CN102247786B - Microfluid control device and method for manufacturing the same - Google Patents
Microfluid control device and method for manufacturing the same Download PDFInfo
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- CN102247786B CN102247786B CN201110071280.1A CN201110071280A CN102247786B CN 102247786 B CN102247786 B CN 102247786B CN 201110071280 A CN201110071280 A CN 201110071280A CN 102247786 B CN102247786 B CN 102247786B
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Abstract
Provided are a plastic microfluid control device having a multi-step microchannel and a method of manufacturing the same. The device includes a lower substrate, and a fluid channel substrate contacting the lower substrate and having a multi-step microchannel having at least two depths in a side coupling to the lower substrate. Thus, the device can precisely control the fluid flow by controlling capillary force in a depth direction of the channel by controlling the fluid using the multi-step microchannel having various channel depths. A multi-step micropattern is formed by repeating photolithography and transferred, thereby easily forming the multi-step microchannel having an even surface and a precisely controlled height.
Description
Technical field
The present invention relates to a kind of microfluid control device (microfluid control device) and manufacture the method for this microfluid control device, more specifically, relate to plastics microfluid control device and the manufacture method thereof with many steps microchannel.
Background technology
Microfluid control device is the critical component of lab on A Chip (lab-on-a-chip), and be applied to the various devices that require accurate fluid control, such as protein-chip, DNA chip, delivery system, micro total analysis system and microreactor.
According to the method for controlling microfluid, microfluid control device can use micro-actuating method, electric osmose (electrosmotic) method or capillary flow method to realize, micro-actuating method is for realize plastic miniature pump and valve on fluid passage or chamber, and electro-osmosis method utilization carrys out drive fluid by the electro-osmosis (electromosis) that applies voltage generation between microfluid.
For example, utilize the attraction that the surface tension between inner surface and the fluid of microfluid control device microtubule of capillary flow method produces or repel and control flowing and flow velocity of fluid.In the time that fluid uses capillary force control, microfluid control device does not need independent actuator or additional power supply, and seldom has fault.
Recently, the various structures that use the fluid control part of capillary flow or micro-plastics micro-structural of biochip have been proposed to be applied to.For example, biochip for diagnosing structure has been proposed, for only use by capillary force mobile carry sample, successively in fluid passage with chamber reacts and by the reacting dose of optical method for measuring sample.In addition, proposed to produce capillary force or there is the width of passage of the even degree of depth by adjusting and angle is controlled the method for capillary force by the hexagon micro-column with the even degree of depth is installed in passage.
Such microfluid control device can be manufactured by the dry etching in retrofit or semiconductor technology such as computer numerical control (CNC) process.
But this retrofit provides coarse surface, forming existence restriction on micro-pattern.Therefore, be difficult to use capillary force accurately to control fluid.In addition, use semiconductor technology to manufacture microfluid control device and there is difficulty in process, manufacturing time is long and manufacturing cost is high problem.
Meanwhile, owing to being disposable (disposable) for the microfluid control device diagnosing the illness, it is conventionally by polymers manufacturing.Conventionally, it is by direct processable polymer or form mould mould is transferred to polymer manufacture.
But, use the conventional microfluid control device of polymer to be difficult to control the surface configuration of microchannel.Due to static or molecule be attached on the surface of passage or the surface characteristic of passage according to the variation of time, be also difficult to control the flow velocity of fluid.
Summary of the invention
The present invention relates to use many steps microchannel to control the microfluid control device of microfluid and manufacture the method for this microfluid control device.
One aspect of the present invention provides a kind of microfluid control device, and this microfluid control device comprises: infrabasal plate; And fluid passage substrate, contact infrabasal plate also has many steps microchannel in a side that is attached to infrabasal plate, and this many steps microchannel at least has two degree of depth.
Another aspect of the present invention provides a kind of method of manufacturing microfluid control device, and the method comprises: form the mould with the micro-pattern of many steps; By the micro-pattern transfer of many steps of mould is arrived to fluid passage substrate, form many steps microchannel at least with two degree of depth; And the fluid passage substrate junction with many steps microchannel is incorporated into infrabasal plate.
