CN102253120B - Texture material measuring device and texture material measuring method - Google Patents
Texture material measuring device and texture material measuring method Download PDFInfo
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- CN102253120B CN102253120B CN201110066066.7A CN201110066066A CN102253120B CN 102253120 B CN102253120 B CN 102253120B CN 201110066066 A CN201110066066 A CN 201110066066A CN 102253120 B CN102253120 B CN 102253120B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
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Abstract
The invention provides a texture material measuring device and a texture material measuring method. The nondestructive measurement of grain size is positively performed by removing oxide films adhering to surfaces of a material to be measured. For this purpose, in making a measurement, first, laser beams are radiated from a surface removal device to an irradiation position of laser beams which are radiated from an ultrasonic detector onto a surface on the other side of a rolled product, whereby an oxide film on the surface on the other side of the rolled product is removed. After the removal of the oxide film from the surface on the other side of the rolled product, laser beams are radiated from an ultrasonic oscillator onto a surface on one side of the rolled product, whereby ultrasonic waves are generated on the surface on the other side of the rolled product. And laser beams are radiated from the ultrasonic detector onto the surface on the other side of the rolled product and, at the same time, the light reflected from the surface on the other side of the rolled product is received by the ultrasonic detector, whereby the ultrasonic waves generated on the surface on the other side of the rolled product is detected, and the grain size of the rolled product is calculated on the basis of detection results of the ultrasonic detector.
Description
The application submitted to based on Dec 15th, 2008, and application number is " 200780022371.8 ", the divisional application that denomination of invention is " tissue material determinator and organize material assay method ".
Technical field
The present invention relates to evaluate organizing material determinator and organizing material assay method of this material by measuring the supersonic oscillations that produce in material, particularly adopt the material of organizing of the metal material of supersonic oscillations measurement to measure.
Background technology
Organizing in material of ferrous materials has the intensity and the ductility that are called as engineering properties, and these engineering properties are generally measured by various tests such as tension tests.In addition, because the metal structures such as the engineering properties of these ferrous materials and crystallization particle diameter are relevant, therefore also can calculate above-mentioned engineering properties by grasping the metal structures such as crystallization particle diameter.But, in above-mentioned various tests and crystallization grain diameter measurement in the past, need to have multiple operations such as test piece cutting, grinding, microscopic examination, and in each operation, need to spend a large amount of time and time.Therefore, crystallization particle diameter is nondestructively measured in urgent hope in advance, has proposed recently to use the method for supersonic oscillations as a kind of method of nondestructively carrying out crystallization grain diameter measurement.
In addition, as the prior art of nondestructively carrying out crystallization grain diameter measurement, following scheme is proposed: from the side surface irradiated with pulse laser of ultrasonic oscillator to measured material such as Nd-YAG laser instruments, make the opposite side surface of measured material that vibration displacement occur, utilize the ultrasonic detectors such as homodyne interferometer to detect the vibration displacement (for example, with reference to patent documentation 1) producing on the opposite side surface of above-mentioned measured material simultaneously.In addition, Figure 10 is the pie graph of organizing material determinator representing in the past, represents above-mentioned prior art.
Patent documentation 1: No. 3184368 communique of Jap.P.
Summary of the invention
In the content that patent documentation 1 is recorded, do not set various determination objects, according to the state of measured material, be not sometimes suitable for the analysis of crystallization particle diameter.Especially with the opposite side surface of the measured material of ultrasonic detector subtend on during with oxide film, thereby exist the luminous flux that turns back to ultrasonic detector seldom cannot fully implement the problem of the analysis of crystallization particle diameter.
The present invention carries out in order to address the above problem, and its object is to provide a kind of can be attached to the oxide film on measured material surface by removing, positively implement organizing material determinator and organizing material assay method of harmless crystallization grain diameter measurement.
What the present invention was relevant organizes material determinator to possess: a side surface irradiating laser to rolled products, make to occur on the opposite side surface of rolled products the ultrasonic oscillator of supersonic oscillations; Thereby detect the ultrasonic detector of the supersonic oscillations that occur on the opposite side surface of rolled products from the reflected light on the opposite side surface of rolled products by the opposite side surface irradiation laser to rolled products reception; The particle diameter calculation element of the testing result drawing according to ultrasonic detector, the crystallization particle diameter that calculates rolled products; And to the irradiation position irradiating laser of the opposite side surface irradiation laser to rolled products from ultrasonic detector, remove device with the surface of oxide film on the opposite side surface of removing rolled products.
What in addition, the present invention was relevant organizes material assay method to possess: to the irradiation position of the opposite side surface irradiation laser to rolled products from ultrasonic detector, remove device irradiating laser from surface and the step of removing the oxide film on the opposite side surface of rolled products; After the oxide film on opposite side surface of removing rolled products from ultrasonic oscillator the side surface irradiating laser to rolled products, make to occur on the opposite side surface of rolled products the step of supersonic oscillations; Thereby by the opposite side surface irradiation laser to rolled products utilize ultrasonic detector to receive the step that detects the supersonic oscillations that occur on the opposite side surface of rolled products from the reflected light on the opposite side surface of rolled products from ultrasonic detector; And the testing result drawing according to ultrasonic detector, calculate the step of the crystallization particle diameter of rolled products.
The present invention, by adopting following structure, possesses: a side surface irradiating laser to rolled products, make to occur on the opposite side surface of rolled products the ultrasonic oscillator of supersonic oscillations; Thereby detect the ultrasonic detector of the supersonic oscillations that occur on the opposite side surface of rolled products from the reflected light on the opposite side surface of rolled products by the opposite side surface irradiation laser to rolled products reception; The particle diameter calculation element of the testing result drawing according to ultrasonic detector, the crystallization particle diameter that calculates rolled products; And to irradiating laser the irradiation position of the opposite side surface irradiation laser to rolled products from ultrasonic detector, remove device with the surface of oxide film on the opposite side surface of removing rolled products, thereby can remove the oxide film that is attached to measured material surface, positively implement harmless crystallization grain diameter measurement.
