A kind of crystalline material abrasive drilling aperture apparatus
[technical field]
The present invention relates to a kind of process equipment of crystalline material, be specifically related to the abrasive drilling aperture apparatus that crystalline materials such as a kind of polysilicon, monocrystalline silicon, crystal jewel are used.
[background technology]
Crystalline material processing at present, especially polysilicon, monocrystalline silicon need be processed processing to crystalline material usually in advance in reduction process.
Using Siemens Method to produce in the process of polysilicon, silicon core overlapping technology is a very important link, and it is mainly used in the reduction reaction process of production of polysilicon.The principle of the reduction reaction process of this link is: described reduction reaction is to carry out in an airtight reduction furnace, is overlapped to form several closed-loop paths with the silicon core in reduction furnace, " bridging " in the jargon just earlier before shove charge; Each closed-loop path all is made up of two perpendicular silicon cores and a horizontal silicon core; Two perpendicular silicon cores of each closed-loop path are connected on respectively on two electrodes on the furnace bottom, two electrodes connect the both positive and negative polarity of dc source respectively, in airtight reduction furnace, feed hydrogen and trichlorosilane, then the silicon core is heated, add and pine for one group of silicon core that overlaps and be equivalent to a big resistance, carry out reduction reaction; Like this, required polysilicon will generate at the silicon wicking surface.
Known, silicon core overlap joint is a very important technology in the process of Siemens Method production polysilicon, the applicant has provided a kind of method for lapping orifice silicon core that can effectively improve contact area and reduce resistance at the Chinese patent of first to file, this patent disclosure on the silicon core spherosome of horizontal silicon core both sides, punch, by perpendicular silicon core upper end the cylinder that the hole on the silicon core spherosome with horizontal silicon core both sides is complementary being set then is connected, form method for lapping orifice silicon core, so that realize effectively improving the contact area of silicon core and reducing the purpose of resistance, and then be implemented in the quality that improves polysilicon in the production of polysilicon.
So, in present method for lapping orifice silicon core, adopt electric hand drill to punch on the silicon core usually or hand-held silicon core punches on drilling machine, the circularity in hole is extremely lack of standardization, institute so that a lot of silicon core scrap; Be subjected to the influence that existing equipment can not be holed better on the silicon core, make that it is very high to satisfy process requirements and cost when utilizing existing equipment work.
List of references:
Chinese patent; Patent name, can effectively improve contact area and reduce the method for lapping orifice silicon core of resistance, publication number, CN101570890A, open day, on November 4th, 2009.
[summary of the invention]
For overcoming the deficiency in the background technology, the invention provides a kind of crystalline material abrasive drilling aperture apparatus, the cooperation of abrasive drilling aperture apparatus of described crystalline material by the clamping device of abrasive drilling holes mechanism and crystal bar, crystal bar is fixed on the clamping device, slowly advance the abrasive drilling holes mechanism that crystal bar is carried out the operation of abrasive drilling hole by feed mechanism, overcome the nonstandard drawback in abrasive drilling hole of prior art.
In order to realize described goal of the invention, the present invention adopts following technical scheme:
A kind of crystalline material abrasive drilling aperture apparatus comprises the abrasive drilling holes mechanism that is used for crystal bar; The clamping device that is used for crystal bar; The described abrasive drilling holes mechanism that is used for crystal bar comprises drill bit, motor A, coolant medium container, drill bit fixed axis, drill bit is fixed on an end of drill bit fixed axis, described drill bit, drill bit fixed axis are hollow-core construction, the other end of drill bit fixed axis is connected with coolant medium container, cooling medium in the coolant medium container is by the cooling in the abrasive drilling of drill bit fixed axis supply drill bit, the drill bit fixed axis is connected with motor A, described drill bit correspondence is fixed in the abrasive drilling position of the crystal bar on the clamping device, the relative side of the drill bit that the described clamping device that is used for crystal bar is arranged on the abrasive drilling holes mechanism; The wherein arbitrary of described abrasive drilling holes mechanism or clamping device is feeding, and another is static setting.
