CN102295268A - 长玻璃柱体阳极键合的加热加压装置 - Google Patents
长玻璃柱体阳极键合的加热加压装置 Download PDFInfo
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- CN102295268A CN102295268A CN2011102050603A CN201110205060A CN102295268A CN 102295268 A CN102295268 A CN 102295268A CN 2011102050603 A CN2011102050603 A CN 2011102050603A CN 201110205060 A CN201110205060 A CN 201110205060A CN 102295268 A CN102295268 A CN 102295268A
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- 239000011521 glass Substances 0.000 title claims abstract description 121
- 238000010438 heat treatment Methods 0.000 title claims abstract description 65
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- 229910052710 silicon Inorganic materials 0.000 claims abstract description 47
- 239000010703 silicon Substances 0.000 claims abstract description 47
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- 239000000919 ceramic Substances 0.000 claims abstract description 16
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- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 6
- 230000003044 adaptive effect Effects 0.000 abstract description 4
- 244000273256 Phragmites communis Species 0.000 abstract 4
- 238000009413 insulation Methods 0.000 abstract 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 description 11
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CN201110205060.3A CN102295268B (zh) | 2011-07-21 | 2011-07-21 | 长玻璃柱体阳极键合的加热加压装置 |
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CN201110205060.3A CN102295268B (zh) | 2011-07-21 | 2011-07-21 | 长玻璃柱体阳极键合的加热加压装置 |
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CN102295268A true CN102295268A (zh) | 2011-12-28 |
CN102295268B CN102295268B (zh) | 2014-08-27 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105253334A (zh) * | 2015-09-30 | 2016-01-20 | 安徽省宁国市天成科技发展有限公司 | 一种加热管生产装置 |
CN110416125A (zh) * | 2019-07-22 | 2019-11-05 | 复汉海志(江苏)科技有限公司 | 一种半导体封装结构及封装方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1792937A (zh) * | 2005-11-30 | 2006-06-28 | 哈尔滨工业大学 | Mems高温压力传感器自动键合机 |
CN1815705A (zh) * | 2005-11-30 | 2006-08-09 | 哈尔滨工业大学 | 用于mems高温压力传感器自动阳极键合的加热装置 |
US20060267023A1 (en) * | 2005-05-13 | 2006-11-30 | Mcbride Sterling E | Anodically bonded ultra-high-vacuum cell |
JP2011029269A (ja) * | 2009-07-22 | 2011-02-10 | Yamatake Corp | 陽極接合装置及び陽極接合方法 |
CN202181210U (zh) * | 2011-07-21 | 2012-04-04 | 苏州大学 | 长玻璃柱体阳极键合的加热加压装置 |
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2011
- 2011-07-21 CN CN201110205060.3A patent/CN102295268B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060267023A1 (en) * | 2005-05-13 | 2006-11-30 | Mcbride Sterling E | Anodically bonded ultra-high-vacuum cell |
CN1792937A (zh) * | 2005-11-30 | 2006-06-28 | 哈尔滨工业大学 | Mems高温压力传感器自动键合机 |
CN1815705A (zh) * | 2005-11-30 | 2006-08-09 | 哈尔滨工业大学 | 用于mems高温压力传感器自动阳极键合的加热装置 |
JP2011029269A (ja) * | 2009-07-22 | 2011-02-10 | Yamatake Corp | 陽極接合装置及び陽極接合方法 |
CN202181210U (zh) * | 2011-07-21 | 2012-04-04 | 苏州大学 | 长玻璃柱体阳极键合的加热加压装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105253334A (zh) * | 2015-09-30 | 2016-01-20 | 安徽省宁国市天成科技发展有限公司 | 一种加热管生产装置 |
CN105253334B (zh) * | 2015-09-30 | 2018-05-11 | 宁国市安瑞电气有限公司 | 一种加热管生产装置 |
CN110416125A (zh) * | 2019-07-22 | 2019-11-05 | 复汉海志(江苏)科技有限公司 | 一种半导体封装结构及封装方法 |
CN110416125B (zh) * | 2019-07-22 | 2021-07-20 | 扬州爱迪秀自动化科技有限公司 | 一种半导体封装结构及封装方法 |
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Effective date of registration: 20191204 Address after: Room 1706, block B, building 2, Lifeng business center, Wuzhong District, Suzhou City, Jiangsu Province Patentee after: Suzhou Xinmu Intellectual Property Service Co.,Ltd. Address before: 215123 No. 199 benevolence Road, Suzhou Industrial Park, Jiangsu, China Patentee before: Soochow University |
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Effective date of registration: 20221128 Address after: 276000 yanpo Road, Feixian Economic Development Zone, Linyi City, Shandong Province Patentee after: LINYI YIQUN PACKING PRODUCTS Co.,Ltd. Address before: Room 1706, block B, building 2, Lifeng business center, Wuzhong District, Suzhou City, Jiangsu Province Patentee before: Suzhou Xinmu Intellectual Property Service Co.,Ltd. |
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Effective date of registration: 20240202 Address after: Room 505, 5th Floor, Building 12, No.1 Ronghua South Road, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100000 RMB Patentee after: Beijing Qiancheng Technology Co.,Ltd. Country or region after: China Address before: 276000 yanpo Road, Feixian Economic Development Zone, Linyi City, Shandong Province Patentee before: LINYI YIQUN PACKING PRODUCTS Co.,Ltd. Country or region before: China |