CN106141654B - A kind of regulation locking device - Google Patents
A kind of regulation locking device Download PDFInfo
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- CN106141654B CN106141654B CN201510134347.XA CN201510134347A CN106141654B CN 106141654 B CN106141654 B CN 106141654B CN 201510134347 A CN201510134347 A CN 201510134347A CN 106141654 B CN106141654 B CN 106141654B
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- locking device
- fine motion
- regulation
- regulation locking
- positioning reed
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Abstract
The present invention discloses a kind of regulation locking device, for adjusting vertical position and the locking of fine motion motor, comprising: a positioning reed connecting with the fine motion motor；One adjusts unit, and the adjusting unit is by adjusting vertical position of the vertical height of the positioning reed to adjust the fine motion motor；One locking unit, the locking unit is by locking the positioning reed to lock the fine motion motor.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field more particularly to a kind of regulation locking devices.
Background technique
In the workpiece table system that rough micro-moving mechanism combines, the subpart of fine motion module is for carrying silicon wafer, stationary part
It is connected firmly with coarse motion module.In general, fine motion module is driven the movement of its six-freedom degree by fine motion motor.The mover of fine motion motor
Partially (magnet segment) is connected firmly with fine motion module, and stationary part (coiler part) is connected firmly with coarse motion module.Due to fine motion motor
Special construction need during the installation and removal of micromotion structure by the mover of fine motion motor and stator bulk handling.It is right
In the locking and disassembly of fine motion motor stator and fine motion bottom plate, there is certain orientation and space to limit.
Summary of the invention
In order to overcome defect existing in the prior art, the present invention proposes a kind of lateral locking device that high-precision is adjusted,
The adjusting of the height and levelness of fine motion motor can be achieved by the operation in operating side.
In order to achieve the above-mentioned object of the invention, the present invention discloses a kind of regulation locking device, for adjusting hanging down for fine motion motor
To position and locking, comprising: a positioning reed being connect with the fine motion motor；One adjusts unit, which passes through adjusting
The vertical height of the positioning reed is to adjust the vertical position of the fine motion motor；One locking unit, the locking unit pass through locking
The positioning reed is to lock the fine motion motor.
Further, which is located at the outside of the fine motion motor, and the quantity of the regulation locking device is big
In equal to two.
Further, the quantity of the regulation locking device is three.
Further, which includes a lozenges, which contacts with the locking unit.
Further, which includes voussoir, a lower wedge block and a screw rod on one, voussoir and the back stop on this
The adjusting face contact of piece, the lower wedge block are located at the lower section of voussoir on this, and lozenges of voussoir and lower wedge block is in contact on this, the spiral shell
One end of bar is connect with the lower wedge block.
Further, which includes a lever regulating part, a wedge-shaped stepping sliding block and a screw rod, the lever regulating
The adjusting face contact of part and the positioning reed is saved, the lozenges of the wedge shape stepping sliding block position is contacted with the lever regulating part, the spiral shell
One end of bar and the wedge shape stepping shoe contact.
It further, include a pressure spring on the screw rod, the other end of the screw rod includes a locking jackscrew.
Further, which includes a sliding block, the wedge-shaped face contact of the sliding block and the positioning reed.
Further, the other end of the screw rod includes an elastic slice and a pressing plate.
Further, which is butterfly spring or elastic washer.
Compared with prior art, lateral locking device of the invention has the function of that high-precision is adjusted, by operating
The adjusting of the height and levelness of fine motion motor can be achieved in the operation at end, locks device after the required accuracy to be achieved.The present invention
The regulating device and adjusting method of proposition, reduce the machining accuracy of part, have saved cost, while also improving micropositioner
Assembly efficiency is, it can be achieved that efficiently maintenance maintenance.The device degree of regulation is high, and operation is simple and reliable, and operating space is small, can be extensive
Applied to precision machinery adjustment field.
Detailed description of the invention
It can be obtained further by detailed description of the invention below and institute's accompanying drawings about the advantages and spirit of the present invention
Solution.
