CN102427110A - Multi-element piezoelectric composite material and preparation method and application thereof - Google Patents
Multi-element piezoelectric composite material and preparation method and application thereof Download PDFInfo
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Abstract
The invention discloses a multi-element piezoelectric composite material and a preparation method. The multi-element piezoelectric composite material is a 1-3-2 type composite material consisting of a piezoelectric ceramic/ polymer composite material and a decoupling material, wherein the piezoelectric ceramic/ polymer composite material takes piezoelectric ceramic as a skeleton and a polymer as a base body and is attached with an upper electrode and a lower electrode, the piezoelectric ceramic skeleton comprises a substrate and a piezoelectric ceramic column connected to the substrate, the decoupling material is filled in the piezoelectric ceramic/ polymer composite material, the piezoelectric ceramic/ polymer composite material is divided into a plurality of units of the same structure by the decoupling material, and the upper electrodes of all elements are discontinuous. Through the adding of the decoupling material, the whole composite material is divided into a plurality of units. The preparation technology is simple. The obtained multi-element material has excellent property, good consistency, low coupling and wide application prospect in the field of transducers.
Description
Technical field
The present invention relates to a kind of piezo-electricity composite material, the particularly a kind of many primitives piezo-electricity composite material that is applied to transmitting transducer array element part.
Background technology
Piezo-electricity composite material is meant the piezoelectric that is compounded to form by two-phase or multiphase material, and it integrates the piezoelectric effect of piezoelectric ceramic and the pliability of polymer, has overcome the defective of pure piezoelectric ceramic aspect intensity, fragility to a certain extent.1-3-2 type piezo-electricity composite material is the novel piezoelectric composite material with parallelly connected 1-3 type and design feature of series connection 2-2 type composite material.It has low-density, high static pressure piezoelectric property, acoustic impedance is easy to and water and biological tissue coupling, Stability Analysis of Structures, and characteristics such as material parameter is customizable within the specific limits.A main application of said material is exactly to design and produce transducer and array thereof, is used for fields such as the underwater sound and supersonic sounding, imaging of medical, Non-Destructive Testing.
Traditional method for preparing transducer array is complicated and not easy to operate; At first to prepare a large amount of composite material samples; Pick out the primitive of the consistent material sample of performance then therein, be arranged in required array to these primitives according to certain formation again as transducer array.Therefore be difficult to satisfy the high conforming requirement of transducer array, and can waste raw material each primitive performance, time-consuming.This just to a great extent limit the application of transducer array.
Therefore, excellent performance, consistency height, the simple composite study of preparation have great importance with the research and development of exploitation to field of transducer.
Summary of the invention
The present invention is directed to above-mentioned deficiency, two kinds of many primitives that structure is slightly different piezo-electricity composite materials are provided, this primitive piezo-electricity composite material more than two kinds all has the advantage that excellent performance, consistency are high, coupling is low.
The present invention also provides the preparation method of many primitives piezo-electricity composite material, and its technology is simple, many primitives of gained piezo-electricity composite material excellent performance, high conformity.
The present invention also provides the application of many primitives piezo-electricity composite material, promptly in the application in transducer array field.
The concrete technical scheme of the present invention is following:
A kind of many primitives piezo-electricity composite material; It is characterized in that: the 1-3-2 type composite material that said many primitives piezo-electricity composite material is made up of the piezoelectric ceramics/polymer 1-3 thing composite material and the material of decoupling; Said piezoelectric ceramics/polymer 1-3 thing composite material is skeleton with the piezoelectric ceramic; With the polymer is matrix, and with upper and lower electrode, said piezoelectric ceramic skeleton comprises substrate and the piezoelectric ceramic post that is connected on it; The said material of decoupling is filled in the piezoelectric ceramics/polymer 1-3 thing composite material and with piezoelectric ceramics/polymer 1-3 thing composite material and is divided into the identical primitive of a plurality of structures, and the top electrode of each primitive is discontinuous.Its structure is as shown in Figure 1.
