CN102200586A - Heavy ion beam diagnosis device for single particle test and related measurement method - Google Patents
Heavy ion beam diagnosis device for single particle test and related measurement method Download PDFInfo
- Publication number
- CN102200586A CN102200586A CN2011100517635A CN201110051763A CN102200586A CN 102200586 A CN102200586 A CN 102200586A CN 2011100517635 A CN2011100517635 A CN 2011100517635A CN 201110051763 A CN201110051763 A CN 201110051763A CN 102200586 A CN102200586 A CN 102200586A
- Authority
- CN
- China
- Prior art keywords
- sample
- detector
- heavy ion
- ion beam
- fluence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 78
- 239000002245 particle Substances 0.000 title claims abstract description 44
- 238000012360 testing method Methods 0.000 title claims abstract description 16
- 238000000691 measurement method Methods 0.000 title abstract description 6
- 238000003745 diagnosis Methods 0.000 title description 2
- 238000005259 measurement Methods 0.000 claims abstract description 15
- 239000000523 sample Substances 0.000 claims description 118
- 238000004347 surface barrier Methods 0.000 claims description 49
- 238000002474 experimental method Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 11
- 238000013341 scale-up Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 5
- 238000012935 Averaging Methods 0.000 claims description 3
- 230000003321 amplification Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 238000004590 computer program Methods 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000013068 control sample Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 8
- 238000011156 evaluation Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 25
- 238000013461 design Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000012631 diagnostic technique Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 208000010086 Hypertelorism Diseases 0.000 description 1
- 206010020771 Hypertelorism of orbit Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Images
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Abstract
The invention belongs to a single event effect resistance performance evaluation test technology of a device, and particularly relates to a single event test heavy ion beam diagnostic device and a related measurement method. The single-particle test heavy ion beam diagnostic device is arranged in a sample irradiation target chamber, a monitor group consisting of a plurality of paths of detectors is arranged at a beam inlet of the sample irradiation target chamber, and the detectors are distributed around an inlet diaphragm; a sample detector group consisting of a plurality of paths of detectors is arranged on a central sample rack of the sample irradiation target chamber, and the sample rack is connected with a sample movement control system and can drive the sample detector group to move in the horizontal and vertical directions; and each path of detector of the monitor group and the sample detector group is respectively connected with the computer through an electronic circuit. The invention reduces the error of irradiation fluence measurement and can realize the measurement of the size and uniformity of heavy ion beam spot of the accelerator.
Description
Technical field
The invention belongs to device anti-single particle effect Performance Evaluation experimental technique, be specifically related to a kind of single particle experiment heavy ion beam current diagnostic device and relevant measurement method.
Background technology
Beijing HI-13 tandem accelerator is the at present domestic ground simulation test accelerator that star is used with device anti-single particle effect Performance Evaluation that is very suitable for carrying out.Ten years is utilized Q3D magnetic spectrometer equipment always in the past, has carried out a large amount of stars device anti-single particle effect Performance Evaluation ground simulation test (hereinafter to be referred as single particle experiment) on tandem accelerator.
Single particle experiment usually needs accurately to obtain the heavy ion fluence of irradiation sample, simultaneously according to the single particle effect situation, the fluence rate of irradiation sample is also had certain area requirement.Single particle experiment all has certain requirement to the heavy ion beam spot size and the irradiation beams spot homogeneity of irradiation sample in addition.Therefore, when utilizing the accelerator heavy ion to carry out single particle experiment, need to be grasped the heavy ion beam current diagnostic techniques.
Based on Q3D magnetic spectrometer equipment, original heavy ion beam current diagnostic device is placed two Au Si surface barrier detectors (MON and SDA) at little target chamber and probe chamber respectively, when line arrives probe chamber, the Au Si surface barrier detector SDA of mobile detector chamber, it is moved to the beam center position, measure simultaneously with the Au Si surface barrier detector MON (monitor) of little target chamber, obtain fluence scale-up factor K.
