CN103846788B - Improve the buffing machine of polished part suction type - Google Patents
Improve the buffing machine of polished part suction type Download PDFInfo
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- CN103846788B CN103846788B CN201410080721.8A CN201410080721A CN103846788B CN 103846788 B CN103846788 B CN 103846788B CN 201410080721 A CN201410080721 A CN 201410080721A CN 103846788 B CN103846788 B CN 103846788B
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- absorption
- gas circuit
- adsorption tank
- dish
- hole
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention discloses a kind of buffing machine improving polished part suction type, including frame, dish in absorption, absorption lower wall, upper disc driving system, lower disc driving system and pumped vacuum systems, up/down disc driving system includes a central shaft, the bottom of central shaft is connected with absorption up/down dish, closed connection gas circuit is offered in central shaft, central shaft is provided with a rotary pneumatic pipeline connector near bottom position, rotary pneumatic pipeline connector is communicated to closed connection gas circuit, the outer air-path interface of rotary pneumatic pipeline connector, absorption up/down dish offers gas circuit through hole, each air-path interface connects with the gas circuit through hole offered on absorption up/down dish by connecting trachea；The lower/upper side of absorption up/down dish is provided with the cushion pad being close to its lower surface, and the surface of cushion pad offers pass-through type adsorption tank, the lower/upper end alignment adsorption tank of gas circuit through hole.The simple in construction of the present invention, cost are low, it is little, easy to operate to invest, and are advantageously implemented later stage automatization's polishing.
Description
Technical field
The present invention relates to a kind of buffing machine, particularly relate to a kind of buffing machine improving polished part suction type.
Background technology
The plane that the machined glass of current buffing machine is all the upper dish or lower wall that are attached to buffing machine is processed, and the absorption layer by polyester synthesis material is adsorbed in the plane of upper and lower dish and carries out grinding and polishing.The upper and lower dish of existing buffing machine mostly is plane non-porous structure, and not there is Incision Machine's, these buffing machines mainly rely on the laminating that the absorption layer of special substance completes polished glass to fix, the absorption layer back side is bonded with upper and lower dish by glue, binding agent etc., absorption layer front is then made up of many concave groove type apertures being of close texture, and is discharged by air in aperture and namely have Incision Machine's after pressing.After use after a while, polishing powder can penetrate in the aperture in absorption layer front gradually, makes original aperture not have Incision Machine's and can not use, it is necessary to frequently to change.Working eight hours every day by buffing machine and calculate, the absorption layer of polyester synthesis material must be changed once every several days, thus causes that the absorption layer of polyester synthesis material remains high with the cost of consumptive material as a kind of polishing always.
Need to peel off the absorption layer that removal is adsorbed on glass it addition, buffing machine often processes a sheet glass, manually can only little by little blow according to existing technique or the method for infiltration removes, fairly time consuming effort, and affect the automaticity of whole buffing machine.Prior art also has and discloses the mode that the upper dish of buffing machine and a pottery displacement disc are carried out vac sorb connection, but the setting of pottery displacement disc not only increases equipment cost, and the heavier mass of pottery displacement disc, power consumption needed for polishing is greatly increased, polishing wafer is placed on pottery displacement disc not only wastes time and energy, and this hard contact easily causes wafer damage when polishing, quality of finish also cannot ensure；Prior art also has the situation of the vacuum cup absorption workpiece directly adopting perforate, but this vac sorb mode often air-tightness is not good, adsorptive pressure needed for causing vac sorb is excessive, this not only easily causes the deformation of workpiece and affects polishing precision, and easily cause the damage of workpiece equally, and if the impurity such as polishing powder enter in the pore offered on vacuum cup, not only clear up difficulty, needing time serious to change whole vacuum cup, cost is greatly increased.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, it is provided that a kind of simple in construction, cost are low, it is little, easy to operate to invest, be advantageously implemented the buffing machine improving polished part suction type of later stage automatization's polishing.