Above-mentioned many primitives piezo-electricity composite material is on the basis of 1-3-2 type piezo-electricity composite material, to carry out improvedly, so it also is a 1-3-2 type piezo-electricity composite material.Existing 1-3-2 type piezo-electricity composite material is a kind of novel piezoelectric composite material; It is functional, Stability Analysis of Structures, and structure is as shown in Figure 2; Be made up of piezoelectric ceramic skeleton, polymer and electrode, wherein the piezoelectric ceramic skeleton comprises the ceramics pole on top and the substrate of bottom.The present invention has carried out further improvement to 1-3-2 type piezo-electricity composite material, on the basis of 1-3-2 type piezo-electricity composite material, adds the material of decoupling, thereby obtains many primitives piezo-electricity composite material of the present invention.The function that the material of decoupling has damping, sound insulation, absorbs sound, decouples, it is divided into a plurality of independently primitives to composite material, can intercept the transmission of acoustic vibration between each primitive effectively, thereby makes composite material become the array of being made up of a plurality of primitives.Each primitive of many primitives piezo-electricity composite material all can be launched sound wave independently, can launch multi-beam simultaneously by its transducer array that makes, and forms beam scanning, or forms specific beam direction, therefore is the ideal material of preparation transducer array element.
In above-mentioned many primitives piezo-electricity composite material, the filling mode of polymer in each primitive, loading are identical, and each primitive forms the array with same substrate by same substrate in combination together.The number of piezoelectric ceramic post and dimensional parameters can be regulated according to performance demands in each primitive; Because each primitive of many primitives piezo-electricity composite material all is identical; And between each primitive, add the material of decoupling, so its consistency, low coupling are all fine.
In above-mentioned many primitives piezo-electricity composite material, the said material of decoupling is a silica gel, and said polymer is an epoxy resin, and said upper and lower electrode is a silver electrode.Here the silica gel of usefulness is mould silica gel, in market, can buy concrete product.
Many primitives piezo-electricity composite material prepares through two step cutting-completion methods; Wherein each primitive structure is identical; It all is one two phase piezo-electricity composite material; These two phases piezo-electricity composite materials are combined by same piezoelectric ceramic substrate, form the array with same substrate, have guaranteed the ground requirement of high consistency and high stability effectively.Preparation technology is simple for many primitives piezo-electricity composite material, can cut into different formations as required, thereby has remedied the shortcoming and deficiency of the method for traditional fabrication transducer array.
The preparation method of many primitives of the present invention piezo-electricity composite material is characterized in that may further comprise the steps:
(1) on piezoelectric ceramic surface perpendicular to the piezoelectric ceramic polaxis, along orthogonal both direction cutting piezoelectric ceramic, get the piezoelectric ceramic skeleton, the top of gained skeleton is the piezoelectric ceramic post, the bottom is a piezoelectric ceramic substrate;
(2) the piezoelectric ceramic skeleton that cuts is cleaned up, the sample after wherein watering polymer injection, pouring vacuumizes the discharge bubble then, and normal temperature cure then gets piezoelectric ceramics/polymer 1-3 thing two-phase composite material;
(3) the piezoelectric ceramics/polymer 1-3 thing two-phase composite material that is cured carries out the cutting second time according to the method for step (1), and the composite material after the cutting cleans up;
(4) the piezoelectric ceramics/polymer 1-3 thing two-phase composite material after the cleaning is poured into a mould the material of decoupling, and the sample after pouring vacuumizes the discharge bubble, and normal temperature cure then gets the piezoelectric ceramics/polymer 1-3 thing/material three-phase composite material of decoupling;
(5) with the piezoelectric ceramics/polymer 1-3 thing/material three-phase composite material sanding and polishing of decoupling, then at the upper surface of each primitive lining top electrode, many primitives piezo-electricity composite material.
