CN102420541A - Piezoelectric ceramic driving power supply and driving method - Google Patents
Piezoelectric ceramic driving power supply and driving method Download PDFInfo
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- CN102420541A CN102420541A CN2011104216270A CN201110421627A CN102420541A CN 102420541 A CN102420541 A CN 102420541A CN 2011104216270 A CN2011104216270 A CN 2011104216270A CN 201110421627 A CN201110421627 A CN 201110421627A CN 102420541 A CN102420541 A CN 102420541A
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Abstract
The invention discloses a piezoelectric ceramic driving power supply and a driving method. The piezoelectric ceramic driving power supply comprises a pulse width modulation (PWM) driving module, an output stage circuit and a feedback closed loop circuit, wherein the feedback closed loop circuit comprises a voltage feedback closed loop circuit and a current feedback closed loop circuit. The displacement of piezoelectric ceramics and the quantity of electric charges on the piezoelectric ceramics are in linear relation, namely the displacement of the piezoelectric ceramics and current flowing through the piezoelectric ceramics are in the linear relation; however, the displacement of the piezoelectric ceramics and voltage on the piezoelectric ceramics are in nonlinear relation. In the piezoelectric ceramic driving power supply and the driving method in the embodiment of the invention, the current feedback closed loop circuit is arranged, and the voltage feedback closed loop circuit and the current feedback closed loop circuit control a voltage signal output by the piezoelectric ceramic driving power supply according to a voltage signal and a current signal on the piezoelectric ceramics, thereby avoiding hysteresis and improving linear control accuracy.
Description
Technical field
The application relates to the driving power technical field, particularly relates to drive power supply for piezoelectric ceramics and driving method.
Background technology
Continuous expansion along with science and technology development and research field; The application demand of nanometer positioning system more and more widely; Piezoelectric ceramic has high, the characteristics such as frequency response is high, noiseless, no heating of the little displacement resolution of volume as the new material of nanoscale positioning field, is a kind of desirable micrometric displacement element; Drive power supply for piezoelectric ceramics is the drive part of piezoelectric ceramic, also is the core of piezoelectric ceramic.
Through the research to prior art, the inventor finds: it is not high that traditional pulse-width modulation driving power all is based on Voltage Feedback Linear Control precision, has hysteresis phenomenon.
Summary of the invention
For solving the problems of the technologies described above, the application embodiment provides a kind of drive power supply for piezoelectric ceramics and driving method, and to solve the problem that existing drive power supply for piezoelectric ceramics Linear Control precision is not high, have hysteresis phenomenon, technical scheme is following:
A kind of drive power supply for piezoelectric ceramics comprises: pulse-width modulation PWM driver module, output-stage circuit and feedback closed loop circuit, wherein:
The first input end of said PWM driver module links to each other with the output of said feedback closed loop circuit; The input of second input has preset reference voltage; The output of said PWM driver module links to each other with said output-stage circuit, and this PWM driver module offers said output-stage circuit according to the feedback signal of telecommunication and the generation of the difference between the said reference voltage corresponding driving voltage signal of said feedback closed loop circuit output;
The voltage signal that said output-stage circuit provides said PWM driver module carries out filtering rear drive piezoelectric ceramic;
Said feedback closed loop circuit comprises: Voltage Feedback closed loop circuit and current feedback closed loop circuit, wherein:
Said Voltage Feedback closed loop circuit is connected between the first input end of output and said PWM driver module of said output-stage circuit, and the voltage signal of the said piezoelectric ceramic end that is used to sample also feeds back to said PWM driver module;
Said current feedback closed loop circuit is used for the current signal that sample streams is crossed said piezoelectric ceramic, and the current sampling signal and the reference current signal difference signal of telecommunication are fed back to said PWM driver module.
Preferably, said current feedback closed loop circuit comprises: current sampling resistor, first resistance, first electric capacity, second resistance and second electric capacity, wherein:
Said current sampling resistor is series at said piezoelectric ceramic and with reference between the ground, and the end that links to each other with said piezoelectric ceramic of this current sampling resistor is connected the first input end of said PWM driver module with first electric capacity through said first resistance of series connection successively;
Said second electric capacity is connected successively with said second resistance and is then linked to each other with the first input end of said PWM driver module, and the end input that said second electric capacity is not connected with said second resistance has reference current.