For solving above-mentioned technical problem, the technical scheme that the present invention proposes is a kind of buffing machine (updraft type) improving polished part suction type, including frame, dish in absorption, absorption lower wall, upper disc driving system, lower disc driving system and pumped vacuum systems, upper disc driving system includes a central shaft, the bottom of central shaft is connected with the upper dish of absorption, closed connection gas circuit is offered in described central shaft, central shaft is provided with a rotary pneumatic pipeline connector near bottom position, the inner of rotary pneumatic pipeline connector is connected with described pumped vacuum systems by closed connection gas circuit, the outer end of rotary pneumatic pipeline connector is provided with multiple air-path interface, in described absorption, dish offers multiple gas circuit through hole, each air-path interface connects by connecting the upper end of the gas circuit through hole offered on the upper dish of trachea and absorption；In described absorption, dish is connected with being close to the cushion pad of its lower surface, and the surface of described cushion pad offers pass-through type adsorption tank (this adsorption tank includes the various pass-through type structures such as hole shape, bar shaped, L-shaped), and align described adsorption tank in the lower end of described gas circuit through hole.
In above-mentioned buffing machine, it is preferred that the plurality of air-path interface is centrosymmetric distribution along the central rotating shaft of described rotary pneumatic pipeline connector.Such air-path interface is provided with and is beneficial to the preferred arrangement coordinating subsequent adsorbtion groove, enables cushion pad uniform stressed, and absorption polished part reaches polishing effect better.The distribution it is furthermore preferred that the central rotating shaft of the upper dish of multiple gas circuit through holes edge absorption that in described absorption, dish is offered is centrosymmetric.Such gas circuit through hole is provided with to be beneficial to dock with rotary pneumatic pipeline connector and be connected in the middle of gas circuit increases on-off valve, and is equally beneficial for coordinating the preferred arrangement of subsequent adsorbtion groove.Being additionally provided with on-off valve it is furthermore preferred that respectively connect on trachea, this makes the buffing machine of the present invention have the model glass that adapts to vary in size and is polished the compatibility of operation；If running into ting model glass, it is only necessary to close the vacuum air-channel outside glass institute coverage, but also be conducive to glass take sheet, when taking sheet, it is only necessary to close negative pressure, access malleation air blowing and just can remove vacuum, taking off polished glass workpiece smoothly, need not manually blow or seep water removes.
In above-mentioned buffing machine, it is preferred that described cushion pad is by adhesive bond mode or is close in absorption on the lower surface of dish by vac sorb mode；Adhesive bond mode is more reliable and more stable；But vac sorb mode is by making the cleaning of cushion pad and changing more operated quickly and conveniently, is advantageously implemented the full-automation of whole buffing machine, also can make full use of the pumped vacuum systems of the supporting setting of buffing machine.When adopting vac sorb mode, described absorption has additional on dish the adsorption hole of adsorption tank described in part misalignment, the air-path interface that this adsorption hole is arranged with described rotary pneumatic pipeline connector outer end by connecting trachea connects, and cushion pad absorption can be fitted in the lower surface of the upper dish of absorption by this adsorption hole.
Conceive as a total technology, the present invention also provides for the another kind of buffing machine (downdraft) improving polished part suction type, including frame, dish in absorption, absorption lower wall, upper disc driving system, lower disc driving system and pumped vacuum systems, lower disc driving system includes a central shaft, the top of central shaft is connected with absorption lower wall, closed connection gas circuit is offered in described central shaft, central shaft is provided with a rotary pneumatic pipeline connector near bottom position, the upper end of rotary pneumatic pipeline connector is connected with the described closed bottom being connected gas circuit, the lower end of rotary pneumatic pipeline connector is connected with described pumped vacuum systems, described closed connection gas circuit top is communicated to the air-path interface offered outside central shaft, described absorption lower wall offers gas circuit through hole, air-path interface connects with the bottom of the gas circuit through hole offered on absorption lower wall by connecting trachea；Described absorption lower wall is arranged over being close to the cushion pad of its upper surface, and the surface of described cushion pad offers pass-through type adsorption tank, and align described adsorption tank in the upper end of described gas circuit through hole.
