CN102377289B - Lateral locking device - Google Patents
Lateral locking device Download PDFInfo
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- CN102377289B CN102377289B CN 201010255096 CN201010255096A CN102377289B CN 102377289 B CN102377289 B CN 102377289B CN 201010255096 CN201010255096 CN 201010255096 CN 201010255096 A CN201010255096 A CN 201010255096A CN 102377289 B CN102377289 B CN 102377289B
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Abstract
The invention discloses a lateral locking device, which is used for assembling a fine motion module of a workpiece stage system of a photoetching machine. The lateral locking device comprises a connecting frame, a horizontal pushing plate, a lateral locking thread part and a long bolt. The connecting frame connects a plurality of micro motor stators and a fine motion bottom plate. A plurality of positioning columns are arranged in the connecting frame. The upper end of the positioning column is fixed with the connecting frame by a pre-fastening device, and the lower end of the positioning column is connected with a positioning pin at the bottom. The middle part of the positioning column is provided with a transverse through hole. The horizontal pushing plate is arranged on a linear guide rail connected with the fine motion bottom plate. One end of the horizontal pushing plate is also provided with a locking pin with a wedged guide part. The locking pin is horizontally inserted into the transverse through hole of the positioning column. The lateral locking thread part drives the horizontal pushing plate to make the locking pin finish feeding and locking by rotary motions in a nut seat fixed on the fine motion bottom plate. The thread part of the long bolt is horizontally inserted into the other end of the horizontal pushing plate to lock the locking thread part and the nut seat in an anti-loosening way. The lateral locking device overcomes the azimuthal and spatial limitations of the micro motor stators and the fine motion bottom plate in assembly and disassembly processes, and the fine motion module is convenient to repair and maintain.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to the lateral locking device of fine motion motor in a kind of work stage of lithographic equipment.
Background technology
In the workpiece table system of lithographic equipment, the mover of fine motion module partly is used for the carrying silicon chip, and stationary part and coarse motion module connect firmly.Usually, fine motion module is driven the motion of its six-freedom degree by the fine motion motor.Mover part (magnet segment) and the fine motion module of fine motion motor connect firmly, and its stationary part (coiler part) connects firmly with the coarse motion module.Due to the special construction of fine motion motor, in the installation and removal process of micromotion structure, need to be with mover and the stator bulk handling of fine motion motor.Locking and dismounting for fine motion motor stator and fine motion base plate have certain orientation and spatial limitation.
Summary of the invention
The object of the invention is to overcome the restriction in fine motion motor stator and fine motion base plate orientation and space in locking and unloading process, propose a kind of lateral locking device, facilitate the installation and maintenance of fine motion module.
The object of the present invention is achieved like this.A kind of lateral locking device is used for the assembling of photo-etching machine work-piece platform system fine motion module, comprising:
Link connects a plurality of fine motion motor stators and fine motion base plate; The fine motion motor stator is supported in described link upper end, and locate by alignment pin and fine motion base plate the lower end; Also comprise some reference columns in described link, the reference column upper end is fixed by pretension screw and link, and the reference column lower end connects the alignment pin of bottom; Have the hole of lateral direction penetrating in the middle of reference column;
Horizontal push pedal is arranged on the line slideway that is connected with the fine motion base plate; One end of horizontal push pedal comprises that also one has the locking pin at wedge shape guiding position, in the hole of the described lateral direction penetrating of the described reference column of locking pin level insertion, thus locking fine motion motor stator and fine motion base plate;
Side direction locking screw spare, by rotatablely moving in the nut seat that is fixed in the fine motion base plate, the horizontal push pedal of promotion makes locking pin complete feeding and locking; And
Long spiro nail, the other end that the threaded portion level is inserted horizontal push pedal carries out locking locking to locking screw spare and nut seat.
Wherein, described lateral locking device also comprises a series of pretension reeds, and described pretension reed is arranged between described pretension screw and link.
Wherein, described lateral locking device also comprises spacer pin and the spacing preiection that is arranged in described horizontal push pedal both sides.
The present invention overcomes the restriction in fine motion motor stator and fine motion base plate orientation and space in locking and unloading process, has facilitated the installation and maintenance of fine motion module.
Description of drawings
Fig. 1 is the position of locking device of the present invention in the fine motion module;
Fig. 2 is locking device installation and removal schematic diagram of the present invention;
Fig. 3 is locking device perspective view of the present invention;
Fig. 4 a is not locking state profile of locking device of the present invention;
Fig. 4 b is locking device locking state profile of the present invention.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
As illustrated in fig. 1 and 2, the present invention is used for the workpiece table system of lithographic equipment, and this system has the structure of fine motion module 019, coarse motion module 018 and divides.The mover of fine motion module 019 partly is used for the carrying silicon chip, and its stationary part and coarse motion module 018 connect firmly.Usually, fine motion module is driven the motion of its six-freedom degree by the fine motion motor.Mover part (magnet segment) and the fine motion module of fine motion motor connect firmly, and its stationary part (coiler part) connects firmly with the coarse motion module.