Preferably, said output-stage circuit comprises the 3rd resistance and first inductance, wherein, said first inductance be connected between the output and piezoelectric ceramic of said PWM driver module after said the 3rd resistance is connected in series.
Preferably, said PWM driver module comprises: error integrator, pwm signal generation module and half-bridge drive circuit, wherein:
The inverting input of said error integrator is the first input end of said PWM driver module; In-phase input end is second input of said PWM driver module; Output links to each other with the input of said pwm signal generation module; Be connected phase compensating network between the inverting input of said error integrator and the output, this phase compensating network comprises the 4th resistance and the 3rd electric capacity of series connection;
The output of said pwm signal generation module links to each other with the control end of said half-bridge drive circuit, and the pwm signal that said pwm signal generation module produces is used to drive said half-bridge drive circuit;
The output of said half-bridge drive circuit links to each other with the input of said output-stage circuit as the output of said PWM driver module, and this half-bridge drive circuit is used to produce the voltage signal that drives said piezoelectric ceramic.
Preferably, said half-bridge drive circuit comprises: the first gold oxygen semiconductor field effect transistor metal-oxide-semiconductor and second metal-oxide-semiconductor, wherein:
The grid of said first metal-oxide-semiconductor links to each other with the output of said pwm signal generation module; The drain electrode input has DC power supply; Source electrode links to each other with the source electrode of said second metal-oxide-semiconductor; Be connected with first diode between the source electrode of said first metal-oxide-semiconductor and the drain electrode, and the anode of this first diode links to each other with the source electrode of said first metal-oxide-semiconductor, negative electrode links to each other with the drain electrode of said first metal-oxide-semiconductor;
The grid of said second metal-oxide-semiconductor links to each other with the output of said pwm signal generation module through inverter; And the input of said inverter links to each other with the output of said pwm signal generation module; The output of inverter links to each other with the grid of said second metal-oxide-semiconductor; The source electrode of second metal-oxide-semiconductor connects with reference to the ground end; And be connected second diode between the source electrode of this second metal-oxide-semiconductor and the drain electrode, and the anode of second diode links to each other with the source electrode of said second metal-oxide-semiconductor, negative electrode links to each other with the drain electrode of said second metal-oxide-semiconductor.
Preferably, also comprise: energy recovering circuit, this energy recovering circuit comprises: energy storage inductor, first switch, second switch, the 3rd diode, the 4th diode, wherein:
Said first switch and said second switch are connected in series between the output and reference ground end of said PWM driver module;
Connecting with said energy storage inductor after said the 3rd diode and said the 4th diode inverse parallel constitutes a series connection branch road, and an end of this series arm links to each other with said piezoelectric ceramic, and the other end links to each other with the common port of second switch with said first switch.
Preferably, said energy recovering circuit also comprises: the 3rd switch of connecting with said the 3rd diode, and the 4th switch of connecting with said the 4th diode.
Preferably, said energy recovering circuit also comprises: be connected the output of said PWM driver module and the 5th switch between the said piezoelectric ceramic, and be connected said the 5th switch and with reference to the 6th switch between the ground.
The present invention also provides a kind of Piezoelectric Ceramic method, comprising:
Obtain voltage feedback signal and the corresponding voltage signal of current feedback signal on the piezoelectric ceramic;
Produce control signal according to the voltage of said voltage feedback signal, said current feedback signal correspondence and preset reference voltage;
Utilize said control signal to produce corresponding pwm pulse signal and drive the PWM drive circuit, produce drive voltage signal with the drive pressure electroceramics.
Preferably, above-mentioned Piezoelectric Ceramic method also comprises, utilizes energy recovering circuit to reclaim the energy on the piezoelectric ceramic.
