CN102241390A - 一种制备悬浮纳米结构的方法 - Google Patents
一种制备悬浮纳米结构的方法 Download PDFInfo
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- CN102241390A CN102241390A CN2011101068277A CN201110106827A CN102241390A CN 102241390 A CN102241390 A CN 102241390A CN 2011101068277 A CN2011101068277 A CN 2011101068277A CN 201110106827 A CN201110106827 A CN 201110106827A CN 102241390 A CN102241390 A CN 102241390A
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O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound 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[Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
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- 230000000694 effects Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound 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- 229910052799 carbon Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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Abstract
本发明公开了一种制备悬浮纳米结构的方法。该方法,包括如下步骤:用聚焦离子束扫描两端固定在保护层上的悬臂梁,得到所述悬浮纳米结构。该方法不受常规光刻条件的限制,对设备的聚焦精度以及扫描精度等要求相对传统的刻蚀方式较低,更有利于进入多结构并行加工,光学器件、传感器件、电子器件等方面具有重要的应用价值。
Description
一种制备悬浮纳米结构的方法
技术领域
[0001] 本发明涉及一种制备悬浮纳米结构的方法。 背景技术
[0002] 聚焦离子束(Focused Ion Beam,FIB)是一种灵活的微纳米加工方法,可原位加工纳米尺度的结构,加工方法包括对目标材料的局部精确刻蚀和淀积,加工的同时还可在片显微观察,可广泛应用在微纳加工以及集成电路测试领域。
[0003] 悬浮的纳米结构作为微/纳机电系统中的关键结构,可用于多种传感器、执行期领域。如其中纳米弦是一种悬浮的纳米线结构,而纳米线是指两个维度的尺度被限制到 IOOnm以下的一种一维纳米结构,这种一维纳米结构表现出很多新奇的特性,从而在制作新型微电子器件和纳机电系统方面有巨大潜力。现有纳米线的制备方法主要为一些“自下而上”的方法,如使用气相的气-液-固(Vapor-Liquid-Solid,VLS)生长法、汽-固 (Vapor-Solid, VS)生长法以及自催化气-液-固(self-catalytic VLS)生长法,使用液相的“毒化”镜面控制生长法、溶液-液-固(Solution-Liquid-Solid,SLS)生长法和一系列的模板生长法,这些方法虽便于大量的加工,但是很难实现纳米线的精确控制和排布。
[0004] 传统的使用聚焦离子束加工纳米结构的方法属于“自上而下”路线,通过聚焦离子束精细的操作通过刻蚀或者淀积的方法直写出线条。这种方法受限于仪器的操作精度,需要精准的操作和丰富的经验,分辨率往往止步于百纳米,且表面较粗糙。另外,由于使用直接使用聚焦离子束加工时会受其引入应力和液化的影响,尤其在尺度减小到达纳米尺度后该影响使直接加工不可控。
发明内容
[0005] 本发明的目的是提供一种制备纳米弦的方法。