Due to the special construction of fine motion motor, its stator often is in two magnet plate structures, sees Fig. 1.In the installation and removal process of micromotion structure, need to be with mover and the stator bulk handling of fine motion motor.When workpiece table system is carried out maintenance maintenance, need to be with the mover partial demolition of fine motion module, aforesaid operations must separate stator 003b and the fine motion base plate 002 (connecting firmly with coarse motion module 018) of fine motion motor.Because of the below of the fine motion base plate coarse motion module that has been connected, therefore the junction of fine motion motor stator can not be arranged on the below of fine motion base plate; And the top of fine motion base plate is the carrying silicon chip devices of fine motion module, and as can be known from Fig. 2, the stator junction of fine motion motor can not be arranged on the top of fine motion base plate; Partly be positioned at the central area of base plate due to the fine motion motor stator, distant if adopt traditional approachs such as directly using screw in the base plate side direction that it is fixed, and reliability is not high.Given this, for the locking of fine motion motor stator 003b, have certain orientation and spatial limitation.
Fig. 3～Fig. 4 is the detailed construction of locking device 001 of the present invention.Wherein, locking device 001 of the present invention comprises link 016, connects a plurality of fine motion motor stator 03b and fine motion base plate 002.Fine motion motor stator 03b is supported in link 016 upper end, and the lower end is by alignment pin 017 and fine motion base plate 002 location.Also comprise a reference column 013 in link 016, reference column 013 upper end is fixing with link 016 by pretension screw 014.Also comprise a pretension reed 015 between pretension screw 014 and link 016.Reference column 013 lower end connects the alignment pin 017 of bottom, has the hole of lateral direction penetrating in the middle of reference column 013.Also comprise a horizontal push pedal 008, horizontal push pedal 008 is arranged on the line slideway 009 that is connected with fine motion base plate 002.One end of horizontal push pedal 008 comprises that also one has the locking pin 010 at wedge shape guiding position, in the hole of the lateral direction penetrating of locking pin 010 level insertion reference column 013, thus locking fine motion motor stator 03b and fine motion base plate 002.Also comprise a side direction locking screw spare 004, locking member 004 forms screw thread pair with the hold-down nut seat 006 that is fixed on fine motion base plate 002.One end of screw element 004 withstands an end of horizontal push pedal 008, after rotational lock screw element 004, the horizontal push pedal 008 of promotion moves horizontally, after the locking pin 010 with wedge shape guiding position is completed locking to reference column 013, be screwed into long spiro nail 005, carry out the locking locking of double thread pair.
As shown in Figure 3, be fixed on and on fine motion base plate 002 hold-down nut seat 006, spacer pin 007, the stationary part of line slideway 009, guide holder 012 arranged.Movable part has locking screw spare 004, long spiro nail 005, and push pedal 008 is arranged on locking pin 010 and the guide finger 011 of push pedal 008 inside and the mover part of line slideway 009.The threaded portion of locking screw spare 004 is installed in the threaded portion of hold-down nut seat, use the instrument of spanner or interior Hexagonal jacket class to hexagonal district's operation of locking screw spare 004 head, can make it promote the feeding of push pedal 008 or withdraw from motion, guide effect due to guide finger 011 and guide holder 012, and the secondary guide effect of the line slideway 009 of push pedal 008 bottom, the action that the locking pin 010 of push pedal 008 head also has feeding and withdraws from, this action can be completed the locking effect to fine motion motor stator 003b.Wherein, what locking pin 011 was carried out guide effect is mainly 011 guide finger, and adopting line slideway 009 is as auxiliary guiding, and can prevent that thrust plate 008 produces dry friction with fine motion base plate 002 Contact.This first dress and debug phase for equipment seems particularly important, always can constantly carry out examination and maintenance to the fine motion inside modules in this stage, and the interface of fine motion motor stator must have certain durability and reliability.
Fig. 4 article the operation principle of this device.Fig. 4 a is that fine motion motor stator 003b is unlocked timer residing position, and Fig. 4 b is that fine motion motor stator 003b is in locking state timer residing position.Based on space availability ratio, the motor power producing characteristics of fine motion motor, and the degree of freedom demand of exerting oneself, its stator is comprised of N sub-coil group (N=1～6).For fixing of fine motion motor stator, adopt the mode of integrated installation, N sub-coil unification is connected on stator link 016, stator link 016 is connected on fine motion base plate 002, also be about to fine motion motor stator 003 and be connected.Use pretension screw 014 to connect reference column 013 below stator link 016, the bottom of reference column 013 alignment pin 017 that has been connected.Alignment pin 017 be mainly used in configuring link 016 with fine motion base plate 002 level (X|Y|Rz) to the degree of freedom, link 016 bottom is used for configuring vertical (Z|Rx|Ry) to the degree of freedom.Pretension reed 015 between pretension screw 014 and link 016 can be disk spring sheet group, also can be the form of Compress Spring, is mainly used in reference column 010 is carried out pretension.