Technical scheme by above the application embodiment provides is visible, and said drive power supply for piezoelectric ceramics comprises PWM driver module, output-stage circuit and feedback closed loop circuit, and wherein, the feedback closed loop circuit comprises Voltage Feedback closed loop circuit and current feedback closed loop circuit.Because the displacement and the quantity of electric charge on the piezoelectric ceramic of piezoelectric ceramic are linear; The displacement that is piezoelectric ceramic is linear with the electric current that flows through piezoelectric ceramic; But the displacement of piezoelectric ceramic and the voltage on it present non-linear relation, and drive power supply for piezoelectric ceramics that the embodiment of the invention provides and driving method have increased the current feedback closed loop circuit; Adopt Voltage Feedback and current feedback double-loop circuit; According to the voltage signal of voltage signal on the piezoelectric ceramic and the output of current signal control drive power supply for piezoelectric ceramics, thereby eliminate hysteresis phenomenon, improved the Linear Control precision.
Description of drawings
In order to be illustrated more clearly in the application embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment that put down in writing among the application, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the theory diagram of the application embodiment drive power supply for piezoelectric ceramics;
Fig. 2 is the electrical block diagram of a kind of drive power supply for piezoelectric ceramics of the application embodiment;
Fig. 3 is the structural representation of the application embodiment energy recovering circuit;
Fig. 4 is the structural representation of the another kind of energy recovering circuit of the application embodiment;
Fig. 5 is the flow chart of a kind of Piezoelectric Ceramic method of the application embodiment.
Embodiment
In order to make those skilled in the art person understand the technical scheme among the application better; To combine the accompanying drawing among the application embodiment below; Technical scheme among the application embodiment is carried out clear, intactly description; Obviously, described embodiment only is the application's part embodiment, rather than whole embodiment.Based on the embodiment among the application, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all should belong to the scope of the application's protection.
See also Fig. 1, show the theory diagram of a kind of drive power supply for piezoelectric ceramics that the application embodiment provides.
Said drive power supply for piezoelectric ceramics comprises: PWM driver module 1, output-stage circuit 2, feedback closed loop circuit 3, wherein:
Said PWM driver module 1 comprises first input end, second input and output; Said output-stage circuit 2 comprises input and output; Said feedback closed loop circuit 3 comprises: Voltage Feedback closed loop circuit 31 and current feedback closed loop circuit 32.
The first input end of said PWM driver module 1 links to each other with the output of said feedback closed loop circuit 3, and the input of second input has preset reference voltage, and output links to each other with the input of said output-stage circuit 2; The output of said output-stage circuit 2 is connected with piezoelectric ceramic 4, is used for the drive pressure electroceramics; Said Voltage Feedback closed loop circuit 31 is connected between the first input end of output and PWM driver module 1 of output-stage circuit 2, and the voltage on the said piezoelectric ceramic 4 that is used to sample also feeds back to said PWM driver module 1; Said current feedback closed loop circuit 32 is used for the current signal that sample streams is crossed piezoelectric ceramic, and the difference between this sample rate current signal and the preset reference current signal is fed back to said PWM driver module.
Concrete, said PWM driver module 1 is specially and can produces control signal according to reference voltage signal and feedback signal, and control produces the pulse duration of pwm pulse signal, and then the unit or the device of the size of the voltage signal of control Driver Circuit output.
The drive power supply for piezoelectric ceramics that present embodiment provides, according to voltage feedback signal, current feedback signal, and preset reference voltage, the size of the voltage signal of the drive pressure electroceramics of control output makes its numerical value near said preset reference voltage.Compare with existing drive power supply for piezoelectric ceramics; The drive power supply for piezoelectric ceramics of present embodiment adopts Voltage Feedback and current feedback double closed-loop control system; Voltage signal according to voltage signal on the piezoelectric ceramic and the output of current signal control drive power supply for piezoelectric ceramics; Thereby eliminated hysteresis phenomenon, improved the Linear Control precision.
See also Fig. 2, show the electrical block diagram of a kind of drive power supply for piezoelectric ceramics of present embodiment.