N in the formula
SDAUnit area (the cm that is measured for the SDA detector
2) counting, N
MONUnit area (the cm that is measured for the MON detector
2) counting.
In irradiation sample, supervise the line fluence then, can control and obtain sample irradiation fluence by counter just the pushing away of fluence scale-up factor K with Au Si surface barrier detector MON (monitor).
N
sample＝K×N
MON′
N in the formula
MON 'Unit area (the cm that is measured for monitor MON detector in irradiation sample
2) counting, N
SampleBe sample unit area (cm
2) the irradiation fluence.
The shortcoming that this sample irradiation fluence measuring method exists is two Au Si surface barrier detector MON and SDA hypertelorism, add because the relation of angle, two place's fluence distribution situations are very different, MON that detects and SDA counting often differ greatly, and cause sample irradiation fluence to measure and have big statistical error.Show that by long-term statistics sample irradiation fluence relative statistic error reaches 29% to test figure.Influence the accurate measurement of sample irradiation fluence.
What the test of original device heavy ion beam spot fluence distributing homogeneity was taked is the off-line measurement method, obtain the distributed intelligence of heavy ion fluence by the irradiation dose film, after the test again the dosage film to irradiation carry out the image scanning analysis, obtain beam spot size and fluence distributed intelligence.The shortcoming that this method exists is to obtain heavy ion fluence distributing homogeneity in real time, has only off-line analysis to obtain afterwards.In addition, the graphical analysis of dosage film is also only rested on the qualitative analysis basis at present, also do not grasp quantitative analysis tech.
Summary of the invention
The objective of the invention is to provides a kind of single particle experiment heavy ion beam current diagnostic device and relevant measurement method, to improve the accuracy that sample irradiation fluence is measured at the defective of prior art and the needs of single particle experiment development.
Technical scheme of the present invention is as follows: a kind of single particle experiment heavy ion beam current diagnostic device, be arranged in the sample irradiation target chamber, be provided with the monitor group of forming by the multiplexed detection device in the line porch of sample irradiation target chamber, detector be distributed in inlet light hurdle around; Be provided with the sample photodetector group of being made up of the multiplexed detection device on the center specimen holder of sample irradiation target chamber, specimen holder is connected with the sample mobile control system, and it is mobile in the horizontal and vertical directions to drive the sample photodetector group; Every road detector of described monitor group and sample photodetector group is connected with computing machine by electronics circuit respectively.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, the detector of described monitor group and sample photodetector group is Au Si surface barrier detector.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, the electronics circuit of described every road Au Si surface barrier detector comprises prime amplifier and amplifier, after the ion fluence information signal amplification that detects, send into timer conter and count, timer conter is imported computer program with count results.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, described monitor group comprises four road Au Si surface barrier detectors, be evenly distributed on inlet light hurdle around, the spacing of the spacing of Au Si surface barrier detector and left and right sides Au Si surface barrier detector equates up and down.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, the preceding collimating aperture diameter of every road Au Si surface barrier detector of described monitor group is Φ 3mm, up and down with left and right sides Au Si surface barrier detector difference spacing 96mm.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, described sample photodetector group comprises five road Au Si surface barrier detectors, is the center with a detector, all the other four detectors are in its peripheral evenly setting.
Further, aforesaid single particle experiment heavy ion beam current diagnostic device, wherein, the preceding collimating aperture diameter of every road Au Si surface barrier detector of described sample photodetector group is Φ 3mm, and the spacing of No. four detectors that the periphery is adjacent is 50mm.
