CN102229137A - Three-degree-of-freedom piezoelectric drive platform - Google Patents
Three-degree-of-freedom piezoelectric drive platform Download PDFInfo
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- CN102229137A CN102229137A CN2011101382103A CN201110138210A CN102229137A CN 102229137 A CN102229137 A CN 102229137A CN 2011101382103 A CN2011101382103 A CN 2011101382103A CN 201110138210 A CN201110138210 A CN 201110138210A CN 102229137 A CN102229137 A CN 102229137A
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Abstract
The invention discloses a three-degree-of-freedom piezoelectric drive platform, which comprises a base, a long beam, at least two piezoelectric stators, an upper guide track, a middle guide track and a lower guide track. The lower guide track is arranged on the base, the middle guide track is arranged above the lower guide track in a transversely slidable manner, and the upper guide track is arranged above the middle guide track in a longitudinally slidable manner; the long beam is fixed above the base, the top ends of the piezoelectric stators are fixed to the long beam, and the bottom ends of the piezoelectric stators are in contact with a top face of the upper guide track; and the piezoelectric stators comprise a long screw bolt, an upper pressing block, four bent vibrating piezoelectric ceramic plates, two bisection-type electrode sheets, three electrode sheets, two longitudinal vibrating piezoelectric ceramic plates and a lower pressing block, wherein the long screw bolt is only in contact with penetrating holes of a first, a second and a third electrode sheets, so that the upper pressing block and the lower pressing block are communicated with the ground, and the rest penetrating holes of the bisection-type electrode sheets and the piezoelectric ceramic plates are all not in contract with the long screw bolt. The drive platform has improved platform positioning precision.
Description
Technical field
The invention belongs to the piezo mechanical technical field, relate to a kind of driving positioner, particularly a kind of Three Degree Of Freedom Piezoelectric Driving platform.
Background technology
At present, being applied to the driving positioner of every field, mainly is traditional mechanical type transmission, unavoidably has the gap, and positioning accuracy is low, is difficult to reach " Ya Nami " level.And the Piezoelectric Driving platform utilizes the inverse piezoelectric effect of piezoelectric, and these two kinds of mode of oscillations of the extensional vibration of stator and flexural vibrations spatially differ
If these two kinds of vibrations also differ in time
, just can be superimposed as the oval micro breadth oscillation of stator end, produce displacement by the mutual friction mutually of stator and mover.The stator micro breadth oscillation can make guide rail produce micro-displacement, thereby improves the platform positioning accuracy.
Summary of the invention
Technical problem to be solved by this invention is at defective in the aforementioned background art and deficiency, and a kind of Three Degree Of Freedom Piezoelectric Driving platform is provided, and it can improve the platform positioning accuracy.
The present invention is for solving above technical problem, and the technical scheme that is adopted is:
A kind of Three Degree Of Freedom Piezoelectric Driving platform comprises base, Chang Liang, at least two piezoelectric stators, upper rail, middle guide and lower guideways; Lower guideway is located on the base, and middle guide can laterally be located at the top of lower guideway slidably, and upper rail then can be located at the top of middle guide with longitudinal sliding; Long beam is fixed in the top of base, and the top of piezoelectric stator is fixed with long beam, and the bottom contacts with the end face of upper rail; Described piezoelectric stator comprises a stay bolt, a upper holder block, first, two, three, the four curved piezoelectric ceramic pieces that shake, first, two and half formula electrode slices, first, two, three electrode slices, first, two longitudinal vibration piezoelectric ceramic pieces and a lower lock block, stay bolt is cross-under upper holder block successively from top to bottom, the first curved piezoelectric ceramic piece that shakes, first minute half formula electrode slice, the second curved piezoelectric ceramic piece that shakes, first electrode slice, the 3rd curved piezoelectric ceramic piece that shakes, second minute half formula electrode slice, the 4th curved piezoelectric ceramic piece that shakes, second electrode slice, the first longitudinal vibration piezoelectric ceramic piece, the third electrode sheet, second longitudinal vibration piezoelectric ceramic piece and the lower lock block, and stay bolt is only with first, two, the perforation place contact of three electrode slices, make upper holder block, lower lock block is connected with ground, all the other each minute half the formula electrode slice, perforation place of piezoelectric ceramic piece does not all contact with stay bolt;
First and second is bent and shakes piezoelectric ceramic piece as one group of piezoelectric ceramic piece, third and fourth is bent and shakes piezoelectric ceramic piece as one group of piezoelectric ceramic piece, first and second longitudinal vibration piezoelectric ceramic piece is as one group of piezoelectric ceramic piece, wherein one group of extensional vibration that is used to encourage oscillator, other two groups of flexural vibrations that are used to encourage the mutual vertical orientations of oscillator respectively; The elliptic motion of particle in extensional vibration and face of one group of superimposed realization of flexural vibration mode, and the elliptic motion of particle in extensional vibration and another face of the superimposed realization of another group flexural vibration mode.
