CN102225534B - Pneumatic control loop for controlling finisher and finishing apparatus - Google Patents
Pneumatic control loop for controlling finisher and finishing apparatus Download PDFInfo
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- CN102225534B CN102225534B CN201110098287.2A CN201110098287A CN102225534B CN 102225534 B CN102225534 B CN 102225534B CN 201110098287 A CN201110098287 A CN 201110098287A CN 102225534 B CN102225534 B CN 102225534B
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- branch road
- valve
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- pneumatic control
- vacuum
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- 238000009966 trimming Methods 0.000 claims description 11
- 230000003584 silencer Effects 0.000 claims description 8
- 230000008901 benefit Effects 0.000 abstract description 8
- 238000005498 polishing Methods 0.000 description 43
- 230000001276 controlling effect Effects 0.000 description 15
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a pneumatic control loop for controlling a finisher and a finishing apparatus. The pneumatic control loop for controlling the finisher comprises a positive pressure control branch, a vacuum branch and a switch valve. The positive pressure control branch comprises a pressure reducing valve connected with an air source, and a first control valve connected with the pressure reducing valve and used for selectively disconnecting and connecting with the positive pressure control branch. The vacuum branch comprises a vacuum generation device. The switch valve is connected with the positive pressure control branch and the vacuum branch respectively and is used for selectively connecting one of the positive pressure control branch and the vacuum branch to the finisher. According to the embodiment of the invention, the pneumatic control loop for controlling the finisher has the advantages of being simple in structure and convenient in control.
Description
Technical field
The present invention relates to wafer polishing technology field, especially relate to a kind of for controlling the Pneumatic control circuit of trimmer and there is its trimming device.
Background technology
In chemical-mechanical polisher, polishing pad in use for some time, along with self wearing and tearing and abrasive dust are to the filling of the micropore of pad interface, the surface of polishing pad becomes level and smooth because forming glazing layer, this makes, and polishing pad stores, the ability of conveying grinding material reduces, and causes material removing rate and polished surface Quality Down.
Therefore, in the prior art, usual employing finishing head is repaired polishing pad, namely by the diamond disk on finishing head, suitable finishing is carried out to polishing pad, the abrasive dust on glazing layer and polishing pad can be removed, improve roughness and the service life of polishing pad, reduce costs, and ensure the uniformity of polishing.
Finishing head drives diamond disk press down and contact with polishing pad, and drives diamond disk to rotate, and diamond disk is contacting with polishing pad and repairing polishing pad in the process rotated.The finishing of polishing pad is not carried out always, but selectively to carry out, when polishing pad uses certain degree, just polishing pad is repaired.Finishing head is not keep in touch state with polishing pad always, but just contact with polishing pad during finishing, so finishing head not only should have the function of stretching motion, keep in touch and disengaging with polishing pad, but also should have when contacting with polishing pad, the function that downforce is controlled.
Summary of the invention
The present invention is intended at least to solve one of technical problem existed in prior art.
For this reason, one object of the present invention is to propose the Pneumatic control circuit for controlling trimmer that a kind of structure is simple, be convenient to control.
Another object of the present invention is to propose a kind of conditioning system with described Pneumatic control circuit.
To achieve these goals, embodiment according to a first aspect of the present invention proposes a kind of Pneumatic control circuit for controlling trimmer, the described Pneumatic control circuit for controlling trimmer comprises over-pressure control branch road, described over-pressure control branch road comprises: pressure-reducing valve, and described pressure-reducing valve is connected with source of the gas; With the first control valve, described first control valve is connected for optionally disconnecting and connecting described over-pressure control branch road with described pressure-reducing valve; Vacuum branch road, described vacuum branch road comprises device for vacuum generation; And transfer valve, described transfer valve is connected with described vacuum branch road for being optionally communicated with described trimmer with a branch road in described vacuum branch road by described over-pressure control branch road with described over-pressure control branch road respectively.