A kind of method of utilizing above-mentioned single particle experiment heavy ion beam current diagnostic device to carry out the measurement of sample irradiation fluence comprises the steps:
Step 1, monitor group and sample photodetector group all are arranged in the sample irradiation target chamber, the Au Si surface barrier detector of monitor group be distributed in inlet light hurdle around, arbitrary Au Si surface barrier detector S1 in the sample photodetector group is moved to beam center by the sample mobile control system, an optional Au Si surface barrier detector M1 in the monitor group, simultaneously M1, S1 are surveyed counting, obtain fluence scale-up factor K by following formula
In the formula, N
S1The counting of the unit area that is measured for the S1 detector, N
M1The counting of the unit area that is measured for the M1 detector;
Step 2 is removed detector S1, and irradiation sample uses detector M1 supervision line fluence simultaneously, pushes away and obtain sample irradiation fluence by fluence scale-up factor K by following formula is counter,
N
sample＝K×N
M1′
In the formula, N
M1 'The counting of the unit area that is measured for M1 detector in irradiation sample, N
SampleIrradiation fluence for the sample unit area.
A kind ofly utilize above-mentioned single particle experiment heavy ion beam current diagnostic device to carry out the method for heavy ion beam spot size and uniformity measurement, carry out level and vertical scan direction at the irradiation sample place along beam profile by arbitrary Au Si surface barrier detector in the sample mobile control system control sample photodetector group, survey the heavy ion fluence by this detector simultaneously, determine the size of heavy ion beam spot according to the situation of change of the shift position coordinate of detector and heavy ion fluence, when the heavy ion fluence takes place greater than 50% variation, determine that the detector current location is in the edge of heavy ion beam spot.
Further, aforesaid method of carrying out heavy ion beam spot size and uniformity measurement, wherein, after the size of determining the heavy ion beam spot, can obtain to restraint the spot center, by the sample mobile control system central detector of sample photodetector group is moved to bundle spot center, utilize No. five detectors while counterweight ion beam spot to carry out the scanning survey of fixed intervals then, behind the end of scan data that measured in the sweep limit are handled, each scanning position point is surveyed counting deduct all scanning position points and surveys behind the mean value of counting divided by this mean value, the Two dimensional Distribution situation of spot fluence distribution heterogeneity and position relation is restrainted in acquisition.
Further, aforesaid method of carrying out heavy ion beam spot size and uniformity measurement, wherein, in irradiation sample, utilize monitor group halved tie simultaneously spot fluence to monitor, obtain the counting of each road Au Si surface barrier detector of monitor group respectively, by averaging, each count value is subtracted remove mean value behind the mean value then, obtain the each point relative deviation, whether real-time judge heavy ion beam spot fluence homogeneity satisfies testing requirements in view of the above, realizes the inhomogeneity real-time oversight of heavy ion beam spot.
Beneficial effect of the present invention is as follows: the present invention all is arranged on the detector of monitor group and sample photodetector group in the sample irradiation target chamber, the monitor group is apart from sample place detector set tens centimetres distance only, two place's fluence distribution situation basically identicals have reduced the error that the irradiation fluence is measured; The detector that the sample mobile control system can be controlled in the sample photodetector group flexibly carries out moving of level and vertical direction, thereby accelerator heavy ion beam spot size and inhomogeneity measurement have been realized, and can the needs of single particle experiment development have been satisfied by monitor group real-time oversight accelerator heavy ion large beam spot homogeneity.
Description of drawings
Fig. 1 is the structural representation of single particle experiment heavy ion beam current diagnostic device of the present invention;
Fig. 2 is provided with structural representation for the monitor group;
Fig. 3 is provided with structural representation for the sample photodetector group;
Fig. 4 is the electronics circuit theory diagram that is connected with detector;
Fig. 5 is heteropical X-Y scheme for line distributes.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in detail.
In order to adapt to the single particle experiment development need, the special-purpose irradiation devices of heavy ion single particle effect in 2009 are tested two Rooms at tandem accelerator and are built up.This covering device designs at heavy ion single particle experiment characteristics, and (5cm * 5cm) and bundle spot fluence distribution heterogeneity are less than ± 10% can to obtain the required heavy ion large beam spot of irradiation device.Along with building up of device, new requirement has been proposed also the heavy ion beam current diagnostic techniques.Adapt to information such as the required ion fluence of irradiation sample, fluence rate, bundle spot size, irradiation fluence homogeneity in order to obtain single-particle, need to solve the heavy ion beam current diagnostic techniques, set up the heavy ion beam current diagnostic device.