Concrete, said PWM driver module comprises: error integrator 11, pwm signal generation module 12, half-bridge drive circuit 13, wherein:
Said error integrator 11 specifically can be realized through operational amplifier; Its inverting input is as the first input end input feedback signal of PWM driver module; In-phase input end has preset reference voltage Vref as second input input of PWM driver module; The input that output connects said pwm signal generation module 12 links to each other; And, between the inverting input of said error integrator 11 and output, being connected with phase compensating network, said phase compensating network comprises the 4th resistance R 4 and the 3rd capacitor C 3 that is connected in series; This phase compensating network is used to compensate the capacity current that is produced by capacitive load, thereby makes this drive power supply for piezoelectric ceramics satisfy stability requirement.The difference that this error integrator is used to obtain to feed back between the signal of telecommunication and the preset reference voltage offers said pwm signal generation module 12 as control signal, and said control signal is used to control the pulse duration of the pwm pulse signal that said pwm signal generation module produced.
The pwm pulse signal that said pwm signal generation module 12 produces is used for driving the switching tube of said half-bridge drive circuit 13, after the voltage signal that obtains carries out filtering through output-stage circuit 2, and the drive pressure electroceramics.
Preferably, said half-bridge drive circuit 13 comprises first metal-oxide-semiconductor 14 and second metal-oxide-semiconductor 15, wherein:
The grid of first metal-oxide-semiconductor 14 links to each other with the output of said pwm signal generation module 12; Drain electrode links to each other with DC power supply VDD; Source electrode links to each other with the drain electrode of second metal-oxide-semiconductor 15; Be connected with the first diode D1 between the drain electrode of first metal-oxide-semiconductor 14 and the source electrode, its anode connects the source electrode of first metal-oxide-semiconductor 14, and negative electrode connects the drain electrode of first metal-oxide-semiconductor 14;
The source electrode of said second metal-oxide-semiconductor 15 connects with reference to the ground end; Grid connects the output of pwm signal generation module 12 through inverter 16; The input of inverter 16 links to each other with the output of pwm signal generation module, and the output of inverter 16 links to each other with the grid of second metal-oxide-semiconductor 15.Be connected with the second diode D2 between the drain electrode of second metal-oxide-semiconductor 15 and the source electrode, and the anode of the second diode D2 links to each other with the source electrode of second metal-oxide-semiconductor 15, negative electrode links to each other with the drain electrode of second metal-oxide-semiconductor 15.
Said first metal-oxide-semiconductor and second metal-oxide-semiconductor all can be N type metal-oxide-semiconductor, when pwm signal generation module 12 output high level signals, and 14 conductings of first metal-oxide-semiconductor, second metal-oxide-semiconductor ends, and the voltage signal of these half-bridge drive circuit 13 outputs is DC power supply VDD; When pwm signal generation module 12 output low level signals, first metal-oxide-semiconductor 14 ends, and through second metal-oxide-semiconductor, 15 conductings behind the inverter inverting function, the voltage signal of half-bridge drive circuit 13 outputs is with reference to the voltage on ground.
Said output-stage circuit comprises the 3rd resistance R 3 and first inductance L 1 that is connected in series; One end of said first inductance L 1 connects the common port of said first metal-oxide-semiconductor 14 and second metal-oxide-semiconductor 15; The other end links to each other with an end of the 3rd resistance R 3, and the other end of said the 3rd resistance R 3 and said piezoelectric ceramic 4 connect, because piezoelectric ceramic 4 itself can equivalence be a capacitor C; The capacitor C and first inductance L 1 constitute filter circuit, are used for the interference signal of the voltage signal of filtering half-bridge drive circuit output.
Said Voltage Feedback closed loop circuit comprises the first sampling resistor R5 and the second sampling resistor R6 that is connected in series; The end of the said first sampling resistor R5 links to each other with an end of piezoelectric ceramic 4; The other end of the first sampling resistor R5 links to each other with the end of the second sampling resistor R6; And the other end of the first sampling resistor R5 is connected to the inverting input of said error integrator 11; The other end of the second sampling resistor R5 connects with reference to the ground end, and the voltage sampling signal on the second sampling resistor R6 is fed back to error integrator 11.