Above-mentioned driving platform also comprises two side walls, and an end of described two side walls is individually fixed in two minor faces of base, and the other end is fixed with two ends of long beam respectively.
Above-mentioned side wall is inverted T shape, offers at least two screwed holes respectively on two short side symmetric orientation of base, and through hole is offered in then corresponding aforementioned threads hole, the bottom of side wall; The top of described side wall is concaved with groove, and establishes the open-work that traverses this groove in addition; Two ends of long beam groove of respective side wall respectively form protruding wall, and corresponding open-work also forms open-work on this protruding wall.
The middle part of above-mentioned long beam has square structure, and its bottom surface is concaved with square groove, and the number of described square groove is identical with the number of piezoelectric stator, and is uniformly distributed on the square structure, is respectively equipped with a screwed hole in each square groove; One screw from top to bottom passes the screwed hole on the long beam, and a spring is nested with the periphery at this screw, again cushion block is worn aforementioned screw and places in the square groove, the end of described screw and with the stay bolt locking, fix thereby piezoelectric stator is carried out flexibility.
The end face of above-mentioned lower guideway is offered cross slide way, the corresponding groove that forms in the bottom surface of middle guide, thus realize the horizontal relative slip of lower guideway and middle guide.
The end face of above-mentioned middle guide is offered vertical protruding rail, the corresponding groove that forms in the bottom surface of upper rail, thus realize the vertical relative slip of middle guide and upper rail.
After adopting such scheme, the stationary part among the present invention utilizes one group of longitudinal vibration piezoelectric ceramic piece to carry out the mode stack with two groups staggered 90 flexural vibrations piezoelectric ceramic pieces of spending respectively, realizes the elliptic motion of particle in two vertical planes respectively.When stator contacts with guide rail, produce friction, drive the rectilinear motion of guide rail, two interior particle elliptic motions respectively of face can realize the two-freedom rectilinear motion of guide rail.When having at least two identical stators to work simultaneously, the elliptic motion of identical direction of rotation particle can realize the rectilinear motion of guide rail in the parallel surface, and the elliptic motion of coordinating several different stator particles can realize rotatablely moving of guide rail.When at least two mutual co-ordinations of stator, realize X-axis and the rectilinear motion of Y direction and the rotatablely moving of guide rail around central shaft.The stator micro breadth oscillation can make mover guide rail micro-displacement, thereby improves the platform positioning accuracy.
Description of drawings
Fig. 1 is a three-dimensional structure diagram of the present invention;
Fig. 2 is that partial structurtes of the present invention are replenished schematic diagram;
Fig. 3 is the structural representation of side wall among the present invention;
Fig. 4 is the structural representation of upper rail among the present invention;
Fig. 5 is the STRUCTURE DECOMPOSITION schematic diagram of piezoelectric stator among the present invention;
Fig. 6 is the structural representation of middle guide among the present invention;
Fig. 7 is the structural representation of lower guideway among the present invention;
Fig. 8 is the structural representation of base among the present invention;
Fig. 9 is the structural representation of long beam among the present invention;
Figure 10 is the elliptical trajectory schematic diagram that is parallel to the XZ plane that the terminal particle of excitation piezoelectric stator produces among the present invention;
Figure 11 is the elliptical trajectory schematic diagram that is parallel to the YZ plane that the terminal particle of excitation piezoelectric stator produces among the present invention;
Figure 12 (a)-(c) is the rotation schematic diagram of piezoelectric stator among the present invention.