Based on the special-purpose irradiation devices of Beijing HI-13 tandem accelerator heavy ion single particle effect, in this device sample irradiation target chamber, build single particle experiment heavy ion beam current diagnostic device, its basic structure is as Figure 1-3.Device mainly is made of sample irradiation target chamber line porch monitor group 1, irradiation sample place detector set 2, sample mobile control system 3 three parts.
Inboard at the line of sample irradiation target chamber 4 inlet 5 is provided with the monitor group of being made up of the multichannel Au Si surface barrier detector 1, Au Si surface barrier detector be distributed in inlet light hurdle around, as shown in Figure 2, the monitor group comprises four road Au Si surface barrier detectors 7 (being designated as M1 to M4 respectively) in the present embodiment, be evenly distributed on inlet light hurdle 8 (be of a size of 60mm * 60mm) around, the spacing of the spacing of Au Si surface barrier detector and left and right sides Au Si surface barrier detector equates up and down.In the present embodiment, the preceding collimating aperture diameter of every road Au Si surface barrier detector is Φ 3mm, up and down with left and right sides detector difference spacing 96mm.The ion fluence information that every road detector (as monitor) is detected forms signal, after prime amplifier and amplifier amplification, send into timer conter PXI 6602 and count, by the Labview computer program, count results is presented at computer screen intuitively in real time then.The electronics circuit that every road Au Si surface barrier detector connects as shown in Figure 4.
The detector of monitor group is not limited to Au Si surface barrier detector among the present invention, and other semiconductor detector also can be considered to use, but weighs from economy and applicability, the practicality of coupling apparatus, and Au Si surface barrier detector is best selection.In addition, the arrangement form of Au Si surface barrier detector around inlet light hurdle also can design arbitrarily, and the distribution mode that present embodiment provided can be considered a kind of optimal design scheme.
Be provided with the sample photodetector group of being made up of the multichannel Au Si surface barrier detector 2 on the center specimen holder 6 of sample irradiation target chamber 4, specimen holder 6 is connected with sample mobile control system 3, and it is mobile in the horizontal and vertical directions to drive sample photodetector group 2.Sample photodetector group 2 comprises five road Au Si surface barrier detectors 9 (being designated as S1 to S5 respectively) in the present embodiment, is the center with a detector, and all the other four detectors are in its peripheral evenly setting.The preceding collimating aperture diameter of every road Au Si surface barrier detector of sample photodetector group is Φ 3mm, and the spacing of No. four detectors that the periphery is adjacent is 50mm.Every road detector electronics circuit is identical with the electronics circuit of above-mentioned monitor group detector, as shown in Figure 4.
Situation with the monitor group is similar, the detector of sample photodetector group is not limited to Au Si surface barrier detector among the present invention, and other semiconductor detector also can be considered to use, but weighs from economy and applicability, the practicality of coupling apparatus, Au Si surface barrier detector are best selections.In addition, the arrangement form of Au Si surface barrier detector also can design arbitrarily, and the arrangement that present embodiment provided can be considered a kind of optimal design scheme.
Sample irradiation target chamber bottom is provided with a sample mobile control system 3, and this system's may command invests detector set 2 edges and beam profile level, vertical moving on the specimen holder 6, thereby realizes the scanning to irradiation sample place heavy ion beam spot.Sample mobile control system 3 adopts general leading screw adjustment structure, comprise a vertical leading screw and a horizontal screw lead, specimen holder 6 is connected with vertical leading screw by web member, vertically the leading screw bottom is connected with horizontal screw lead by web member, vertically leading screw and horizontal screw lead pass through driven by motor respectively, thereby realize level, the vertical moving of specimen holder, this mechanism is conspicuous common practise for those skilled in the art.In addition,, a rotating mechanism can also be set, specimen holder can be rotated a certain angle in surface level in horizontal screw lead mechanism bottom.
