CN102364380A - Autofocus digital off-axis parabolic mirror parallel light pipe - Google Patents
Autofocus digital off-axis parabolic mirror parallel light pipe Download PDFInfo
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- CN102364380A CN102364380A CN2011101730510A CN201110173051A CN102364380A CN 102364380 A CN102364380 A CN 102364380A CN 2011101730510 A CN2011101730510 A CN 2011101730510A CN 201110173051 A CN201110173051 A CN 201110173051A CN 102364380 A CN102364380 A CN 102364380A
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Abstract
The invention discloses an autofocus digital off-axis parabolic mirror parallel light pipe and a measuring method using the autofocus technology and the CCD (Charge Coupled Device) exploration focal length value principle. The autofocus digital off-axis parabolic mirror parallel light pipe comprises a main off-axis parabolic reflecting mirror, a five-dimensional adjusting support, a precision guide rail, a floating focal plane device, a CCD five-dimensional adjusting mechanism, a parabolic mirror image plane position precision digital display device, a CCD camera focal length measuring device, an autocollimating plane reflecting mirror, an adjusting support and an autofocus compensating rod. By using the parallel light pipe provided by the invention, the sensitivity of the traditional parallel light pipe to use environment and temperature variation is effectively reduced, and the stability and the reliability of the parallel light pipe are improved. Because the focal length value of an instrument can be detected and displayed in real time, the detection accuracy used by the instrument is improved. Because the new technology is introduced, the automation degree of the instrument is further increased, the labor intensity of instrument operators is reduced, and the detection efficiency of the instrument is improved.
Description
Technical field
The present invention relates to a kind of optical instrument, more particularly to a kind of autofocus digital off-axis parabolic mirror parallel light pipe.
Background technology
Parallel light tube is to be obtained by it from without remote light beam, the directional light of this light beam meaning.Parallel light tube is the important tool that dress tunes up whole optical instrument, is also the important component in optical metrology instrument, the different graticle of adapted, together with side position ocular head, or microscopic system.The focal length of lens group, resolution, and other image quality technical indicators can then be determined.The attached adjustment type plane mirror matched somebody with somebody is fixed on the examined workpiece of linear motion, with the attached Gauss autocollimating eyepiece head assigned in light pipe, observed by the Gauss eyepiece on light pipe, the linearity that can carry out Moving Workpieces is examined.
And off axis paraboloidal mirror parallel light tube is widely used in optics or photoelectric technology engineering field, the design of parallel light tube in itself reaches its maturity with the technology such as processing, integrated.Because it is most using in environment temperature very stable laboratory, so be not in the more exposed technical problem being temperature dependent, the problem of in particular with the focal plane produced by the change of environment temperature or focal length variations.Such issues that seem more prominent in the long parallel light tube of focal length.
And when being tested using parallel light tube, its focal length parameter is very necessary parameter in the every test result of reduction, accurate test result is obtained, it is necessary to accurate parallel light tube focal length value in real time.Existing parallel light tube, does not provide real-time focal length this function.
The content of the invention
For drawbacks described above and needs, the invention provides a kind of autofocus digital off-axis parabolic mirror parallel light pipe, the autofocus digital off-axis parabolic mirror parallel light pipe includes：Off axis paraboloid mirror principal reflection mirror, five dimension regulation bearings, precise guide rail, floating type focal plane device, the dimensions of CCD five governor motion, paraboloidal mirror image plane position precise figures display device, CCD camera focal length measuring equipment, auto-collimation plane mirror, regulation bearing and automatic focusing compensation bar.
Described floating type focal plane device and off axis paraboloidal mirror are arranged in precise guide rail, and described ccd detector is arranged on floating type focal plane device, and described automatic focusing compensation bar is connected between off axis paraboloidal mirror and floating type focal plane device respectively.
Described automatic focusing compensates bar at least provided with three；Described off axis paraboloidal mirror uses zero expansion glass ceramic material.
Described automatic focusing compensation bar uses zero thermal expansion coefficient materials in the tube temperature compensation rod.
The dimension governor motions of CCD five are provided with described ccd detector.
Five dimensions regulation bearing is provided with described parabola principal reflection mirror；Five described dimension regulation bearings and floating type focal plane device are arranged on the base of steel；Paraboloidal mirror image plane position precise figures display device and CCD camera focal length measuring equipment are provided with described floating type focal plane device, described floating type focal plane device also includes CCD five and ties up governor motion.
