CN102412772A - Self-adaptive adjusting method for control parameters of motor magnetic suspension start - Google Patents
Self-adaptive adjusting method for control parameters of motor magnetic suspension start Download PDFInfo
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- CN102412772A CN102412772A CN201110383080XA CN201110383080A CN102412772A CN 102412772 A CN102412772 A CN 102412772A CN 201110383080X A CN201110383080X A CN 201110383080XA CN 201110383080 A CN201110383080 A CN 201110383080A CN 102412772 A CN102412772 A CN 102412772A
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Abstract
The invention discloses a self-adaptive adjusting method for control parameters of motor magnetic suspension start, belonging to the technical field of control of permanent magnet synchronous planar motors. The method is characterized by comprising the following steps of: calculating a corresponding motor thrust constant when an active cell is at a certain preset position higher than a stator according to design parameters of permanent magnet synchronous planar motor, and estimating the control parameter of a height according to the motor thrust constant and the requirement of the control system performance bandwidth; and measuring the height of the active cell above the stator at every moment in the magnetic suspension starting processing of the permanent magnet synchronous planar motor, calculating a corresponding control gain compensation value according to the height difference between the height and a preset height, and multiplying the gain compensation value with the control parameter of the preset height to obtain the control parameter of the planar motor magnetic suspension start. The self-adaptive adjusting method has the advantages: the stability and reliability of the motor magnetic suspension start control are ensured, and the motor can be started normally in a suspension way.
Description
Technical field
The invention discloses the Control Parameter adaptive regulation method that a kind of motor magnetic suspension starts, belong to permanent magnetic synchronous plane electromotor electric machines control technology field
Background technology
In scanning photoetching machine, " pick up and put " equipment or the equipment such as other checkout equipments, nano-imprinting apparatus in
semi-conductor industry; Usually need use multiple degrees of freedom precise motion location; The traditional a plurality of single dof mobility of multiple degrees of freedom precise motion location employing mechanism stack design is like the motion stage of gantry driving.The stack design complex structure; System stiffness is low; And usually be that the driving mechanism of some degree of freedom becomes the load that other degrees of freedom drive, the complicacy of structure makes control performance descend, control precision is low; Acceleration and deceleration characteristic is poor, even single-degree-of-freedom wherein drives the defective that the linear electric motors that adopt direct-drive type also are difficult to overcome structure itself.And the planar motor stator is made up of permanent magnet array of in horizontal plane, arranging or coil array; Mover is made up of a plurality of coil or permanent magnet arrays of exerting oneself; According to the difference of motor type, adopt suitable coil current control method, can realize planar fully directly driving of multifreedom motion; Simple in structure, quality is little, rigidity is high, magnetic suspension support not to have friction; Compare with traditional multiple degrees of freedom precise motion location, can realize higher positioning accuracy, higher acceleration and deceleration performance, wide application prospect is arranged.
The motor that relates among
the present invention is the permanent magnetic synchronous plane electromotor motor.Different according to permanent magnet array and coil combination arrangement, the permanent magnetic synchronous plane electromotor motor is divided into moving winding formula planar motor and two kinds of framework modes of moving-magnet planar motor.The stator of moving winding formula planar motor is made up of the permanent magnet array of planar arranging, mover is formed by being arranged in a coil array on the plane; The stator of moving-magnet planar motor then is made up of the coil array of planar arranging, mover is formed by being arranged in a permanent magnet array in the plane.The permanent magnetic synchronous plane electromotor motor of two kinds of framework modes does not have the difference of essence, and the present invention is its basic thought of example explanation with moving winding formula planar motor.
The mover of
permanent magnetic synchronous plane electromotor motor supports through the magnetic suspension mode, needs certain clearance between mover and the stator during work, and being convenient to mover does not have the frictional plane motion and regulate the vertical direction displacement.The magnetic flux density of permanent magnetic synchronous plane electromotor motor is exponential damping in vertical direction.Planar motor need rise to from the initial position that rests on stator surface in the work suspended planar in initialization or when running into fault and needing to be started by the stator surface magnetic suspension again.In the process of this lifting; Because the attenuation characteristic of space magnetic field itself; The magnetic flux density of motor coil experience changes, and the power that same electric current produces also changes thereupon, and promptly the thrust constant of motor will change; Make that the planar motor mover is difficult to reach identical control performance at differing heights, make the system control performance variation.Changing under the bigger situation, adopting a cover Control Parameter in lifting process, all highly all to reach satisfied control performance, even might let system's unstability.
