CN102230164A - Metal strip continuous winding vacuum film plating equipment with building block type structure - Google Patents
Metal strip continuous winding vacuum film plating equipment with building block type structure Download PDFInfo
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- CN102230164A CN102230164A CN2011101934787A CN201110193478A CN102230164A CN 102230164 A CN102230164 A CN 102230164A CN 2011101934787 A CN2011101934787 A CN 2011101934787A CN 201110193478 A CN201110193478 A CN 201110193478A CN 102230164 A CN102230164 A CN 102230164A
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Abstract
The invention provides a metal strip continuous winding vacuum film plating equipment with a building block type structure. The metal strip continuous winding vacuum film plating equipment comprises an unwinding chamber (1), a winding chamber (2) and thirteen building block type vacuum chambers (3), wherein the first and the second vacuum chambers are ion source bombardment washing chambers (31); the third and the tenth vacuum chambers are independent gas isolation chambers (32); the fourth to the ninth vacuum chambers are vacuum sputtering chambers (33); the eleventh and the twelfth vacuum chambers are immediate frequency sputtering chambers (34); the thirteenth vacuum chamber is a detection chamber (35); one end of the unwinding chamber (1) is connected with the first building block type vacuum chamber; and the winding chamber (2) is connected with the thirteenth building block type vacuum chamber. According to the invention, because the vacuum chambers are in building type structures, the functions of the vacuum chambers can be assembled, increased and reduced according to the process requirements to be favorable for meeting the requirements for the process; compared with the prior art, the metal strip continuous winding vacuum film plating equipment with the building block type structure, provided by the invention, has the characteristics of novel structure, simplicity, practicability, stable quality of a film layer on the metal strip, high efficiency, and suitability for large-scale industrial production; and raw materials and energy are saved; and the film plating production can be continuously carried out for a long time.
Description
Technical field
The present invention relates to a kind of vacuum coating film equipment, particularly a kind ofly on metal (copper or aluminium) coiling band, be coated with solar selectively absorbing coating continuously, be applied to the metal band continuous reeling vacuum coating film equipment of the modular construction on the solar plate heat collector.
Background technology
For save energy, protection environment, uplift the people's living standard the fast development in nearly more than ten years of China solar water heater industry.Solar water heater's turnout and sales volume all rapidly increase.Nowadays, China has become solar water heater's production and selling big country in the world, and annual turnover and total recoverable amount all rank first in the world.China's solar water heater's kind is a lot of, several big classes such as vacuum tube water heater, plate water-heater, vexed solarization type water-heater is arranged, based on vacuum tube water heater.But solar vacuum-tube water heater exists easy booster, maintenance inconvenience, combines with building to have defectives such as not attractive in appearance.And abroad, adopt plate water-heater mostly.Some large-scale solar water conservancy project journeys of China also more adopts flat-plate solar heat collector, but employed metal band solar absorbing film is mainly by import.Because the plate type solar water-heater adopts sheet metal to make heat absorption core components and parts, has advantages such as sturdy and durable, can with the building perfect adaptation, overcome solar vacuum-tube water heater in installation, maintenance and work-ing life, with weak points such as building combine.
What plate solar type water-heater adopted is that the flat metal band is as the core heat absorbing element, therefore, the selective adsorption coating on thermal-arrest plate surface be coated with quality and performance and weathering resistance, be the gordian technique of the whole solar water heating equipment of decision, metal band continuous reeling equipment then is the key equipment of preparation metal band selective adsorption coating.
Domestic present use be that anodic oxidation (plating) technology is produced plate solar collector, this technology damage to the environment has electroplating sewerage, has been limited to produce that quality product is inferior simultaneously, emittance is high; Adopt spraying technology to produce plate solar collector in addition in addition, the quality product that this technology is produced is poorer, and specific absorption is low, and emittance is higher.What employing vacuum magnetic-control sputtering technology was coated with plate solar collector also is some single chamber bantams, and quality product is also extremely unstable.