Above-mentioned many primitives piezo-electricity composite material is the three-phase composite material that is formed by piezoelectric ceramic, polymer and the material of decoupling, and in order further to simplify the preparation process, many primitives of the present invention piezo-electricity composite material also can be the two-phase composite material that is only formed by the piezoelectric ceramic and the material of decoupling; In this many primitives composite material; The material of decoupling promptly plays the effect of matrix, plays the effect of isolating each primitive again, and the material of promptly decoupling has replaced polymer; Each primitive is the line of demarcation with the material of decoupling; Be piezoelectric ceramic and the two-phase composite material that the material of decoupling forms in addition in each primitive, only need step cutting to accomplish so in the preparation, simple.
The present invention also provides a kind of many primitives piezo-electricity composite material of two phases; It is characterized in that: be skeleton with the piezoelectric ceramic; With the material of decoupling is matrix, and said piezoelectric ceramic skeleton comprises substrate and be positioned at the piezoelectric ceramic post on the substrate that the said material of decoupling is filled in and forms the piezoelectric ceramic/material composite material of decoupling in the piezoelectric ceramic skeleton; Has upper and lower electrode on the said piezoelectric ceramic/material composite material of decoupling; Wherein, top electrode is that border, discontinuous investing on the piezoelectric ceramic/material composite material of decoupling and with the piezoelectric ceramic/material composite material of decoupling are divided into the identical primitive of a plurality of structures with the material of decoupling, and all primitives form the array with same substrate.
In above-mentioned many primitives piezo-electricity composite material, filling mode, the loading of the material of decoupling in each primitive are identical, and each primitive forms the array with same substrate by same substrate in combination together.
In above-mentioned many primitives piezo-electricity composite material, the said material of decoupling is a silica gel, and said upper and lower electrode is a silver electrode.Here the silica gel of usefulness is mould silica gel, in market, can buy concrete product.
In order to simplify preparation technology, many primitives three-phase piezo-electricity composite material also can be two phase piezo-electricity composite materials, and material is directly filled as polymer with decoupling; The material of decoupling promptly plays the effect of matrix, plays the effect of isolating each primitive again, and each primitive is the line of demarcation with the material of decoupling; Technology is simpler; Just because the material of decoupling is an elastomeric material, hardness does not have the general polymerization thing big, may reduce the stability and the compressive property of material itself; But preparation technology is simple, and it may further comprise the steps:
(1) on piezoelectric ceramic surface perpendicular to the piezoelectric ceramic polaxis, along orthogonal both direction cutting piezoelectric ceramic, get the piezoelectric ceramic skeleton, the top of gained skeleton is the piezoelectric ceramic post, the bottom is a substrate;
(2) the piezoelectric ceramic skeleton that cuts is cleaned up, to wherein pouring into a mould the material of decoupling, the sample after pouring vacuumizes the discharge bubble then, and normal temperature cure then gets the piezoelectric ceramic/material two-phase composite material of decoupling;
(3) with the piezoelectric ceramic/material two-phase composite material sanding and polishing of decoupling, delimit the number of primitive according to demand, at the upper surface lining top electrode of each primitive, discontinuous between each primitive top electrode then, much final primitive piezo-electricity composite material.
Inventive point of the present invention is to lay particular emphasis on the consistency and low coupling of whole material, and it realizes that the key of above-mentioned advantage is through the material of decoupling whole composite material to be divided into a plurality of primitives, and property consistent with each other is good between each primitive, and coupling is low, and effect is fine.For single primitive; The difference of ceramics pole content can exert an influence to its single performance; But can not influence the consistency and the coupling of whole material, so the post of ceramics pole height, the thickness of substrate, ceramics pole length-width ratio can be selected in the prior art.For example, substrate thickness is unsuitable blocked up, also should not be too thin, and the too thick piezoelectricity dielectric property that can influence material etc., the too thin stability that can reduce material generally gets final product about 1.5mm.For example, the length and width size can be 1.5 * 1.5,1 * 1,1.5 * 3,2 * 1,4 * 1,1.5 * 1,2 * 4 etc., and those skilled in the art can carry out routine as required and select.In addition; The content of piezoelectric ceramic can be selected according to the performance requirement of required product in practical application; This selection should just can realize that for those skilled in the art the content of general piezoelectric ceramic accounts for more than 80% of entire product without creative work.Decouple the loading of material according to the difference of the size of the number of primitive, piezo-electricity composite material and difference can be confirmed according to actual conditions.