[0006] 本发明提供的制备悬浮纳米结构(也即线形、纺锤形或针尖对形的悬浮纳米结构)的方法,包括如下步骤:用聚焦离子束扫描两端固定在保护层上的悬臂梁,得到所述悬浮纳米结构。
[0007] 上述方法中,所述保护层可按照包括如下步骤的方法制备而得:1)在衬底的正反两面各制备一层纳米结构材料层及位于所述纳米结构材料层之上的保护层;
[0008] 2)对所述步骤1)所得纳米结构材料层进行图形化,并使所述步骤1)所得纳米结构材料层的区域悬空,得到所述两端固定在所述保护层上的悬臂梁。
[0009] 上述方法中,构成所述衬底的材料为硅;构成所述纳米结构材料层的材料为单晶材料、多晶材料、无定形材料或金属材料;各种常用的单晶材料、多晶材料、无定形材料或金属材料均适用于本方法,优选的,所述单晶材料为单晶硅;所述多晶材料为多晶硅;所述无定形材料为无定形氮化硅或无定形氧化硅,所述金属材料选自铝和金中的至少一种;构成所述保护层的材料为氮化硅;所述纳米结构材料层的厚度为50-200纳米,优选100纳米,所述保护层的厚度为50-500纳米,优选100纳米。所述制备纳米结构材料层的方法为各种常用的化学气相淀积、溅射法或蒸发法。
[0010] 所述使所述步骤1)所得纳米结构材料层的区域悬空的方法为各种常规方法,如可使用牺牲层或制备背腔;其中,所述使用牺牲层的方法包括如下步骤:以正面图形化的纳米结构材料层为掩膜,对所述衬底和所述掩膜进行各向异性刻蚀,再进行各向同性刻蚀; 所述制备背腔的方法包括如下步骤:用背面光刻的方法定义背腔图形,再利用反应离子刻蚀方法刻蚀所述背面图形,再用氢氧化钾的水溶液等常规腐蚀液腐蚀所述衬底即得。该步骤中,所述图形化的方法为各种常规图形化方法,如可为光刻后使用光刻胶做掩膜刻蚀或者剥离。
[0011] 制备所述悬浮纳米结构的形状为线形的方法中,所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤中,所述悬臂梁的厚度为20-300纳米,优选100纳米,所述加速电压为 15KeV-30KeV,优选30keV,所述轰击束流密度为 5X1016ion ·αιΓ2 ·8_1-5 X 1017ion ·αιΓ2 ·
优选3. lX1017ion/cm · s,所述扫描时间为1秒-60秒,优选17秒。
[0012] 制备所述悬浮纳米结构的形状为纺锤形的方法中,所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤中,所述悬臂梁的厚度为20-300纳米,优选100纳米,所述加速电压为 30keV-60keV,优选 30keV,所述轰击束流密度为 5X1017ion ·αιΓ2 ·8_1-5Χ 1018ion ·αιΓ 2 · s—1,优选3. lX1018ion/cm · s,所述扫描时间为1秒-60秒,优选17秒。
[0013] 用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤中,该悬臂梁会因溅射作用而减薄,同时,在离子投影射程(几十纳米)范围内的物质会被引入应力并一定程度上流体化,当目标材料的厚度被减薄到离子投影射程以下时,所剩物质基本流体化即形成所谓准 “液桥”;继续进行所述扫描,在准“液桥”断裂前,在引入应力和此时被轰击物质所表现出的粘度、表面张力等体性质的混合作用下,能够形成线形或纺锤形等纳米结构。通过控制离子束作用的条件(如加速电压、轰击束流密度、作用时间等)以及靶材料的性质,其准“液桥” 表现出不同的流体性质,加速电压和束流密度越大,等效粘度越小,流体性越明显,具体如下:图1(a)和图1(b)为相同束流和材料不同电压的比较;图1(b)和图1(c)在相同电压、 材料参数下展现了束流的作用;图1(b)和图1(d)的比较可以看出不同的材料展现出不同的性质。