The main element symbol description
7 bases, 71 circular grooves, 72 screwed holes
1 side wall, 11 grooves, 12 open-works
13 through holes, 14 screws
8 long beam 81 square grooves 82 screwed holes
83 open-works, 84 protruding wall 85 bolts
86 nuts, 87 screws, 88 cushion blocks
89 springs
4 piezoelectric stators, 41 stay bolts, 42 upper holder blocks
The 43 curved piezoelectric ceramic piece 46 curved piezoelectric ceramic pieces that shake that shake
45 minutes half formula electrode slice 48 lower lock blocks of 44 electrode slices
47 longitudinal vibration piezoelectric ceramic pieces
3 upper rails, 31 grooves
5 middle guides, 51 protruding rails, 52 grooves
6 lower guideways, 61 guide rails, 62 boss.
The specific embodiment
Below with reference to the drawings and specific embodiments, structure of the present invention and operation principle are elaborated.
As shown in Figure 1, the invention provides a kind of Three Degree Of Freedom Piezoelectric Driving platform, comprise in base 7, two side walls 1, long beam 8, at least two piezoelectric stator 4(present embodiments being provided with 4), upper rail 3, middle guide 5 and lower guideway 6, below will introduce respectively.
As shown in Figure 8, base 7 is a rectangular slab, and its center offers circular groove 71, and respectively offers at least two screwed holes on two relative short side symmetric orientation, is provided with three screwed holes 72 in the present embodiment.These screwed holes 72 are for fixing side wall 1, and it then is that slewing area in order to make lower guideway 6 is bigger that screwed hole 72 is located on the minor face, avoids lower guideway 6 to be subjected to the influence of side wall 1 when rotating.
Again as shown in Figure 3, be the structural representation of side wall 1 among the present invention, described side wall 1 has two, and its integral body is inverted T shape, three screwed holes 72 of the corresponding base 7 in bottom are offered three through holes 13, and side wall 1 are fixed in the side (cooperating shown in Figure 1) of base 7 by screw 2; The top of side wall 1 then is concaved with groove 11, and establishes the open-work 12 that traverses this groove 11 in addition.
As shown in Figure 9, be the structural representation of long beam 8 among the present invention, two ends of described long beam 8 groove 11 of respective side wall 1 respectively form protruding wall 84, and corresponding open-work 12 forms open-work 83 on this protruding wall 84, utilize bolt 85 to pass open- work 12,83 respectively, utilize nut 86 fastening again, as shown in Figure 1; The middle part of long beam 8 has square structure, its bottom surface is concaved with at least two square grooves, and the concrete quantity of described square groove is identical with the quantity of piezoelectric stator 4, is provided with 4 square grooves 81 in the present embodiment, and be uniformly distributed on the square structure, be respectively equipped with a screwed hole 82 in each square groove 81.
As shown in Figure 5, be the structural representation of piezoelectric stator 4 among the present invention, comprise stay bolt 41, upper holder block 42, the curved piezoelectric ceramic piece 43 that shakes, the curved piezoelectric ceramic piece 46 that shakes, divide half formula electrode slice 45, electrode slice 44, longitudinal vibration piezoelectric ceramic piece 47 and lower lock block 48.
As shown in Figure 5, be the structural representation of piezoelectric stator 4 among the present invention, comprise a stay bolt 41, upper holder block 42, first, second, third and fourth curved piezoelectric ceramic piece 43 that shakes, first and second divides half formula electrode slice 45, first, second and third electrode slice 44, first and second longitudinal vibration piezoelectric ceramic piece 47 and a lower lock block 48.During assembling, by subregion shown in Figure 5 and electrode slice block form, with stay bolt 41 cross-under upper holder block 42 successively from top to bottom, the first curved piezoelectric ceramic piece 43 that shakes, first minute half formula electrode slice 45, the second curved piezoelectric ceramic piece 43 that shakes, first electrode slice 44, the 3rd curved piezoelectric ceramic piece 43 that shakes, second minute half formula electrode slice 45, the 4th curved piezoelectric ceramic piece 43 that shakes, second electrode slice 44, the first longitudinal vibration piezoelectric ceramic piece 47, third electrode sheet 44, the second longitudinal vibration piezoelectric ceramic piece 47 and lower lock block 48, wherein, stay bolt 41 contacts with perforation place of each electrode slice 44, make upper holder block 42, lower lock block 48 is connected all the other each electrode slices 45 with ground, piezoelectric ceramic piece 43,47 perforation place does not all contact with stay bolt 41.