Exactly because the design feature of many primitives piezoceramic material; Thereby make its each primitive all can launch sound wave independently; Can launch multi-beam simultaneously by its transducer array that makes, form beam scanning, or form specific beam direction; Therefore be the ideal material of preparation transducer array element, such composite study has great importance with the research and development of exploitation to field of transducer.
The present invention adds the material of decoupling on the basis of original 1-3-2 type piezo-electricity composite material, form many primitives piezo-electricity composite material, and composite material preparation process is simple, and many primitives of gained piezo-electricity composite material excellent performance, high conformity, coupling are low.Each primitive in the composite material all can be launched sound wave independently, can launch multi-beam simultaneously by its transducer array that makes, and forms beam scanning, or forms specific beam direction, has broad application prospects in field of transducer.
Description of drawings
Fig. 1 is the structural representation of many primitives of the present invention piezo-electricity composite material;
Fig. 2 is the structural representation of existing 1-3-2 type piezo-electricity composite material;
Fig. 3 is many primitives of the present invention piezo-electricity composite material secondary cut process chart;
Fig. 4 is each primitive numbering sketch map of embodiment 1, embodiment primitive more than 2 piezo-electricity composite material;
Fig. 5 is the impedance characteristic of embodiment primitive more than 1 piezo-electricity composite material;
Fig. 6 is the response wave shape figure of embodiment 1 primitive 2#～4#;
Fig. 7 is the impedance characteristic of embodiment primitive more than 2 piezo-electricity composite material;
Fig. 8 is the response wave shape figure of embodiment 2 primitive 2#～4#;
Fig. 9 is embodiment 3 tested primitive sketch mapes;
Figure 10 is the impedance characteristic of embodiment primitive more than 3 piezo-electricity composite material;
Figure 11 is embodiment 3 tested primitive sketch mapes 1;
Figure 12 is embodiment 3 tested primitive sketch mapes 2;
Figure 13 is the response wave shape figure of embodiment 3 primitive 2#～6#;
Among the figure, 1, primitive, 2, the piezoelectric ceramic post, 3, the material of decoupling, 4, polymer, 5, electrode, 6, substrate.
Embodiment
Through specific embodiment the present invention is further set forth below, should be understood that, following explanation only is in order to explain the present invention, its content not to be limited.
Many elementary materials among the following embodiment adopt two-step method or one-step method cutting to form, and its step is following:
Adopt two step cutting-completion methods to prepare many primitives piezo-electricity composite material, may further comprise the steps:
First step cutting step:
(1) in the first half of piezoelectric ceramic; On piezoelectric ceramic surface,, get the piezoelectric ceramic skeleton along orthogonal both direction cutting piezoelectric ceramic perpendicular to the piezoelectric ceramic polaxis; The top of gained skeleton is the piezoelectric ceramic post, and the bottom is a piezoelectric ceramic substrate;
(2) the piezoelectric ceramic skeleton that cuts is put into supersonic wave cleaning machine and clean repeatedly, remove ceramic residue;
(3) the piezoelectric ceramic skeletal fixation after will cleaning is watered polymer injection in mould, and piezoelectric ceramic and mould that cast is good place vacuum tank to vacuumize, and treats after the complete emptying of bubble to obtain piezoelectric ceramics/polymer 1-3 thing two-phase composite material more than the normal temperature cure 12h;
The second step cutting step:
(1) carries out the cutting second time by the method for first step cutting along orthogonal direction again after the polymer full solidification;
(2) put into supersonic wave cleaning machine to the composite material skeleton that cuts and clean repeatedly, the pottery that produces in the removing cutting process and the residue of polymer;
(3) the composite material skeletal fixation after will cleaning is in mould, the cast material of decoupling, and the composite material that cast is good vacuumizes processing, discharges bubble, more than the normal temperature cure 12h, obtains the piezoelectric ceramics/polymer 1-3 thing/material three-phase composite material of decoupling;
After the cutting of (4) two steps is accomplished,, in the upper surface lining silver electrode of each primitive, promptly get many primitives of 1-3-2 type piezo-electricity composite material then with the sample sanding and polishing.