Brief description of the drawings
By describing the preferred embodiments of the present invention in detail with reference to accompanying drawing, above and other feature of the present invention and advantage will become more obvious for those of ordinary skill in the art, in accompanying drawing:
Figure 1A and Figure 1B illustrate the structure of the microfluid control device of example embodiment according to the present invention;
Fig. 1 C and Fig. 1 D illustrate the principle of the control microfluid of the microfluid control device of the example embodiment according to the present invention;
Fig. 2 A to Fig. 2 F is the sectional view that the method for example embodiment formation mould prototype (prototype) according to the present invention is shown;
Fig. 3 is the sectional view that the method for the formation mould of the example embodiment according to the present invention is shown;
Fig. 4 A to Fig. 4 D is the sectional view that the method for the formation fluid passage substrate of the example embodiment according to the present invention is shown; And
Fig. 5 A and Fig. 5 B illustrate that the fluid passage substrate junction of the example embodiment according to the present invention is incorporated into the sectional view of infrabasal plate.
Detailed description of the invention
Below, will describe example embodiment of the present invention in detail.But, the invention is not restricted to the embodiment of following discloses, but can implement with various forms.For clear, will omit and the incoherent part of description of the invention, run through whole description, similar parts will represent with similar Reference numeral.
Run through whole description, in the time of part " comprising " or " comprising " parts, unless otherwise defined, this part can comprise instead of get rid of another element.In addition, term " part " used herein or " unit " refer to the unit that at least has a function or operation.
Figure 1A and Figure 1B illustrate the structure of the microfluid control device of example embodiment according to the present invention.Figure 1A is perspective view, and Figure 1B is the sectional view intercepting along the line I-I ' of Figure 1A.
As shown in FIG. 1A and 1B, the fluid passage substrate 110 that comprises infrabasal plate 120 and contact with infrabasal plate 120 according to the microfluid control device 100 of example embodiment of the present invention, fluid passage substrate 110 has many steps microchannel 150, and many steps microchannel 150 at least has two degree of depth with the combination side of infrabasal plate 120.Here, fluid passage substrate 110 can also comprise fluid intake 130 and fluid issuing 140 and sorting hole, and air can be by sorting hole to help fluid to flow.Infrabasal plate 120 can also comprise sensor and reactor.
Fluid passage substrate 110 and infrabasal plate 120 can be formed by polymer, and they can have identical or different structure.
Many steps microchannel 150 has each degree of depth according to position, and the degree of depth of passage is controlled by many steps.Here, the width (W) of step 152,154,156 and 158 and height (H) can change according to the purposes of microfluid control device and application.Therefore,, due to width and the height of step 152,154,156 and 158, capillary force can be accurately controlled according to the position of passage.
For example, because becoming in the part that fluid is passed through fast with in the mobile part that stops fluid because of reaction, tunnel-shaped there is the different degree of depth, so fluid can be with high accuracy and repeatability control.Therefore, the height (H) of each step 152,154,156 or 158 can be 1 to 1000 μ m, and the width (W) of each step 152,154,156 or 158 can be 1 to 100000 μ m.
Hydrophobicity or hydrophily can or physically be processed to control by chemistry in the surface of many steps microchannel 150.
Fig. 1 C and Fig. 1 D illustrate the principle of the control microfluid of the microfluid control device of the example embodiment according to the present invention.Fig. 1 C is the perspective view of many steps microchannel, and Fig. 1 D illustrates the sectional view of many steps microchannel.
As shown in Figure 1 C, according to the present invention, the microfluid control device 100 of example embodiment can be controlled on the depth D of microchannel 1 and D2.In other words, because the passage of microfluid control device 100 can be formed as having many ledge structures of the various degree of depth, so capillary force can be controlled on depth direction.
According to the present invention, the microfluid control device 100 of example embodiment can be controlled on the depth D of passage 1 and D2 and width W 1, W2 and W3.Therefore,, by width W 1 and W2 and depth D 1 and the D2 of while control channel, capillary force can be controlled more accurately.
For example, in the part of the flow velocity for increasing fluid, can increase depth D 1 and/or the width W 1 of passage, thereby reduce capillary force.In the part of the mobile part for stopping fluid, valve portion or reduction flow velocity, reduce depth D 2 and/or width W 2 and the W3 of passage, thereby increased capillary force.