By arranging described over-pressure control branch road for the Pneumatic control circuit that controls trimmer the finishing head of described trimmer is contacted with polishing pad and described polishing pad is repaired according to the embodiment of the present invention, and by arranging described vacuum branch road, thus after finishing terminates, the finishing head of described trimmer and described polishing pad are departed from.According to the embodiment of the present invention for control trimmer Pneumatic control circuit by only arranging a small amount of element, just achieve the control of the finishing head to described trimmer, therefore have structure simple, be convenient to the advantage that controls.
In addition, following additional technical characteristic can be had according to the embodiment of the present invention for the Pneumatic control circuit controlling trimmer:
According to one embodiment of present invention, described device for vacuum generation is vacuum generator, described vacuum generator is connected with described source of the gas, described vacuum branch road also comprises the second control valve, and described second control valve is connected with described vacuum generator for optionally disconnecting and connecting described vacuum branch road.
According to one embodiment of present invention, also comprise silencer, the noise that described silencer is connected for reducing described vacuum generator with described vacuum generator.
According to one embodiment of present invention, described second control valve is 2/2-way valve or two-position three-way valve and is connected between described vacuum generator and described source of the gas.
According to one embodiment of present invention, described pressure-reducing valve is hand reducing pressure valve or electric Proportion valve.
According to one embodiment of present invention, described first control valve is connected between described pressure-reducing valve and described source of the gas.
According to one embodiment of present invention, described first control valve is 2/2-way valve or two-position three-way valve.
According to one embodiment of present invention, described transfer valve is two-position three-way valve or three-position three-way valve.
According to one embodiment of present invention, described device for vacuum generation is vavuum pump.
Embodiment according to a second aspect of the present invention proposes a kind of trimming device, and described trimming device comprises: trimmer, and described trimmer has finishing head, is limited with closed chamber in described finishing head; And Pneumatic control circuit, described Pneumatic control circuit is Pneumatic control circuit described according to a first aspect of the present invention, and the over-pressure control branch road of described Pneumatic control circuit is optionally communicated with to drive described finishing head to move along the direction corresponding with a described branch road with the confined space of described finishing head to a branch road in described vacuum branch road by the described transfer valve of wherein said Pneumatic control circuit.
According to the trimming device of the embodiment of the present invention, by arranging the finishing that Pneumatic control circuit has controlled described polishing pad to described trimmer.According to the trimming device of the embodiment of the present invention, there is the advantage that structure is simple, be convenient to control.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the structural representation of the Pneumatic control circuit for controlling trimmer according to the embodiment of the present invention;
Fig. 2 is the structural representation of the Pneumatic control circuit for controlling trimmer according to the embodiment of the present invention; With
Fig. 3 utilizes the schematic perspective view repaired polishing pad according to the trimmer of the conditioning system of the embodiment of the present invention.
Detailed description of the invention
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " longitudinal direction ", " transverse direction ", " on ", D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end " " interior ", the orientation of the instruction such as " outward " or position relationship be based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, unless otherwise prescribed and limit, it should be noted that, term " installation ", " being connected ", " connection " should be interpreted broadly, such as, can be mechanical connection or electrical connection, also can be the connection of two element internals, can be directly be connected, also indirectly can be connected by intermediary, for the ordinary skill in the art, the concrete meaning of above-mentioned term can be understood as the case may be.
Referring to Fig. 1, the Pneumatic control circuit for controlling trimmer according to the embodiment of the present invention is described.As shown in Figure 1, over-pressure control branch road, vacuum branch road and transfer valve 300 is comprised according to the embodiment of the present invention for the Pneumatic control circuit controlling trimmer.Described over-pressure control branch road comprises pressure-reducing valve 110 and the first control valve 120, and pressure-reducing valve 110 is connected with source of the gas 400, and the first control valve 120 is connected with pressure-reducing valve 110 for optionally disconnecting and connecting described over-pressure control branch road.Described vacuum branch road comprises device for vacuum generation 240.Transfer valve 300 is connected with described vacuum branch road for being optionally communicated with trimmer 500 with a branch road in described vacuum branch road by described over-pressure control branch road with described over-pressure control branch road respectively.
