsed electron beam just begins aspect material surface modifying, to obtain to pay attention to and use.This technology can realize higher energy deposition (0 ~ 50J/cm
2) make material surface in time (ns ~ 10
2μ s) and (0 μ m ~ 10, space
2μ m) under the situation of high compression, forms 10
3The temperature field of the K order of magnitude, 10
8~ 10
9The annealing rate of K/s and 10
2~ 10
3The stress field of MPa, the violent physicochemical change of bringing out a series of nonequilibrium state, thus improve hardness, the wear and corrosion behavior on metallic substance top layer, even fatigue property, realize the reinforcement and the optimization of material surface performance.But because equipment has only Russia at present, Germany, the U.S., indivedual R&D institutions of Japan etc. have carried out some exploration work in this respect.
The pulsed electron beam technology is combined with the multi-arc ion coating technology, also do not have relevant report at present.
Summary of the invention
One of the object of the invention provides a kind of preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane.
Adopt the surface before high-power electron beam is handled ion plating to carry out the method that high energy beam current carries out surface cleaning.
The technical scheme that adopts is
The preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane comprises process step down:
(1) surperficial large size defective is removed on polishing carbon steel part surface;
(2) the mild steel sections surface cleaning that step (1) is handled be will pass through, degreasing, impurity removed;
(3) will pass through parts that step (2) handles and be put into and carry out the high energy pulse electron beam treatment in the Vakuumkammer, the high energy pulse electron beam treatment mainly is surface of low-carbon steel to be carried out the degree of depth clean;
(4) adopt multi-arc ion plating equipment that ion plating is carried out on the carbon steel part surface of handling through step (3) and handle, make its top layer plate one deck TIN ceramic membrane.
In order further to improve the over-all propertieies such as hardness, wear resistance and bonding strength of coating, high energy pulse electron beam treatment parameter is in the above-mentioned steps (3): current density 100 ~ 150A, pulsed voltage 12 ~ 15kV, pulse-repetition 2 ~ 10Hz, pulse number 2 ~ 10 times;
In order further to improve the over-all propertieies such as hardness, wear resistance and bonding strength of coating, the multi-arc ion coating parameter is in the above-mentioned steps (4): metal evaporation sources, titanium alloy target evaporation and ionization; Flame current is 40 ~ 80A; Negative bias-90 ~-120V; Gas ion source acceleration voltage 10 ~ 15 kV, strength of current 5 ~ 10mA; Operating pressure is 0.2Pa; Depositing time 10 ~ 60min.
Polishing described in the above-mentioned steps (1), the sand paper granularity should be in 600 orders;
The removing of surface and oil contaminant and dust can be adopted alcohol, acetone and other organic solvent described in the above-mentioned steps (2), or other solution or mode such as thermokalite, cleans more than 10 minutes.
Specifically: the high energy beam current complex method prepares TIN ceramic membrane technology, and it comprises:
(1) adopts granularity 600 orders with interior sand papering titanium alloy member surface, remove the large size defective on surface, guarantee the precision of treat surface;
(2) adopt other solution or modes such as alcohol, acetone and other organic solvent, or thermokalite, it is surperficial more than 10 minutes to clean the titanium alloy member of handling through step (1), removes degreasing, impurity etc.;
(3) adopt the high energy pulse electron beam treatment, processing parameter is: current density 100 ~ 150A, pulsed voltage 12 ~ 15kV; Pulse-repetition 2 ~ 10Hz; Pulse number 2 ~ 10 times will pass through the parts surface that step (2) handles and carry out surface cleaning processing, preparation cleaning, smooth surface of low-carbon steel;
(4) adopt multi-arc ion coating that ion plating is carried out on the mild steel sections surface of handling through step (3) and handle, processing parameter is that flame current is 40 ~ 80A; Negative bias-90 ~-120V; Gas ion source acceleration voltage 10 ~ 15 kV, strength of current 5 ~ 10mA; Operating pressure is 0.2Pa; Depositing time 10 ~ 60min.
The effect that the present invention had:
The inventive method one operation, the TIN ceramic membrane of preparation had both had the high bond strength with metallic matrix, had the characteristics of high firmness, high-wearing feature, high anti-corrosion again.
In addition, the high energy pulse electron beam treatment not only plays the effect of cleaning surfaces, also plays the effect of top layer metal activation, and like this, the bonding strength of TIN coating and metallic matrix is higher, is expected to solve the problem that traditional TIN coating is peeled off too early.
Embodiment
Embodiment 1
The preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane specifically may further comprise the steps:
(1) adopts granularity 600 order sand papering titanium alloy members surface, remove the large size defective on surface, guarantee the precision of treat surface;
(2) adopt alcohol, degreasing, impurity are removed in the titanium alloy member surface that cleaning process (1) is handled 15 minutes;
(3) adopt the high energy pulse electron beam treatment, processing parameter is: current density 120A, pulsed voltage 13kV; Pulse-repetition 5Hz; Pulse number 6 times will pass through the parts surface that step (2) handles and carry out surface cleaning processing, preparation cleaning, smooth surface of low-carbon steel;
(4) adopt multi-arc ion coating that ion plating is carried out on the mild steel sections surface of handling through step (3) and handle, processing parameter is that flame current is 50A; Negative bias-90V; Gas ion source acceleration voltage 12 kV, strength of current 8mA; Operating pressure is 0.2Pa; Depositing time 40min.