In above-mentioned downdraft buffing machine, preferably, the bottom of described gas circuit through hole is provided with vacuum chamber (absorption lower wall is connected formation vacuum chamber with sealed bottom), this vacuum chamber is between support and absorption lower wall, and described connection trachea is to be connected with the gas circuit through hole offered on described absorption lower wall by this vacuum chamber.By arranging the vacuum chamber within downdraft buffing machine, the pressure that can make vac sorb is more stable, uniform, and is easy to simplify follow-up air-path interface and connect the setting of trachea.Therefore, in above-mentioned downdraft buffing machine, it is furthermore preferred that only offer an air-path interface outside described central shaft, this air-path interface is connected with described vacuum chamber by a connection trachea.
In above-mentioned downdraft buffing machine, it is preferred that the gas circuit through hole that described absorption lower wall is offered connects with the central rotating shaft of absorption lower wall；Described vacuum chamber is divided into the sub-chamber of multiple vacuum, and these multiple vacuum Zi Qiangcheng centers diffusion way to the periphery is arranged, each vacuum is interconnected between sub-chamber.
Similar with above-mentioned updraft type buffing machine, it is preferred that described cushion pad be can be through adhesive bond mode or is close on the upper surface of absorption lower wall by vac sorb mode；When adopting vac sorb mode, described absorption has additional on dish the adsorption hole of adsorption tank described in part misalignment, this adsorption hole connects with the air-path interface of described rotary pneumatic pipeline connector arranged outside such by connecting trachea or also can directly be communicated to above-mentioned vacuum chamber, and cushion pad absorption can be fitted in the upper surface of absorption lower wall by this adsorption hole.
In above-mentioned updraft type or downdraft buffing machine, it is preferred that described adsorption tank is provided with a plurality of, this plurality of adsorption tank is that center diffusion way to the periphery is arranged on cushion pad surface.This preferred adsorption tank set-up mode advantageously ensures that workpiece glass can consolidate and is adsorbed on the upper dish of absorption or absorption lower wall equably, preferred, described adsorption tank is that similar " time " font is arranged, and one loop of composition after the adsorption tank docking of every two U-shapeds, mutually cut off between the adsorption tank of two U-shapeds of the same circuit.
In above-mentioned updraft type or downdraft buffing machine, preferably, when the lower surface that the upper dish of absorption is close to by described cushion pad is arranged, in described absorption, the lower surface of dish offers the non-pass-through type groove alignd with described adsorption tank, and the lower end of described gas circuit through hole is communicated to this non-pass-through type groove；
When the upper surface that absorption lower wall is close to by described cushion pad is arranged, the upper surface of described absorption lower wall offers the non-pass-through type groove alignd with described adsorption tank, and the upper end of described gas circuit through hole is communicated to this non-pass-through type groove.
In above-mentioned updraft type or downdraft buffing machine, it is preferred that based on the special construction adopted in the present invention or particular form, described cushion pad preferably employs rubber blanket material and makes.Almost without the situation adopting rubber blanket to make in existing cushion pad.
Compared with prior art, it is an advantage of the current invention that:
1. comparing existing buffing machine suction type, the suction type after present invention improvement is not only simple in structure, and improvement cost is very low；
2. the buffing machine after present invention improvement adopts the mode of vac sorb and air blowing, is highly convenient for the load of processed glass and takes sheet, and being easy to being close to and peeling off of cushion pad, it is possible to be greatly simplified artificial；Owing to the buffing machine after improving adopts the mode of vac sorb and air blowing, absorption and the stripping process of polished part and cushion pad are greatly simplified, and solve current buffing machine and manually take a difficult problem for sheet, are conducive to realizing from now on the production automation of buffing machine polishing；
3. the structural design that the present invention is special makes the cushion pad of the present invention be not limited to adopt the polyester synthesis material being exclusively used in the upper dish of bonding absorption or lower wall in prior art, the material that other prices can be adopted less expensive makes (such as rubber blanket) cushion pad, to meet adsorption function, and need not frequently change, the use cost being substantially reduced in buffing machine cushion pad consumptive material；
4. the structural design that the present invention is special makes the cushion pad of the present invention also can undertake other more functional location, for instance can use as cushion pad, is greatly improved the processing quality of polished part polishing.