As shown in Figure 2, with piezoelectric stator 4 with long beam 8 fixedly the time, at first screw 87 is from top to bottom passed the screwed hole 82 on the long beam 8, then spring 89 is nested with periphery at screw 87, again cushion block 88 is worn screw 87 and place in the square groove 81, the end of described screw 87 and with stay bolt 41 locking, fix thereby piezoelectric stator 4 is carried out flexibility.
Shown in Figure 4 is the structure of upper rail 3 among the present invention, and the bottom surface of described upper rail 3 offers two grooves that are parallel to each other 31.
Shown in Figure 6 is the structure of middle guide 5 among the present invention, and the groove 31 of the corresponding respectively upper rail 3 of the end face of described middle guide 5 is offered protruding rail 51, and the bottom surface then vertically offers two grooves that are parallel to each other 52 with protruding rail 51.
Shown in Figure 7 is the structure of lower guideway 6 among the present invention, the groove 52 of the corresponding respectively middle guide 5 of the end face of described lower guideway 6 is offered guide rail 61, the bottom surface then forms round boss 62 in the center, place the circular groove 71 on the base 7, thereby lower guideway 6 is located on the base 7.
The present invention when mounted, at first use screw 14 that side wall 1 is fixed on the base 7, lower guideway 6, middle guide 5 and upper rail 3 are installed then successively, then long beam 8 is placed on approximate location, unfixing earlier, successively four cushion blocks 88, spring 89 and piezoelectric stator 4 are put in the square groove 81.Follow fixed length beam 8, last adjustment screw 87 makes piezoelectric stator 4 have enough precompressions to contact with upper rail 3.
These two kinds of mode of oscillations of the extensional vibration of piezoelectric stator 4 and flexural vibrations spatially differ
If these two kinds of vibrations also differ in time
, just can be superimposed as the elliptic motion of piezoelectric stator 4 ends.With first, two curved shake piezoelectric ceramic piece 43 as the 3rd group of piezoelectric ceramic piece, the 3rd, four curved shake piezoelectric ceramic piece 43 as second group of piezoelectric ceramic piece, first, two longitudinal vibration piezoelectric ceramic pieces 47 are as first group of piezoelectric ceramic piece, when first group of piezoelectric ceramic piece and second group of piezoelectric ceramic piece voltage signal logical shown in Figure 5, the bending vibration modes of first group of piezoelectric ceramic piece generation longitudinal vibration mode and second group of piezoelectric ceramic piece generation is superimposed, can produce the elliptic motion that is parallel to the XZ plane at particle place, center, piezoelectric stator 4 lower end, can realize the counter motion of particle when as shown in figure 10, exchanging the voltage signal that divides on the half formula electrode slice 45.When first group of piezoelectric ceramic piece and the 3rd group of piezoelectric ceramic piece voltage signal logical shown in Figure 5, the bending vibration modes of first group of piezoelectric ceramic piece generation longitudinal vibration mode and the 3rd group of piezoelectric ceramic piece generation is superimposed, can produce the elliptic motion that is parallel to the YZ plane at particle place, center, stator lower end, can realize the counter motion of particle when as shown in figure 11, exchanging the voltage signal that divides on the half formula electrode slice 45.
Below introduce the co-ordination of piezoelectric stator 4:
When all piezoelectric stators 4 when all to be first group of piezoelectric ceramic pieces with second group of piezoelectric ceramic piece connect corresponding identical voltage signal work, produce the elliptic motion in the same way that is parallel to the XZ plane at particle place, center, piezoelectric stator 4 lower end, piezoelectric stator 4 produces friction with upper rail 3, promote the rectilinear motion of upper rail 3 in X-direction, exchange the voltage signal on each component half formula electrode slice 45 simultaneously, can realize the counter motion of upper rail 3.
When all piezoelectric stators 4 all are that first group of piezoelectric ceramic piece connects corresponding identical voltage signal work with the 3rd group of piezoelectric ceramic piece, produce the elliptic motion in the same way that is parallel to the YZ plane at particle place, center, piezoelectric stator 4 lower end, piezoelectric stator 4 produces friction with upper rail 3, promote the rectilinear motion of middle guide 5 in Y direction, exchange the voltage signal on each component half formula electrode slice 45 simultaneously, can realize the counter motion of middle guide 5.