Described crystalline material abrasive drilling aperture apparatus, the described abrasive drilling holes mechanism that is used for crystal bar, motor A is fixed on the upper side of fixed head, the described motor A drill bit fixed axis interior with being arranged on beam barrel is connected, described drill bit fixed axis is fixed in the beam barrel by bearing and gland, described beam barrel is fastened in beam barrel gland and the beam barrel holder, described beam barrel holder is fixed on the upper side of fixed head, one end of drill bit fixed axis is by drill bit locking nut fixed drill bit, the other end of drill bit fixed axis is connected with coolant medium container, described coolant medium container prevents to follow the rotation of drill bit fixed axis by the anti-rotation holder, and described anti-rotation holder is fixed on beam barrel holder one side and forms a cover abrasive drilling holes mechanism.
Described crystalline material abrasive drilling aperture apparatus, described abrasive drilling holes mechanism are set to a cover or two covers, and wherein be set to a cover and be an end abrasive drilling of crystal bar, when being set to two covers, be the synchronous abrasive drilling in two ends of crystal bar; Described two cover abrasive drilling holes mechanisms are by one or two motor A supply power, and just motor A drive two cover abrasive drilling holes mechanisms or each abrasive drilling holes mechanism are supplied with power by a motor A; Wherein spacing is laterally adjusted in conjunction with trip bolt by the slotted hole that is arranged on the feed mechanism supporting plate between two motor A and the two cover abrasive drilling holes mechanisms, so that adapt to the crystal bar of different length.
Described crystalline material abrasive drilling aperture apparatus, the connected mode of described motor A and drill bit fixed axis is belt transmission or chain drive, is provided with the tight piece of motor item in drill bit fixed axis one side of motor A.
Described crystalline material abrasive drilling aperture apparatus, a described cover or two covers are used for the elasticity of the clamping device of crystal bar by locking handwheel adjusting locking, clamping device is fixed on the top of clamp mechanism holder, described clamping device is laterally adjusted in conjunction with trip bolt by the slotted hole on the clamp mechanism holder, so that adapt to the crystal bar of different length.
Described crystalline material abrasive drilling aperture apparatus, described feed mechanism, the leading screw two ends are fixed on the top of frame respectively by bearing block, end at leading screw is provided with shaft coupling A, described shaft coupling A is connected with an end of braking maneuver power output shaft, end at reductor power power shaft is provided with the hand feed handwheel, described hand feed handwheel is used for the hand feed of feed mechanism or the fine setting of feed mechanism, the other end at the power input shaft of reductor is connected with motor B by shaft coupling B, described leading screw forms wire connection by the screw that is arranged on feed mechanism supporting plate bottom and cooperates, the bottom of described feed mechanism supporting plate is provided with at least two slide blocks, described slide block and the slide rail that is arranged on upper rack slide join and, be provided with the limit switch baffle plate that cooperates frame 11 upper limit position switch in feed mechanism supporting plate one side, be interval with the catch holder at the opposite side of feed mechanism supporting plate, the catch of adjusting before and after on the catch holder, being respectively equipped with, at least two optoelectronic switches that fixedly install on the frame are between catch and the catch, and described limit switch baffle plate forms the protection of feed mechanism by limit switch; Described catch is realized duplicate protection to feed mechanism by being arranged on optoelectronic switch on another side of frame.
Described crystalline material abrasive drilling aperture apparatus, or the other end of described leading screw connects the bottom of clamping device, form the feeding of clamping device by feeding of described lead screw linkage clamping device, described clamping device bottom is provided with slideway, and a described cover or two cover abrasive drilling holes mechanisms are static setting.