Adopt a step cutting-completion method to prepare many primitives piezo-electricity composite material, may further comprise the steps:
(1) in the first half of piezoelectric ceramic; On piezoelectric ceramic surface,, get the piezoelectric ceramic skeleton along orthogonal both direction cutting piezoelectric ceramic perpendicular to the piezoelectric ceramic polaxis; The top of gained skeleton is the piezoelectric ceramic post, and the bottom is a piezoelectric ceramic substrate;
(2) the piezoelectric ceramic skeleton that cuts is put into supersonic wave cleaning machine and clean repeatedly, remove ceramic residue;
(3) the piezoelectric ceramic skeletal fixation after will cleaning is in mould; Pour into a mould the material of decoupling; Piezoelectric ceramic and mould that cast is good place vacuum tank to vacuumize, and treat after the complete emptying of bubble to obtain the piezoelectric ceramic/material two-phase composite material of decoupling more than the normal temperature cure 12h;
(4) with two phase sample sanding and polishings, the number of dividing primitive then as required is a boundary in the upper surface lining silver electrode of each primitive with the material of decoupling, and UNICOM not between each primitive top electrode promptly gets many primitives of 1-3-2 type piezo-electricity composite material.
Adopt the PZT4 piezoelectric ceramic piece, piezoelectric constant
d 33Be 210pCN
-1, electromechanical coupling factor
K tBe 49.67%, mechanical quality factor
Q mBe 48.6, relative dielectric constant
ε rBe 999, material thickness is 15.1mm.Polymer adopts the epoxy resin (AB be in the milk resin) of good fluidity, and the ratio of epoxy resin and curing agent is 4:1.The material of decoupling is a HL-2288 type silica gel, and the filling width is 0.5mm, and the ratio of silica gel and curing agent is 1:0.02.According to aforementioned preparation process make the primitive number be 6 (3 * 2), each primitive to comprise the ceramics pole number be that 9 (3 * 3), each ceramics pole cross sectional dimensions are many primitives piezo-electricity composite material of 1.5mm * 1.5mm, the high 13.3mm of ceramics pole, ceramics pole volume fraction 52.29%, the thick 1.8mm of substrate, the performance of many primitives piezo-electricity composite material of acquisition is following:
(1) piezoelectricity, dielectric and mechanical-electric coupling performance
Table 1 is piezoelectricity, dielectric and the mechanical-electric coupling performance (each primitive numbering is like Fig. 4) of many primitives piezo-electricity composite material.Piezoelectricity, dielectric, mechanical-electric coupling performance by visible each primitive of table are all consistent, explain that the consistency of each primitive is better, and have inherited the advantage of 1-3 type piezo-electricity composite material, thickness electromechanical coupling coefficient K
tHigh, acoustic impedance Z is low, the pulse echo signal bandwidth is wide, is of value to practical application.
(2) frequency characteristic
The impedance characteristic of many primitives piezo-electricity composite material is as shown in Figure 5.Visible by figure, the frequency invariance of each primitive is better, all about 100kHz, calculates the relative frequency difference of each primitive and is 1.76% to the maximum, and I reaches 0.68%.Random peak, the not assorted peak of curve, frequency is 25kHz and 100 kHz places, has all occurred the sequence peak on the impedance characteristic of each primitive, these peaks are respectively plane resonance peak and thickness resonance peak.And curve smoothing between two peaks, illustrative material thickness mode is pure, helps practical application.