Introduce rotatablely moving of guide rail below, clockwise turn to example with guide rail, shown in Figure 12 (a)-(c), arrow is represented the frictional force that piezoelectric stator 4 is given workbench among the figure, and some O represents pivot.When having only two piezoelectric stator 4 co-ordinations, shown in Figure 12 (a), excite a stator job, make piezoelectric stator 4 give the frictional force of workbench Y positive direction; Simultaneously, excite another stator work, make piezoelectric stator 4 give the frictional force of workbench Y negative direction, workbench just rotatablely moves.When three piezoelectric stator 4 co-ordinations, shown in Figure 12 (b), excite another stator work, make piezoelectric stator 4 give the frictional force of workbench X positive direction, excite second stator work, make piezoelectric stator 4 give the frictional force of workbench Y negative direction, excite the 3rd stator work, make piezoelectric stator 4 give the frictional force of workbench Y positive direction, workbench just rotates.When four piezoelectric stator 4 co-ordinations, shown in Figure 12 (c), excite first stator work, make piezoelectric stator 4 give the frictional force of workbench Y positive direction, excite second stator work, make piezoelectric stator 4 give the frictional force of workbench X positive direction, excite the 3rd stator work, make piezoelectric stator 4 give the frictional force of workbench Y negative direction, excite the 4th stator work, make piezoelectric stator 4 give the frictional force of workbench X negative direction, workbench just rotates.More multiple pressure electricity stator is as example work.
More than be exactly the operation principle of this Three Degree Of Freedom Piezoelectric Driving platform, this platform can accurate be realized the rectilinear motion of X-axis and Y-axis and around the rotational motion of center circular groove.
In sum, a kind of Three Degree Of Freedom Piezoelectric Driving of the present invention platform, by using at least two identical piezoelectric stators 4, mutual co-ordination between the utilization piezoelectric stator 4, the elliptic motion of identical direction of rotation particle can realize the rectilinear motion of guide rail in the parallel surface, the elliptic motion of coordinating several different stator particles can realize rotatablely moving of guide rail, and then the motion of the three degree of freedom of implementation platform.Owing to be the multiple spot contact, improved the stability of motion and driven power.
Above embodiment only for explanation technological thought of the present invention, can not limit protection scope of the present invention with this, every technological thought that proposes according to the present invention, and any change of being done on the technical scheme basis all falls within the protection domain of the present invention.
Claims (6)
1. a Three Degree Of Freedom Piezoelectric Driving platform is characterized in that: comprise base, Chang Liang, two piezoelectric stators, upper rail, middle guide and lower guideways at least; Lower guideway is located on the base, and middle guide can laterally be located at the top of lower guideway slidably, and upper rail then can be located at the top of middle guide with longitudinal sliding; Long beam is fixed in the top of base, and the top of piezoelectric stator is fixed with long beam, and the bottom contacts with the end face of upper rail;
Described piezoelectric stator comprises a stay bolt, a upper holder block, first, two, three, the four curved piezoelectric ceramic pieces that shake, first, two and half formula electrode slices, first, two, three electrode slices, first, two longitudinal vibration piezoelectric ceramic pieces and a lower lock block, stay bolt is cross-under upper holder block successively from top to bottom, the first curved piezoelectric ceramic piece that shakes, first minute half formula electrode slice, the second curved piezoelectric ceramic piece that shakes, first electrode slice, the 3rd curved piezoelectric ceramic piece that shakes, second minute half formula electrode slice, the 4th curved piezoelectric ceramic piece that shakes, second electrode slice, the first longitudinal vibration piezoelectric ceramic piece, the third electrode sheet, second longitudinal vibration piezoelectric ceramic piece and the lower lock block, and stay bolt is only with first, two, the perforation place contact of three electrode slices, make upper holder block, lower lock block is connected with ground, all the other each minute half the formula electrode slice, perforation place of piezoelectric ceramic piece does not all contact with stay bolt;
First and second is bent and shakes piezoelectric ceramic piece as one group of piezoelectric ceramic piece, third and fourth is bent and shakes piezoelectric ceramic piece as one group of piezoelectric ceramic piece, first and second longitudinal vibration piezoelectric ceramic piece is as one group of piezoelectric ceramic piece, wherein one group of extensional vibration that is used to encourage oscillator, other two groups of flexural vibrations that are used to encourage the mutual vertical orientations of oscillator respectively; The elliptic motion of particle in extensional vibration and face of one group of superimposed realization of flexural vibration mode, and the elliptic motion of particle in extensional vibration and another face of the superimposed realization of another group flexural vibration mode.