Said current feedback closed loop circuit comprises current sampling resistor R7, first resistance R 1, first capacitor C 1, second resistance R 2, second capacitor C 2, wherein:
Said current sampling resistor R7 is serially connected in said piezoelectric ceramic 4 and with reference between the ground; And the end that this current sampling resistor R7 is connected with piezoelectric ceramic 4 links to each other with the inverting input of said error integrator 11 with first capacitor C 1 through first resistance R 1 that is connected in series, and the current sampling signal on the piezoelectric ceramic 4 converts the correspondent voltage signal into after through first resistance R 1 and first capacitor C 1;
Said second resistance R 2 and the second capacitor C 2 formation series arm that is connected in series; One end of series arm links to each other with the inverting input of said error integrator 11; Other end input has preset reference current Iref, and this reference current Iref converts the correspondent voltage signal into after through second resistance R 2 and second capacitor C 2.
This current feedback closed loop circuit 32; The difference that current sampling signal on the piezoelectric ceramic and the preset corresponding voltage signal of reference current signal Iref are relatively obtained; Superpose with voltage feedback signal; After feed back to error integrator 11, the difference signal after feedback signal that error integrator 11 obtains stack and said preset reference voltage signal Vref compare offers the pwm signal generation module as control signal.
Present embodiment provides the particular circuit configurations of drive power supply for piezoelectric ceramics; Adopt Voltage Feedback and current feedback double-loop circuit; Voltage signal according to voltage signal on the piezoelectric ceramic and the output of current signal control drive power supply for piezoelectric ceramics; Thereby eliminated hysteresis phenomenon, improved the Linear Control precision.
See also Fig. 3, show the structural representation of the another kind of drive power supply for piezoelectric ceramics of the application embodiment, the embodiment corresponding with Fig. 2 compares, and this drive power supply for piezoelectric ceramics also comprises energy recovering circuit.
Concrete, this energy recovering circuit 5 comprises: said first inductance L 1, first switch S 1, second switch S2 the 3rd diode D3 and the 4th diode D4, wherein:
Concrete, when piezoelectric ceramic 4 is charged, first switch S, 1 closure, second switch S2 breaks off, and is the piezoelectric ceramic charging through the 3rd diode D3 and energy storage inductor L2; During piezoelectric ceramic 4 discharges, second switch S2 is closed, and first switch S 1 is broken off, and piezoelectric ceramic 4 discharges through energy storage inductor L2 and the 4th diode D4, converts the electric field energy in the piezoelectric ceramic into magnetic field energy and is stored among the energy storage inductor L2.
Preferably, see also Fig. 4, this energy recovering circuit also comprises: the 3rd switch S 3 of connecting with said the 3rd diode D3, and the 4th switch S 4 of connecting with said the 4th diode D4.When being the charging of said piezoelectric ceramic, said the 3rd switch S 3 closures; When said piezoelectric ceramic discharges, the 4th switch S 4 closures.
Said energy recovering circuit also comprises: be connected the output of said PWM driver module and the 5th switch S 5 between the said piezoelectric ceramic 4; And the 6th switch S 6 between holding with being connected said the 5th switch S 5 and reference; Wherein, In the time need not charging through 1 pair of said piezoelectric ceramic 4 of first inductance L, the 5th switch S 5 closures; When said piezoelectric ceramic 4 need not discharge through first inductance L 1, the 6th switch S 6 closures.
The drive power supply for piezoelectric ceramics that present embodiment provides has been set up energy recovering circuit, and in each course of work of piezoelectric ceramic, the piezoelectric ceramic charging finishes; Terminal voltage slowly descends after the outage; Therefore electric charge can be preserved a period of time in the inside of piezoelectric ceramic, and said energy recovering circuit can reclaim this part electric field energy timely and effectively, and utilizes again; Thereby improved electric energy utilance, improved the efficient of piezoelectric ceramic, reduced the power loss of piezoelectric ceramic.
Corresponding to above-mentioned drive power supply for piezoelectric ceramics embodiment, the application also provides a kind of Piezoelectric Ceramic method embodiment, specifically comprises:
S101 obtains voltage feedback signal and the corresponding voltage signal of current feedback signal on the piezoelectric ceramic;
S102 produces control signal according to the voltage of said voltage feedback signal, said current feedback signal correspondence and preset reference voltage;
S103 utilizes said control signal to produce corresponding pwm pulse signal and drives the PWM drive circuit, produces drive voltage signal with the drive pressure electroceramics.