Present invention also offers the measuring method that ccd detector in a kind of use autofocus digital off-axis parabolic mirror parallel light pipe surveys focal length.The measuring method that described use ccd detector surveys focal length comprises the following steps：
（1）Before mobile ccd detector Jiao Yu and defocused position, the distance value △ l with focus are measured by the long grating or electric light grid on guide rail or accurate length scale chi respectively1, △ l2；
（2）The actual clear aperture value D of system is measured with " photoscreen method "；
（3）Disc of confusion radius or defocused disc of confusion radius y before Jiao are accurately measured by ccd detector1And y2；
（4）According to step 1~3, change △ l1Or △ l2, measure corresponding y1Or y2, according to f '=D △ l1/y1= D·△l2/y2,Obtain respective focal measured value；
（5）Data processing is carried out to the focometry value obtained by step 4, the exact value of current focus is obtained；
（6）The accuracy for the current focus that step display 5 is obtained over the display.
By above measuring method, real-time parallel light tube focal length value can be automatically obtained, the influence by environmental factor to parallel light tube is preferably minimized, improve the accuracy detected to optics.
Autofocus digital off-axis parabolic mirror parallel light pipe disclosed by the invention reduces Conventional parallel light pipe to use environment and the sensitiveness of temperature change, improves the Stability and dependability of parallel light tube.Due to the focal length value with display instrument can be detected in real time, improve the accuracy of detection that instrument is used.Due to having introduced new technology, automation equipment level is further lifted, so as to alleviate the labor intensity of instrument user of service, improves instrumental detection efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of autofocus digital off-axis parabolic mirror parallel light pipe of the present invention；
Fig. 2 is that CCD camera of the present invention measures off-axis parabolic mirror focal length schematic diagram；
Reference
1st, off axis paraboloid mirror principal reflection mirror；
2nd, five dimension regulation bearing；
3rd, precise guide rail；
4th, floating type focal plane device；
5th, CCD five ties up governor motion；
6th, paraboloidal mirror image plane position precise figures display device；
7th, CCD camera focal length measuring equipment；
8th, auto-collimation plane mirror；
9th, bearing is adjusted；
10th, automatic focusing compensation bar.
Embodiment
Detailed analytic explanation is carried out to the present invention below in conjunction with the accompanying drawings：
Paraboloidal mirror position of focal plane caused under use environment temperature variations can change：0.1 is taken in temperature difference △ tOC or 0.3ODuring C：
Mirror optical glass
α=32 × 10- 7
△ t take 0.1OC
The change that paraboloidal mirror causes focal length when there is the temperature difference in minute surface front with the back side can be calculated as the following formula
Due toAnd △ t numerical value very littles, even ifWhen quite big, two and 1 difference very little in above formula denominator, above formula are rewritable such as following formula：
D=300mm, f ＇=1500mm are now set, mirror thickness l=40mm, △ t take 0.1OC or 0.3OC
Take △ t=0.1OC,
Take △ t=0.3OC,
If focal plane is coupled with paraboloidal mirror with steel, distance is l, the coefficient of expansion of steel between focal plane and paraboloidal mirror
Total focal plane amount of movement
For drawbacks described above, so needing design is a kind of can effectively eliminate the autofocus digital off-axis parabolic mirror parallel light pipe of temperature change influence, described autofocus digital off-axis parabolic mirror parallel light pipe includes：Off axis paraboloid mirror principal reflection mirror, five dimension regulation bearings, precise guide rail, floating type focal plane device, the dimensions of CCD five governor motion, paraboloidal mirror image plane position precise figures display device, CCD camera focal length measuring equipment, auto-collimation plane mirror, regulation bearing and automatic focusing compensation bar.Described off axis paraboloidal mirror and three zero thermal expansion coefficient materials in the tube temperature compensation rods are laid between floating type focal plane device in precise guide rail, paraboloidal mirror end face is withstood in one end of described compensation bar, and the other end couples floating type focal plane device.Described off axis paraboloidal mirror uses zero expansion glass ceramic material, though use environment is unstable, mirror front and back temperature is inconsistent, and mirror will not be deformed, and minute surface focal length is constant.
Five dimensions regulation bearing is provided with described parabola principal reflection mirror；Although base can expand with heat and contract with cold because variation of ambient temperature is produced, but it can be slided because focal plane device floats, in addition the compensation pole stock matter of connection paraboloidal mirror end face and floating type focal plane device is 32Ni-64Fe-4Co superinvars or the stainless invar of 37Fe-32Co-11Cr, deformation will not be produced because of room temperature environment change, so focal plane will not be caused with respect to distance change between paraboloidal mirror, simply the length dimension of base is stretching, and has obtained the effect of automatic focusing.
Five described dimension regulation bearings and floating type focal plane device are arranged on the base of steel；Paraboloidal mirror image plane position precise figures display device and CCD camera focal length measuring equipment are provided with described floating type focal plane device, described floating type focal plane device also includes CCD five and ties up governor motion.
The random measurement of focal length uses ccd detector as measurement head with display in real time, can find initial focus position using autocollimatic straight hair when system is debug, then carry out focometry and its numerical monitor with ccd detector.
The ccd detector uses the FT50M type area array CCDs of DALSA companies, the mega pixel of valid pixel 1, the effective mm of 6 x of imaging area 6, the dB of dynamic range 67, the fps of speed 100.
Carry the guide rail model Seiko SNK of ccd detector LAH15BN, a height of 74 × 34 × 28mm of length and width.The ball screw of ccd detector is affected to use the single nut of THK companies, have trimming, diameter 50mm, helical pitch 100mm WGF 50100-3 type screw mandrels.Control walks and provided the grating scale of position pin-point reading using the type absolute type linear grating chis of HEIDENHAIN companies of Germany LC 483, and measurement step pitch is 0.1 μm, the x 10 of thermal coefficient of expansion ≈ 8-6 K-1, measurement length 1340 mm.
Ccd detector surveys the measuring method of focal length in a kind of use autofocus digital off-axis parabolic mirror parallel light pipe, comprises the following steps：
（1）Before mobile ccd detector Jiao Yu and defocused position, the distance value △ l with focus are measured by the long grating or electric light grid on guide rail or accurate length scale chi respectively1, △ l2；
（2）The actual clear aperture value D of system is measured with " photoscreen method "；
（3）Disc of confusion radius or defocused disc of confusion radius y before Jiao are accurately measured by ccd detector1And y2；
（4）According to step 1~3, change △ l1Or △ l2, measure corresponding y1Or y2, according to f '=D △ l1/y1= D·△l2/y2,Obtain respective focal measured value；
（5）Data processing is carried out to the focometry value obtained by step 4, the exact value of current focus is obtained；
（6）The accuracy for the current focus that step display 5 is obtained over the display.
Claims (6)
1. a kind of autofocus digital off-axis parabolic mirror parallel light pipe, it is characterised in that：Described autofocus digital off-axis parabolic mirror parallel light pipe includes：Off axis paraboloid mirror principal reflection mirror, five dimension regulation bearings, precise guide rail, floating type focal plane device, the dimensions of CCD five governor motion, paraboloidal mirror image plane position precise figures display device, CCD camera focal length measuring equipment, auto-collimation plane mirror, regulation bearing and automatic focusing compensation bar, described floating type focal plane device and off axis paraboloidal mirror are arranged in precise guide rail, described ccd detector is arranged on floating type focal plane device, and described automatic focusing compensation bar is connected between off axis paraboloidal mirror and floating type focal plane device respectively.
2. a kind of autofocus digital off-axis parabolic mirror parallel light pipe according to claim 1, it is characterised in that described automatic focusing compensates bar at least provided with three.
3. a kind of autofocus digital off-axis parabolic mirror parallel light pipe according to claim 1, it is characterised in that：Described off axis paraboloidal mirror uses zero expansion glass ceramic material.
4. a kind of autofocus digital off-axis parabolic mirror parallel light pipe according to claim 1 or 2, it is characterised in that：Described automatic focusing compensation bar uses zero thermal expansion coefficient materials in the tube temperature compensation rod, and material is 32Ni-64Fe-4Co superinvars or the stainless invar of 37Fe-32Co-11Cr.
5. a kind of autofocus digital off-axis parabolic mirror parallel light pipe according to claim 1, it is characterised in that：The dimension governor motions of CCD five are provided with described ccd detector.
6. ccd detector surveys the measuring method of focal length in a kind of use autofocus digital off-axis parabolic mirror parallel light pipe, it is characterised in that：Comprise the following steps：
（1）Before mobile ccd detector Jiao Yu and defocused position, the distance value △ l with focus are measured by the long grating or electric light grid on guide rail or accurate length scale chi respectively1, △ l2；
（2）The actual clear aperture value D of system is measured with " photoscreen method "；
（3）Disc of confusion radius or defocused disc of confusion radius y before Jiao are accurately measured by ccd detector1And y2；
（4）According to step 1~3, change △ l1Or △ l2, measure corresponding y1Or y2, according to f '=D △ l1/y1= D·△l2/y2,Obtain respective focal measured value；
（5）Data processing is carried out to the focometry value obtained by step 4, the exact value of current focus is obtained；
（6）The accuracy for the current focus that step display 5 is obtained over the display.