[0014] 精确的控制纳米线或纺锤形的悬浮纳米结构,还可形成自对准的针尖对结构。该针尖对的悬浮纳米结构的制备方法,是在所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤之后,继续用聚焦离子束扫描所得悬浮纳米结构,直至所述悬浮纳米结构断裂停止扫描,得到形态为针尖对的悬浮纳米结构;所述继续用聚焦离子束扫描所得悬浮纳米结构步骤中,所述轰击束流密度为5X1016ion · cm_2 · s^-5X 1018ion · cm_2 · 优选 3. lX1017ion/cm*s 或 3. 1 X 1018ion/cm · s,扫描时间为 0. 1 秒-10 秒,优选 0. 2 秒。其中, 继续用聚焦离子束扫描所得悬浮纳米结构步骤中,所用轰击束流密度可根据悬浮纳米结构形态的不同进行调节,当所述悬浮纳米结构的形状为线形时,所述轰击束流密度具体可为 5 X 1016ion · CnT2 · s_1-5 X 1017ion · cnT2 · s-1,,优选 3. 1 X 1017ion/cm · s ;当所述悬浮纳米结构的形状为纺锤形时,所述轰击束流密度具体可为5X1017ion ·αιΓ2 -s^-SX 1018ion ·αιΓ2 · s—1,优选3. lX1018ion/cm.So该步骤中,可用扫描电子束观察所述悬浮纳米结构是否断裂, 该用扫描电子束观察步骤中,扫描电子束电压为^eV〜30keV,优选17keV,放大倍数5万倍〜100万倍,优选50万倍。[0015] 通过扫描电子显微镜高倍率的观察,还可进行电子束诱导淀积碳,从而控制针尖对结构之间的间距。因而,本发明提供的制备形状为针尖对的悬浮纳米结构,还包括如下步骤:在所述停止扫描步骤之后,用扫描电子束扫描所述悬浮纳米结构的断裂点,得到所述形状为针尖对的悬浮纳米结构;所述用扫描电子束扫描所述悬浮纳米结构的断裂点步骤中, 电子束电压^eV〜30keV,优选17keV,放大倍数为10万倍〜500万倍,优选50万倍,扫描时间为0. 2〜10分钟,优选1分钟。
[0016] 按照上述方法制备所得的悬浮纳米结构,也属于本发明的保护范围。该悬浮纳米结构的形状为线形、纺锤形或针尖对;
[0017] 其中,所述形状为线形的悬浮纳米结构,直径为3纳米-30纳米,优选5纳米,长度为50纳米〜5微米,优选50纳米;
[0018] 所述形态为纺锤形的悬浮纳米结构,长度为50纳米〜5微米,优选50纳米,两端最细处的直径为3纳米-30纳米,优选5纳米,两端最粗处的直径为30-60纳米,优选30纳米;
[0019] 所述形状为针尖对的悬浮纳米结构,针尖的直径为2〜20纳米,优选5纳米,针尖对的间距为2〜50纳米,优选17纳米。
[0020] 本发明使用了独创的聚焦离子束致液化的原理,利用聚焦离子束的扫描式轰击使目标材料表现出有限的流动性,同时,在与引入应力的混合作用下制备得到诸如纳米线、纳米纺锤、针尖对等形态的悬浮纳米结构。该方法具有如下优点:1、可以不受常规光刻条件的限制,而主要依赖离子束作用的初始图形的设计;2、离子束作用采用大面积扫描方式,因而对设备的聚焦精度以及扫描精度等要求相对传统的刻蚀方式较低,更有利于进入多结构并行加工;3、由于原理上是液体重流定型,因此加工所得的纳米结构表面十分光滑;4、聚焦离子束方法与微电子工业常用的离子注入、刻蚀技术有着千丝万缕的联系,因此有可能将本发明的原理推广到常规离子束作用上,融入现已大规模应用的工艺流程。该方法能够应用在不同的材料上,包括金、铝等金属材料,单晶硅、多晶硅等半导体材料,以及氮化硅、二氧化硅等非晶结构绝缘体材料。加工过程中,可通过调节轰击离子的能量、密度及作用时间来调节形成的“液桥”的性质和引入的应力的程度,从而调整形成不同材料、不同规格的纳米弦结构。基于本发明制作的悬浮纳米结构,可应用于光学器件、传感器件、电子器件等方面,具有重要的应用价值。
附图说明
[0021] 图1为比较不同悬浮纳米结构加工过程中其电压、束流参数和靶材料参数对加工结果的影响。
[0022] 图2为实施例1中1)-3)形成悬浮薄膜的流程示意图;
[0023] 图3为实施例1中聚焦离子束加工的模式说明图;
[0024] 图4为实施例1中加工形成液桥的示意图;
[0025] 图5为实施例1和2所得不同结构的悬浮纳米结构的扫描电子显微镜 (ScanningElectron Microscope, SEM)照片。
[0026] 图6为实施例3所得纳米对准针尖对及间距调节过程的扫描电子显微镜照片。具体实施方式
[0027] 本发明提供的制备悬浮纳米结构的方法,是使用聚焦离子束轰击悬浮的薄膜材料,目标材料在被溅射掉的同时表现出有限的流动性,在持续聚焦离子束的轰击下,最终剩余材料会形成一个准“液桥”。基于液体所具有的不同粘度和表面张力性质,该“液桥”在断裂的瞬间会形成不同的形状。用适当能量和剂量的离子束轰击材料可以控制液体的性质, 也可以控制引入应力的程度,从而在特定区域加工出悬浮纳米结构。用该方法加工所得悬浮纳米结构的表面形貌取决于液体的流动,因此其表面相对于传统的刻蚀结构更为光滑。