Accompanying drawing explanation
Fig. 1 is the structural representation of updraft type buffing machine superstructure in the embodiment of the present invention 1.
Fig. 2 be in the embodiment of the present invention 1 updraft type buffing machine superstructure along the sectional view of central shaft.
Fig. 3 is the overall structure schematic diagram of updraft type buffing machine in the embodiment of the present invention 1.
Fig. 4 is the structural representation of downdraft buffing machine infrastructure in the embodiment of the present invention 2.
Fig. 5 be in the embodiment of the present invention 2 downdraft buffing machine infrastructure along the sectional view of central shaft.
Fig. 6 is the plan structure schematic diagram of cushion pad in the embodiment of the present invention.
Fig. 7 is the overall structure schematic diagram of downdraft buffing machine in the embodiment of the present invention 2.
Marginal data:
1, frame；2, dish in absorption；3, absorption lower wall；4, upper disc driving system；5, lower disc driving system；6, central shaft；61, closed connection gas circuit；62, rotary pneumatic pipeline connector；63, air-path interface；64, gas circuit through hole；65, trachea is connected；66, on-off valve；7, cushion pad；71, adsorption tank；8, vacuum chamber；81, the sub-chamber of vacuum；9, support；10, polished part.
Detailed description of the invention
For the ease of understanding the present invention, below in conjunction with Figure of description and preferred embodiment, the present invention is made more comprehensively, describes meticulously, but protection scope of the present invention is not limited to embodiment in detail below.
It should be strongly noted that when a certain element is described as on " be fixed on or be connected to " another element, it can be directly fixing or be connected on another element, it is also possible to be indirectly fixed by other intermediate connectors or be connected on another element.
Unless otherwise defined, the implication that all technical term used hereinafter is generally understood that with those skilled in the art is identical.Technical term used herein is intended merely to the purpose describing specific embodiment, is not intended to limit the scope of the invention.
Embodiment 1:
A kind of improve polished part suction type the updraft type buffing machine of the present invention as shown in FIG. 1 to 3, including frame 1, dish 2 in absorption, absorption lower wall 3, upper disc driving system 4, lower disc driving system 5, recovery system and pumped vacuum systems, upper disc driving system 4 includes a central shaft 6, the bottom of central shaft 6 is connected with the upper dish 2 of absorption, closed connection gas circuit 61 is offered in central shaft 6, central shaft 6 is provided with a rotary pneumatic pipeline connector 62 near bottom position, the inner of rotary pneumatic pipeline connector 62 is connected with outside pumped vacuum systems by closed connection gas circuit 61 and (adopts conventional pumped vacuum systems, not shown), the outer end of rotary pneumatic pipeline connector 62 is provided with multiple air-path interface 63, in absorption, dish 2 offers multiple gas circuit through hole 64, each air-path interface 63 connects by connecting the upper end of the gas circuit through hole 64 offered on the upper dish 2 of trachea 65 and absorption；In absorption, dish 2 is connected with being close to the cushion pad 7 of its lower surface by binding agent bonding method, and the surface of cushion pad 7 offers pass-through type adsorption tank 71, the lower end alignment adsorption tank 71 of gas circuit through hole 64.Cushion pad 7 be arranged below polished part 10.
In the updraft type buffing machine of the present embodiment, multiple air-path interfaces 63 are centrosymmetric distribution along the central rotating shaft of rotary pneumatic pipeline connector 62.The distribution it addition, multiple gas circuit through holes 64 that in absorption, dish 2 is offered central rotating shaft of dish 2 in absorption is centrosymmetric.As in figure 2 it is shown, be additionally provided with on-off valve 66 on each connection trachea 65.