By arranging described over-pressure control branch road for the Pneumatic control circuit that controls trimmer the finishing head 510 of trimmer 500 is contacted with polishing pad and described polishing pad is repaired according to the embodiment of the present invention, and after finishing terminates, make the finishing head 510 of trimmer 500 depart from described polishing pad by arranging described vacuum branch road.Only be provided with a small amount of element according to the embodiment of the present invention for the Pneumatic control circuit controlling trimmer, just achieve the control of the finishing head 510 to trimmer 500, therefore have structure simple, be convenient to the advantage that controls.
In the process that trimmer 500 pairs of polishing pads are repaired, by controlling described over-pressure control branch road, open the first control valve 120 on described over-pressure control branch road, transfer valve 300 is switched to described over-pressure control branch road, is communicated with trimmer 500 to make described over-pressure control branch road.Particularly, transfer valve 300 is switched to described over-pressure control branch road, is communicated with the finishing head 510 of trimmer 500 to make described over-pressure control branch road.Be limited with closed chamber in finishing head 510, in described closed chamber, be limited with confined space 520.Pressure-reducing valve 110 is blown into the gas of certain pressure in the confined space 520 of the finishing head 510 of trimmer 500, finishing head 510 move downward (as shown in arrow A in Fig. 3) contact with the polishing pad on polishing disk 600 and to as described in polishing pad repair.In dressing process, can regulate the air pressure size in confined space 520 by regulating pressure-reducing valve 110, thus change finishing head 510 to the active force of described polishing pad.
After terminating the finishing of described polishing pad, finishing head 510 needs to depart from described polishing pad, causes damage to described polishing pad to avoid excessive finishing.Now by controlling described vacuum branch road, transfer valve 300 is switched to described vacuum branch road, is communicated with trimmer 500 to make described vacuum branch road.Particularly, transfer valve 300 is switched to described vacuum branch road, is communicated with the finishing head 510 of trimmer 500 to make described vacuum branch road.The confined space 520 opening device for vacuum generation 240 pairs of finishing heads 510 vacuumizes.Finishing head 510, under the effect of negative pressure, departs from polishing disk 600 and moves upward (as shown in arrow B in Fig. 3).
In one embodiment of the invention, device for vacuum generation 240 can be vavuum pump.
As shown in Figure 2, in some embodiments of the invention, device for vacuum generation 240 can be vacuum generator 210, and vacuum generator 210 can be connected with source of the gas 400.Described vacuum branch road can also comprise the second control valve 220, second control valve 220 and can be connected with vacuum generator 210 for optionally disconnecting and connecting described vacuum branch road.Wherein, described over-pressure control branch road and described vacuum branch circuit parallel connection.After terminating the finishing of described polishing pad, can open the second control valve 220 on described vacuum branch road, transfer valve 300 can be switched to described vacuum branch road, and the confined space 520 opening vacuum generator 210 pairs of finishing heads 510 vacuumizes.
In one embodiment of the invention, as shown in Figure 2, the first control valve 120 can be connected between pressure-reducing valve 110 and source of the gas 400.In a concrete example of the present invention, the first control valve 120 can be 2/2-way valve or two-position three-way valve.As shown in Figure 2, in one embodiment of the invention, the second control valve 220 can be connected between vacuum generator 210 and source of the gas 400.In a concrete example of the present invention, the second control valve 220 can be 2/2-way valve or two-position three-way valve.
As shown in Figure 2, in examples more of the present invention, the described Pneumatic control circuit for controlling trimmer can also comprise silencer 230, the noise that silencer 230 can be connected for reducing vacuum generator 210 with vacuum generator 210.Particularly, silencer 230 can be micropunch silencer.