Similarly, the present invention, by adopting following structure, possesses: to the irradiation position of the opposite side surface irradiation laser to rolled products from ultrasonic detector, remove device irradiating laser from surface and the step of removing the oxide film on the opposite side surface of rolled products; After the oxide film on opposite side surface of removing rolled products from ultrasonic oscillator the side surface irradiating laser to rolled products, make to occur on the opposite side surface of rolled products the step of supersonic oscillations; Thereby by the opposite side surface irradiation laser to rolled products utilize ultrasonic detector to receive the step that detects the supersonic oscillations that occur on the opposite side surface of rolled products from the reflected light on the opposite side surface of rolled products from ultrasonic detector; And the testing result drawing according to ultrasonic detector, calculate the step of the crystallization particle diameter of rolled products, thus can remove the oxide film that is attached to measured material surface, positively implement harmless crystallization grain diameter measurement.
Brief description of the drawings
Fig. 1 is the pie graph of organizing material determinator representing in embodiment of the present invention 1.
Fig. 2 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 1.
Fig. 3 is the arrangement plan of organizing material determinator representing in embodiment of the present invention 1.
Fig. 4 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 1.
Fig. 5 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 2.
Fig. 6 is the arrangement plan of organizing material determinator representing in embodiment of the present invention 3.
Fig. 7 is the pie graph that represents the rolling equipment major part in embodiment of the present invention 4.
Fig. 8 is the pie graph that represents the forecast model of organizing material.
Fig. 9 is other pie graphs that represent the rolling equipment in embodiment of the present invention 4.
Figure 10 is the pie graph of organizing material determinator representing in the past.
Label declaration
1 measured material
2 ultrasonic oscillators
3 ultrasonic detectors
4 signal processing apparatus
5 particle diameter calculation elements
Device is removed on 6 surfaces
7 CW laser instruments
8 reverberators
9 beam splitters
10 beam splitters
11 Fabry-Perot interferometers
12 photodetectors
13a catoptron
13b catoptron
14 topworkies
15 compressional wave reflection pickup devices
16 frequency analyzing devices
17 different frequency die-away curve device for identifying
More than 18 Function Fitting device
19 light are sold off element
20 gas injection apparatus
21 rolling mills
22 bands
23 output tables
24 coiled materials
25 engineering properties actual measurement devices
26 organize material information actual measurement device
27 organize material determinator
28 organize material information harvester
29 the 1st organize material information comparison means
30 thermometers
31 process flow data acquisition devices
32 organize material information prediction unit
33 the 2nd organize material information comparison means
34 engineering properties prediction units
35 engineering properties comparison means
Embodiment
First,, before explanation concrete formation of the present invention, the method for the crystallization particle diameter of nondestructively measuring metal material is described.Nondestructively carrying out in the method for measuring of metal material crystallization particle diameter, proposed to utilize Rayleigh scattering method, utilize the method for ultrasonic propagation velocity and utilize method of ultrasonic microscope etc.In addition, although each assay method is also all applicable to the present invention,, the representational method of the decay that the scattering (Rayleigh scattering) that utilizes ultrasound wave to cause because of crystal grain produces is described here.
Ultrasonic root is divided into compressional wave and shear wave etc. according to the difference of its vibration form.In the crystallization particle diameter assay method that utilizes Rayleigh scattering, use hyperacoustic compressional wave (bulk wave) wherein.In addition, the decay of bulk wave is known explains with following formula.
p＝p
0·exp(-a·x)……(1)
In formula, p and p
0for acoustic pressure, a is attenuation constant, and x is the propagation distance in steel plate.
In addition, in the time that body wave frequency is " Rayleigh region ", above-mentioned attenuation constant a explains with following formula.
a＝a
1·f+a
4·f
4……(2)
In formula, a
1and a
4for coefficient, f is ultrasonic frequency, and attenuation constant a is approximately the biquadratic function of ultrasonic frequency f as mentioned above.In addition, the 1st expression of (2) formula is because of the caused attenuation by absorption item of internal friction, and the 2nd represents Rayleigh scattering item.
In addition, above-mentioned Rayleigh region refers to that the wavelength of crystallization particle diameter and bulk wave is in a ratio of enough little region, for example, be the scope that meets following formula.
0.03＜d/λ＜0.3……(3)
In formula, d represents crystallization particle diameter, and λ represents the wavelength of bulk wave.
In addition, the four ordered coefficients a of (2) formula
4knownly meet following formula relation.
a
4＝S·d
3……(4)
In formula, S is scattering constant., coefficient a
4be directly proportional to the cube of crystallization particle diameter d.
The frequency content that contains a certain distribution in the waveform of the bulk wave sending due to ultrasonic oscillator, therefore carries out frequency analysis by the waveform that ultrasonic detector is received, and can obtain the attenuation rate of each frequency content.And, because the mistiming of receiving and dispatching by detection is determined the propagation distance in steel plate, therefore according to the attenuation rate of each frequency content and propagation distance, can derive each coefficient of (2) formula.Then,, by predetermining scattering constant S with standard model etc., can utilize (4) formula to draw crystallization particle diameter d.
Then,, in order to illustrate in greater detail the relevant material determinator of the present invention, describe with reference to the accompanying drawings.In addition, in each figure, same or suitable part is adopted to same label, suitably simplify and even omit its repeat specification.
Embodiment 1
Fig. 1 is the pie graph of organizing material determinator representing in embodiment of the present invention 1.In addition, described later organize material determinator be arranged at by rolling raw material (slab) manufacture rolled products (also comprise from slab to completing as the state the way of finished product.Identical below) roll line on, measure the material of organizing through the rolling product of roll line.