As shown in Figure 6, in the updraft type buffing machine of the present embodiment, adsorption tank 71 is provided with a plurality of, and this plurality of adsorption tank 71 is that center diffusion way to the periphery is arranged on cushion pad 7 surface.Concrete, adsorption tank 71 is arranged in similar " time " font, and one loop of composition after adsorption tank 71 docking of every two U-shapeds, mutually cuts off between the adsorption tank of two U-shapeds of the same circuit.In the present embodiment, cushion pad adopts rubber blanket material to make.
The upper disc driving system 4 of whole buffing machine also includes the conventional components such as lifting cylinder, drive mechanism, lower disc driving system 5 then includes the parts such as corresponding motor, drive mechanism, upper disc driving system 4 and lower disc driving system 5 are mounted in frame 1, and all can by guidance panel control.
In the updraft type buffing machine of above-mentioned the present embodiment, a load of dish 2 in absorption, take sheet operating process and include: first pass through guidance panel and control upper disc driving system 4 and make dish 2 in absorption tilt, it is then turned on pumped vacuum systems, the pass-through type adsorption tank 71 that polished workpiece glass alignment cushion pad 7 surface is offered, and make it fit, then workpiece glass is polished operation, after having polished, makes in absorption dish 2 times just；In control, disc driving system 4 makes dish 2 in absorption again tilt, and lifts by hand or the workpiece glass after polishing fixed by mechanical hand, close negative pressure, access malleation, workpiece glass can be made to depart from by blowing.
Embodiment 2:
A kind of improve polished part suction type the downdraft buffing machine of the present invention as shown in Figure 4 to 7, including frame 1, dish 2 in absorption, absorption lower wall 3, upper disc driving system 4, lower disc driving system 5, recovery system and pumped vacuum systems (referring to Fig. 7), lower disc driving system 5 includes a central shaft 6, the top of central shaft 6 is connected with absorption lower wall 3, closed connection gas circuit 61 is offered in central shaft 6, central shaft 6 is provided with a rotary pneumatic pipeline connector 62 near bottom position, the upper end of rotary pneumatic pipeline connector 62 is connected with the closed bottom being connected gas circuit 61, the lower end of rotary pneumatic pipeline connector 62 is connected with pumped vacuum systems, closed connection gas circuit 61 top is communicated to the air-path interface 63 offered outside central shaft 6, absorption lower wall 3 offers multiple gas circuit through hole 64, air-path interface 63 connects with the bottom of the gas circuit through hole 64 offered on absorption lower wall 3 by connecting trachea 65.Absorption lower wall 3 is arranged over being close to the cushion pad 7 of its upper surface by binding agent bonding method.The surface of cushion pad 7 offers pass-through type adsorption tank 71, the upper end alignment adsorption tank 71 of gas circuit through hole 64.In the present embodiment, volume cushion pad 7 can also be close on the upper surface of absorption lower wall 3 by vac sorb mode；When adopting vac sorb mode, on absorption lower wall 3 except aforesaid multiple gas circuit through hole 64 is set, also have additional the adsorption hole of part misalignment adsorption tank 71, these adsorption holes and gas circuit through hole 64 are structurally without essential distinction, it is passage, and the air-path interface 63 that these adsorption holes are arranged with rotary pneumatic pipeline connector 62 outer end again by connection trachea 65 connects.In such cases, gas circuit through hole 64 and adsorption hole are all communicated to pumped vacuum systems, and gas circuit through hole 64 is directed through in adsorption tank 71 absorption of setting on cushion pad 7 to polish workpiece, and adsorption hole then directly adsorbs cushion pad 7.
In the downdraft buffing machine of the present embodiment, the bottom of gas circuit through hole 64 is provided with vacuum chamber 8, and this vacuum chamber 8 is between support 9 and absorption lower wall 3, and connecting trachea 65 is connected with the gas circuit through hole 64 offered on absorption lower wall 3 by this vacuum chamber 8.In the present embodiment, only offering an air-path interface 63 outside central shaft 6, this air-path interface 63 is connected with vacuum chamber 8 by a connection trachea 65.Absorption multiple gas circuit through holes 64 of offering of lower wall 3 are centrosymmetric distribution along the central rotating shaft of absorption lower wall 3；Vacuum chamber 8 is then divided into the sub-chamber 81 of multiple vacuum, and the sub-Qiang81Cheng center of these multiple vacuum diffusion way to the periphery is arranged, the sub-chamber 81 of each vacuum is interconnected.Be docked and connected below corresponding gas circuit through hole 64 vacuum chamber 8.