Existing metal band continuous coiling and coating device is box-type mostly, unreels chamber, rolling chamber and sputtering chamber all in a box body.Chinese patent 200420077793.6 disclosed a kind of solar selectively adsorptive coating continuous coating apparatus, between described vacuum chamber and vacuum chamber two Room an independently excessive device is set, though finish single chamber independence continuous coating, but above-mentioned equipment is in the process of being coated with, workpiece is after each plated film, the capital comes off and enters in the vacuum excessive device after the vacuum environment, like this owing to be coated with at twice that workpiece influences film quality easily in the process under temperature and vacuum condition variation.Chinese patent 200810241896.7 disclosed a kind of continuous reeling formula magnetic controls spatter vacuum coater, in its vacuum chamber inner chamber, be horizontally disposed with the trilateral tenslator that constitutes by three rollers, this apparatus structure makes the curved radius of the metal strip roll coil of strip little, easily rete behind the plated film is damaged.In addition, above-mentioned two kinds of metal band continuous coiling and coating devices are provided with the chamber division board at the chamber middle part, and chamber is isolated into two independently cavitys, and raw materials consumption and process energy consumption are all bigger.
Summary of the invention
The objective of the invention is to overcome the above-mentioned deficiency of prior art, and a kind of metal band continuous reeling vacuum coating film equipment of modular construction is provided.
Technical scheme of the present invention is: a kind of metal band continuous reeling vacuum coating film equipment of modular construction, comprise that put the volume chamber, rolling chamber and cord wood vacuum chamber, vacuum chamber is respectively ion source bombardment purge chamber, separate gas insulated chamber, vacuum sputtering chamber, intermediate frequency sputtering chamber and sensing chamber, each cord wood vacuum chamber all has independently vacuum system, the end that put the volume chamber is connected with first cord wood vacuum chamber, the other end is connected with the vacuum unit, the rolling chamber is connected with last cord wood vacuum chamber, and the other end is connected with the vacuum unit.
The cord wood vacuum chamber has 13, first and second vacuum chamber are ion source bombardment purge chamber, the 3rd and the tenth vacuum chamber are the separate gas insulated chamber, the 4th to the 9th vacuum chamber is the vacuum sputtering chamber, two d.c. sputtering targets all are housed in each vacuum sputtering chamber, the 11 and the 12 vacuum chamber are the intermediate frequency sputtering chamber, and two intermediate frequency sputtering targets all are housed in each intermediate frequency sputtering chamber, and the 13 vacuum chamber is sensing chamber.
The cord wood vacuum chamber is made up of vacuum chamber body and sealing cover, and vacuum chamber body and sealing cover are connected through the hinge; Above the vacuum chamber body opening is arranged, there are the rectangle of passing through for metal band advance window, joint bolt hole and be used to install the sealing groove of sealing-ring in the side, is tightly connected as a whole by joint bolt and sealing-ring between vacuum chamber and the vacuum chamber.
The vacuum chamber body side surface also is equipped with carrying roller.
The vacuum chamber body side surface also is equipped with the window of advancing and adjusts piece.
Sealing-ring is arranged on the sealing cover.
Sealing member is arranged on the sealing cover.
Viewing window is arranged on the sealing cover.
The present invention compared with prior art has following characteristics:
One, modular construction can be carried out assembly unit of vacuum chamber function and increase and decrease according to processing requirement, help reaching the technology necessary requirement, do the ion source bombardment purge chamber of clean metal band as first and second vacuum chamber, totally also can not increase the ion source bombardment purge chamber that a vacuum chamber is done the clean metal band as cleaning, other functional compartments also can similarly be carried out assembly unit adjustment, this novel structure, simple, practical.
Two, adopt modular construction, under the effect of the carrying roller of whole metal band in each vacuum chamber, become horizontal uniform motion, it is curved to have kept metal band not roll up, do not beat, add at the uniform velocity linear velocity control and the control of high-precision tension, make metal band steady, thereby guarantee the stable of film quality.