Fig. 1 is position view of the regulation locking device according to the present invention in fine motion module；
Fig. 2 is the adjusting of regulation locking device according to the present invention and the structural schematic diagram of locking member；
Fig. 3 is the top view of regulation locking device according to the present invention；
Fig. 4 a is the structural schematic diagram of regulation locking device according to the present invention；
Fig. 4 b is the structural schematic diagram of positioning reed in the present invention.
Fig. 5 is the structural schematic diagram of the first embodiment of regulation locking device according to the present invention；
Fig. 6 a is regulation locking device locking schematic illustration according to the present invention；
Fig. 6 b is the first embodiment schematic diagram of the locking unit of regulation locking device according to the present invention
Fig. 7 is the structural schematic diagram of the second embodiment of regulation locking device according to the present invention；
Fig. 8 is the knot of the second embodiment of the uncoupling gear of the locking unit of regulation locking device according to the present invention
Structure schematic diagram.
Specific embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
This programme is in the workpiece table system of lithographic equipment.The subpart of fine motion module 5 is determined for carrying silicon wafer
Subdivision is connected firmly with coarse motion module 6.In general, fine motion module 5 is moved by its six-freedom degree of fine motion motor driven.Fine motion motor
Subpart (magnet segment) is connected firmly with fine motion module 5, and stationary part (coiler part) is connected firmly with coarse motion module 6.Herein
Signified positioning reed 4 refers to the component that coarse motion module 6 is connect with fine motion motor stator, hereinafter no longer describes.
In Fig. 1, fine motion motor passes through N(N >=3) a positioning reed 4 connect with the fine motion bottom plate 1 in coarse motion module 6.Fine motion
It, need to be by 2 bulk handling of fine motion motor stator assembly in the installation and removal of motor.Aforesaid operations must determine fine motion motor
Position reed 4 is separated with fine motion bottom plate 1.Because of the coarse motion module 6 fixedly connected below of fine motion bottom plate 1, therefore fine motion motor and its regulating device
Junction cannot be arranged in below fine motion bottom plate 1.As can be known from Fig. 2, the top of fine motion bottom plate 1 is fine motion module 5, therefore fine motion
1 top of fine motion bottom plate can not be arranged in the junction of motor and its regulating device.Due to fine motion motor stator assembly 2
In the central area of bottom plate, if laterally directly fixed using traditional approach such as screws to it using in bottom plate, distance is farther out, vertical
Insufficient space, tool operation less than.Therefore, for the installation and adjustment of fine motion motor and disassembly, there is certain orientation and space to limit
System.
As shown in figure 3, for the top view of regulation locking device of the present invention, including three lateral adjustment locking device 3a, 3b,
3c is located on the fine motion bottom plate 1 of 6 top of coarse motion module, position distribution triangular in shape.Regulation locking device 3a, 3b, 3c include
Adjust screw 7 and the lock-screw 8 for locking the regulation locking device 3a, 3b, 3c.
As shown in Figs. 4a and 4b, fine motion motor can be adjusted, locked and is dismantled from two sides.Device housing 11 and fine motion
Bottom plate 1 is connected.When installation, passing through N(N >=3) the coarse positioning face 14 on a positioning reed 4 is oriented to, by 4 insertion apparatus of positioning reed
In shell 11, adjustment end 9 is contacted with the bottom surface 13 of positioning reed 4, the lozenges 12 of positioning reed 4 towards locking end 10,
In this way, fine motion motor stator assembly 2 is placed into 11 top of device housing by positioning reed 4, interior six are used on the outside
Angle spanner is operated to 7 head of screw is adjusted, and adjustment end 9 can be made to move up and down, and adjusts 4 height of positioning reed to reach
Effect, so realize fine motion motor installation accuracy, after adjusting, operate locking device.It is locked using spanner to 8
Screw head is operated, and can be made to lock the feeding of end 10, be completed by compressing reed lozenges 12 to 4 both ends of positioning reed
Locking.After locking, locking device is operated.