Embodiment 2
The preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane specifically may further comprise the steps:
(1) adopts granularity 400 order sand papering titanium alloy members surface, remove the large size defective on surface, guarantee the precision of treat surface;
Degreasing, impurity are removed in the mild steel sections surface of (2) adopting 90 ℃ of hot alkaline solutions to clean to handle through (1) 20 minutes;
(3) adopt the high energy pulse electron beam treatment, processing parameter is: current density 150A, pulsed voltage 5kV; Pulse-repetition 10Hz; Pulse number 5 times will pass through the parts surface that step (2) handles and carry out surface cleaning processing, preparation cleaning, smooth surface of low-carbon steel;
(4) adopt multi-arc ion coating that ion plating is carried out on the mild steel sections surface of handling through step (3) and handle, processing parameter is that flame current is 80A; Negative bias-120V; Gas ion source acceleration voltage 10kV, strength of current 5mA; Operating pressure is 0.2Pa; Depositing time 60min.。
Coat-thickness through present method preparation is 5 μ m, the fine and close zero defect of coatingsurface, and abrasion loss reduces more than 50%.
Claims (3)
1. the preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane is after surface of low-carbon steel is handled through high-current pulsed electron beam, utilizes the multi-arc ion coating technology again, prepares the TIN ceramic membrane at surface of low-carbon steel, is characterised in that to comprise following process step:
(1) surperficial large size defective is removed on polishing carbon steel part surface;
(2) will pass through step) the mild steel sections surface cleaning handled, remove degreasing, impurity;
(3) will pass through parts that step (2) handles and be put into and carry out the high energy pulse electron beam treatment in the Vakuumkammer, the high energy pulse electron beam treatment mainly is surface of low-carbon steel to be carried out the degree of depth clean;
(4) adopt multi-arc ion plating equipment that ion plating is carried out on the carbon steel part surface of handling through step (3) and handle, make its top layer plate one deck TIN ceramic membrane.
2. the preparation method of the surface of low-carbon steel high bond strength TIN ceramic membrane of stating like claim; It is characterized in that: high energy pulse electron beam treatment parameter is in the above-mentioned steps (3): current density 100 ~ 150A; Pulsed voltage 12 ~ 15kV, pulse-repetition 2 ~ 10Hz, pulse number 2 ~ 10 times.
3. the preparation method of surface of low-carbon steel high bond strength TIN ceramic membrane as claimed in claim 2 is characterized in that: flame current is 40 ~ 80A; Negative bias-90 ~-120V; Gas ion source acceleration voltage 10 ~ 15 kV, strength of current 5 ~ 10mA; Operating pressure is 0.2Pa; Depositing time 10 ~ 60min.
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| CN2011103978296A CN102433536A (en) | 2011-12-05 | 2011-12-05 | Preparation method of high-bonding-strength titanium nitride (TIN) ceramic membrane on surface of low-carbon steel |
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| CN2011103978296A CN102433536A (en) | 2011-12-05 | 2011-12-05 | Preparation method of high-bonding-strength titanium nitride (TIN) ceramic membrane on surface of low-carbon steel |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923636A (en) * | 2019-11-29 | 2020-03-27 | 南京航空航天大学 | Electron beam composite plasma alloying treatment method for surface of gamma-TiAl alloy |
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| JP2006066272A (en) * | 2004-08-27 | 2006-03-09 | Canon Inc | Image display device |
| CN1847449A (en) * | 2006-05-15 | 2006-10-18 | 西安宇杰表面工程有限公司 | TiNx film preparing process on the surface of cutter for machining gear in automobile gear box |
| CN101363110A (en) * | 2008-09-24 | 2009-02-11 | 四川大学 | Physical vapor-phase preparation method of c-sic coating for hydrogen (tritium) resistance |
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2011
- 2011-12-05 CN CN2011103978296A patent/CN102433536A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006066272A (en) * | 2004-08-27 | 2006-03-09 | Canon Inc | Image display device |
| CN1847449A (en) * | 2006-05-15 | 2006-10-18 | 西安宇杰表面工程有限公司 | TiNx film preparing process on the surface of cutter for machining gear in automobile gear box |
| CN101363110A (en) * | 2008-09-24 | 2009-02-11 | 四川大学 | Physical vapor-phase preparation method of c-sic coating for hydrogen (tritium) resistance |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923636A (en) * | 2019-11-29 | 2020-03-27 | 南京航空航天大学 | Electron beam composite plasma alloying treatment method for surface of gamma-TiAl alloy |
| CN110923636B (en) * | 2019-11-29 | 2020-11-20 | 南京航空航天大学 | Electron beam composite plasma alloying treatment method for surface of gamma-TiAl alloy |
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Application publication date: 20120502 |