Preferably, this method also comprises, S104 utilizes energy recovering circuit to recycle the electric energy in the said piezoelectric ceramic.
Need to prove; In this article; Relational terms such as first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint relation or the order that has any this reality between these entities or the operation.
The above only is the application's a embodiment; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the application's principle; Can also make some improvement and retouching, these improvement and retouching also should be regarded as the application's protection range.
Claims (10)
1. a drive power supply for piezoelectric ceramics is characterized in that, comprising: pulse-width modulation PWM driver module, output-stage circuit and feedback closed loop circuit, wherein:
The first input end of said PWM driver module links to each other with the output of said feedback closed loop circuit; The input of second input has preset reference voltage; The output of said PWM driver module links to each other with said output-stage circuit, and this PWM driver module offers said output-stage circuit according to the feedback signal of telecommunication and the generation of the difference between the said reference voltage corresponding driving voltage signal of said feedback closed loop circuit output;
The voltage signal that said output-stage circuit provides said PWM driver module carries out filtering rear drive piezoelectric ceramic;
Said feedback closed loop circuit comprises: Voltage Feedback closed loop circuit and current feedback closed loop circuit, wherein:
Said Voltage Feedback closed loop circuit is connected between the first input end of output and said PWM driver module of said output-stage circuit, and the voltage signal of the said piezoelectric ceramic end that is used to sample also feeds back to said PWM driver module;
Said current feedback closed loop circuit is used for the current signal that sample streams is crossed said piezoelectric ceramic, and the current sampling signal and the reference current signal difference signal of telecommunication are fed back to said PWM driver module.
2. drive power supply for piezoelectric ceramics according to claim 1 is characterized in that, said current feedback closed loop circuit comprises: current sampling resistor, first resistance, first electric capacity, second resistance and second electric capacity, wherein:
Said current sampling resistor is series at said piezoelectric ceramic and with reference between the ground, and the end that links to each other with said piezoelectric ceramic of this current sampling resistor is connected the first input end of said PWM driver module with first electric capacity through said first resistance of series connection successively;
Said second electric capacity is connected successively with said second resistance and is then linked to each other with the first input end of said PWM driver module, and the end input that said second electric capacity is not connected with said second resistance has reference current.
3. drive power supply for piezoelectric ceramics according to claim 1; It is characterized in that; Said output-stage circuit comprises the 3rd resistance and first inductance, wherein, said first inductance be connected between the output and piezoelectric ceramic of said PWM driver module after said the 3rd resistance is connected in series.
4. drive power supply for piezoelectric ceramics according to claim 1 is characterized in that, said PWM driver module comprises: error integrator, pwm signal generation module and half-bridge drive circuit, wherein:
The inverting input of said error integrator is the first input end of said PWM driver module; In-phase input end is second input of said PWM driver module; Output links to each other with the input of said pwm signal generation module; Be connected phase compensating network between the inverting input of said error integrator and the output, this phase compensating network comprises the 4th resistance and the 3rd electric capacity of series connection;
The output of said pwm signal generation module links to each other with the control end of said half-bridge drive circuit, and the pwm signal that said pwm signal generation module produces is used to drive said half-bridge drive circuit;
The output of said half-bridge drive circuit links to each other with the input of said output-stage circuit as the output of said PWM driver module, and this half-bridge drive circuit is used to produce the voltage signal that drives said piezoelectric ceramic.
5. drive power supply for piezoelectric ceramics according to claim 4 is characterized in that, said half-bridge drive circuit comprises: the first gold oxygen semiconductor field effect transistor metal-oxide-semiconductor and second metal-oxide-semiconductor, wherein:
The grid of said first metal-oxide-semiconductor links to each other with the output of said pwm signal generation module; The drain electrode input has DC power supply; Source electrode links to each other with the source electrode of said second metal-oxide-semiconductor; Be connected with first diode between the source electrode of said first metal-oxide-semiconductor and the drain electrode, and the anode of this first diode links to each other with the source electrode of said first metal-oxide-semiconductor, negative electrode links to each other with the drain electrode of said first metal-oxide-semiconductor;
The grid of said second metal-oxide-semiconductor links to each other with the output of said pwm signal generation module through inverter; And the input of said inverter links to each other with the output of said pwm signal generation module; The output of inverter links to each other with the grid of said second metal-oxide-semiconductor; The source electrode of second metal-oxide-semiconductor connects with reference to the ground end; And be connected second diode between the source electrode of this second metal-oxide-semiconductor and the drain electrode, and the anode of second diode links to each other with the source electrode of said second metal-oxide-semiconductor, negative electrode links to each other with the drain electrode of said second metal-oxide-semiconductor.