Fine motion module (comprising that fine motion motor stator is whole) is slowly fallen under the guider of its surrounding setting coordinates by boom hoisting, locates the fine motion motor stator complete by 3 alignment pins 017 of bottom.This moment can be with reference to figure 4a locking state not, and the left side of push pedal 008 can contact with spacer pin 007, or is free state, namely is in the state that locking pin 010 does not enter the mounting hole scope of reference column 017.This moment, guide finger 011 was installed in advance in the corresponding mating holes of guide holder 012.During locking, with the turret head of spanner or interior Hexagonal jacket operation locking screw element 004 end, make its other end promote push pedal 008 and move right, this moment, locking pin 010 was slowly entered the mounting hole zone of reference column 013 by 15 ° of wedge shapes guiding positions of head.During initial the installation, locking pin 010 bottom is lower than the about height of 0～1mm in reference column 013 mounting hole bottom, in locking pin 010 slowly feeding process, fit tightly bottom locking pin 010 bottom and reference column 013 mounting hole, effect due to wedge shape, and the elastic reaction of top pretension reed 015, reference column 013 pin 010 that is locked compresses downwards.When push pedal 008 bottom arrives the spacing preiection in guide holder 012 left side, complete locking stroke L1, be screwed into 005 pair of locking screw spare of long spiro nail 004 and carry out locking fastening with locking screw female seat 006.
When needs are removed the fine motion module, first long spiro nail 005 is unclamped, operation locking screw element 004 withdraws from it, until push pedal 008 left end is when contacting with spacer pin 007, the mounting hole that shows locking pin 010 and reference column 013 is thrown off fully, and namely the fine motion motor stator separates fully with the fine motion base plate.Can configure boom hoisting and guider this moment with fine motion module mover partial demolition.
Described in this specification is preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (3)
1. lateral locking device is used for the assembling of photo-etching machine work-piece platform system fine motion module, it is characterized in that described lateral locking device comprises:
Link connects a plurality of fine motion motor stators and fine motion base plate; The fine motion motor stator is supported in described link upper end, and locate by alignment pin and fine motion base plate the lower end; Also comprise some reference columns in described link, the reference column upper end is fixed by pretension screw and link, and the reference column lower end connects the alignment pin of bottom; Have the hole of lateral direction penetrating in the middle of reference column;
Horizontal push pedal is arranged on the line slideway that is connected with the fine motion base plate; One end of horizontal push pedal comprises that also one has the locking pin at wedge shape guiding position, in the hole of the described lateral direction penetrating of the described reference column of locking pin level insertion, thus locking fine motion motor stator and fine motion base plate;
Side direction locking screw spare, by rotatablely moving in the nut seat that is fixed in the fine motion base plate, the horizontal push pedal of promotion makes locking pin complete feeding and locking; And
Long spiro nail, the other end that the threaded portion level is inserted horizontal push pedal carries out locking locking to locking screw spare and nut seat.
2. lateral locking device as claimed in claim 1, is characterized in that described lateral locking device also comprises a series of pretension reeds, and described pretension reed is arranged between described pretension screw and link.
3. lateral locking device as claimed in claim 1, is characterized in that described lateral locking device also comprises spacer pin and the spacing preiection that is arranged in described horizontal push pedal both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010255096 CN102377289B (en) | 2010-08-17 | 2010-08-17 | Lateral locking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010255096 CN102377289B (en) | 2010-08-17 | 2010-08-17 | Lateral locking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102377289A CN102377289A (en) | 2012-03-14 |
| CN102377289B true CN102377289B (en) | 2013-05-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010255096 Active CN102377289B (en) | 2010-08-17 | 2010-08-17 | Lateral locking device |
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| CN (1) | CN102377289B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106141654B (en) * | 2015-03-26 | 2019-04-12 | 上海微电子装备（集团）股份有限公司 | A kind of regulation locking device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2532336Y (en) * | 2002-04-16 | 2003-01-22 | 郑磊 | Valve with locking mechanism |
| CN101303532A (en) * | 2008-06-10 | 2008-11-12 | 上海微电子装备有限公司 | Six-freedom degree precision positioning platform capable of switching station |
| CN101465581A (en) * | 2007-12-21 | 2009-06-24 | 上海双骁机电设备有限公司 | Installation fixture for stator and rotor of rare-earth permanent magnet generator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080073823A1 (en) * | 2006-09-21 | 2008-03-27 | Tung-Chuan Lin | Clamp structure |
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2010
- 2010-08-17 CN CN 201010255096 patent/CN102377289B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2532336Y (en) * | 2002-04-16 | 2003-01-22 | 郑磊 | Valve with locking mechanism |
| CN101465581A (en) * | 2007-12-21 | 2009-06-24 | 上海双骁机电设备有限公司 | Installation fixture for stator and rotor of rare-earth permanent magnet generator |
| CN101303532A (en) * | 2008-06-10 | 2008-11-12 | 上海微电子装备有限公司 | Six-freedom degree precision positioning platform capable of switching station |
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| Publication number | Publication date |
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| CN102377289A (en) | 2012-03-14 |
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Address after: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |