CN102324395B - Operation system and operation method for LED (light-emitting diode) crystal grain scanning and point-detection - Google Patents
Operation system and operation method for LED (light-emitting diode) crystal grain scanning and point-detection Download PDFInfo
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- CN102324395B CN102324395B CN 201110226595 CN201110226595A CN102324395B CN 102324395 B CN102324395 B CN 102324395B CN 201110226595 CN201110226595 CN 201110226595 CN 201110226595 A CN201110226595 A CN 201110226595A CN 102324395 B CN102324395 B CN 102324395B
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Abstract
The invention discloses an operation system and an operation method for LED (light-emitting diode) crystal grain scanning and point-detection, which are used for detecting LED crystal grains outputted from a wafer bearing device and distributed on an LED crystal grain carrier. The operation system for LED crystal grain scanning and point-detection comprises a conveying belt, a set of sucking device, at least a scanning device and more than one LED crystal grain point-detection device, wherein the sucking devices are used for carrying the LED crystal grain carrier, the scanning device is arranged on any side of the conveying belt, and the LED crystal grain point-detection devices are arranged on any side of the conveying belt; and when the conveying belt conveys the LED crystal grain carrier into the scanning device, the scanning device carries out coordinate scanning and storage on the crystal grains on the LED crystal grain carrier, and then, the conveying belt conveys the LED crystal grain carrier into any LED crystal grain point-detection device so as to carry out point-detection on the crystal grains on the LED crystal grain carrier. By using the system and method disclosed by the invention, a crystal grain scanning process and a crystal grain point-detection process can be unified, and an operation of carrying out manual carrying of the LED crystal grain carrier is not required, therefore, the efficiency of crystal grain point-detection can be greatly improved, and the manufacturing costs and the manpower costs can be saved.
Description
Technical field
Operation system and How It Works that the present invention surveys about the scanning of a kind of LED crystal grain and point, especially a kind of automated detection system can carry out in the lump crystal grain scanning and point and survey LED crystal grain on the LED crystal grain carrier that this wafer bearing device exports in this system.
Background technology
When testing the LED wafer, can first use wafer-scanning equipment (as: scanning machine, automation optical device) to carry out the wafer-scanning of each crystal grain coordinate, in order to produce with absolute coordinate and confirm the crystal grain Distribution Data, afterwards, again to LED crystal grain carry out a survey with obtain each crystal grain electrically, the crystal grain attribute data such as optical characteristics, outward appearance and in addition classification, in order to the quality of the crystal grain that can check out the LED wafer, in order to improve the quality of product.
Yet, existing wherein a kind of execution mode is after the LED wafer is carried out coordinate scanning by wafer-scanning equipment to crystal grain at present, must the wafer bearing device of scanned wafer be carried to a measurement equipment by manpower transport's mode, can begin LED crystal grain is tested, and the mode of a dead lift causes efficient low, and therefore present crystal grain scanning is surveyed with crystal grain point and still had very large problem to solve; Therefore, if crystal grain scanning can be surveyed with crystal grain point operates in same system simultaneously, and the wafer after utilizing automation with crystal grain scanning is transported in crystal grain point measurement equipment, with crystal grain scanning and crystal grain point flow gauge unification, so will no longer need a dead lift, can significantly promote the efficient that crystal grain point is surveyed, also can save manufacturing cost and the human cost that causes because of manpower simultaneously, be a best solution.
Summary of the invention
Purpose of the present invention namely is to provide operation system and the How It Works of a kind of LED crystal grain scanning with the some survey, LED crystal grain on the LED crystal grain carrier that wafer bearing device can be exported carries out the flow process that the scanning of LED crystal grain and LED crystal grain point are surveyed in the lump automatically in native system.
A further object of the present invention is to provide a kind of some examining system of the one-to-many in conjunction with the scanner uni test, with the asymmetric scanner uni point survey time of script, see through the setting at multi-point sampler station, digestion originally too fast, some survey time scanning process time pass problem of a specified duration, and obtain the balance of both activity durations.
can reach operation system and the How It Works of the scanning of LED crystal grain with the some survey of foregoing invention purpose, for detection of the LED crystal grain on the LED crystal grain carrier of wafer bogey output, this LED crystal grain scanning comprises a conveyer belt with the operation system that point is surveyed, one group of drawing device that can move between this wafer bearing device and conveyer belt position, at least one is arranged at the scanning means of this conveyer belt either side and is arranged at LED crystal grain spot measurement device on this conveyer belt either side more than one, and this conveyer belt is when entering the carrying of this LED crystal grain carrier in this scanning means, can carry out coordinate scanning and store the crystal grain on this LED crystal grain carrier, afterwards, after this LED crystal grain carrier scans through coordinate, by this conveyer belt, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, so that the crystal grain on this LED crystal grain carrier is carried out a survey.
In particular, described LED crystal grain scanning has a control unit that is connected with this conveyer belt and this LED crystal grain spot measurement device with the operation system that point is surveyed, and this control unit is used for controlling this LED crystal grain carrier and sends into arbitrary LED crystal grain spot measurement device; Have at least one empty sheet detecting element in this LED crystal grain spot measurement device in addition, in order to whether judging in this LED crystal grain spot measurement device loaded LED crystal grain carrier, and will judge that signal is back to this control unit.
In particular, have three identification marks on described LED crystal grain carrier, by this scanning means, the identification mark of this LED crystal grain carrier is carried out coordinate scanning and stored, as the use of contraposition before a survey.
In particular, described conveyer belt includes at least one group of transverse shifting track and at least one group and vertically moves track, so that the LED crystal grain carrier that this conveyer belt is carried can carry out laterally or vertically move.
In particular, described wafer bearing device is the container that wafer cassette, wafer film magazine etc. can carry LED crystal grain carrier.
in addition, the present invention is except using conveyer belt carrying LED crystal grain carrier, also can use the mode of pick-up arm to carry LED crystal grain carrier, therefore this LED crystal grain scanning also can include one with the operation system of putting survey and put the feed zone with a plurality of LED crystal grain carriers in order to provide, one puts the discharge zone with a plurality of complete survey LED crystal grain carriers in order to provide, at least one scanning means, one group in order to move LED crystal grain carrier in feed zone, pick-up arm between discharge zone and scanning means, more than one LED crystal grain spot measurement device, therefore when transporting this LED crystal grain carrier, pick-up arm enters in this scanning means, namely can carry out to the crystal grain on this LED crystal grain carrier coordinate scanning and store, afterwards, after this LED crystal grain carrier scans through this scanning means coordinate, before being carried to discharge zone, by this pick-up arm, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, so that the crystal grain on this LED crystal grain carrier is carried out a survey.
In particular, described LED crystal grain scanning has a control unit that is connected with this pick-up arm and this LED crystal grain spot measurement device with the operation system that point is surveyed, and this control unit is used for controlling this LED crystal grain carrier and sends into arbitrary LED crystal grain spot measurement device; Have at least one empty sheet detecting element in this LED crystal grain spot measurement device in addition, in order to whether judging in this LED crystal grain spot measurement device loaded LED crystal grain carrier, and will judge that signal is back to this control unit.
In particular, have three identification marks on described LED crystal grain carrier, by this scanning means, the identification mark of this LED crystal grain carrier is carried out coordinate scanning and stored, as the use of contraposition before a survey.
In particular, described wafer bearing device is the container that wafer cassette, wafer film magazine etc. can carry LED crystal grain carrier.
In addition, LED crystal grain scanning of the present invention and the How It Works of putting survey, for detection of the LED crystal grain on the LED crystal grain carrier of wafer bogey output, its key step is:
(1) by drawing device, the LED crystal grain carrier on wafer bearing device is moved on conveyer belt;
(2) this conveyer belt is transported to this LED crystal grain carrier in scanning means, and the crystal grain on this LED crystal grain carrier being carried out coordinate scanning and to store, and one group of remittance abroad is to the coordinate message of crystal grain position on should LED crystal grain carrier; And
(3) LED crystal grain carrier is shifted out this scanning means, by this conveyer belt, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, and the coordinate message that will organize crystal grain position on should LED crystal grain carrier imports this LED crystal grain spot measurement device, uses the crystal grain on this LED crystal grain carrier is carried out a survey.
In particular, before described LED crystal grain carrier moves to conveyer belt, an identification mark of LED crystal grain carrier can be carried out coordinate scanning and store, with as the use that enters the contraposition of arbitrary LED crystal grain spot measurement device.
In particular, after described LED crystal grain carrier is carried to this scanning means, first judge the identification mark coordinate of LED crystal grain carrier, if confirm errorlessly, just can begin to carry out the scanning of crystal grain coordinate.
In particular, described LED crystal grain carrier can first judge the identification mark coordinate of LED crystal grain carrier after being carried to this LED crystal grain spot measurement device, if confirm errorlessly, just can begin to carry out to survey the crystal grain on this LED crystal grain carrier.
A kind of LED crystal grain scanning provided by the present invention and operation system and the How It Works of putting survey when mutually comparing with other located by prior art, have more and get the row advantage ready:
LED crystal grain on the LED crystal grain carrier that the present invention can export wafer bearing device, automatically carry out in the lump the flow process that the scanning of LED crystal grain and LED crystal grain point are surveyed in native system, the wafer after therefore but automation being scanned crystal grain is transported in crystal grain point measurement equipment, with crystal grain scanning and crystal grain point flow gauge unification.
The present invention will no longer need manually to carry in the scanning of LED crystal grain and LED crystal grain point survey process, therefore can significantly promote the efficient that crystal grain point is surveyed, and also can save manufacturing cost and the human cost that causes because of manpower simultaneously.
Description of drawings
Figure 1A to Fig. 1 F is LED crystal grain scanning of the present invention and the operation system of some survey and the first enforcement illustration of How It Works;
Fig. 2 is: LED crystal grain scanning of the present invention and the operation system of some survey and the operation workflow figure of How It Works; And
Fig. 3 A to Fig. 3 F is LED crystal grain scanning of the present invention and the operation system of some survey and the second enforcement illustration of How It Works.
Embodiment
Relevant for aforementioned and other technology contents, characteristics and effect of the present invention, in the following detailed description that coordinates with reference to graphic preferred embodiment, can clearly present.
see also Figure 1A to Fig. 1 F, be a kind of LED crystal grain scanning of the present invention and the operation system of some survey and the first enforcement illustration of How It Works, the operation system that this LED crystal grain scanning and point are surveyed is in order to detect the LED crystal grain 21 on the LED crystal grain carrier 2 of wafer bogey 1 output, as shown in Figure 1A, one group of drawing device 3 that moves between this wafer bearing device 1 and conveyer belt 4 positions, can adsorb a LED crystal grain carrier 2 by this wafer bearing device 1 is interior, and as shown in Figure 1B, can will be positioned on conveyer belt 4 on this LED crystal grain carrier 2 by this drawing device 3, for another example shown in Fig. 1 C, by this conveyer belt 4, this LED crystal grain carrier 2 being carried to forward one again is arranged in the scanning means 5 of these conveyer belt 4 either sides, the LED crystal grain 21 on this LED crystal grain carrier 2 carried out coordinate scanning and to store.
as shown in Fig. 1 D, after LED crystal grain carrier 2 is through coordinate scanning, this conveyer belt 4 can withdraw from this scanning means 5 with this LED crystal grain carrier 2, and whether judge in this LED crystal grain spot measurement device 6 loaded LED crystal grain carrier 2 by the empty sheet detecting element (not shown) in arbitrary LED crystal grain spot measurement device 6 that is arranged on these conveyer belt 4 either sides again, and will judge signal be back to one with control unit (not shown) that this conveyer belt 4 and this LED crystal grain spot measurement device 6 are connected in, and this control unit is sent into arbitrary LED crystal grain spot measurement device 6 for controlling this LED crystal grain carrier 2, therefore, as shown in Fig. 1 E and Fig. 1 F, after this LED crystal grain carrier 2 is through these scanning means 5 coordinate scannings, this control unit can control this conveyer belt 4 this LED crystal grain carrier 2 is selected to transport in the LED crystal grain spot measurement device 6(figure that enters inside and do not have LED crystal grain carrier 2 with one of them LED crystal grain spot measurement device of shinny expression 6 inside there is no LED crystal grain carrier 2), so that the LED crystal grain 21 on this LED crystal grain carrier 2 is carried out a survey.