In Fig. 1, the 1st, the measured material being formed by the rolling product (steel plate), the 2nd, be arranged at the below through the rolled products of roll line, a side surface irradiating laser to rolled products and make to occur on the opposite side surface of rolled products the ultrasonic oscillator (transmitter side laser instrument) of supersonic oscillations, the 3rd, be arranged at the top through the rolled products of roll line, thereby detect the ultrasonic detector (receiver side laser instrument) of the supersonic oscillations that occur on the opposite side surface of rolled products from the reflected light on the opposite side surface of rolled products by the opposite side surface irradiation laser to rolled products reception, the 4th, be connected with ultrasonic detector 3, receive from the detection signal of ultrasonic detector 3 and process the signal processing apparatus of the detection signal of reception in order to calculate the crystallization particle diameter of rolled products, the 5th, according to the result of signal processing apparatus 4, calculate the particle diameter calculation element of the crystallization particle diameter of rolled products, the 6th, be arranged at the top through the rolled products of roll line, to the irradiation position irradiating laser of the opposite side surface irradiation laser to rolled products from ultrasonic detector 3 and device (appending laser instrument) is removed on the surface of removing the oxide film on rolled products opposite side surface.
Above-mentioned ultrasonic oscillator 2 irradiates the laser of highpowerpulse shape to a side surface of measured material 1 (rolled products), make to produce ultrasonic pulse at a side surface of measured material 1.In addition, as the pulsed laser that sends pulse laser from ultrasonic oscillator 2, use the YAG laser instrument of such as adjustable Q etc.The pulse laser scioptics (not shown) that send from ultrasonic oscillator 2 etc. focus on target beam diameter, and are irradiated to a side surface of measured material 1.Then, the ultrasonic pulse producing at a side surface of measured material 1 because of the pulse laser that irradiates from ultrasonic oscillator 2, in measured material 1, propagate and the opposite side surface of measured material 1 is vibrated, in measured material 1, coming and going simultaneously, repeatedly carrying out multiple reflections.
In addition, in above-mentioned ultrasonic detector 3, by using CW (continuous wave) laser instrument, detect the displacement of the supersonic oscillations that produce on the opposite side surface of measured material 1 because of above-mentioned ultrasonic pulse.In order to detect the displacement (being designated hereinafter simply as " vibration displacement ") of the supersonic oscillations that produce on the opposite side surface of measured material 1, adopt and for example make to use up the interferometer of selling off.Also have, except making to use up the interferometer of selling off, in the case of ultrasonic detector 3 arrange environment good, also can suitably adopt Fabry-Perot interferometer, opposite side surface at measured material 1 is non-uneven surface, also can suitably adopt Michelson interferometer etc.Here, Fig. 2 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 1, the formation of the ultrasonic detector 3 when concrete expression is used Fabry-Perot interferometer.Below, describe in detail and utilize the ultrasonic detector 3 of Fabry-Perot mode to detect the situation of above-mentioned vibration displacement.
In Fig. 2, the 7th, CW laser instrument, the 8th, reverberator, 9 and 10 is beam splitters, the 11st, Fabry-Perot interferometer, the 12nd, photodetector.Above-mentioned Fabry-Perot interferometer 11 is made up of the topworks 14 of distance between a pair of catoptron 13a and 13b, accommodation reflex mirror 13a and 13b and the control gear (not shown) of control topworks 14.Further, above-mentioned topworks 14 is made up of for example piezoelectric element, utilizes control gear to operate successively, to guarantee distance between catoptron 13a and the 13b value as expecting.
In the ultrasonic detector 3 with above-mentioned formation, the laser of exporting from CW laser instrument 7 is incident to beam splitter 9 after reverberator 8 reflection, be divided into the laser on the opposite side surface that is irradiated to measured material 1 and as with reference to light directly into the laser that is incident upon Fabry-Perot interferometer 11.The laser that is irradiated to the opposite side surface of measured material 1 is carried out the opposite side surface reflection of the measured material 1 of supersonic oscillations, incides Fabry-Perot interferometer 11.In Fabry-Perot interferometer 11, utilize catoptron 13a and 13b to make laser (reflected light) and the reference light generation resonance at the opposite side surface reflection of measured material 1.In addition, the interval of catoptron 13a and 13b is adjusted by topworks 14, makes reflected light and reference light generation resonance.The laser that resonance occurs in Fabry-Perot interferometer 11 becomes interference light, and incides photodetector 12 by beam splitter 10.Then,, in photodetector 12, according to the interference light of incident, detect the interference waveform that produces because of the optical path difference of reflected light and reference light, the i.e. Strength Changes of interference light.
On the other hand, the pulsed laser of the high-energy-density with the degree that causes ablation is removed device 6 and is possessed on above-mentioned surface, by the surface irradiation pulse laser to measured material 1, removes the oxide film on measured material 1 surface.In addition, so-called ablation, refers to that while irradiating the laser with high-energy-density, burst that occur, that be accompanied by the solid surface layer of luminescence of plasma and impulsive sound is peeled off.
Then, above-mentioned ultrasonic oscillator 2, ultrasonic detector 3 and the surperficial setting position of removing device 6 are described.In addition, Fig. 3 is the arrangement plan of organizing material determinator representing in embodiment of the present invention 1.In Fig. 3, ultrasonic oscillator 2 is set to there is predetermined distance with a side surface (bottom surface) of measured material 1.And above-mentioned ultrasonic oscillator 2 is configured so that the light path of the pulse laser of a side surface that irradiates measured material 1, has the following inclination of above 45 degree of 0 degree with the straight line of the side surface perpendicular to measured material 1.Further, in Fig. 3, represent the light path situation vertical with a side surface of measured material 1 from the pulse laser of ultrasonic oscillator 2.