This device can be realized heavy ion beam current diagnosis in the single particle experiment.Concrete grammar is as follows:
1) detection of sample irradiation fluence and fluence rate
Use arbitrary detector (for example S1) in the sample photodetector group, by the sample mobile control system this detector is moved to beam center (irradiation sample place), an optional monitor (for example M1) is surveyed counting to M1, S1 simultaneously in the monitor group, obtains fluence scale-up factor K.
In the formula, N
S1Unit area (the cm that is measured for the S1 detector
2) counting, N
M1Unit area (the cm that is measured for the M1 detector
2) counting.
Remove S1 then, irradiation sample uses M1 supervision line fluence simultaneously, can control and obtain sample irradiation fluence by counter just the pushing away of fluence scale-up factor K.
N
sample＝K×N
M1′
In the formula, N
M1 'Unit area (the cm that is measured for monitor M1 detector in irradiation sample
2) counting, N
SampleBe sample unit area (cm
2) the irradiation fluence.
The advantage of this method is that monitor group and sample place detector set all are arranged in the sample irradiation target chamber, and the monitor group is apart from sample place detector set 50cm (from expanding electron gun point 800cm) only, and two place's fluence distribution situation basically identicals have reduced the measuring system error.
In last sample irradiation is measured,, can obtain sample irradiation fluence rate by measuring exposure time.
Carry out being described as follows of embodiment with concrete data:
Utilize the 140MeV's of tandem accelerator generation
35The Cl heavy ion beam obtains the required bundle spot of single particle experiment by the special-purpose irradiation devices of heavy ion single particle effect, and this bundle spot is carried out the measurement of fluence, fluence rate.
This detector of S1 is moved to beam center (irradiation sample place), simultaneously M1, S1 are surveyed counting, obtain unit area (cm
2) M1, S1 the counting be respectively 5610,5520.Therefore fluence scale-up factor K is:
Remove S1 then, irradiation sample uses M1 supervision line fluence simultaneously, obtains unit area (cm
2) the M1 counting is 6000, so unit area (cm
2) sample irradiation fluence is:
N
sample＝K×N
M1′＝6000*0.98＝5880(ions/cm
2)
In last notes sample irradiation is measured, mutual radiation 300 seconds, so sample irradiation fluence rate is:
5880/300＝19.6(ions/cm
2/sec)
2) measurement of heavy ion beam spot size
At the irradiation sample place, scan along beam profile by mobile example place detector set, survey the heavy ion fluence simultaneously, can determine heavy ion beam spot size according to the change situation of heavy ion fluence.Present embodiment is set when heavy ion fluence generation during greater than 50% variation, determines that the detector current location is in the edge of heavy ion beam spot.
Carry out being described as follows of embodiment with concrete data:
Carry out horizontal scanning by mobile example place detector set along beam profile, find that when S5 moves to coordinate be (60, during 0) with (60,0), the heavy ion fluence that detects is respectively 5500 and 5320, with (0,0) position heavy ion fluence 5430 is basic identical, moves to (65,0) and (65,0) time, the heavy ion fluence that detects is respectively 230 and 450.But determined level direction heavy ion beam spot size is 120mm in view of the above, equally the beam profile vertical direction is scanned, and the result obtains vertical direction heavy ion beam spot size and also is 120mm.Therefore can determine that this heavy ion beam spot size is 120mm * 120mm.
3) the inhomogeneity measurement of heavy ion beam spot
In the single particle experiment on the testing sample plane each point heavy ion irradiation fluence should be consistent, heavy ion beam spot homogeneity can directly have influence on the degree of accuracy that sample irradiation fluence is measured to a certain extent.We can realize the inhomogeneity measurement of heavy ion beam spot by the heavy ion beam current diagnostic device of setting up, and concrete grammar is as follows:
In above-mentioned definite heavy ion beam spot size, we have also just obtained bundle spot center, and the central detector S5 of sample place detector set is moved to bundle spot center, and this position coordinates is designated as (0,0).Utilize No. 5 detector counterweight ion beam spots to carry out scanning survey then, can obtain heavy ion beam spot fluence distributing homogeneity information.