Described crystalline material abrasive drilling aperture apparatus, the bottom of frame is respectively arranged with titting water outlet and admitting pipe joint, be respectively arranged with at least one quick union that is used to shunt and valve on the described admitting pipe joint, wherein said valve is a total control switch, one end of described titting water outlet and admitting pipe joint is connected with cooling medium circulation reservoir vessel respectively, the other end of admitting pipe joint is connected with the cooling medium carrier pipe with coolant medium container respectively, and described but medium transport pipe is fixed on the clamp mechanism holder by cooling medium carrier pipe holder.
Described crystalline material abrasive drilling aperture apparatus is provided with distribution box in frame, described distribution box is connected with the control system that is arranged on upper rack, in the inside or the outer setting of frame cooling medium circulation reservoir vessel is arranged.
Because adopt technique scheme, the present invention has following beneficial effect:
Crystalline material of the present invention abrasive drilling aperture apparatus, by crystal bar is fixed on the clamping device, as required by an abrasive drilling holes mechanism or two abrasive drilling holes mechanisms abrasive drilling hole, one or both ends to crystal bar, and by feed mechanism it is slided by the arbitrary of clamping device of abrasive drilling holes mechanism and crystal bar, the standard in realization abrasive drilling hole is carried out, because the fixing and abrasive drilling holes mechanism of crystal bar slowly advances the abrasive drilling holes mechanism that crystal bar is carried out the operation of abrasive drilling hole by feed mechanism, realized that the standard in abrasive drilling hole carries out, used for the lapping orifice silicon core in later stage to have obtained effective assurance; The present invention is rational in infrastructure, and processing effect is better than existing method, is beneficial in the polysilicon industry and applies.
[description of drawings]
Fig. 1 is a perspective view of the present invention;
Fig. 2 is a plan structure schematic diagram of the present invention;
Fig. 3 is a left TV structure schematic diagram of the present invention;
Fig. 4 is a main TV structure schematic diagram of the present invention;
Among the figure: 1, cooling medium carrier pipe; 2, clamping device; 3, drill bit; 4, beam barrel; 5, clamp mechanism holder; 6, motor A; 7, fixed head; 8, hand feed handwheel; 9, feed mechanism supporting plate; 10, distribution box; 11, frame; 12, leading screw; 13, guard shield; 14, beam barrel holder; 15, coolant medium container; 16, belt; 17, cooling medium carrier pipe holder; 18, support bar; 19, control system; 20, illuminating lamp; 21, locking handwheel; 22, drill bit locking nut; 23, drill bit fixed axis; 24, beam barrel gland, 25, bearing block; 26, motor B; 27, reductor; 28, belt wheel; 29, motor withstanding tight block; 30, catch holder; 31, optoelectronic switch; 32, shaft coupling A; 33, slide block; 34, valve; 35, admitting pipe joint; 36, limit switch baffle plate; 37, limit switch; 38, titting water outlet; 39, quick union; 40, catch; 41, anti-rotation holder; 42, shaft coupling B.
[specific embodiment]
With reference to following embodiment, can explain the present invention in more detail, but the present invention is not limited to the compound mode of these embodiment.
A kind of crystalline material abrasive drilling aperture apparatus described in 1~4 comprises the abrasive drilling holes mechanism that is used for crystal bar in conjunction with the accompanying drawings, is used for the clamping drill bit, realizes crystal bar is carried out the abrasive drilling hole; The clamping device 2 that is used for crystal bar is to realize that these clamping device 2 positions are adjustable simultaneously, to satisfy the crystal bar of different length to the fixedly securing of crystal bar; The described abrasive drilling holes mechanism that is used for crystal bar comprises drill bit 3, motor A6, coolant medium container 15, drill bit fixed axis 23, drill bit 3 is fixed on an end of drill bit fixed axis 23, described drill bit 3, drill bit fixed axis 23 is a hollow-core construction, the other end of drill bit fixed axis 23 is connected with coolant medium container 15, the cooling that cooling medium in the coolant medium container 15 is supplied with in drill bit 3 abrasive drillings by drill bit fixed axis 23, it is cooling medium commonly used that cooling medium adds cooling fluid with water, drill bit fixed axis 23 is connected with motor A6, described drill bit 3 correspondences are fixed in the abrasive drilling position of the crystal bar on the clamping device 2, and the described clamping device 2 that is used for crystal bar is arranged on drill bit 3 relative sides of abrasive drilling holes mechanism; The wherein arbitrary of described abrasive drilling holes mechanism or clamping device 2 is feeding, and another is static setting.