Up to now, Shang Weijian has disclosed technical scheme to address this problem
Summary of the invention
task of the present invention is to propose the Control Parameter adaptive regulation method that a kind of motor magnetic suspension starts; To planar motor magnetic flux density change in magnetic flux density situation in the motor coil that the variation of vertical direction causes in the magnetic suspension start-up course; Regulate Control Parameter adaptively; The control performance of improvement system is guaranteed the reliable and stable of permanent magnetic synchronous plane electromotor motor magnetic suspension start-up control.
task of the present invention is accomplished like this; A kind of adaptive regulation method of motor magnetic suspension start-up control parameter; It is characterized in that: at first according to permanent magnetic synchronous plane electromotor motor design parameter; Corresponding motor thrust constant when calculating mover and being in a certain preset height on the stator estimates the Control Parameter of this height again according to the requirement of this motor thrust constant and control system capability bandwidth; In the magnetic suspension start-up course of permanent magnetic synchronous plane electromotor motor; Record each moment mover and be in the height on the stator; According to the difference in height of this height with said preset height; Calculate corresponding ride gain offset, this gain compensation value multiply by the Control Parameter of said preset height, obtain the Control Parameter that the planar motor magnetic suspension starts.
disclosed technical scheme of the present invention is gone the variation of adaptive small electromotor thrust constant through the change of ride gain; Finally make the total open-loop gain of system keep constant basically; And then make system control performance keep constant basically; Guarantee the reliable and stable of motor magnetic suspension start-up control, made the motor startup that can normally suspend.
Description of drawings
Fig. 1 is a moving winding formula permanent magnetic synchronous plane electromotor motor configuration diagram.
Fig. 2 is a moving-magnet permanent magnetic synchronous plane electromotor motor configuration diagram.
Fig. 3 is a moving winding formula permanent magnetic synchronous plane electromotor motor force analysis chart.
Embodiment
implementation result in order more clearly to introduce technical spirit of the present invention and to bring; Describe a specific embodiment of the present invention in detail below in conjunction with accompanying drawing; But the description to embodiment all is not the restriction to the present invention program, any according to the present invention design done only for pro forma but not substantial equivalent transformation all should be regarded as technical scheme category of the present invention.
Embodiment 1:
Referring to Fig. 1, this is the moving winding formula permanent magnetic synchronous plane electromotor electric machine structure sketch map that present embodiment uses
, and the coil array of electric mover comprises 4 unit, is called the body of having an effect.Have an effect body 2 with have an effect body 4 for X to having an effect body coil, make mover produce the directions X motion, Z rotatablely moves to motion and Ry; Have an effect body 1 with have an effect body 3 for Y to having an effect body coil, make mover produce Y and rotatablely move to motion and Rx to motion, Z.Each body of having an effect occupies 
The space, three-phase coil equidistantly distributes, every phase coil occupies 
The space.Motor stator 5 is the Halbach permanent magnet array, has increased the transition magnetic patch that level magnetizes between its N, the S magnet, to strengthen the sine property of space magnetic flux distribution, reduces high order harmonic component.
Fig. 3 is a moving winding formula permanent magnetic synchronous plane electromotor motor force analysis chart, has clearly described the coil and the distribution of magnets in body 2 spaces of living in of having an effect that are made up of first, second coil 2a, 2b and tertiary coil 2c among the figure, and mover apart from the stator level does
, the magnetic flux distribution that its three-phase coil is corresponding is:
Wherein
Be a constant relevant with electric machine structure, the magnetic flux of three-phase coil exists
To being exponential damping, corresponding thrust constant is:
Find out that thus the thrust constant of mover is along with the height increase apart from the stator plane also is exponential damping, decay factor does
on the other hand, because of the control performance of system depends primarily on the control bandwidth of system, and control bandwidth mainly is confined to the mechanical oscillation mode of system.Mover is apart from differing heights place, stator plane, and the mechanical property of system changes very little, and therefore, mover is positioned at that the differing heights place should reach identical control bandwidth on the stator.But, because along with highly increasing, the thrust constant of motor is exponential damping; If adopt identical Control Parameter in the lifting process, the variation of thrust constant can cause the variation of motor open-loop gain, and then the control bandwidth of system is changed; Make poor system performance, even make system's unstability.
Performance remains unchanged in the mover lifting process in order to make
, the method below present embodiment has been taked.
At first, find the solution the Control Parameter of reference planes
.In order to obtain the Control Parameter of differing heights, need to confirm earlier reference planes, obtain the corresponding Control Parameter in this plane, the Control Parameter on other planes just can obtain according to the method for attenuation characteristic through adaptive equalization.
If reference planes are that mover is apart from the stator surface height
The place through the motor thrust constant that adopts the electromagnetism simulating analysis to obtain this place is:
According to the mechanical oscillation mode of motor thrust constant and system, can further obtain certain control bandwidth
Following corresponding Control Parameter:
Wherein
Be controller gain,
Product for controller PID and filter transfer function.
Adaptive equalization is secondly carried out to Control Parameter in
in working control.