In addition, by Figure 1A as can be known, have three identification marks 22 on this LED crystal grain carrier 2, carry out coordinate scanning and store by the identification mark 22 of 5 pairs of these LED crystal grain carriers 2 of this scanning means, as the use of contraposition before a survey.
In addition, by in Figure 1A to Fig. 1 F as can be known, because must transporting this LED crystal grain carrier 2, this conveyer belt 4 enters in different LED crystal grain spot measurement device 6, therefore conveyer belt 4 includes at least one group of transverse shifting track and at least one group and vertically moves track, so that the LED crystal grain carrier 2 that this conveyer belt 4 is carried can carry out laterally or vertically move.
See also Fig. 2, be a kind of LED crystal grain scanning of the present invention and the operation system of some survey and the operation workflow figure of How It Works, its key step is:
(1) by drawing device, the LED crystal grain carrier on wafer bearing device is moved on conveyer belt 201;
(2) this conveyer belt is transported to this LED crystal grain carrier in this scanning means, and the crystal grain on this LED crystal grain carrier being carried out coordinate scanning and to store, and one group of remittance abroad is to the coordinate message 202 of crystal grain position on should LED crystal grain carrier; And
(3) LED crystal grain carrier is shifted out this scanning means, by this conveyer belt, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, and the coordinate message that will organize crystal grain position on should LED crystal grain carrier imports this LED crystal grain spot measurement device, uses the crystal grain on this LED crystal grain carrier is carried out surveying 203.
In addition, before this LED crystal grain carrier moves to conveyer belt, an identification mark of LED crystal grain carrier can be carried out coordinate scanning and store, with as the use that enters the contraposition of arbitrary LED crystal grain spot measurement device; Therefore, after this LED crystal grain carrier is carried to this scanning means, first judge the identification mark coordinate of LED crystal grain carrier, if confirm errorless, just can begin to carry out the scanning of crystal grain coordinate, and after this LED crystal grain carrier is carried to this LED crystal grain spot measurement device, also can first judge the identification mark coordinate of LED crystal grain carrier, if confirm errorlessly, just can begin to carry out to survey the crystal grain on this LED crystal grain carrier.
See also Fig. 3 A to Fig. 3 F, be a kind of LED crystal grain scanning of the present invention and the operation system of some survey and the second enforcement illustration of How It Works, the present invention is except can using the first conveyer belt carrying LED crystal grain carrier of implementing, also can use the mode of pick-up arm to carry LED crystal grain carrier 2, this pick-up arm includes but not limited in implementing: suction nozzle draws mode, clipping picks and places or magnetic means etc.As shown in Figure 3A, by one group in order to move the pick-up arm 9 of LED crystal grain carrier 2 between feed zone 7, discharge zone 8 and scanning means 5, the LED crystal grain carrier 2 that feed zone 7 is put is mentioned, and then as shown in Fig. 3 B, by this pick-up arm 9, this LED crystal grain carrier 2 is transported and enter in this scanning means 5, namely can carry out to the LED crystal grain 21 on this LED crystal grain carrier 2 coordinate scanning and store.
As shown in Figure 3 C, after LED crystal grain carrier 2 is through coordinate scanning, this pick-up arm 9 with this LED crystal grain carrier 2 by proposing in this scanning means 5, and whether judge in this LED crystal grain spot measurement device 6 loaded LED crystal grain carrier 2 by the empty sheet detecting element (not shown) in arbitrary LED crystal grain spot measurement device 6 again, and will judge signal be back to one with control unit (not shown) that this pick-up arm 9 and this LED crystal grain spot measurement device 6 are connected in, and this control unit is used for controlling this LED crystal grain carrier 2 and sends into arbitrary LED crystal grain spot measurement device 6; Therefore, as shown in Fig. 3 D, after this LED crystal grain carrier 2 is through these scanning means 5 coordinate scannings, before being carried to discharge zone 8, this control unit can be controlled by this pick-up arm 9, this LED crystal grain carrier 2 to be transported and enter the LED crystal grain spot measurement device 6 that arbitrary inside does not have LED crystal grain carrier 2, so that the LED crystal grain 21 on this LED crystal grain carrier 2 is carried out a survey.
As shown in Fig. 3 E, after carrying out a survey through LED crystal grain spot measurement device 6, this pick-up arm 9 can be with this LED crystal grain carrier 2 by proposing in this LED crystal grain spot measurement device 6, and as shown in Fig. 3 F, this pick-up arm 9 can be moved complete survey LED crystal grain carrier 2 to a discharge zone 8 again, in order to carry out subsequent treatment.
In addition, by Fig. 3 A as can be known, have three identification marks 22 on this LED crystal grain carrier 2, carry out coordinate scanning and store by the identification mark 22 of 5 pairs of these LED crystal grain carriers 2 of this scanning means, as the use of contraposition before a survey.
By the above detailed description of preferred embodiments, hope can be known description feature of the present invention and spirit more, and with above-mentioned disclosed preferred embodiment, category of the present invention is limited.On the contrary, its objective is that hope can contain in the category of the scope of the claims of being arranged in of various changes and tool equality institute of the present invention wish application.
Claims (15)
1. a LED crystal grain scans the operation system of surveying with point, and the LED crystal grain for detection of on the LED crystal grain carrier of wafer bogey output is characterized in that, this LED crystal grain scans the operation system of surveying with point and comprises:
One conveyer belt;
One group of drawing device that can move between this wafer bearing device and conveyer belt position is used for carrying LED crystal grain carrier;
At least one scanning means is arranged at the either side of this conveyer belt, and this conveyer belt transports this LED crystal grain carrier and enters in this scanning means, the crystal grain on this LED crystal grain carrier carried out coordinate scanning and to store; And
More than one LED crystal grain spot measurement device, be arranged on the either side of this conveyer belt, so that after this LED crystal grain carrier process coordinate scanning, by this conveyer belt, this LED crystal grain carrier is transported and enters arbitrary LED crystal grain spot measurement device, so that the crystal grain on this LED crystal grain carrier is carried out a survey.
2. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 1, it is characterized in that, have three identification marks on this LED crystal grain carrier, by this scanning means, the identification mark of this LED crystal grain carrier is carried out coordinate scanning and stored, as the use of contraposition before a survey.
3. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 1, have a control unit that is connected with this conveyer belt and this LED crystal grain spot measurement device, and this control unit is used for controlling this LED crystal grain carrier and sends into arbitrary LED crystal grain spot measurement device.
4. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 3, it is characterized in that, have at least one empty sheet detecting element in this LED crystal grain spot measurement device, in order to whether judging in this LED crystal grain spot measurement device loaded LED crystal grain carrier, and will judge that signal is back to this control unit.
5. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 1, it is characterized in that, this conveyer belt includes at least one group of transverse shifting track and at least one group and vertically moves track, so that the LED crystal grain carrier that this conveyer belt is carried can carry out laterally or vertically move.
6. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 1, is characterized in that, this wafer bearing device is for carrying the container of LED crystal grain carrier.
7. a LED crystal grain scans the How It Works of surveying with point, and the LED crystal grain for detection of on the LED crystal grain carrier of wafer bogey output is characterized in that, the steps include:
(1) by drawing device, the LED crystal grain carrier on wafer bearing device is moved on conveyer belt;
(2) this conveyer belt is transported to this LED crystal grain carrier in scanning means, and the crystal grain on this LED crystal grain carrier being carried out coordinate scanning and to store, and one group of remittance abroad is to the coordinate message of crystal grain position on should LED crystal grain carrier; And
(3) LED crystal grain carrier is shifted out this scanning means, by this conveyer belt, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, and the coordinate message that will organize crystal grain position on should LED crystal grain carrier imports this LED crystal grain spot measurement device, uses the crystal grain on this LED crystal grain carrier is carried out a survey.
8. the scanning of LED crystal grain and the How It Works of putting survey as claimed in claim 7, it is characterized in that, before this LED crystal grain carrier moves to conveyer belt, an identification mark of LED crystal grain carrier can be carried out coordinate scanning and store, with as the use that enters the contraposition of arbitrary LED crystal grain spot measurement device.
9. the How It Works surveyed of LED crystal grain scanning and point as claimed in claim 8, is characterized in that, after this LED crystal grain carrier is carried to this scanning means, first judges the identification mark coordinate of LED crystal grain carrier, if confirm errorlessly, just can begin to carry out the scanning of crystal grain coordinate.
10. the scanning of LED crystal grain and the How It Works of putting survey as claimed in claim 9, it is characterized in that, after this LED crystal grain carrier is carried to this LED crystal grain spot measurement device, can first judge the identification mark coordinate of LED crystal grain carrier, if confirm errorlessly, just can begin to carry out to survey the crystal grain on this LED crystal grain carrier.
11. a LED crystal grain scans the operation system of surveying with point, the LED crystal grain for detection of on the LED crystal grain carrier of wafer bogey output is characterized in that, this LED crystal grain scans the operation system of surveying with point and comprises:
One feed zone has a plurality of LED crystal grain carriers in order to provide to put;
One discharge zone has a plurality of complete survey LED crystal grain carriers in order to provide to put;
At least one scanning means enters in this scanning means so that this LED crystal grain carrier transports, the crystal grain on this LED crystal grain carrier carried out coordinate scanning and to store;
One group of pick-up arm is in order to move LED crystal grain carrier between feed zone, discharge zone and scanning means; And
More than one LED crystal grain spot measurement device, after this LED crystal grain carrier scans through this scanning means coordinate, before being carried to discharge zone, by this pick-up arm, this LED crystal grain carrier is transported and enter arbitrary LED crystal grain spot measurement device, so that the crystal grain on this LED crystal grain carrier is carried out a survey.
12. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 11, it is characterized in that, have three identification marks on this LED crystal grain carrier, by this scanning means, the identification mark of this LED crystal grain carrier is carried out coordinate scanning and stored, as the use of contraposition before a survey.
13. the scanning of LED crystal grain and the operation system of putting survey, have a control unit that is connected with this pick-up arm and this LED crystal grain spot measurement device as claimed in claim 11, this control unit is used for controlling this LED crystal grain carrier and sends into arbitrary LED crystal grain spot measurement device.
14. the scanning of LED crystal grain and the operation system of putting survey as claimed in claim 13, it is characterized in that, has at least one empty sheet detecting element in this LED crystal grain spot measurement device, in order to whether judging in this LED crystal grain spot measurement device loaded LED crystal grain carrier, and will judge that signal is back to this control unit.
15. the scanning of LED crystal grain and the operation system of putting survey, is characterized in that as claimed in claim 11, this wafer bearing device is for carrying the container of LED crystal grain carrier.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110226595 CN102324395B (en) | 2011-08-09 | 2011-08-09 | Operation system and operation method for LED (light-emitting diode) crystal grain scanning and point-detection |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110226595 CN102324395B (en) | 2011-08-09 | 2011-08-09 | Operation system and operation method for LED (light-emitting diode) crystal grain scanning and point-detection |
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| CN102324395A CN102324395A (en) | 2012-01-18 |
| CN102324395B true CN102324395B (en) | 2013-06-19 |
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| CN 201110226595 Expired - Fee Related CN102324395B (en) | 2011-08-09 | 2011-08-09 | Operation system and operation method for LED (light-emitting diode) crystal grain scanning and point-detection |
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| CN104808128B (en) * | 2015-03-31 | 2019-01-18 | 山西南烨立碁光电有限公司 | The automatic endurance testing device of LED and method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006165216A (en) * | 2004-12-07 | 2006-06-22 | Nikon Corp | Evaluation method, scanning exposure method and scanning exposure device |
| CN102101112A (en) * | 2009-12-18 | 2011-06-22 | 旺矽科技股份有限公司 | Light emitting diode wafer sorting method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4209709B2 (en) * | 2003-03-20 | 2009-01-14 | 株式会社キーエンス | Displacement meter |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006165216A (en) * | 2004-12-07 | 2006-06-22 | Nikon Corp | Evaluation method, scanning exposure method and scanning exposure device |
| CN102101112A (en) * | 2009-12-18 | 2011-06-22 | 旺矽科技股份有限公司 | Light emitting diode wafer sorting method |
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