In addition, ultrasonic detector 3 is set to there is predetermined distance with the opposite side surface (upper surface) of reverse side of a side surface that becomes measured material 1.And, above-mentioned ultrasonic detector 3 is configured so that the light path of the laser of launching from CW laser instrument 7, opposite side surface near normal with measured material 1, the point (sound sources of supersonic oscillations) that is simultaneously also configured to make its light path of passing through the pulse laser irradiating from ultrasonic oscillator 2 crossing with a side surface of measured material 1 and with the sound source of above-mentioned supersonic oscillations corresponding (embodiment 1, be above-mentioned supersonic oscillations sound source directly over) at least one party in the lip-deep point of opposite side of measured material 1.And ultrasonic detector 3 is also configured to receive the reflected light from the opposite side surface of measured material 1.Also have, in order to prevent being directly incident in ultrasonic detector 3 from the pulse laser of ultrasonic oscillator 2, the acceptance division (such as lens etc.) of ultrasonic detector 3 can be set on the extended line of the pulse laser light path of exporting from ultrasonic oscillator 2 yet.
On the other hand, the distance of regulation is removed device 6 and is configured to have with the opposite side surface of measured material 1 on above-mentioned surface, makes to swash direction that direction of light the is identical opposite side surface irradiation pulse laser to measured material 1 from irradiating CW with ultrasonic detector 3.Then, in order to prevent that the pulse laser that irradiates measured material 1 is directly incident in ultrasonic detector 3, surface remove device 6 be configured to make the light path of above-mentioned pulse laser and the light path of the CW laser of exporting from ultrasonic detector 3 have more than 0 degree 90 spend less than regulation cant angle theta.
Remove in device 6 thering is the ultrasonic oscillator 2 of above-mentioned formation, ultrasonic detector 3 and surface, measure measured material 1 organize material time, first, to the irradiation position of the opposite side surface to measured material 1 (upper surface of rolled products) irradiation CW laser from ultrasonic detector 3, remove device 6 irradiated with pulse laser from surface, remove the oxide film on the opposite side surface that is attached to measured material 1.Then, after the oxide film on opposite side surface of having removed measured material 1, a side surface (bottom surface of rolled products) irradiated with pulse laser from ultrasonic oscillator 2 to measured material 1, makes, on the opposite side surface of measured material 1, supersonic oscillations occur.Then, by the opposite side surface irradiation CW laser to measured material 1 from ultrasonic detector 3, and utilize ultrasonic detector 3 to be received in the reflected light of the CW laser of the opposite side surface reflection of measured material 1, thereby utilize above-mentioned ultrasonic detector 3 to detect the supersonic oscillations that occur on the opposite side surface of measured material 1.In addition, utilize detection signal that ultrasonic detector 3 detects such as, by storages such as digital waveform storeies (digital oscilloscope), and export to signal processing apparatus 4.
In addition, in order to remove the oxide film as object, the Laser output that requires surface in said process to remove device 6 is power more than setting.Therefore the adjustment that, in fact needs to carry out surface and remove the Laser output of device 6.In relevant adjustment, for example from surface remove device 6 to the opposite side surface irradiation pulse laser of measured material 1, by confirming the output of ultrasonic detector 3, judge the state of removing of oxide film.When being judged as removing of oxide film inadequate time, while not obtaining the output of enough ultrasonic detectors 3, increase surface and remove the Laser output of device 6, and opposite side surface irradiated with pulse laser again to measured material 1, implement the output of ultrasonic detector 3 and confirm.In addition, even when confirming by again irradiating but the output of ultrasonic detector 3 when also enough, on one side slowly increase surface and remove the Laser output of device 6, the opposite side surface irradiation pulse laser to measured material 1 on one side, and each irradiation is confirmed to the output of ultrasonic detector 3.Then, in the time obtaining the output of enough and suitable ultrasonic detector 3, the rising that stops surface and remove the Laser output of device 6.
Then, reception is described from the work of the signal processing apparatus 4 of the detection signal of ultrasonic detector 3.Fig. 4 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 1, especially represents the structure of signal processing apparatus 4 and particle diameter calculation element 5.In Fig. 4, signal processing apparatus 4 for example by compressional wave reflection pickup device 15, frequency analyzing device 16, different frequency die-away curve device for identifying 17 and repeatedly Function Fitting device 18 form.
In signal processing apparatus 4, first, according to the detection signal of inputting from ultrasonic detector 3, utilize compressional wave reflection pickup device 15 to gather multiple compressional wave echoed signals.Then, utilize the frequency analysis of multiple compressional wave echoed signals that frequency analyzing device 16 gathers, from the poor damping capacity that calculates each frequency of spectral intensity of the multiple echo signal from measured material 1 surface.Then, if necessary, carry out diffusive attenuation correction, transmission loss correction, calculate the frequency characteristic of attenuation constant.In addition, the frequency characteristic of attenuation constant by with least square method etc. to biquadratic curve etc. repeatedly function carry out matching, obtain repeatedly the coefficient vector of function.
Then, the coefficient vector of the repeatedly function drawing when above-mentioned attenuation constant being carried out to matching by biquadratic curve with least square method etc. and proofread and correct the scattering coefficient S drawing from measured material 1 of use, calculates the measured value d of the crystallization particle diameter before the correction of carrying out because of the volume fraction of each micro-tissue
0.
Further, illustrate above-mentioned treatment process below.
Utilize above-mentioned ultrasonic detector 3 to measure to be called the 1st ultrasonic pulse, the 2nd ultrasonic pulse ... sequence of ultrasound pulses.Now, the energy containing in each ultrasonic pulse is decayed along with the propagation in loss and the measured material 1 of reflex time, thereby diminishes gradually.; carry out frequency analysis if only take out the part of the 1st ultrasonic pulse and the 2nd ultrasonic pulse; obtain energy (power spectrum) separately; because the 2nd ultrasonic pulse is compared with the 1st ultrasonic pulse; its propagation distance grows 2 times of sizes of the thickness of slab t of measured material 1; therefore, decay according to above-mentioned (1) formula produce power.In addition, if obtain poor as with the power spectrum of the 1st ultrasonic pulse of damping capacity between the two, become the curve rising to the right.This curve is equivalent to the attenuation constant a of above-mentioned (2) formula to be multiplied by the poor 2t of propagation distance.Thus, each coefficient of above-mentioned (2) formula by the unit's of obtaining propagation distances such as least square methods.Then, a from the scattering constant S being obtained by standard model in advance and the coefficient of obtaining as mentioned above
4, above-mentioned by seizing back confiscated property (3) formula, can obtain the measured value d of crystallization particle diameter
0.