As shown in Figure 6, in the updraft type buffing machine of the present embodiment, cushion pad 7 be provided above polished part.Adsorption tank 71 is provided with a plurality of, and this plurality of adsorption tank 71 is that center diffusion way to the periphery is arranged on cushion pad 7 surface.Concrete, adsorption tank 71 is arranged in similar " time " font, and forms same loop after adsorption tank 71 docking of every two U-shapeds, mutually cuts off between the adsorption tank of two U-shapeds of the same circuit.Be docked and connected above corresponding gas circuit through hole 64 the same circuit.In the present embodiment, cushion pad adopts rubber blanket material to make.
The upper disc driving system of whole buffing machine also includes the conventional components such as lifting cylinder, drive mechanism, lower disc driving system 5 then includes the parts such as corresponding motor, drive mechanism, upper disc driving system and lower disc driving system 5 are mounted in frame 1, and all can by guidance panel control.
The load of the downdraft buffing machine of above-mentioned the present embodiment, to take sheet operating process essentially identical with the updraft type buffing machine in embodiment 1.
Claims (7)
1. the buffing machine improving polished part suction type, including frame, dish in absorption, absorption lower wall, upper disc driving system, lower disc driving system and pumped vacuum systems, upper disc driving system includes a central shaft, the bottom of central shaft is connected with the upper dish of absorption, it is characterized in that: in described central shaft, offer closed connection gas circuit, central shaft is provided with a rotary pneumatic pipeline connector near bottom position, the inner of rotary pneumatic pipeline connector is connected with described pumped vacuum systems by closed connection gas circuit, the outer end of rotary pneumatic pipeline connector is provided with multiple air-path interface, in described absorption, dish offers multiple gas circuit through hole, each air-path interface connects by connecting the upper end of the gas circuit through hole offered on the upper dish of trachea and absorption；In described absorption, dish is connected with being close to the cushion pad of its lower surface, and the surface of described cushion pad offers pass-through type adsorption tank, and align described adsorption tank in the lower end of described gas circuit through hole；Described adsorption tank is provided with a plurality of, and this plurality of adsorption tank is that center diffusion way to the periphery is arranged on cushion pad surface；In described absorption, the lower surface of dish offers the non-pass-through type groove alignd with described adsorption tank, and the lower end of described gas circuit through hole is communicated to this non-pass-through type groove；Described adsorption tank is that similar " time " font is arranged, and one loop of composition after the adsorption tank docking of every two U-shapeds, mutually cuts off between the adsorption tank of two U-shapeds of the same circuit；Described cushion pad adopts rubber blanket material to make.
2. buffing machine according to claim 1, it is characterised in that: the plurality of air-path interface is centrosymmetric distribution along the central rotating shaft of described rotary pneumatic pipeline connector；Multiple gas circuit through holes that in described absorption, dish is offered are centrosymmetric distribution along the central rotating shaft of the upper dish of absorption；Each trachea that connects is provided with on-off valve.
3. buffing machine according to claim 1 and 2, it is characterised in that: described cushion pad is by adhesive bond mode or is close in absorption on the lower surface of dish by vac sorb mode；
When adopting vac sorb mode, described absorption having additional on dish the adsorption hole of adsorption tank described in part misalignment, the air-path interface that described adsorption hole is arranged with described rotary pneumatic pipeline connector outer end by connecting trachea connects.