6. according to each described drive power supply for piezoelectric ceramics of claim 1-5, it is characterized in that, also comprise: energy recovering circuit, this energy recovering circuit comprises: energy storage inductor, first switch, second switch, the 3rd diode, the 4th diode, wherein:
Said first switch and said second switch are connected in series between the output and reference ground end of said PWM driver module;
Connecting with said energy storage inductor after said the 3rd diode and said the 4th diode inverse parallel constitutes a series connection branch road, and an end of this series arm links to each other with said piezoelectric ceramic, and the other end links to each other with the common port of second switch with said first switch.
7. drive power supply for piezoelectric ceramics according to claim 6 is characterized in that, said energy recovering circuit also comprises: the 3rd switch of connecting with said the 3rd diode, and the 4th switch of connecting with said the 4th diode.
8. drive power supply for piezoelectric ceramics according to claim 6; It is characterized in that; Said energy recovering circuit also comprises: be connected the output of said PWM driver module and the 5th switch between the said piezoelectric ceramic, and be connected said the 5th switch and with reference to the 6th switch between the ground.
9. a Piezoelectric Ceramic method is characterized in that, comprising:
Obtain voltage feedback signal and the corresponding voltage signal of current feedback signal on the piezoelectric ceramic;
Produce control signal according to the voltage of said voltage feedback signal, said current feedback signal correspondence and preset reference voltage;
Utilize said control signal to produce corresponding pwm pulse signal and drive the PWM drive circuit, produce drive voltage signal with the drive pressure electroceramics.
10. Piezoelectric Ceramic method according to claim 9 is characterized in that, also comprises utilizing energy recovering circuit to reclaim the energy on the piezoelectric ceramic.
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| CN104993736A (en) * | 2015-07-03 | 2015-10-21 | 南京航空航天大学 | Ultrasonic motor driving control device and control method |
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| CN105386912B (en) * | 2015-10-12 | 2017-11-03 | 中国第一汽车股份有限公司无锡油泵油嘴研究所 | The piezo injector drive device of energy on-line control |
| US11362259B2 (en) | 2015-11-12 | 2022-06-14 | Epcos Ag | Control circuit and method for controlling a piezoelectric transformer |
| CN108352438A (en) * | 2015-11-12 | 2018-07-31 | 埃普科斯股份有限公司 | Control circuit and method for manipulating piezoelectric transformer |
| CN108352438B (en) * | 2015-11-12 | 2022-04-15 | 埃普科斯股份有限公司 | Control circuit and method for controlling a piezoelectric transformer |
| CN107612324B (en) * | 2017-06-14 | 2019-12-06 | 成都芯源系统有限公司 | DC converter and method thereof |
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| CN108448927A (en) * | 2018-05-25 | 2018-08-24 | 多场低温科技（北京）有限公司 | Control system for step-by-step movement driving device |
| CN108847780A (en) * | 2018-07-23 | 2018-11-20 | 三明学院 | A kind of driver circuit for piezoelectric ceramics and its driving method |
| CN110209045A (en) * | 2019-05-31 | 2019-09-06 | 西安交通大学 | A kind of external cavity tunable laser diode Nonlinearity Correction Method based on FPGA |
| CN112448578A (en) * | 2019-09-04 | 2021-03-05 | 株式会社东芝 | Switching power supply circuit |
| CN111510018A (en) * | 2020-05-20 | 2020-08-07 | 矽力杰半导体技术(杭州)有限公司 | Piezoelectric drive circuit and piezoelectric drive method |
| CN113489095A (en) * | 2021-07-06 | 2021-10-08 | 一念传感科技(深圳)有限公司 | Piezoelectric ceramic actuator linear displacement driving circuit and implementation method thereof |
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