According to the embodiment of the present invention 1, remove device 6 by possessing surface, can remove the oxide film on the opposite side surface that is attached to measured material 1.; organizing in material determinator of above-mentioned formation; utilize and remove the pulse laser that device 6 produces from surface and remove the oxide film on opposite side surface of measured material 1; to measured material 1 irradiated with pulse laser, utilize ultrasonic detector 3 to detect the supersonic oscillations that produce on measured material 1 from ultrasonic oscillator 2.Therefore, in the time measured material 1 being irradiated to CW laser from ultrasonic detector 3, the oxide film on the opposite side surface of measured material 1 is removed, thereby can make the luminous flux that turns back to ultrasonic detector 3 increase, and can make the resolution of ultrasonic detector 3 significantly improve.
In addition, surface remove device 6 be configured to the light path of the pulse laser that makes its output and the light path of the CW laser launched from ultrasonic detector 3 have more than 0 degree 90 spend less than cant angle theta.Therefore, can prevent from removing from surface the pulse laser that device 6 exports and be directly incident on ultrasonic detector 3 measured material 1 reflection.In addition, owing to removing device 6 and there is above-mentioned configuration in surface, therefore can by ultrasonic detector 3 and measured material 1 near normal configure, can carry out efficiently the detection of supersonic oscillations.Further, work and remove oxide film owing to making surface remove device 6 before ultrasonic detector 3 work, the pulse laser of therefore removing device 6 from surface can not cause harmful effects such as producing Lamb wave to the performance of ultrasonic detector 3.
In addition, use above-mentioned material determinator on roll line time, by being removed to device 6, ultrasonic detector 3 and surface be arranged at the top of rolled products, ultrasonic oscillator 2 is arranged to the below of rolled products, can avoid the dropping such as water vapour or dust being produced by roll line to be detained at the lower surface of rolled products, the harmful effect that supersonic oscillations can be detected suppresses for Min..Therefore,, even under the environment of rolled products motion, also can utilize ultrasonic detector 3 efficiently and carry out safely the detection of supersonic oscillations, can really nondestructively implement the measurement of crystallization particle diameter on roll line.
In addition, in embodiment 1, illustrate ultrasonic oscillator 2 is arranged at through the below of the rolled products of roll line, device 6 is removed in ultrasonic detector 3 and surface is arranged at the situation through the top of the rolled products of roll line, but according to the environmental baseline of organizing material determinator is set, can select arbitrarily its configuration.; according to being set, environment also can adopt following structure: the top that ultrasonic oscillator 2 is arranged to rolled products; and the upper surface of rolled products is irradiated to the pulse laser from ultrasonic oscillator 2; device 6 is removed in ultrasonic detector 3 and surface simultaneously and be arranged at the below of rolled products, and the bottom surface of rolled products is irradiated from the CW laser of ultrasonic detector 3 and removed the pulse laser of device 6 from surface.
Embodiment 2
Fig. 5 is the major part pie graph of organizing material determinator representing in embodiment of the present invention 2, especially specifically represents the formation of ultrasonic detector 3.In Fig. 5, ultrasonic detector 3 sells off element 19 by CW laser instrument 7, reverberator 8, beam splitter 9, light and photodetector 12 forms.That is, above-mentioned ultrasonic detector 3 is to make to use up the light of selling off element 19 to sell off the ultrasonic detector of mode, and other have the structure identical with embodiment 1.
In the ultrasonic detector 3 with dependency structure, the laser of exporting from CW laser instrument 7 is after reverberator 8 reflections, incide beam splitter 9, be divided into the laser on the opposite side surface of irradiating measured material 1 and sell off the laser in element 19 as be directly incident on light with reference to light.In addition, carrying out the reflected light of opposite side surface reflection of measured material 1 of supersonic oscillations, incide light by beam splitter 9 and sell off element 19.Sell off in element 19 at light, in crystal, make reflected light and reference light produce and interfere, and this interference light is directly incident on to detecting device 12.
In addition, in interferometer, make to use up while selling off element 19, have and cannot detect the restrictive condition that exceedes 1/8 the surface displacement that receives optical wavelength.This restriction can become problem when especially the thin plate below 2mm is measured.Therefore, in order to make amplitude be positioned at above-mentioned limits value scope, and to reduce the Laser output of ultrasonic oscillator 2, so in the time that surface displacement exceedes 66.5nm (wavelength 532nm=green) or 133nm (wavelength 1064nm=is infrared), the Laser output that must limit ultrasonic oscillator 2, reduces surface displacement.Or, do not reduce the Laser output of ultrasonic oscillator 2, but need to suppress Lamb wave vibration by reducing spot diameter.Further, before arriving measured material 1, reduce spot diameter using the degree that does not cause ablation in space as lower limit from the laser of ultrasonic oscillator 2.
According to the embodiment of the present invention 2, sell off the ultrasonic detector 3 of mode by adopting light, compare with the situation of the ultrasonic detector 3 that adopts Fabry-Perot mode, can reduce catoptron 13a and 13b such easily because external vibration etc. disturbs the precision mechanism portions such as affected position and topworks 14 and control gear.Therefore, be difficult for the impact that the interference such as vibrated causes and on the poor roll line of environment, also can carry out for a long time stable mensuration even if can realize.