Described crystalline material abrasive drilling aperture apparatus, the described abrasive drilling holes mechanism that is used for crystal bar, motor A6 is fixed on the upper side of fixed head 7 by screw, described motor A6 uses belt or chain to be connected by being arranged on motor A6 with belt wheel 28 or sprocket wheel on the drill bit fixed axis 23 with drill bit fixed axis 23 in being arranged on beam barrel 4, described drill bit fixed axis 23 is fixed in the beam barrel 4 by bearing and the bearing gland that two ends are provided with, described beam barrel 4 by bolted in beam barrel gland 24 and beam barrel holder 14, described beam barrel holder 14 is fixed on the upper side of fixed head 7, one end of drill bit fixed axis 23 is by drill bit locking nut 22 fixed drill bit 3, the other end of drill bit fixed axis 23 is connected with coolant medium container 15, coolant medium container 15 is a working standard spare, so the present invention is not to its detailed description, described coolant medium container 15 prevents to follow 23 rotations of drill bit fixed axis by anti-rotation holder 41, coolant medium container 15 is connected by pipeline with cooling medium circulation reservoir vessel, for drill bit 3 provides cooling medium, flow into cooling medium circulation reservoir vessel by circulation canal after cooling medium arrives the abrasive drilling hole site, described anti-rotation holder 41 is fixed on beam barrel holder 14 1 sides and forms a cover abrasive drilling holes mechanism.
Described crystalline material abrasive drilling aperture apparatus, described abrasive drilling holes mechanism are set to a cover or two covers, and wherein be set to a cover and be an end abrasive drilling of crystal bar, when being set to two covers, be the synchronous abrasive drilling in two ends of crystal bar; Described two cover abrasive drilling holes mechanisms are by one or two motor A6 supply power, and just motor A6 drive two cover abrasive drilling holes mechanisms or each abrasive drilling holes mechanism are supplied with power by a motor A6; Wherein spacing is laterally adjusted in conjunction with trip bolt by the slotted hole that is arranged on the feed mechanism supporting plate 9 between two motor A6 and the two cover abrasive drilling holes mechanisms, so that adapt to the crystal bar of different length.
Described crystalline material abrasive drilling aperture apparatus, the connected mode of described motor A6 and drill bit fixed axis 23 are belt 16 transmissions or chain drive, are provided with motor withstanding tight block 29 in drill bit fixed axis 23 1 sides of motor A6.
Described crystalline material abrasive drilling aperture apparatus, a described cover or two covers are used for the elasticity of the clamping device 2 of crystal bar by the 21 adjusting lockings of locking handwheel, clamping device 2 is fixed on the top of clamp mechanism holder 5, described clamping device 2 is laterally adjusted in conjunction with trip bolt by the slotted hole on the clamp mechanism holder 5, so that adapt to the crystal bar of different length.