[0028] 下面结合具体实施例对本发明作进一步阐述,但本发明并不限于以下实施例。所述方法如无特别说明均为常规方法。所述材料如无特别说明均能从公开商业途径而得。
[0029] 实施例1 :制备线形的氮化硅(Si3N4)悬浮纳米结构
[0030] 按照图1所示方法进行制备:
[0031] 1)将厚度为400微米的硅衬底层1用硫酸/双氧水(硫酸、双氧水的体积比为 4 : 1)加热至120°C加热清洗10分钟后,用化学气相沉积方法淀积一层厚度为100纳米的二氧化硅层2 (SiO2)(纳米结构材料层的保护层)和一层厚度为100纳米的氮化硅层 3 (Si3N4)(纳米结构材料层),由于是双面淀积,其中正面形成用于制备纳米线的氮化硅层, 背面用于形成氢氧化钾(KOH)腐蚀掏背腔的掩膜层材料,见图加;
[0032] 2)用背面光刻的方法定义背面光刻图形,然后反应离子刻蚀(RIE)步骤1)所得位于背面的氮化硅层3及二氧化硅层2,形成图2b的掩模;用质量百分浓度为30%的氢氧化钾水溶液腐蚀掏背腔,留10微米余厚;正面光刻形成悬臂梁的图形后,背面使用ASE继续刻蚀硅衬底层硅层去除干净,见图2c;最后用缓冲氢氟酸(BHF,NH4F : HF以体积比5 : 1 混合而得)腐蚀二氧化硅层2使薄膜悬浮,形成厚度为IOOnm的悬浮的氮化硅悬臂梁,见图 2d ;
[0033] 3)用聚焦离子束在步骤2~)所得氮化硅悬臂梁上进行选择性刻蚀,根据目标图形作进一步图形化加工;如图3所示(其中1为硅衬底层,3为氮化硅层),继续使用聚焦离子束在希望形成纳米线的区域(也即厚度为IOOnm的氮化硅悬臂纳米梁区域,如图3中4所示辐照区域)进行扫描,加速电压为30keV,轰击束流密度为3. lX1017ion/cm*S,扫描时间为17秒;在该扫描过程中,聚焦离子束扫描区域可以很大,覆盖多个初始图形,实现并行加工,在目标区域减薄到一定程度后,离子作用下短时间内会使特定区域基本流体化(即形成准“液桥”,其侧视图见图4,其中,31为液化并引入应力的薄层,3为氮化硅层,32为准液桥),同时并且引入应力,在准“液桥”即将断裂的时候形成图5所示形状的纳米线形的悬浮结构。其中,图fe为所得纳米线的结构俯视电镜照片;图5c为一次性所得多根纳米线的结构俯视电镜照片,图5d为其鸟瞰电镜照片;由图可知,按照该实施例的方法加工形成了纳米线悬浮结构,其直径为5纳米,长度为50纳米。
[0034] 实施例2 :制备纺锤形的多晶硅悬浮纳米结构
[0035] 按照与实施例1完全相同的方法进行制备,仅将步骤1)中化学气相淀积方法中的淀积材料更改为多晶硅;将步骤幻用聚焦离子束扫描步骤中所用的加速电压、轰击束流密度分别更改为30keV、3. lX1018ion/cm · s,得到纺锤形的多晶硅悬浮纳米结构。
[0036] 图恥分别为所得不同尺寸的纺锤形的多晶硅悬浮纳米结构的电镜照片。由图可知,按照该实施例的方法加工形成了悬浮的纺锤形纳米结构,长度为50纳米,其两端最细
7处直径为5纳米,最粗处直径为30纳米。
[0037] 实施例3 :制备间距可调的针尖对形状的氮化硅悬浮纳米结构
[0038] 用聚焦离子束扫描实施例1制备所得线形的氮化硅(Si3N4)悬浮纳米结构的最细部位(也即直径小于10纳米的部位),加速电压为15keV,轰击束流密度为3. lX1017ion/ cms,扫描时间为0. 2秒,该聚焦离子束扫描时会产生微弱的刻蚀作用,同时用扫描电子束原位观察(扫描电子束电压为17keV,放大倍数为50万倍)该最细部位,直至该最细部位断裂停止扫描,得到针尖对形状的氮化硅悬浮纳米结构。图6a为纳米针尖对结构电镜照片。 由图可知,按照该实施例的方法加工形成了针尖对形状的氮化硅悬浮纳米结构,其针尖直径为5纳米,间距为17纳米。
[0039] 为了对该所得针尖对的间距进行调节,将所得针尖对形状的氮化硅悬浮纳米结构再使用扫描电子束观察断裂点,也即进行碳的淀积(如图6a〜图6d可原位观察到碳的淀积过程),其中电子束电压为17keV,放大倍数50万倍,扫描时间为1分钟,扫描完毕得到间距可调的针尖对形状的氮化硅悬浮纳米结构,该针尖的直径为5纳米,间距为3-5纳米。