Fig. 5 is the Principles of Regulation introduction of the device.Screw rod 19a is threadedly coupled with lower wedge block 16, because being that screw rod rotates at 18a
When swivel feeding screw rod (adjusts and use) 19a, horizontal displacement will not occur itself for fixed point, but drive has screw thread to match therewith
The lower wedge block 16 of conjunction moves forward and backward.Lower wedge block 16 is installed in the slot of device housing 11, can only be moved forward and backward after being limited,
Lower wedge block 16 moves forward and backward, the up and down motion of voussoir 15 in promotion, and upper 15 top of voussoir is equipped with adjustment end 9.Adjustable side
The front in portion 9 is the supporting point of a RxRy self-regulated pose, so pushes 13 bottom of adjusting face of positioning reed 4, such N(N >=3)
The adjusting of a positioning reed 4 and regulating device is read by amesdial 22, it can be achieved that the initial position of fine motion module mover 5 ' is adjusted
Adjusted result is taken, locking jackscrew 20a is tightened in adjusting afterwards in place, completes to adjust.
Fig. 6 a is the locking principles and methods of the device.Because being that screw rod rotates fixed point at 18b, swivel feeding screw rod (is adjusted
With) 19b when, itself will not occur horizontal displacement, but drive has the feeding sliding block 23 being threadedly engaged to move forward and backward therewith, into
It is installed in sliding block 23 in the slot of device housing 11, can only be moved forward and backward after being limited.So push locking endpoint 10, end
The front of point is the supporting point of a RxRy self-regulated pose, which follows the wedge-shaped part 12 of positioning reed 4 to generate pressuring action,
So that positioning reed 4 generates micro-strain and is pressed in device housing 11, to reach locking function.Locking is tightened afterwards in place
Locking jackscrew 20b completes locking.If when disassembly, unscrewing locking jackscrew 20b, 19b is reversely rotated, makes to lock end 10 backward
Movement, to disengage positioning reed 4, removal compresses to complete the disassembly of motor.
In Fig. 3,3b and 3c are angle installation, if angle is β, locking distance Ls '=Ls*cos β.When β=60 °, if
It is fed by pitch P=0.5mm screw thread, when locking distance Ls ' is arranged in 2mm, 8 circle of lock-screw rotation can be completed to lock
Tightly.When β=0 °, if being fed by pitch P=0.5mm screw thread, when locking distance Ls ' is arranged in 2mm, lock-screw rotates
4 circles can be completed to lock.
Fig. 7 is the structural schematic diagram of the second embodiment of regulation locking device according to the present invention.Pass through lever regulating
Part 15 ' is saved, wedge-shaped stepping sliding block 16 ' realizes the height adjustment of positioning reed 4, its advantage is that structure is more simpler than wedge shape adjusting
It is single.
Fig. 8 is the structural schematic diagram of the second embodiment of the locking gear of regulation locking device according to the present invention.
By can be butterfly spring, elastic washer etc. in screw cephalic par 19c mounting elastic sheet 24(), it is compressed and is pressed using fastening screw 26
Plate 25, thus head of screw 19c is pressed in device housing 21 complete it is locking.The advantages of program, is and adjusts and lock-screw
Fore side same place, the mounting structure more narrow suitable for space.
Lateral locking device of the invention has the function of that high-precision is adjusted, and fine motion can be achieved by the operation in operating side
The adjusting of the height and levelness of motor locks device after the required accuracy to be achieved.Regulating device proposed by the present invention and tune
Section method reduces the machining accuracy of part, has saved cost, while also improving the assembly efficiency of micropositioner, it can be achieved that fast
Prompt maintenance maintenance.The device degree of regulation is high, and operation is simple and reliable, and operating space is small, can be widely applied to precision machinery dress
Tune field.
It is preferred embodiment of the invention described in this specification, above embodiments are only to illustrate the present invention
Technical solution rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical solution of experiment, it all should be within the scope of the present invention.
Claims (9)
1. a kind of regulation locking device, for adjusting vertical position and the locking of fine motion motor characterized by comprising one with
The positioning reed of the fine motion motor connection；One adjusts unit, and the unit that adjusts is by adjusting the vertical of the positioning reed
Vertical position highly to adjust the fine motion motor；One locking unit, the locking unit is by locking the positioning reed
To lock the fine motion motor；Wherein, the positioning reed includes a lozenges, and the lozenges connects with the locking unit
Touching.