In electric mover magnetic suspension lifting process, vertical direction sensor measurement mover is apart from the height of stator surface
, the difference in height that can obtain this height and reference planes does
, because decay factor does
, therefore corresponding thrust constant becomes reference planes
Height
Doubly, obtain identical control performance, the ride gain of system be adjusted in order to make differing heights:
Thereby obtain new Control Parameter:
in practical implementation, mover all is real-time apart from the measurement of the height of stator surface and the calculating of Control Parameter.
on this basis, can be according to Z to move distance, Z to movement velocity, control precision and motor size, adopt the Control Parameter self-adapting compensation method of simplifying.In motion process, total kilometres equidistantly are divided into several sections at Z, each part finds a mean value, during stroke motion after this section cut apart, adopts an average Control Parameter, calculates to simplify.
a large amount of simulation shows; The disclosed Control Parameter adaptive regulation method that is used for planar motor magnetic suspension startup of the present invention can improve the control performance of system effectively, guarantees the reliable and stable of permanent magnetic synchronous plane electromotor motor magnetic suspension start-up control.
above description is that example describes with the moving winding formula permanent magnetic synchronous plane electromotor motor that the vertical direction magnetic flux density is index variation; But obviously; The framework form of the index variation rule of vertical direction magnetic flux density and moving winding formula permanent magnetic synchronous plane electromotor motor does not constitute the restriction to the disclosed technical scheme of the present invention; The present invention is applicable to that equally also magnetic flux density is the permanent magnetic synchronous plane electromotor motor that other rules change in vertical direction, also is applicable to moving-magnet permanent magnetic synchronous plane electromotor motor.
Embodiment 2:
Referring to Fig. 2, figure is a moving-magnet permanent magnetic synchronous plane electromotor motor configuration diagram, and among the figure: mark 6 is the stator coil array, and mark 7 is a mover Halbach permanent magnet array, and the Control Parameter adaptive regulation method is with the description to embodiment 1
Claims (1)
1.
A kind of adaptive regulation method of motor magnetic suspension start-up control parameter; It is characterized in that: at first according to permanent magnetic synchronous plane electromotor motor design parameter; Corresponding motor thrust constant when calculating mover and being in a certain preset height on the stator estimates the Control Parameter of this height again according to the requirement of this motor thrust constant and control system capability bandwidth; In the magnetic suspension start-up course of permanent magnetic synchronous plane electromotor motor; Record each moment mover and be in the height on the stator; According to the difference in height of this height with said preset height; Calculate corresponding ride gain offset, this gain compensation value multiply by the Control Parameter of said preset height, obtain the Control Parameter that the planar motor magnetic suspension starts
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110383080A CN102412772B (en) | 2011-11-28 | 2011-11-28 | Self-adaptive adjusting method for control parameters of motor magnetic suspension start |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110383080A CN102412772B (en) | 2011-11-28 | 2011-11-28 | Self-adaptive adjusting method for control parameters of motor magnetic suspension start |
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| CN102412772A true CN102412772A (en) | 2012-04-11 |
| CN102412772B CN102412772B (en) | 2012-10-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103955137A (en) * | 2014-05-07 | 2014-07-30 | 西北工业大学 | Distributed electromagnetic array coupling electromagnetic force compound control method |
| CN108886331A (en) * | 2016-02-26 | 2018-11-23 | 杭州零零科技有限公司 | The multi-freedom electric motor of Electromagnetic Control number of phases reduction designs |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1599213A (en) * | 2004-08-20 | 2005-03-23 | 清华大学 | Permanent-magnet synchronous planar motor |
| US20070164697A1 (en) * | 2006-01-13 | 2007-07-19 | Asml Netherlands B.V. | Lithographic apparatus having a controlled motor, and motor control system and method |
| JP2009177976A (en) * | 2008-01-25 | 2009-08-06 | Japan Aviation Electronics Industry Ltd | Linear motor system |
| JP2010207038A (en) * | 2009-03-05 | 2010-09-16 | Yokogawa Electric Corp | Method of analyzing thrust ripple and method of correcting same |
-
2011
- 2011-11-28 CN CN201110383080A patent/CN102412772B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1599213A (en) * | 2004-08-20 | 2005-03-23 | 清华大学 | Permanent-magnet synchronous planar motor |
| US20070164697A1 (en) * | 2006-01-13 | 2007-07-19 | Asml Netherlands B.V. | Lithographic apparatus having a controlled motor, and motor control system and method |
| JP2009177976A (en) * | 2008-01-25 | 2009-08-06 | Japan Aviation Electronics Industry Ltd | Linear motor system |
| JP2010207038A (en) * | 2009-03-05 | 2010-09-16 | Yokogawa Electric Corp | Method of analyzing thrust ripple and method of correcting same |
Non-Patent Citations (1)
| Title |
|---|
| 曹卫，穆海华，周云飞: "超精密平面电机控制技术", 《机床与液压》, vol. 35, no. 5, 31 May 2007 (2007-05-31), pages 62 - 64 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103955137A (en) * | 2014-05-07 | 2014-07-30 | 西北工业大学 | Distributed electromagnetic array coupling electromagnetic force compound control method |
| CN103955137B (en) * | 2014-05-07 | 2017-02-15 | 西北工业大学 | Distributed electromagnetic array coupling electromagnetic force compound control method |
| CN108886331A (en) * | 2016-02-26 | 2018-11-23 | 杭州零零科技有限公司 | The multi-freedom electric motor of Electromagnetic Control number of phases reduction designs |
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|---|---|
| CN102412772B (en) | 2012-10-10 |
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