In an example of the present invention, pressure-reducing valve 110 can be hand reducing pressure valve or electric Proportion valve.Wherein, described electric Proportion valve accurately can control the size of the gas pressure in the confined space 520 of finishing head 510.That is, by arranging described electric Proportion valve, the size of finishing head 510 to the active force of described polishing pad accurately can be controlled.In another example of the present invention, transfer valve 300 can be two-position three-way valve or three-position three-way valve.
Referring to Fig. 1-3, the trimming device according to the embodiment of the present invention is described.As Figure 1-3, described trimming device comprises trimmer 500 and Pneumatic control circuit.Trimmer has finishing head 510, is limited with closed chamber in finishing head 510.Described Pneumatic control circuit is above-mentioned Pneumatic control circuit.Wherein, the described over-pressure control branch road of described Pneumatic control circuit is optionally communicated with to drive finishing head 510 to move along the direction corresponding with a described branch road with the confined space 520 of finishing head 510 to a branch road in described vacuum branch road by the transfer valve 300 of described Pneumatic control circuit.Wherein, the described corresponding direction of over-pressure control branch road refers to the direction of the polishing pad on polishing disk 600, and the described corresponding direction of vacuum branch road refers to the direction away from the polishing pad on polishing disk 600.
According to the finishing that the trimming device of the embodiment of the present invention has controlled described polishing pad by arranging described Pneumatic control circuit to trimmer 500.According to the trimming device of the embodiment of the present invention, there is the advantage that structure is simple, be convenient to control.
According to the embodiment of the present invention for the Pneumatic control circuit controlling trimmer have structure simple, be convenient to the advantage that controls.
In the description of this description, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present invention and aim, scope of the present invention is by claim and equivalents thereof.
Claims (10)
1. one kind for controlling the Pneumatic control circuit of trimmer, the described Pneumatic control circuit for controlling trimmer comprises over-pressure control branch road, described over-pressure control branch road comprises the first control valve, it is characterized in that, described over-pressure control branch road also comprises pressure-reducing valve, described pressure-reducing valve is connected with source of the gas, and described first control valve is connected with described pressure-reducing valve for optionally disconnecting and connecting described over-pressure control branch road, and the described Pneumatic control circuit for controlling trimmer also comprises:
Vacuum branch road, described vacuum branch road comprises device for vacuum generation; And
Transfer valve, described transfer valve is connected with described vacuum branch road for being optionally communicated with described trimmer with a branch road in described vacuum branch road by described over-pressure control branch road with described over-pressure control branch road respectively.
2. the Pneumatic control circuit for controlling trimmer according to claim 1, it is characterized in that, described device for vacuum generation is vacuum generator, described vacuum generator is connected with described source of the gas, described vacuum branch road also comprises the second control valve, and described second control valve is connected with described vacuum generator for optionally disconnecting and connecting described vacuum branch road.
3. the Pneumatic control circuit for controlling trimmer according to claim 2, is characterized in that, also comprise silencer, the noise that described silencer is connected for reducing described vacuum generator with described vacuum generator.
4. the Pneumatic control circuit for controlling trimmer according to claim 2, is characterized in that, described second control valve is 2/2-way valve or two-position three-way valve and is connected between described vacuum generator and described source of the gas.
5. the Pneumatic control circuit for controlling trimmer according to claim 1, is characterized in that, described pressure-reducing valve is hand reducing pressure valve or electric Proportion valve.
6. the Pneumatic control circuit for controlling trimmer according to claim 1, is characterized in that, described first control valve is connected between described pressure-reducing valve and described source of the gas.
7. Pneumatic control circuit according to claim 1, is characterized in that, described first control valve is 2/2-way valve or two-position three-way valve.
8. the Pneumatic control circuit for controlling trimmer according to any one of claim 1-7, is characterized in that, described transfer valve is two-position three-way valve or three-position three-way valve.
9. the Pneumatic control circuit for controlling trimmer according to claim 1, is characterized in that, described device for vacuum generation is vavuum pump.