(3) coupling performance
With the coupling performance between signal generator and each primitive of oscilloscope test.The sine wave of signal generator tranmitting frequency 100kHz, peak value 10V, excitation primitive 1# vibrates, and records the response signal of primitive 1#～4# respectively.Fig. 6 is the response wave shape figure of primitive 2#～4#, and table 2 is the amplitude and the attenuation rate of each primitive response signal.It is thus clear that: along with each receives primitive and the increase that encourages the primitive distance, the response signal amplitude reduces, and rate of signal attenuation increases, and waveform is constant, and the response signal of excitation primitive itself does not decay.
Adopt the PZT4 piezoelectric ceramic piece, piezoelectric constant
d 33Be 210pCN
-1, electromechanical coupling factor
K tBe 49.67%, mechanical quality factor
Q mBe 48.6, relative dielectric constant
ε rBe 999, material thickness is 15.1mm.Polymer adopts the epoxy resin (AB be in the milk resin) of good fluidity, and epoxy resin is 4:1 with the quality of curing agent than ratio.The material of decoupling is a HL-2288 type silica gel, and the filling width is 0.5mm, and the ratio of silica gel and curing agent is 1:0.02.According to aforementioned preparation process make the primitive number be 6 (3 * 2), each primitive to comprise the ceramics pole number be that 9 (3 * 3), each ceramics pole cross sectional dimensions are many primitives piezo-electricity composite material of 1 mm * 1mm, the high 13.3mm of ceramics pole, ceramics pole volume fraction 42.06%, the thick 1.8mm of substrate, the performance of many primitives piezo-electricity composite material of acquisition is following:
(1) piezoelectricity, dielectric and mechanical-electric coupling performance
Table 3 is piezoelectricity, dielectric and the mechanical-electric coupling performance (each primitive numbering is like Fig. 4) of many primitives piezo-electricity composite material.Piezoelectricity, dielectric, mechanical-electric coupling performance by visible each primitive of table are all consistent, explain that the consistency of each primitive is better, and have inherited the advantage of 1-3 type piezo-electricity composite material, thickness electromechanical coupling coefficient K
tHigh, acoustic impedance Z is low, the pulse echo signal bandwidth is wide, is of value to practical application.
(2) frequency characteristic
The impedance characteristic of many primitives piezo-electricity composite material is as shown in Figure 7.By Tu Kede, the resonance frequency of each primitive is respectively 90.8kHz, 92.23 kHz, 91.16 kHz, 89.29 kHz, 89.56 kHz, 89.03 kHz, and relatively frequency difference is 2.09% to the maximum, and I reaches 0.5%, and the frequency invariance of visible composite material is better.All occurred the sequence peak on the impedance characteristic of each primitive, these peaks are respectively plane resonance peak and thickness resonance peak.And curve smoothing between two peaks, material thickness mode is pure, helps practical application.
(3) coupling performance
With the coupling performance between signal generator and each primitive of oscilloscope test.The sine wave of signal generator tranmitting frequency 100kHz, peak value 10V, excitation primitive 1# vibrates, and records the response signal of primitive 1#～4# respectively.Fig. 8 is the response wave shape figure of primitive 2#～4#, and table 4 is the amplitude and the attenuation rate of each primitive response signal.It is thus clear that: along with each receives primitive and the increase that encourages the primitive distance, the response signal amplitude reduces, and rate of signal attenuation increases, and waveform is constant, and the response signal of excitation primitive itself does not decay.
Adopt the PZT4 piezoelectric ceramic piece, piezoelectric constant
d 33Be 281pCN
-1, electromechanical coupling factor
K tBe 34.3%, relative dielectric constant
ε rBe 1121, material thickness is 15.5mm.Polymer all adopts HL-2288 type silica gel with the material of decoupling, and the ratio of silica gel and curing agent is 1:0.02.Because polymer is identical with the material of decoupling; So employing is once cut, once filling gets final product; Making the primitive number and be 45 (9 * 5), each primitive, to comprise the ceramics pole number be that 9 (3 * 3), each ceramics pole cross sectional dimensions are many primitives piezo-electricity composite material of 2mm * 2mm, the high 13.5mm of ceramics pole, ceramics pole volume fraction 64.36%, the thick 2mm of substrate, and the performance of many primitives piezo-electricity composite material of acquisition is following:
(1) piezoelectricity, dielectric and mechanical-electric coupling performance
Select 5 primitives (as shown in Figure 7) at random, the piezoelectricity of each primitive, dielectric and mechanical-electric coupling performance are seen table 5.Can know that by table the piezoelectricity of each primitive, dielectric, mechanical-electric coupling performance are all consistent, explain that the consistency of each primitive is better.And thickness electromechanical coupling coefficient
K t High, acoustic impedance
ZLow, the pulse echo signal bandwidth is wide.