2. a kind of Three Degree Of Freedom Piezoelectric Driving platform as claimed in claim 1, it is characterized in that: described driving platform also comprises two side walls, and an end of described two side walls is individually fixed in two minor faces of base, and the other end is fixed with two ends of long beam respectively.
3. a kind of Three Degree Of Freedom Piezoelectric Driving platform as claimed in claim 2, it is characterized in that: described side wall is inverted T shape, offers at least two screwed holes respectively on two short side symmetric orientation of base, and through hole is offered in then corresponding aforementioned threads hole, the bottom of side wall; The top of described side wall is concaved with groove, and establishes the open-work that traverses this groove in addition; Two ends of long beam groove of respective side wall respectively form protruding wall, and corresponding open-work also forms open-work on this protruding wall.
4. a kind of Three Degree Of Freedom Piezoelectric Driving platform as claimed in claim 1, it is characterized in that: the middle part of described long beam has square structure, its bottom surface is concaved with square groove, the number of described square groove is identical with the number of piezoelectric stator, and be uniformly distributed on the square structure, be respectively equipped with a screwed hole in each square groove; One screw from top to bottom passes the screwed hole on the long beam, and a spring is nested with the periphery at this screw, again cushion block is worn aforementioned screw and places in the square groove, the end of described screw and with the stay bolt locking, fix thereby piezoelectric stator is carried out flexibility.
5. a kind of Three Degree Of Freedom Piezoelectric Driving platform as claimed in claim 1, it is characterized in that: the end face of described lower guideway is offered cross slide way, the corresponding groove that forms in the bottom surface of middle guide, thus realize the horizontal relative slip of lower guideway and middle guide.
6. a kind of Three Degree Of Freedom Piezoelectric Driving platform as claimed in claim 1, it is characterized in that: the end face of described middle guide is offered vertical protruding rail, the corresponding groove that forms in the bottom surface of upper rail, thus realize the vertical relative slip of middle guide and upper rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110138210 CN102229137B (en) | 2011-05-26 | 2011-05-26 | Three-degree-of-freedom piezoelectric drive platform |
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|---|---|---|---|
| CN 201110138210 CN102229137B (en) | 2011-05-26 | 2011-05-26 | Three-degree-of-freedom piezoelectric drive platform |
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| CN102229137A true CN102229137A (en) | 2011-11-02 |
| CN102229137B CN102229137B (en) | 2013-06-19 |
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Cited By (5)
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| CN105006255A (en) * | 2015-07-28 | 2015-10-28 | 昆明理工大学 | Three-degree-of-freedom micro-positioning workbench |
| CN108422356A (en) * | 2018-05-29 | 2018-08-21 | 沈阳飞机工业（集团）有限公司 | A kind of multistation model processing work platform |
| CN108705329A (en) * | 2018-08-22 | 2018-10-26 | 金陵科技学院 | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator |
| CN112713801A (en) * | 2021-01-26 | 2021-04-27 | 金陵科技学院 | High-precision linear driving type piezoelectric actuator |
| CN116587277A (en) * | 2023-06-01 | 2023-08-15 | 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) | Inertial piezoelectric driven planar three-degree-of-freedom mobile robot and driving method |
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| CN112713801A (en) * | 2021-01-26 | 2021-04-27 | 金陵科技学院 | High-precision linear driving type piezoelectric actuator |
| CN116587277A (en) * | 2023-06-01 | 2023-08-15 | 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) | Inertial piezoelectric driven planar three-degree-of-freedom mobile robot and driving method |
| CN116587277B (en) * | 2023-06-01 | 2023-12-01 | 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) | Inertial piezoelectric driven planar three-degree-of-freedom mobile robot and driving method |
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| CN102229137B (en) | 2013-06-19 |
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