Described crystalline material abrasive drilling aperture apparatus, described feed mechanism, leading screw 12 two ends are fixed on the top of frame 11 respectively by bearing block 25, end at leading screw 12 is provided with shaft coupling A32, described shaft coupling A32 is connected with an end of reductor 27 power output shafts, described power output shaft is homemade axle, can be fixed in the endoporus of reductor 27 by nut, end at reductor 27 power input shafts is provided with hand feed handwheel 8, described hand feed handwheel 8 is used for the hand feed of feed mechanism or the fine setting of feed mechanism, the other end at the power input shaft of reductor 27 is connected with motor B26 by shaft coupling B42, described motor B26 is an adjustable speed motor, adjust the movement velocity of feed mechanism by the speed of adjusting motor, described leading screw 12 forms wire connection by the screw that is arranged on feed mechanism supporting plate 9 bottoms and cooperates, the bottom of described feed mechanism supporting plate 9 is provided with at least two slide blocks 33, described slide block 33 and the slide rail that is arranged on frame 11 tops slide join and, be provided with guard shield 13 on slide rail top, be used for preventing falling into of dust or other material, guarantee the precision-fit of slide rail and slide block 33, be provided with the limit switch baffle plate 36 that cooperates frame 11 upper limit position switch 37 in feed mechanism supporting plate 9 one sides, be interval with catch holder 30 at the opposite side of feed mechanism supporting plate 9, the catch of adjusting before and after on catch holder 30, being respectively equipped with 40, at least two optoelectronic switches 31 that fixedly install on the frame 11 are between catch 40 and the catch 40, and described limit switch baffle plate 36 forms the protection of feed mechanism by limit switch 37; The duplicate protection that described catch 40 is realized feed mechanism by the optoelectronic switch 31 that is arranged on frame 11 another sides can also be realized the feeding distance of feed mechanism by using any one group of optoelectronic switch 31 simultaneously.
Described crystalline material abrasive drilling aperture apparatus, or the other end of described leading screw 12 connects the bottom of clamping device 2, the feeding that forms clamping device 2 that feeds by described leading screw 12 interlock clamping devices 2, described clamping device 2 bottoms are provided with slideway, and a described cover or two cover abrasive drilling holes mechanisms are static setting.
Described crystalline material abrasive drilling aperture apparatus, the bottom of frame 11 is respectively arranged with titting water outlet 38 and admitting pipe joint 35, be respectively arranged with at least one quick union that is used to shunt 39 and valve 34 on the described admitting pipe joint 35, described quick union 39 connects cooling medium carrier pipe 1 or coolant medium container 15 respectively, wherein said valve 34 is a total control switch, described total control switch, when the abrasive drilling holes mechanism does not need cooling medium, can close total control switch, to overhaul of the equipments or carry out other work, one end of described titting water outlet 38 and admitting pipe joint 35 is connected with cooling medium circulation reservoir vessel respectively, the other end of admitting pipe joint 35 is connected with cooling medium carrier pipe 1 with coolant medium container 15 respectively, and described but medium transport pipe 1 is fixed on the clamp mechanism holder 5 by cooling medium carrier pipe holder 17.
Described crystalline material abrasive drilling aperture apparatus, in frame 11, be provided with distribution box 10, described distribution box 10 is connected with the control system 19 that is arranged on frame 11 tops, described control system 19 is fixed on frame 11 tops by support bar 18, be provided with illuminating lamp 20 on the top of control system 19, cooling medium circulation reservoir vessel arranged in the inside or the outer setting of frame 11.
Implement crystalline material of the present invention abrasive drilling aperture apparatus, by crystal bar is fixed on the clamping device, as required by an abrasive drilling holes mechanism or two abrasive drilling holes mechanisms abrasive drilling hole, one or both ends to crystal bar, and by feed mechanism it is slided by the arbitrary of clamping device of abrasive drilling holes mechanism and crystal bar, the standard in realization abrasive drilling hole is carried out, wherein employed drill bit is a hollow-core construction, the temperature in crystal bar abrasive drilling hole is reduced, because the fixing and abrasive drilling holes mechanism of crystal bar slowly advances the abrasive drilling holes mechanism that crystal bar is carried out the operation of abrasive drilling hole by feed mechanism, realized that the standard in abrasive drilling hole carries out, used for the lapping orifice silicon core in later stage to have obtained effective assurance.
Part not in the detailed description of the invention is a prior art.
The embodiment that selects for use in this article in order to disclose purpose of the present invention currently thinks to suit, but will be appreciated that, the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.