As shown in Fig. 1 D, by width (W1 > W3 > W2) and the degree of depth (D1 > D2) of while control channel, can effectively reduce microfluid the cross section of microchannel of process.For example, compared with in the time that only the width of control channel (W1 > W3 > W2) reduces the cross section of microchannel (W1 × D1 > W3 × D1 > W2 × D1), in the time that the width (W1 > W3 > W2) of passage and the degree of depth (D1 > D2) are controlled simultaneously, can effectively reduce the cross section (W1 × D1 > W3 × D1 > W2 × D1) of microchannel.
Similarly, by the governing factor of usage level and vertical direction, the stopping of fluid, valve regulation, by can being controlled more accurately and reproducibly with converging.Particularly, in biological MEMS (bio-MEMS) for the early diagnosis of disease and chemico-analytic chip, according to the present invention, the application of many steps of example embodiment microchannel can provide more accurately and analyzes by accurately controlling and reproducibly control ultra micro fluid.
In addition,, in the time that capillary force is only controlled in the horizontal direction, the width of passage and shape have to be controlled, and therefore can increase the size of chip.But in the time that capillary force is also controlled in vertical direction, the size of chip can not increase.
In order to manufacture the microfluid control device that comprises many steps microchannel, can use processing or semiconductor technology.But according to processing technology, passage can have coarse surface, therefore the reproducibility in fluid control can reduce.Compared with machining, according to semiconductor technology, can obtain more level and smooth surface, but passage can be formed as having only 1 μ m or the less degree of depth, and manufacturing cost becomes higher.As a result, productivity ratio is lower than the productivity ratio of disposable plastic chip product.Below, the method that is suitable for the manufacture microfluid control device that forms many steps microchannel is described with reference to the accompanying drawings.
Fig. 2 A to Fig. 5 B is the sectional view that the method for the manufacture microfluid control device of the example embodiment according to the present invention is shown.
According to example embodiment of the present invention, form the mould prototype with the micro-pattern of many steps, the mould mould prototype with the micro-pattern of many steps forms.Then, by the micro-pattern transfer of many steps of mould is formed to many steps microchannel at least with two degree of depth to fluid passage substrate.Then, the fluid passage substrate junction with many steps microchannel is incorporated into infrabasal plate, thereby completes microfluid control device.
According to the present invention, when microfluid control device is when manufacturing the micro-pattern transfer of many steps of mould to fluid passage substrate, owing to having obtained the level and smooth surface of passage, the reproducibility of fluid control uprises, and has obtained low manufacturing cost and high production rate.Due to the degree of depth of passage can be controlled in from micron to centimetre not commensurate, so capillary force be accurately controlled, thereby fluid can be controlled more accurately.
Fig. 2 A to Fig. 2 F is the sectional view that the method for the formation mould prototype of the example embodiment according to the present invention is shown.
As shown in Figure 2 A, photoresist 220 is coated to silicon substrate 210, and mask pattern 230 is formed on photoresist 220.
Here, photoresist 220 can be epoxy radicals photoresist.Epoxy radicals photoresist 220 can easily form by exposure the pattern of expecting, can not damaged or distortion by extra exposure, and can form micro-pattern after thermmohardening.Can use exemplary epoxy radicals photoresist, SU-8 base photoresist.
The thickness of the photoresist 220 of coating can be controlled according to per unit revolution and the time of the viscosity of photoresist, spin coating device.For example, photoresist 220 can apply with 500 to 5000rpm rotary speed, and can be formed as the thickness of 1 to 100 μ m.
The width W of micro-pattern is definite by the width W 4 of mask pattern 230, and mask pattern 230 can have the width W 2 of 1 to 100000 μ m.
As shown in Figure 2 B, first pattern 220A use mask pattern 230 as etching obstacle by exposing and developing formation.Here, the formation of the first pattern 220A can be undertaken by the photoetching with 1 μ m or larger resolution ratio.
Then, the first pattern 220A solidifies by thermmohardening technique.Here, thermmohardening technique can and be carried out before developing afterwards.
As a result, form the mould prototype with micro-pattern, the micro-pattern of many steps can be by repeating to comprise that the coating of photoresist, the formation of mask pattern, the formation of micro-pattern and the technique of sclerosis form.
As shown in Figure 2 C, photoresist 240 is coated on the whole surface of the products therefrom that comprises the first curing pattern 220A, and mask pattern 250 is formed on photoresist 240.
As shown in Figure 2 D, second pattern 240A use mask pattern 250 as etching obstacle by exposing and developing formation.Then, the second pattern 240A solidifies by thermmohardening.