10. a trimming device, is characterized in that, comprising:
Trimmer, described trimmer has finishing head, is limited with closed chamber in described finishing head; With
Pneumatic control circuit, described Pneumatic control circuit is the Pneumatic control circuit according to any one of claim 1-9, and the over-pressure control branch road of described Pneumatic control circuit is optionally communicated with to drive described finishing head to move along the direction corresponding with a described branch road with the confined space of described finishing head to a branch road in described vacuum branch road by the described transfer valve of wherein said Pneumatic control circuit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110098287.2A CN102225534B (en) | 2011-04-19 | 2011-04-19 | Pneumatic control loop for controlling finisher and finishing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110098287.2A CN102225534B (en) | 2011-04-19 | 2011-04-19 | Pneumatic control loop for controlling finisher and finishing apparatus |
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| CN102225534A CN102225534A (en) | 2011-10-26 |
| CN102225534B true CN102225534B (en) | 2015-06-24 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411134A (en) * | 2013-07-26 | 2013-11-27 | 潍坊永昱电控科技有限公司 | Air passage for double welding arm and welding/suction nozzle of LED wafer sorting machine |
| CN103411133A (en) * | 2013-07-26 | 2013-11-27 | 潍坊永昱电控科技有限公司 | Air passage system of pick-up suction nozzle of automatic LED wafer sorting machine |
| CN106239371B (en) * | 2016-09-26 | 2018-10-16 | 天津华海清科机电科技有限公司 | Trimmer gas handling system and polishing machine |
| CN106378710B (en) * | 2016-09-28 | 2018-09-04 | 天津华海清科机电科技有限公司 | Trimmer gas handling system and polishing machine |
| CN114719520B (en) * | 2021-01-04 | 2024-03-22 | 海信容声(广东)冰箱有限公司 | Refrigerator with a refrigerator body |
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| EP0689899A1 (en) * | 1994-06-28 | 1996-01-03 | BOTTERO S.p.A. | An assembly for grinding sheets of glass |
| CN2714036Y (en) * | 2004-04-15 | 2005-08-03 | 邱林 | Alternating negative pressure massager |
| CN101116956A (en) * | 2007-08-24 | 2008-02-06 | 湖南大学 | Abrasive wheel double-speed finishing control circuit |
| CN201579701U (en) * | 2009-11-26 | 2010-09-15 | 中国电子科技集团公司第四十五研究所 | Lower pressure control system of CMP polishing pad finisher |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005246550A (en) * | 2004-03-04 | 2005-09-15 | Nikon Corp | Dressing device, machining tool dressed by the dressing device, polishing device, and method for manufacturing device |
| JP2008155299A (en) * | 2006-12-21 | 2008-07-10 | Sharp Corp | Grinding device of liquid crystal panel substrate |
| CN102245350B (en) * | 2008-12-12 | 2016-01-20 | 旭硝子株式会社 | The manufacture method of lapping device and Ginding process and glass plate |
-
2011
- 2011-04-19 CN CN201110098287.2A patent/CN102225534B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0689899A1 (en) * | 1994-06-28 | 1996-01-03 | BOTTERO S.p.A. | An assembly for grinding sheets of glass |
| CN2714036Y (en) * | 2004-04-15 | 2005-08-03 | 邱林 | Alternating negative pressure massager |
| CN101116956A (en) * | 2007-08-24 | 2008-02-06 | 湖南大学 | Abrasive wheel double-speed finishing control circuit |
| CN201579701U (en) * | 2009-11-26 | 2010-09-15 | 中国电子科技集团公司第四十五研究所 | Lower pressure control system of CMP polishing pad finisher |
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| CN102225534A (en) | 2011-10-26 |
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Effective date of registration: 20190618 Address after: 300 350 Building 9, 8 Juxing Road, Haihe Science Park, Jinnan District, Tianjin Patentee after: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Address before: 100084 Haidian District 100084-82 mailbox in Beijing Patentee before: Tsinghua University |
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Address after: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Patentee before: TSINGHUA University |
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