4. the buffing machine improving polished part suction type, including frame, dish in absorption, absorption lower wall, upper disc driving system, lower disc driving system and pumped vacuum systems, lower disc driving system includes a central shaft, the top of central shaft is connected with absorption lower wall, it is characterized in that: in described central shaft, offer closed connection gas circuit, central shaft is provided with a rotary pneumatic pipeline connector near bottom position, the upper end of rotary pneumatic pipeline connector is connected with the described closed bottom being connected gas circuit, the lower end of rotary pneumatic pipeline connector is connected with described pumped vacuum systems, described closed connection gas circuit top is communicated to the air-path interface offered outside central shaft, this air-path interface connects with the bottom of the gas circuit through hole offered on absorption lower wall by connecting trachea；Described absorption lower wall is arranged over being close to the cushion pad of its upper surface, and the surface of described cushion pad offers pass-through type adsorption tank, and align described adsorption tank in the upper end of described gas circuit through hole；Described adsorption tank is provided with a plurality of, and this plurality of adsorption tank is that center diffusion way to the periphery is arranged on cushion pad surface；The upper surface of described absorption lower wall offers the non-pass-through type groove alignd with described adsorption tank, and the upper end of described gas circuit through hole is communicated to this non-pass-through type groove；Described adsorption tank is that similar " time " font is arranged, and one loop of composition after the adsorption tank docking of every two U-shapeds, mutually cuts off between the adsorption tank of two U-shapeds of the same circuit；Described cushion pad adopts rubber blanket material to make.
5. buffing machine according to claim 4, it is characterized in that: the bottom of described gas circuit through hole is provided with vacuum chamber, this vacuum chamber is between support and absorption lower wall, and described connection trachea is to be connected with the gas circuit through hole offered on described absorption lower wall by this vacuum chamber.
6. buffing machine according to claim 5, it is characterised in that: only offering an air-path interface outside described central shaft, this air-path interface is connected with described vacuum chamber by a connection trachea.
7. the buffing machine according to claim 5 or 6, it is characterised in that: described vacuum chamber is divided into the sub-chamber of multiple vacuum, and these multiple vacuum Zi Qiangcheng centers diffusion way to the periphery is arranged, each vacuum is interconnected between sub-chamber.
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| CN201410080721.8A CN103846788B (en) | 2014-03-07 | 2014-03-07 | Improve the buffing machine of polished part suction type |
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| CN201410080721.8A CN103846788B (en) | 2014-03-07 | 2014-03-07 | Improve the buffing machine of polished part suction type |
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| CN106217089B (en) * | 2016-08-15 | 2018-05-01 | 中国工程物理研究院化工材料研究所 | It is machined the gas-water separation structure of clamping vacuum cup |
| CN107097151B (en) * | 2017-07-04 | 2023-09-22 | 大连桑姆泰克工业部件有限公司 | Polishing solution pipeline system and upper disc and lower disc grinding mechanism |
| CN110170912B (en) * | 2019-05-30 | 2024-03-15 | 湖南永创机电设备有限公司 | Vacuum adsorption and blowing discharging device for polishing glass substrate |
| CN110339980A (en) * | 2019-08-13 | 2019-10-18 | 昆山希盟自动化科技有限公司 | The face IC glue is coated with microscope carrier mechanism |
| CN113427393B (en) * | 2021-07-23 | 2022-06-03 | 长江存储科技有限责任公司 | Sucker device and chemical mechanical polishing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09262758A (en) * | 1996-03-28 | 1997-10-07 | Toshiba Corp | Polishing level block, and polishing device using the same |
| JPH11156697A (en) * | 1997-11-27 | 1999-06-15 | Toshiba Mach Co Ltd | Surface polishing device and method |
| US6503131B1 (en) * | 2001-08-16 | 2003-01-07 | Applied Materials, Inc. | Integrated platen assembly for a chemical mechanical planarization system |
| JP4505822B2 (en) * | 2003-04-24 | 2010-07-21 | 株式会社ニコン | Polishing apparatus, polishing method, and device manufacturing method using the polishing apparatus |
| JP5408789B2 (en) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | Float glass polishing system |
| CN203726328U (en) * | 2014-03-07 | 2014-07-23 | 湖南永创机电设备有限公司 | Polishing machine with improved polishing member adsorption mode |
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