Three, metal band is the horizontal linear uniform motion, thereby it is little because of the curved radius of the metal strip roll coil of strip to have captured prior art, easily with technical barriers such as rete damages behind the plated film, saves starting material and energy consumption simultaneously.
Four, adopt modular construction in the whole flow process of preparation metal band, metal band all is under the identical vacuum environment from start to finish, do not reveal atmosphere, guaranteed the consistence of rete color, thickness, stable performance, simultaneously realized that really the metal band of rolling carries out the production of long-time continuous plated film, the efficient height is fit to large-scale industrial production.
Below in conjunction with figure and embodiment detailed structure of the present invention is further described.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the structural representation of vacuum chamber of the present invention;
Fig. 4 is the left view of Fig. 3;
Fig. 5 is the vertical view of Fig. 4.
Embodiment
As shown in Figure 1: a kind of metal band continuous reeling vacuum coating film equipment of modular construction, comprise that rolling up the chamber puts (1), rolling chamber (2) and 13 cord wood vacuum chambers (3), first and second vacuum chamber are ion source bombardment purge chamber (31), the 3rd and the tenth vacuum chamber are separate gas insulated chamber (32), the 4th to the 9th vacuum chamber is vacuum sputtering chamber (33), in each vacuum sputtering chamber (33) two d.c. sputtering targets are housed all, the 11 and the 12 vacuum chamber are intermediate frequency sputtering chamber (34), in each intermediate frequency sputtering chamber (34) two intermediate frequency sputtering targets are housed all, the 13 vacuum chamber is sensing chamber (35), each cord wood vacuum chamber all has independently vacuum system, the end that (1) is put in the volume chamber is connected with first cord wood vacuum chamber, the other end is connected with the vacuum unit, rolling chamber (2) is connected with the 13 cord wood vacuum chamber, and the other end is connected with the vacuum unit.
Shown in Fig. 3-5: the cord wood vacuum chamber is made up of vacuum chamber body (36) and sealing cover (37), and vacuum chamber body (36) is connected by hinge (38) with sealing cover (37); Above the vacuum chamber body (36) opening 361 is arranged, there are the rectangle of passing through for metal band advance window 362, joint bolt hole 363 and be used to install the sealing groove 364 of sealing-ring in the side, it is as a whole to be tightly connected by joint bolt and sealing-ring between vacuum chamber and the vacuum chamber, and carrying roller 365 also is installed in vacuum chamber body (36) side and the window of advancing is adjusted piece 366; Sealing-ring (371), sealing member (372) and viewing window (373) are arranged on the sealing cover (37).
The present invention is outdoor except the retractable volume, the structure of all the other all vacuum chambers all is the same cordwood vacuum chamber, and adopt the cord wood mode to carry out assembly unit, connection, each cordwood vacuum chamber all has independently vacuum system, according to processing requirement, column type directed sputter rotary target in garden can be installed, but also mounting plane target, lonely source target also can be installed, also can carry out function assembly unit and increase and decrease at the vacuum chamber of modular construction according to processing requirement.In a word, this is a kind of novelty, vacuum coating film equipment practical, can be coated with solar selective absorbing coating in metallic coil on band, and the present invention will break import monopolies, make the production domesticization of metal band solar absorbing film.
The present invention is except the cord wood vacuum chamber structure, and its internal structure also has simple and practical function simultaneously.A carrying roller in each vacuum chamber, the rectangle that carrying roller is installed in each vacuum chamber is advanced under the window of window, band keeps can not beating under the interaction of the carrying roller and the window adjustment piece of advancing, metal band is under linear velocity control and the control of high-precision tension at the uniform velocity, via the advance narrow slit of window of each vacuum chamber, be landed on the carrying roller and slowly steadily advance.Therefore, the present invention removes has simple in structure, the characteristics of assembly unit flexibly, also can be coated with various functional membranes on various coiling bands, even film layer, stable performance, and efficient height, suitable large-scale industrial production.