Claims (10)
1. 一种制备悬浮纳米结构的方法,包括如下步骤:用聚焦离子束扫描两端固定在保护层上的悬臂梁,得到所述悬浮纳米结构。
2.根据权利要求1所述的方法,其特征在于:所述两端固定在保护层上的悬臂梁,是按照包括如下步骤的方法制备而得:1)在衬底的正反两面各制备一层纳米结构材料层及位于所述纳米结构材料层之上的保护层;2)对所述步骤1)所得纳米结构材料层进行图形化,并使所述步骤1)所得纳米结构材料层的区域悬空,得到所述两端固定在所述保护层上的悬臂梁。
3.根据权利要求1或2所述的方法,其特征在于:构成所述衬底的材料为硅;构成所述纳米结构材料层的材料为单晶材料、多晶材料、无定形材料或金属材料;构成所述保护层的材料为氮化硅;所述纳米结构材料层的厚度均为50-200纳米,优选100纳米,所述保护层的厚度均为50-500纳米,优选100纳米。
4.根据权利要求3所述的方法,其特征在于:所述单晶材料为单晶硅;所述多晶材料为多晶硅;所述无定形材料为无定形氮化硅或无定形氧化硅,所述金属材料选自铝和金中的至少一种;制备所述纳米结构材料层的方法为化学气相淀积法、溅射法或蒸发法。
5.根据权利要求1-4任一所述的方法,其特征在于:制备所述悬浮纳米结构的形状为线形的方法中,所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤中,所述悬臂梁的厚度为20-300纳米,优选100纳米,所述加速电压为15KeV-30KeV,优选30keV,所述轰击束流密度为 5 X 1016ion · CnT2 · s_1-5 X 1017ion · cnT2 · s、优选 3. lX1017ion/cm · s,所述扫描时间为1秒-60秒,优选17秒。
6.根据权利要求1-5任一所述的方法,其特征在于:制备所述悬浮纳米结构的形状为纺锤形的方法中,所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤中,所述悬臂梁的厚度为20-300纳米,优选100纳米,所述加速电压为30keV-60keV,优选30keV,所述轰击束流密度为 5X 1017ion · cnT2 · s_1-5X 1018ion · cnT2 · s、优选 3. lX1018ion/cm · s,所述扫描时间为1秒-60秒,优选17秒。
7.根据权利要求1-6任一所述的方法,其特征在于:所述制备悬浮纳米结构的方法, 还包括如下步骤:在所述用聚焦离子束扫描两端固定在保护层上的悬臂梁步骤之后,继续用聚焦离子束扫描所得悬浮纳米结构,直至所述悬浮纳米结构断裂停止扫描,得到形状为针尖对的悬浮纳米结构;所述继续用聚焦离子束扫描所得悬浮纳米结构步骤中,所述轰击束流密度为 5 X1016ion · cnT2 · s_1-5 X 1018ion · cnT2 · s"1,优选 3. lX1017ion/cm · s 或 3. IXlO18Wcm · s,作用时间为0. 1秒-10秒,优选0. 2秒。
8.根据权利要求7所述的方法,其特征在于:所述制备形态为针尖对的悬浮纳米结构, 还包括如下步骤:在所述停止扫描步骤之后,用扫描电子束扫描所述悬浮纳米结构的断裂点,得到所述形状为针尖对的悬浮纳米结构;所述用扫描电子束扫描所述悬浮纳米结构的断裂点步骤中,电子束电压为^eV〜30keV,优选17keV,放大倍数为10万倍〜500万倍, 优选50万倍,扫描时间为0. 2〜10分钟,优选1分钟。
9.权利要求1-8任一所述方法制备而得的悬浮纳米结构。
10.根据权利要求9所述的悬浮纳米结构,其特征在于:所述悬浮纳米结构的形状为线形、纺锤形或针尖对;其中,所述形状为线形的悬浮纳米结构,直径为3纳米-30纳米,优选5纳米,长度为50 纳米〜5微米,优选50纳米;所述形态为纺锤形的悬浮纳米结构,长度为50纳米〜5微米,优选50纳米,两端最细处的直径为3纳米-30纳米,优选5纳米,两端最粗处的直径为30-60纳米,优选30纳米; 所述形状为针尖对的悬浮纳米结构,针尖的直径为2〜20纳米,优选5纳米,针尖对的间距为2〜50纳米,优选17纳米。
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