2. regulation locking device as described in claim 1, which is characterized in that the regulation locking device is located at the fine motion electricity
The quantity in the outside of machine, the regulation locking device is more than or equal to two.
3. regulation locking device as claimed in claim 2, which is characterized in that the quantity of the regulation locking device is three.
4. regulation locking device as described in claim 1, which is characterized in that the adjusting unit includes voussoir, once on one
Voussoir and a screw rod, the adjusting face contact of the upper voussoir and the positioning reed, the lower wedge block are located at the upper voussoir
The lozenges of lower section, the upper voussoir and lower wedge block is in contact, and one end of the screw rod is connect with the lower wedge block.
5. regulation locking device as described in claim 1, which is characterized in that the adjusting unit include a lever regulating part,
One wedge-shaped stepping sliding block and a screw rod, the adjusting face contact of the lever regulating part and the positioning reed, the wedge shape stepping
The lozenges of sliding block position is contacted with the lever regulating part, one end of the screw rod and the wedge-shaped stepping shoe contact.
6. regulation locking device as described in claim 4 or 5, which is characterized in that include a pressure spring, the spiral shell on the screw rod
The other end of bar includes a locking jackscrew.
7. regulation locking device as described in claim 1, which is characterized in that the locking unit includes a sliding block, the cunning
The wedge-shaped face contact of block and the positioning reed.
8. regulation locking device as described in claim 4 or 5, which is characterized in that the other end of the screw rod includes an elastic slice
An and pressing plate.
9. regulation locking device as claimed in claim 8, which is characterized in that the elastic slice is butterfly spring or elastic washer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510134347.XA CN106141654B (en) | 2015-03-26 | 2015-03-26 | A kind of regulation locking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510134347.XA CN106141654B (en) | 2015-03-26 | 2015-03-26 | A kind of regulation locking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106141654A CN106141654A (en) | 2016-11-23 |
| CN106141654B true CN106141654B (en) | 2019-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510134347.XA Active CN106141654B (en) | 2015-03-26 | 2015-03-26 | A kind of regulation locking device |
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| CN (1) | CN106141654B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107702668A (en) * | 2017-11-16 | 2018-02-16 | 哈尔滨工程大学 | A kind of ultrasound thin oil film demarcation testboard |
| CN109848691B (en) * | 2017-11-30 | 2021-04-02 | 上海微电子装备（集团）股份有限公司 | Improved adjusting and locking device |
| CN109856917A (en) * | 2017-11-30 | 2019-06-07 | 上海微电子装备（集团）股份有限公司 | Safety device, work stage and litho machine |
| CN108738436B (en) * | 2018-07-12 | 2023-09-15 | 湖北工业大学 | Modularized multifunctional agricultural robot for weeding among rotary tillage seeding plants in greenhouse |
| CN112312699B (en) * | 2020-10-21 | 2021-12-28 | 北京华卓精科科技股份有限公司 | Installation adjusting structure of equipment shell guard plate |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100468202C (en) * | 2005-02-23 | 2009-03-11 | 上海微电子装备有限公司 | Accurate adjustable positioning device |
| CN2799164Y (en) * | 2005-06-21 | 2006-07-26 | 江苏国力锻压机床有限公司 | Adjustable work bench of plate shearing machine |
| CN2932619Y (en) * | 2006-06-07 | 2007-08-08 | 上海微电子装备有限公司 | High-precision silicon table |
| US20080073823A1 (en) * | 2006-09-21 | 2008-03-27 | Tung-Chuan Lin | Clamp structure |
| CN101488371B (en) * | 2009-03-04 | 2010-12-29 | 上海微电子装备有限公司 | Precise positioning platform with six freedom of motion |
| CN102377289B (en) * | 2010-08-17 | 2013-05-22 | 上海微电子装备有限公司 | Lateral locking device |
| CN202317680U (en) * | 2011-11-08 | 2012-07-11 | 宁波天瑞精工机械有限公司 | Base horizontal adjusting device of machine tool |
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2015
- 2015-03-26 CN CN201510134347.XA patent/CN106141654B/en active Active
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| CN106141654A (en) | 2016-11-23 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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