(2) frequency characteristic
The impedance characteristic of many primitives piezo-electricity composite material such as Fig. 8.Visible by figure; The frequency invariance of each primitive is better; Be respectively 98.17 kHz, 99.18 kHz, 97.17 kHz, 97.17 kHz, 97.20 kHz, all occurred the sequence peak on the impedance characteristic of each primitive, these peaks are respectively plane resonance peak and thickness resonance peak.Curve smoothing between two peaks, thickness mode is pure, helps practical application.
(3) coupling performance
Select a panel region (as shown in Figure 9) at random, by the sine wave of signal generator tranmitting frequency 100kHz, peak value 5V, excitation primitive 1# vibrates, and records the response signal of primitive 1#～9# respectively.The response voltage and the attenuation rate that record each primitive are as shown in table 6.By Biao Kede, signal attenuation has in various degree all taken place in the primitive that closes on of excitation primitive, and attenuation rate is all bigger, explains that the effect of decoupling of silica gel is remarkable.
Select a row primitive (shown in figure 10) at random; By the sine wave of signal generator tranmitting frequency 100kHz, crest voltage 5V, excitation primitive 1# vibrates, and records the response signal of primitive 1#～6# respectively with oscilloscope; Shown in figure 11, table 7 is the amplitude and the attenuation rate of each primitive response signal.It is thus clear that: along with the increase response signal amplitude of each primitive with excitation primitive distance reduces, rate of signal attenuation increases, and waveform is constant, and the response signal of excitation primitive itself does not decay.
Claims (9)
1. primitive piezo-electricity composite material more than a kind; It is characterized in that: the 1-3-2 type composite material that said many primitives piezo-electricity composite material is made up of the piezoelectric ceramics/polymer 1-3 thing composite material and the material of decoupling; Said piezoelectric ceramics/polymer 1-3 thing composite material is skeleton with the piezoelectric ceramic; With the polymer is matrix, and with upper and lower electrode, said piezoelectric ceramic skeleton comprises substrate and the piezoelectric ceramic post that is connected on it; The said material of decoupling is filled in the piezoelectric ceramics/polymer 1-3 thing composite material and with piezoelectric ceramics/polymer 1-3 thing composite material and is divided into the identical primitive of a plurality of structures, and the top electrode of each primitive is discontinuous.
2. many primitives piezo-electricity composite material according to claim 1 is characterized in that: the filling mode of polymer in each primitive, loading are identical, and each primitive forms the array with same substrate by same substrate in combination together.
3. many primitives piezo-electricity composite material according to claim 1 is characterized in that: the said material of decoupling is a silica gel, and said polymer is an epoxy resin, and said upper and lower electrode is a silver electrode.
4. the preparation method of the described many primitives piezo-electricity composite material of claim 1 is characterized in that may further comprise the steps:
(1) on piezoelectric ceramic surface perpendicular to the piezoelectric ceramic polaxis, along orthogonal both direction cutting piezoelectric ceramic, get the piezoelectric ceramic skeleton, the top of gained skeleton is the piezoelectric ceramic post, the bottom is a piezoelectric ceramic substrate;
(2) the piezoelectric ceramic skeleton that cuts is cleaned up, the sample after wherein watering polymer injection, pouring vacuumizes the discharge bubble then, and normal temperature cure then gets piezoelectric ceramics/polymer 1-3 thing two-phase composite material;
(3) the piezoelectric ceramics/polymer 1-3 thing two-phase composite material that is cured carries out the cutting second time according to the method for step (1), and the composite material after the cutting cleans up;
(4) the piezoelectric ceramics/polymer 1-3 thing two-phase composite material after the cleaning is poured into a mould the material of decoupling, and the sample after pouring vacuumizes the discharge bubble, and normal temperature cure then gets the piezoelectric ceramics/polymer 1-3 thing/material three-phase composite material of decoupling;
(5) with the piezoelectric ceramics/polymer 1-3 thing/material three-phase composite material sanding and polishing of decoupling, then at the upper surface of each primitive lining top electrode, many primitives piezo-electricity composite material.
5. primitive piezo-electricity composite material more than a kind; It is characterized in that: be skeleton with the piezoelectric ceramic; With the material of decoupling is matrix, and said piezoelectric ceramic skeleton comprises substrate and be positioned at the piezoelectric ceramic post on the substrate that the said material of decoupling is filled in and forms the piezoelectric ceramic/material composite material of decoupling in the piezoelectric ceramic skeleton; Has upper and lower electrode on the said piezoelectric ceramic/material composite material of decoupling; Wherein, top electrode is that border, discontinuous investing on the piezoelectric ceramic/material composite material of decoupling and with the piezoelectric ceramic/material composite material of decoupling are divided into the identical primitive of a plurality of structures with the material of decoupling, and all primitives form the array with same substrate.
6. many primitives piezo-electricity composite material according to claim 5 is characterized in that: filling mode, the loading of the material of decoupling in each primitive are identical.
7. many primitives piezo-electricity composite material according to claim 5 is characterized in that: the said material of decoupling is a silica gel, and said electrode is a silver electrode.
8. the preparation method of the described many primitives piezo-electricity composite material of claim 5 is characterized in that may further comprise the steps:
(1) on piezoelectric ceramic surface perpendicular to the piezoelectric ceramic polaxis, along orthogonal both direction cutting piezoelectric ceramic, get the piezoelectric ceramic skeleton, the top of gained skeleton is the piezoelectric ceramic post, the bottom is a substrate;
(2) the piezoelectric ceramic skeleton that cuts is cleaned up, to wherein pouring into a mould the material of decoupling, the sample after pouring vacuumizes the discharge bubble then, and normal temperature cure then gets the piezoelectric ceramic/material two-phase composite material of decoupling;
(3) with the piezoelectric ceramic/material two-phase composite material sanding and polishing of decoupling, delimit the number of primitive according to demand, at the upper surface lining top electrode of each primitive, discontinuous between each primitive top electrode then, much final primitive piezo-electricity composite material.
9. the application of a claim 1 or 5 described many primitives piezo-electricity composite materials is characterized in that: as the material of preparation transducer array element.
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| CN105405963A (en) * | 2015-12-23 | 2016-03-16 | 济南大学 | Gradient piezoelectric fiber composite material and preparation method thereof |
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| CN104393164B (en) * | 2014-10-23 | 2017-05-17 | 北京信息科技大学 | Manufacturing method of 1-1-3 piezoelectric composite material |
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| CN112530395A (en) * | 2020-11-18 | 2021-03-19 | 中国空气动力研究与发展中心 | Low-frequency broadband piezoelectric acoustic metamaterial layout structure and layout method |
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| CN110137339A (en) * | 2019-03-25 | 2019-08-16 | 中国船舶重工集团公司第七一五研究所 | A kind of triangle array element piezo-electricity composite material energy converter preparation method |
| CN110012402A (en) * | 2019-03-25 | 2019-07-12 | 中国船舶重工集团公司第七一五研究所 | A kind of extensional vibration composite transducers |
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| CN112530395A (en) * | 2020-11-18 | 2021-03-19 | 中国空气动力研究与发展中心 | Low-frequency broadband piezoelectric acoustic metamaterial layout structure and layout method |
| CN112530395B (en) * | 2020-11-18 | 2023-04-14 | 中国空气动力研究与发展中心 | Low-frequency broadband piezoelectric acoustic metamaterial layout structure and layout method |
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