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| CN2011101730510A CN102364380A (en) | 2011-06-24 | 2011-06-24 | Autofocus digital off-axis parabolic mirror parallel light pipe |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853992A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | Method for improving installation accuracy of collimator tube reticle |
| CN103826118A (en) * | 2014-03-18 | 2014-05-28 | 西安工业大学 | Color television imaging system spatial resolution detecting device |
| RU2639995C1 (en) * | 2016-10-31 | 2017-12-25 | АКЦИОНЕРНОЕ ОБЩЕСТВО "Научно-исследовательский институт оптико-электронного приборостроения" (АО "НИИ ОЭП") | Single-mirror off-axis lens |
| CN108120989A (en) * | 2017-12-28 | 2018-06-05 | 长春长光精密仪器集团有限公司 | Focometry and device, the system and method for position of focal plane calibration |
| CN110955015A (en) * | 2019-12-19 | 2020-04-03 | 中国科学院长春光学精密机械与物理研究所 | Wide-temperature-adaptability collimator reflector supporting structure |
| CN115291407A (en) * | 2022-09-29 | 2022-11-04 | 中国科学院长春光学精密机械与物理研究所 | Collimator fuselage device based on off-axis optical system |
| CN115308918A (en) * | 2022-09-29 | 2022-11-08 | 中国科学院长春光学精密机械与物理研究所 | Machine body device of large-caliber coaxial collimator |
| CN118274890A (en) * | 2024-06-03 | 2024-07-02 | 北京威睛光学技术有限公司 | Computing optical measurement system and method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101008563A (en) * | 2006-01-24 | 2007-08-01 | 中国科学院长春光学精密机械与物理研究所 | System for testing optical axis of broadband multi-sensor electro-optic apparatus |
| CN101949700A (en) * | 2010-08-27 | 2011-01-19 | 中国航空工业第六一八研究所 | Laser gyro cavity length control reflecting mirror assembly |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101008563A (en) * | 2006-01-24 | 2007-08-01 | 中国科学院长春光学精密机械与物理研究所 | System for testing optical axis of broadband multi-sensor electro-optic apparatus |
| CN101949700A (en) * | 2010-08-27 | 2011-01-19 | 中国航空工业第六一八研究所 | Laser gyro cavity length control reflecting mirror assembly |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853992A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | Method for improving installation accuracy of collimator tube reticle |
| CN103826118A (en) * | 2014-03-18 | 2014-05-28 | 西安工业大学 | Color television imaging system spatial resolution detecting device |
| CN103826118B (en) * | 2014-03-18 | 2016-02-03 | 西安工业大学 | A kind of color TV imaging system spatial discrimination force checking device |
| RU2639995C1 (en) * | 2016-10-31 | 2017-12-25 | АКЦИОНЕРНОЕ ОБЩЕСТВО "Научно-исследовательский институт оптико-электронного приборостроения" (АО "НИИ ОЭП") | Single-mirror off-axis lens |
| CN108120989A (en) * | 2017-12-28 | 2018-06-05 | 长春长光精密仪器集团有限公司 | Focometry and device, the system and method for position of focal plane calibration |
| CN108120989B (en) * | 2017-12-28 | 2020-04-10 | 佛山长光智能制造研究院有限公司 | Device, system and method for focal length measurement and focal plane position calibration |
| CN110955015A (en) * | 2019-12-19 | 2020-04-03 | 中国科学院长春光学精密机械与物理研究所 | Wide-temperature-adaptability collimator reflector supporting structure |
| CN115291407A (en) * | 2022-09-29 | 2022-11-04 | 中国科学院长春光学精密机械与物理研究所 | Collimator fuselage device based on off-axis optical system |
| CN115308918A (en) * | 2022-09-29 | 2022-11-08 | 中国科学院长春光学精密机械与物理研究所 | Machine body device of large-caliber coaxial collimator |
| CN115308918B (en) * | 2022-09-29 | 2023-01-03 | 中国科学院长春光学精密机械与物理研究所 | Machine body device of large-caliber coaxial collimator |
| CN118274890A (en) * | 2024-06-03 | 2024-07-02 | 北京威睛光学技术有限公司 | Computing optical measurement system and method |
| CN118274890B (en) * | 2024-06-03 | 2024-07-30 | 北京威睛光学技术有限公司 | Computing optical measurement system and method |
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Application publication date: 20120229 |