As shown in Figure 2 E, photoresist 260 is coated on the whole surface of the products therefrom that comprises the second curing pattern 240A, and mask pattern 270 is formed on photoresist 260.
As shown in Figure 2 F, the 3rd pattern 260A uses mask pattern 270 to form as etching obstacle.Then, the 3rd pattern 260A solidifies by thermmohardening.
As a result, manufactured the mould prototype 200 with the micro-pattern of three steps.Here, the number of times that the number of the step of micro-pattern can repeat according to technique is controlled, and the shape of micro-pattern can change according to the shape of mask pattern 230,250 or 270.
Fig. 3 is the sectional view that the method for example embodiment formation mould according to the present invention is shown.
As shown in Figure 3, form mould 300 by the mould prototype 200 with the micro-pattern of many steps.For example, metal die can form by plating.Particularly, seed crystal film can be formed in mould prototype 200, and metal die can form by plating.
Here, thus seed crystal film can be by forming and have individual layer or bilayer such as the metal of Ti, Cr, Al or Au.Thereby it is not bending or break in ensuing transfer printing process that mould 300 can be formed as having enough thickness.
Then,, although do not illustrate in the accompanying drawings, mould prototype 200 is removed by wet etching.
Fig. 4 A to Fig. 4 D is the sectional view illustrating according to the method for the formation fluid passage substrate of example embodiment of the present invention.
As shown in Figure 4 A, prepared the substrate 400 that comprises the mould 300 of the micro-pattern of many steps and be formed on the micro-pattern of lip-deep many steps of mould 300 for transfer printing.
Here, substrate 400 can be polymeric substrates, it can be by cyclic olefine copolymer (COC), polymethyl methacrylate (PMMA), Merlon (PC), cyclic olefin polymer (COP), liquid crystal polymer (LCP), dimethyl silicone polymer (PDMS), polyamide (PA), polyethylene (PE), polyimides (PI), polypropylene (PP), polyphenylene oxide (PPE), polystyrene (PS), polyformaldehyde (POM), polyether-ether-ketone (PEEK), polyether sulfone (PES), PETG (PET), polytetrafluoroethylene (PTFE) (PTFE), polyvinyl chloride (PVC), polyvinylidene fluoride (PVDF), polybutylene terephthalate (PBT) (PBT), PEP (FEP), crossing fluoroalkyl compound (PFA) or its synthetic forms.
Substrate 400 can be by injection mo(u)lding, hot moulding, casting, stereolithography, laser ablation (laser ablation), Rapid Prototype Design (rapid prototyping), serigraphy, such as the conventional mechanical processing of digital control processing or form such as the semiconductor technology of photoetching.
As shown in Figure 4 B, the micro-pattern transfer of many steps of mould 300 is to substrate 400.
For example, in the time using the substrate 400 being formed by polymer, the micro-pattern of many steps can carry out transfer printing with injection mo(u)lding, hot moulding or casting.As a result, the micro-pattern of many steps with complicated shape can easily be transferred to polymeric substrates 400, therefore can complete the fluid passage substrate 400A with many steps microchannel.As mentioned above, when many steps microchannel is formed on polymeric substrates 400 by transfer printing, passage can be formed as having the degree of depth from several microns to several centimetres.
As shown in Figure 4 C, complete the micro-pattern of many steps after the transfer printing of fluid passage substrate 400A, removing mould 300.In the accompanying drawings, the many steps microfluid passage being formed on the substrate 400A of fluid passage is indicated by Reference numeral " 410 ".
As shown in Figure 4 D, substrate 400A in fluid passage is etched to be formed for the injecting fluid intake 420 of fluid and for discharging the fluid issuing 430 of fluid.In the accompanying drawings, the fluid passage substrate that has fluid intake 420 and fluid issuing 430 is indicated by Reference numeral " 400B ".In addition,, although do not have shown in the drawingsly, can further form the hole that allows air pass through.
Fig. 5 A and Fig. 5 B illustrate that the fluid passage substrate junction of the example embodiment according to the present invention is incorporated into the sectional view of infrabasal plate.
As shown in Figure 5A, preparation has fluid passage substrate 400B and the infrabasal plate 500 of many steps microfluid passage 410.
Here, infrabasal plate 500 can be by forming with the fluid passage similar polymer of substrate 400B.Fluid passage substrate 400B and infrabasal plate 500 can be formed by identical or different polymer architecture.The example of the material of infrabasal plate 500 is identical with the example of the material of above-mentioned fluid passage substrate 400.