Especially while implementing on-line measurement on Hot Line, can produce by the water vapour by waiting the vibration that causes or produce during to rolled material injection chilled water from cooling line for the temperature control of rolled material of milling train and rolled material etc., its measurement environment is very severe.In addition, the rolled material in course of hot rolling also can reach approximately 500 degree to approximately 900 degree, and near temperature rolled material is very high.Therefore, by adopt light to sell off the ultrasonic detector 3 of mode, can provide be also applicable to above-mentioned environment organize material determinator.
In addition, do not reduce the output from the pulse laser of ultrasonic oscillator 2, but by reducing spot diameter, reduce the amplitude of low-frequency oscillation, amplitude that the substitute is the required ultrasound wave composition of the measurement of crystallization particle diameter increases.Thereby can avoid becoming the Lamb wave vibration of measuring one of reason of precision reduction, can detect the effective supersonic oscillations of mensuration to organizing material.
Embodiment 3
Fig. 6 is the arrangement plan of organizing material determinator representing in embodiment of the present invention 3.In Fig. 6, ultrasonic oscillator 2, ultrasonic detector 3 and surface are removed device 6 and are had the structure same with embodiment 1 or 2 and configuration.The 20th, gas injection apparatus, this gas injection apparatus is arranged at the top of the rolled products (measured material 1) through roll line, removing the irradiation position of the opposite side surface irradiation pulse laser of device 6 to measured material 1 and near of this irradiation position from surface, spray the inert gas such as nitrogen, thereby it is again oxidized to have prevented from removing the opposite side surface of measured material 1 of oxide film.
Thering is the organizing in material determinator of dependency structure, remove the opposite side surface irradiation pulse laser of device 6 to measured material 1 from surface and removed oxide film, from gas injection apparatus 20 to the part ejection inert gas of having removed oxide film.Other structures and work are identical with embodiment 1 and 2.
According to the embodiment of the present invention 3, owing to can making time of a certain degree of state continuance of oxide film of having removed from opposite side surface of measured material 1, the sensitivity that therefore can improve ultrasonic detector 3, can realize the mensuration of more reliable crystallization particle diameter.
Embodiment 4
What this embodiment was relevant organizes material determinator is in embodiment 1 or 2, utilizes the decision such as trace information surface to remove the measuring point of device, so that it is with engineering properties in the inspection line of rolled products or organize the mensuration impact point of material information consistent.Utilize Fig. 7 and Fig. 8 that its structure is described below.
Fig. 7 is the pie graph that represents the major part of the rolling equipment in embodiment of the present invention 4, and Fig. 8 is the pie graph that represents the forecast model of organizing material.In Fig. 7, after milling train 21 band 22 is out cooling on output table 23, batches and become coiled material 24 with coiling machine.Then, coiled material 24 is transported to and is checked on line, cut wherein a part and be processed into test piece.Further, checking on line, utilizing engineering properties actual measurement device 25 to survey the engineering properties such as pulling strengrth or yield stress of above-mentioned test piece.In addition, utilize according to microscopic examination etc. organize material information actual measurement device 26, survey the material information of organizing of above-mentioned test piece, i.e. the volume fraction of each phase such as ferrite particle diameter or ferritic-pearlitic bainite.
Organize material determinator 27 to be arranged at before the outlet side and coiling machine of milling train 21, utilize and organize material information harvester 28, gather by the above-mentioned crystallization particle diameter that material determinator 27 measures etc. organized and organize material information.By the indicated value of carrying out self-organization material determinator 27 of organizing material information harvester 28 to gather with according to the measured value of organizing material information actual measurement device 26, organize material information comparison means 29 to compare by the 1st.Then, organize the comparative result of material information comparison means 29 to feed back to by the 1st and organize material information harvester 28, for organizing correction or the precision confirmation of material determinator 27.In addition, the 1st organize the comparative result of material information comparison means 29 to be also used in the raising of the adjustment parameters precision of the identification gimmick while organizing material determinator 27 to calculate crystallization particle diameter.
On the other hand, the load obtaining from milling train 21 and speed data and gathered by process flow data acquisition device 31 from being arranged at the temperature data established technology flow data that the thermometer 30 of front and back of milling train 21 obtains.The technological process data of measuring with check the engineering properties in line or organize mensuration impact point and the moment of material information relevant, be stored in for example not shown data storage device as database.And material and technological process data from rolling moment etc. in retrieve data memory storage, control and organize material determinator 27, make surface remove the measuring point of device with engineering properties in inspection line or organize the mensuration impact point of material information consistent.
In addition, the technological process data such as the distortion obtaining from process flow data acquisition device 31, deformation velocity, temperature are sent to and organize material information prediction unit 32, by organizing material information prediction unit 32 to calculate and organize material information according to mathematical model.Below, according to Fig. 8, the computing method in material information prediction unit 32 are organized in explanation.
What computation organization's material information was used organize material model to be broadly divided into by hot rolling model and phase transition model forms.Hot rolling model is to carry out formulism for phenomenons such as the recovery by the middle dynamic recrystallization occurring of being depressed by the roll of milling train 21, then dynamic recrystallization generation, Static Recrystallization, grain growths, calculates the austenitic states such as the particle diameter (grain boundary area of per unit area) in rolling and after rolling, residual transfering density and prepares.This hot rolling model according to γ particle diameter, temperature based on temperature and speed by during temporal information and the equivalent deformation deformation velocity information based on depressing pattern, calculate the intermediate structure states such as rolling γ particle diameter and transfering density.Further, said temperature by during temporal information and equivalent deformation deformation velocity information calculate according to rolling condition (entrance side thickness of slab, outlet side thickness of slab, heating-up temperature, pass through during time, roller diameter, roll rotational speed).