Claims (8)
1. the metal band continuous reeling vacuum coating film equipment of a modular construction, comprise that put the volume chamber, rolling chamber and cord wood vacuum chamber, it is characterized in that vacuum chamber is respectively ion source bombardment purge chamber, separate gas insulated chamber, vacuum sputtering chamber, intermediate frequency sputtering chamber and sensing chamber, each cord wood vacuum chamber all has independently vacuum system, the end that put the volume chamber is connected with first cord wood vacuum chamber, the other end is connected with the vacuum unit, the rolling chamber is connected with last cord wood vacuum chamber, and the other end is connected with the vacuum unit.
2. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 1, it is characterized in that the cord wood vacuum chamber has 13, first and second vacuum chamber are ion source bombardment purge chamber, the 3rd and the tenth vacuum chamber are the separate gas insulated chamber, the 4th to the 9th vacuum chamber is the vacuum sputtering chamber, two d.c. sputtering targets all are housed in each vacuum sputtering chamber, the 11 and the 12 vacuum chamber are the intermediate frequency sputtering chamber, two intermediate frequency sputtering targets all are housed in each intermediate frequency sputtering chamber, and the 13 vacuum chamber is sensing chamber.
3. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 1 and 2 is characterized in that the cord wood vacuum chamber is made up of vacuum chamber body and sealing cover, and vacuum chamber body and sealing cover are connected through the hinge; Above the vacuum chamber body opening is arranged, there are the rectangle of passing through for metal band advance window, joint bolt hole and be used to install the sealing groove of sealing-ring in the side, is tightly connected as a whole by joint bolt and sealing-ring between vacuum chamber and the vacuum chamber.
4. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 3 is characterized in that the vacuum chamber body side surface also is equipped with carrying roller.
5. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 3 is characterized in that the vacuum chamber body side surface also is equipped with the window of advancing and adjusts piece.
6. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 3 is characterized in that sealing and is stamped sealing-ring.
7. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 3 is characterized in that sealing and is stamped sealing member.
8. the metal band continuous reeling vacuum coating film equipment of modular construction according to claim 3 is characterized in that sealing and is stamped viewing window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101934787A CN102230164A (en) | 2011-07-12 | 2011-07-12 | Metal strip continuous winding vacuum film plating equipment with building block type structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101934787A CN102230164A (en) | 2011-07-12 | 2011-07-12 | Metal strip continuous winding vacuum film plating equipment with building block type structure |
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| CN102230164A true CN102230164A (en) | 2011-11-02 |
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| CN2011101934787A Pending CN102230164A (en) | 2011-07-12 | 2011-07-12 | Metal strip continuous winding vacuum film plating equipment with building block type structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853212A (en) * | 2012-09-20 | 2013-01-02 | 赵炳泉 | Split chamber type production line for continuously encapsulating vacuum insulation panels and production method thereof |
| CN108411270A (en) * | 2018-05-11 | 2018-08-17 | 湖南菲尔姆真空设备有限公司 | A kind of vertical silicon chip magnetron sputtering coater |
| CN112853304A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
-
2011
- 2011-07-12 CN CN2011101934787A patent/CN102230164A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853212A (en) * | 2012-09-20 | 2013-01-02 | 赵炳泉 | Split chamber type production line for continuously encapsulating vacuum insulation panels and production method thereof |
| CN108411270A (en) * | 2018-05-11 | 2018-08-17 | 湖南菲尔姆真空设备有限公司 | A kind of vertical silicon chip magnetron sputtering coater |
| CN108411270B (en) * | 2018-05-11 | 2023-03-07 | 湖南众源科技有限公司 | Vertical silicon wafer magnetron sputtering coating machine |
| CN112853304A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
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Application publication date: 20111102 |