Fluid passage substrate 400B and infrabasal plate 500 can be by having identical hydrophobicity or hydrophily, or have different hydrophobicitys or hydrophilic material forms.Alternatively, a surperficial part for fluid passage substrate 400B and infrabasal plate 500 can be by having different hydrophobicitys or hydrophilic material forms.Similarly, owing to can controlling the surface modification of fluid passage substrate 400B and infrabasal plate 500, so can control the flow velocity of fluid.
As shown in Figure 5 B, microfluid control device is manufactured by fluid passage substrate 400B is attached to infrabasal plate 500.
Here,, in the time that fluid passage substrate 400B and infrabasal plate 500 are formed by identical material, fluid passage substrate 400B can be by carrying out with heat, chemical substance or hyperacoustic fusion adhesion method to the combination of infrabasal plate 500.
In the time that fluid passage substrate 400B and infrabasal plate 500 are formed by different materials, fluid passage substrate 400B can carry out with liquid-type jointing material, powder-stuck material or paper shape film-type jointing material to the combination of infrabasal plate 500.
Especially, can use UV curing agent.In addition, can require room temperature or low temperature to prevent biochemical material modification during combination, in this case, can use the contact adhesive that only carries out combination with pressure.
According to the present invention, fluid is controlled in many steps microchannel by use with different depth, and microfluid control device regulates capillary force and accurately controls flowing of fluid in channel depth direction.In addition, form the micro-pattern of many steps by repeating photoetching and the micro-pattern of transfer printing, can easily form the many steps microchannel having an even surface and be highly accurately controlled.
Therefore, fluid can use vertical many steps ultra microstructure reproducibly and accurately to be controlled.The biological device of various lab on A Chips be can be applied to according to microfluid control device of the present invention and manufacture method thereof, protein-chip, DNA chip, delivery system, micro total analysis system and biochemical microreactor comprised.
Although illustrate and described the present invention with reference to particular exemplary embodiment of the present invention, it will be understood by those skilled in the art that and can carry out various changes in form and details and do not deviate from the spirit and scope that the present invention is defined by the claims.
The application requires the korean patent application No.10-2010-0026154 submitting on March 24th, 2010 and priority and the rights and interests of korean patent application No.10-2010-0077699 of submitting on August 12nd, 2010, and its full content is incorporated herein by reference.
Claims (7)
1. a method of manufacturing microfluid control device, comprising:
Formation has the mould of the micro-pattern of many steps;
By the micro-pattern transfer of described many steps of described mould is arrived to fluid passage substrate, form many steps microchannel at least with two degree of depth; And
The described fluid passage substrate junction with described many steps microchannel is incorporated into infrabasal plate,
The formation of wherein said mould comprises:
Formation has the mould prototype of the micro-pattern of many steps; And
Use described mould prototype to form metal die by plating,
The formation of wherein said mould prototype comprises:
Coating photoresist is to the surface of silicon substrate;
Form micro-pattern by photoresist described in patterning; And
The described micro-pattern that hardens,
Wherein repeat formation and the described sclerosis of the coating of described photoresist, described micro-pattern, to form the micro-pattern of described many steps.
2. the method for claim 1, wherein said fluid passage substrate and described infrabasal plate are formed by identical or different polymer.
3. the method for claim 1, wherein said fluid passage substrate uses adhesive or ultrasonic joint and is attached to described infrabasal plate.
4. the method for claim 1, wherein said photoresist is epoxy radicals photoresist.
5. the method for claim 1, wherein said photoresist is SU-8 base photoresist.
6. the method for claim 1, the formation of wherein said metal die comprises:
In described mould prototype, form seed crystal thin layer;
Form described metal die by plating; And
Remove described mould prototype by wet etching.