Structural state after the phase transformations such as phase transition model is in order to separate nucleation and growth, point rate of supposition particle diameter, pearlite and bainite possesses.This phase transition model is according to the temperature information of the refrigerating mode based on output table 23, and the tissue that calculates ferrite particle diameter and each phase divides rate etc.Further, said temperature information is to calculate according to each information of the phase variable of cooling condition (being divided into plate speed, composition in air cooling and water-cooled, water yield density, cooling device) and phase transition model generation.
In addition, except hot rolling processing model and phase transition model, while considering the affecting of the trace additives such as Nb, V, Ti, owing to considering the impact of precipitation particles, therefore also can suitably use precipitation model.In addition, for a part of metal material such as aluminium or stainless steel, owing to not undergoing phase transition, therefore also can not use above-mentioned phase transition model.
Utilization is there is to the measured value of organizing material information and utilization to organize material information actual measurement device 26 to obtain of organizing material information prediction unit 32 to calculate of said structure, organize material information comparison means 33 to compare by the 2nd.Then, organize material information prediction unit 32, organize the adjustment of material model, thereby can try hard to improve precision of prediction by organizing the comparative result of material information comparison means 33 to feed back to by the 2nd.
Further, by the technological process data that obtain from process flow data acquisition device 31 with by organizing the material information of organizing that material information prediction unit 32 calculates, send to engineering properties prediction unit 34, in this engineering properties prediction unit 34, forecast model according to the rules calculates engineering properties.By the engineering properties of utilizing engineering properties prediction unit 34 to calculate and the measured value that utilizes engineering properties actual measurement device 25 to obtain, compare by engineering properties comparison means 35.Then, by the comparative result of engineering properties comparison means 35 is fed back to engineering properties prediction unit 34, carry out the adjustment of the forecast model of engineering properties, thereby can try hard to improve precision of prediction.
According to the embodiment of the present invention 4, even on the severe roll line of environment, also can provide a kind of to the impact point of organizing material to measure, effectively detect supersonic oscillations organize material determinator.
Further, Fig. 9 is other pie graphs that represent the rolling equipment in embodiment of the present invention 4.The formation of embodiment 4 also can change as shown in Figure 9 input and form.That is, organizing the input of material information comparison means 33 to the 2nd can be also by the command value of carrying out self-organization material determinator 27 of organizing material information harvester 28 to gather, replaces coming the measured value of self-organization material information actual measurement device 26.In addition, can be also by the command value of carrying out self-organization material determinator 27 of organizing material information harvester 28 to gather to the input of engineering properties prediction unit 34, replace by organizing the material information of organizing that material information prediction unit 32 calculates.Utilize above-mentioned formation also can play effect similar to the above.
Further, the present invention is not defined in above-mentioned embodiment same as before, implementation phase do not depart from the scope of its main points, can change inscape and specialize.In addition, by suitably combining the multiple inscapes that disclose in above-mentioned embodiment, can form multiple invention.For example, also can from the whole inscapes shown in embodiment, delete several inscapes.And, also can carry out appropriately combined to the inscape in all different embodiments.
Industrial practicality
As mentioned above, the relevant material determinator of organizing according to the present invention, owing to detecting the supersonic oscillations that occur on its opposite side surface under the state of oxide film of having removed measured material, therefore, can make the luminous flux turning back on the ultrasonic detector that detects supersonic oscillations significantly increase, can positively implement the mensuration of the crystallization particle diameter of measured material.
In addition, owing to having removed the oxide film being attached on measured material, and can nondestructively carry out the mensuration of crystallization particle diameter, therefore, especially can adapt to the on-line determination on Hot Line.
Claims (2)
1. organize material to measure a system, it is characterized in that, comprising:
Organize material determinator (27), be located at before the outlet side and coiling machine of milling train of roll line, the material information of organizing to the rolled products through described roll line is measured, this tissue material determinator (27) comprising: the side surface irradiating laser to described rolled products and make to occur on the opposite side surface of described rolled products the ultrasonic oscillator (2) of supersonic oscillations, thereby detect the ultrasonic detector (3) of the supersonic oscillations that occur on the opposite side surface of described rolled products from the reflected light on the opposite side surface of described rolled products by the opposite side surface irradiation laser to described rolled products reception, be connected with described ultrasonic detector (3) and receive from the detection signal of described ultrasonic detector (3) and received detection signal processed to the signal processing apparatus (4) of the crystallization particle diameter that calculates described rolled products, calculate the particle diameter calculation element (5) of the crystallization particle diameter of described rolled products according to the result of described signal processing apparatus (4), and remove device (6) to the surface that the irradiation position irradiating laser of the opposite side surface irradiation laser to described rolled products from described ultrasonic detector (3) is removed the oxide film on described rolled products opposite side surface,
Organize material information harvester (28), gather the material information of organizing of organizing material determinator (27) mensuration by described;
Organize material information actual measurement device (26), survey the material information of organizing of described rolled products;
Process flow data acquisition device (31), gathers the technological process data of described roll line;
Organize material information prediction unit (32), based on the technological process data that gathered by described process flow data acquisition device (31), according to the predetermined material forecast model of organizing, calculate the material information of organizing of described rolled products;
First organizes material information comparison means (29), to by described organize that material information harvester (28) gathers organize material information, compare with the described measured value of organizing material information actual measurement device (26) to obtain, and this comparative result is fed back to the described material information harvester (28) of organizing, for described correction or the precision confirmation of organizing material determinator (27);
Second organizes material information comparison means (33), to by described organize material information harvester (28) gather organize material information, with compared by the described material information of organizing of organizing material information prediction unit (32) to calculate;
Engineering properties prediction unit (34), technological process data based on being gathered by described process flow data acquisition device (31) and by described organize that material information harvester (28) gathers organize material information, according to predetermined forecast model, calculate the engineering properties of described rolled products;
Engineering properties is surveyed device (25), surveys the engineering properties of described rolled products; And
Engineering properties comparison means (35), the measured value obtaining to the engineering properties being calculated by described engineering properties prediction unit (34), with described engineering properties actual measurement device (25) compares,
The described material determinator (27) of organizing is according to predetermined identification gimmick, calculate the crystallization particle diameter of described rolled products, and organize the comparative result of material information comparison means (29) based on described first, the parameter of described identification gimmick is adjusted
The described material information prediction unit (32) of organizing is organized the comparative result of material information comparison means (33) based on described second, the described material forecast model of organizing adjusted,
The comparative result of described engineering properties prediction unit (34) based on described engineering properties comparison means (35), adjusts described forecast model.
2. organize material to measure a system, it is characterized in that, comprising:
Organize material determinator (27), be located at before the outlet side and coiling machine of milling train of roll line, the material information of organizing to the rolled products through described roll line is measured, this tissue material determinator (27) comprising: the side surface irradiating laser to described rolled products and make to occur on the opposite side surface of described rolled products the ultrasonic oscillator (2) of supersonic oscillations, thereby detect the ultrasonic detector (3) of the supersonic oscillations that occur on the opposite side surface of described rolled products from the reflected light on the opposite side surface of described rolled products by the opposite side surface irradiation laser to described rolled products reception, be connected with described ultrasonic detector (3) and receive from the detection signal of described ultrasonic detector (3) and received detection signal processed to the signal processing apparatus (4) of the crystallization particle diameter that calculates described rolled products, calculate the particle diameter calculation element (5) of the crystallization particle diameter of described rolled products according to the result of described signal processing apparatus (4), and remove device (6) to the surface that the irradiation position irradiating laser of the opposite side surface irradiation laser to described rolled products from described ultrasonic detector (3) is removed the oxide film on described rolled products opposite side surface,
Organize material information harvester (28), gather the material information of organizing of organizing material determinator (27) mensuration by described;
Organize material information actual measurement device (26), survey the material information of organizing of described rolled products;
Process flow data acquisition device (31), gathers the technological process data of described roll line;
Organize material information prediction unit (32), based on the technological process data that gathered by described process flow data acquisition device (31), according to the predetermined material forecast model of organizing, calculate the material information of organizing of described rolled products;
First organizes material information comparison means (29), to by described organize that material information harvester (28) gathers organize material information, compare with the measured value of organizing material information of described rolled products, and this comparative result is fed back to the described material information harvester (28) of organizing, for described correction or the precision confirmation of organizing material determinator (27);
Second organizes material information comparison means (33), to described organize measured value that material information actual measurement device (26) obtains, with compared by the described material information of organizing of organizing material information prediction unit (32) to calculate;
Engineering properties prediction unit (34), technological process data based on being gathered by described process flow data acquisition device (31) and organize the material information of organizing that material information prediction unit (32) calculates by described, according to predetermined forecast model, calculate the engineering properties of described rolled products;
Engineering properties is surveyed device (25), surveys the engineering properties of described rolled products; And
Engineering properties comparison means (35), the measured value obtaining to the engineering properties being calculated by described engineering properties prediction unit (34), with described engineering properties actual measurement device (25) compares,
The described material determinator (27) of organizing is according to predetermined identification gimmick, calculate the crystallization particle diameter of described rolled products, and organize the comparative result of material information comparison means (29) based on described first, the parameter of described identification gimmick is adjusted
The described material information prediction unit (32) of organizing is organized the comparative result of material information comparison means (33) based on described second, the described material forecast model of organizing adjusted,
The comparative result of described engineering properties prediction unit (34) based on described engineering properties comparison means (35), adjusts described forecast model.
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| JP5176554B2 (en) * | 2008-01-16 | 2013-04-03 | 東芝三菱電機産業システム株式会社 | Rolled product quality control system |
| WO2010119094A2 (en) * | 2009-04-15 | 2010-10-21 | Dietmar Oberhoff | Ultrasonic testing system |
| CA2810630C (en) * | 2010-10-15 | 2016-06-28 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Measuring apparatus and measuring method for metallic microstructures or material properties |
| JP5633404B2 (en) * | 2011-02-02 | 2014-12-03 | Ｊｆｅスチール株式会社 | Metal structure measurement method and metal structure measurement apparatus |
| CN103403537B (en) * | 2011-02-28 | 2016-07-27 | 东芝三菱电机产业系统株式会社 | The characteristic detecting apparatus of metal material |
| KR101989155B1 (en) | 2012-08-01 | 2019-06-17 | 삼성전자주식회사 | The ultrasonic wave converter, the ultrasonic wave generating apparatus and system including the same |
| KR101659702B1 (en) * | 2012-08-31 | 2016-09-26 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | Material organization predict device, product fabrication method, and material organization predict method |
| JP6068146B2 (en) * | 2013-01-10 | 2017-01-25 | 東芝三菱電機産業システム株式会社 | Set value calculation apparatus, set value calculation method, and set value calculation program |
| DE102013107560B4 (en) * | 2013-07-16 | 2023-11-02 | Althaus Engineering | Method and device for testing rolling elements using ultrasound |
| JP6466654B2 (en) * | 2014-04-24 | 2019-02-06 | 株式会社東芝 | Leakage detection apparatus and method |
| KR101710508B1 (en) * | 2016-04-12 | 2017-02-27 | 한국과학기술원 | Diagnosis method of structure and dianosis system |
| KR101858861B1 (en) * | 2016-12-22 | 2018-06-28 | 주식회사 포스코 | Measuring apparatus for grain size of steel sheet |
| ES2878898T3 (en) | 2019-06-04 | 2021-11-19 | Ssab Technology Ab | Procedure and arrangement for estimating a material property of an object by means of laser ultrasonic measuring equipment (LUS) |
| JP2021123580A (en) | 2020-02-06 | 2021-08-30 | 住友化学株式会社 | Carboxylate, carboxylic acid generator, resist composition, and method for producing resist pattern |
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| TWI360654B (en) | 2012-03-21 |
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| JP2012032404A (en) | 2012-02-16 |
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