7. the method for claim 1, wherein said transfer printing is undertaken by injection mo(u)lding, hot moulding or casting.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2010-0026154 | 2010-03-24 | ||
| KR20100026154 | 2010-03-24 | ||
| KR1020100077699A KR101348655B1 (en) | 2010-03-24 | 2010-08-12 | Microfluid control device and method for manufacturing the same |
| KR10-2010-0077699 | 2010-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102247786A CN102247786A (en) | 2011-11-23 |
| CN102247786B true CN102247786B (en) | 2014-11-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201110071280.1A Expired - Fee Related CN102247786B (en) | 2010-03-24 | 2011-03-24 | Microfluid control device and method for manufacturing the same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101348655B1 (en) |
| CN (1) | CN102247786B (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101443981B1 (en) * | 2012-11-29 | 2014-10-14 | 포항공과대학교 산학협력단 | The structure for the microdroplet control and microdroplet/microparticle made based on this |
| KR101411333B1 (en) * | 2013-07-22 | 2014-06-25 | 연세대학교 산학협력단 | Microfluidic Channel Having Heat Generating Member and Airborne Fine Particles Monitoring Apparatus Having the Same |
| JP6987910B2 (en) * | 2014-11-28 | 2022-01-05 | デクセリアルズ株式会社 | A method for manufacturing a master for making a microchannel, a transcript, and a master for making a microchannel. |
| CN105149024B (en) * | 2015-09-16 | 2017-01-11 | 杭州电子科技大学 | Thermophoresis coupling subparticle sorter |
| WO2018183074A1 (en) * | 2017-03-29 | 2018-10-04 | Kimberly-Clark Worldwide, Inc. | Surface for directional fluid transport including against external pressure |
| WO2018236901A1 (en) | 2017-06-19 | 2018-12-27 | Curiochips | Microfluidic device having partially enclosed microfluidic channel and use thereof |
| KR102086802B1 (en) * | 2017-07-19 | 2020-03-09 | 서강대학교산학협력단 | Injection mold for manufacturing probe of atomic force microscopy and manufacturing method thereof |
| CN107271421A (en) * | 2017-07-27 | 2017-10-20 | 深圳中科芯海智能科技有限公司 | A kind of microparticle fluorescence detection means in fluid sample |
| CN110078018A (en) * | 2018-01-26 | 2019-08-02 | 苏州锐材半导体有限公司 | Stepped formwork processing method for micro-fluidic chip preparation |
| CN108927232B (en) * | 2018-07-17 | 2020-12-01 | 博奥生物集团有限公司 | Fluid mixing structure for micro-fluidic chip |
| CN111254390B (en) * | 2018-11-30 | 2022-03-22 | 研能科技股份有限公司 | Method for manufacturing micro-fluid actuator |
| FR3092103B1 (en) * | 2019-01-29 | 2022-08-05 | Netri | Process for manufacturing 3D microfluidic devices |
| CN110559995B (en) * | 2019-09-11 | 2021-09-21 | 南京工业大学 | Method for adsorbing polystyrene micro-plastic in water by using three-dimensional graphene |
| KR102283697B1 (en) | 2019-10-16 | 2021-07-30 | 울산과학기술원 | Apparatus for analyzing nanochannel by controlling temperature |
| CN111250185B (en) * | 2020-02-21 | 2022-11-04 | 京东方科技集团股份有限公司 | Preparation method and preparation device of micro-fluidic chip |
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| CN1867795A (en) * | 2003-08-11 | 2006-11-22 | 加州理工学院 | Microfluidic large scale integration |
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| WO2001089691A2 (en) * | 2000-05-24 | 2001-11-29 | Micronics, Inc. | Capillaries for fluid movement within microfluidic channels |
| US7125510B2 (en) * | 2002-05-15 | 2006-10-24 | Zhili Huang | Microstructure fabrication and microsystem integration |
| US6923920B2 (en) * | 2002-08-14 | 2005-08-02 | Lam Research Corporation | Method and compositions for hardening photoresist in etching processes |
| TW200428538A (en) * | 2002-11-20 | 2004-12-16 | Reveo Inc | Method of fabricating vertical integrated circuits |
| KR100452946B1 (en) * | 2002-11-26 | 2004-10-14 | 한국전자통신연구원 | Low Power Consumption Microfabricated Thermal Cycler and its Fabrication Method |
| KR100995363B1 (en) * | 2007-12-17 | 2010-11-19 | 한국전자통신연구원 | Device for Controlling of Microfluidic and Method of Fabricating and Operating the Same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1867795A (en) * | 2003-08-11 | 2006-11-22 | 加州理工学院 | Microfluidic large scale integration |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN102247786A (en) | 2011-11-23 |
| KR20110107255A (en) | 2011-09-30 |
| KR101348655B1 (en) | 2014-01-08 |
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