Carry out being described as follows of embodiment with concrete data:
In above-mentioned definite heavy ion beam spot size, we have also just obtained bundle spot center, and S5 have been moved to bundle spot centre bit coordinate position and be designated as (0,0).Utilize No. 5 detector counterweight ion beam spots to carry out scanning survey then, sweep spacing 10mm, each scanning position test duration is 300 seconds.Behind the end of scan experimental data that 150mm * interscan of 150mm scope is measured is handled.Each scanning position point is surveyed counting to be deducted all scanning position points and surveys behind the mean value of counting divided by this mean value, obtain the two-dimensional distribution (as shown in Figure 5) of bundle spot fluence distribution heterogeneity and position relation, data are the relative deviation of each point measured value among the figure.
Calculate bundle spot area 75mm * 75mm, the interior mean value of 50mm * 50mm scope respectively according to following computing formula
Standard deviation, obtaining out relative standard deviation is line distribution heterogeneity index.
In the above-mentioned formula, k is the sum of all location points in the selected bundle spot area, N
iThe counting of surveying for any one location point,
Mean value for the counting of all location points in the bundle spot area.
According to above analytical calculation, can know that in that 50mm * 50mm internal beam current distribution statistics error is less than 4.5%, i.e. line distribution heterogeneity is less than 4.5%.Can know also from Fig. 5 that simultaneously the heterogeneity that distributes at small size scope internal beam current is much smaller than this numerical value.
4) the inhomogeneity real-time oversight of heavy ion beam spot
In irradiation sample, utilize monitor group halved tie simultaneously spot fluence to monitor, the counting according to each monitor measures just can obtain the homogeneity of heavy ion beam spot in real time, thereby has realized the inhomogeneity real-time oversight of heavy ion beam spot.
Carry out being described as follows of embodiment with concrete data:
In irradiation sample, utilize monitor group halved tie simultaneously spot fluence to monitor, obtaining each monitor counting respectively is 5620,5537,5580,5726, by averaging, remove mean value after then each count value being subtracted mean value, obtain the each point relative deviation and be respectively 0.1%, 1.4%, 0.6%, 2.0%.Show in real time by computer programming from calculating, but therefore in view of the above real-time judge heavy ion beam spot fluence homogeneity whether satisfy testing requirements, thereby realized the inhomogeneity real-time oversight of heavy ion beam spot.The rational deviation range that the present invention sets is ± 10%, that is to say, when the relative deviation of each point changes in 10% scope, can determine that heavy ion beam spot fluence homogeneity satisfies testing requirements, if surpass 10% variation range, just be considered as heavy ion beam spot fluence homogeneity and can not have satisfied testing requirements.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technology thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (11)
1. a single particle experiment heavy ion beam current diagnostic device is arranged in the sample irradiation target chamber, it is characterized in that: be provided with the monitor group of forming by the multiplexed detection device in the line porch of sample irradiation target chamber, detector be distributed in inlet light hurdle around; Be provided with the sample photodetector group of being made up of the multiplexed detection device on the center specimen holder of sample irradiation target chamber, specimen holder is connected with the sample mobile control system, and it is mobile in the horizontal and vertical directions to drive the sample photodetector group; Every road detector of described monitor group and sample photodetector group is connected with computing machine by electronics circuit respectively.
2. single particle experiment heavy ion beam current diagnostic device as claimed in claim 1 is characterized in that: the detector of described monitor group and sample photodetector group is Au Si surface barrier detector.
3. single particle experiment heavy ion beam current diagnostic device as claimed in claim 2, it is characterized in that: the electronics circuit of described every road Au Si surface barrier detector comprises prime amplifier and amplifier, after the ion fluence information signal amplification that detects, send into timer conter and count, timer conter is imported computer program with count results.
4. as claim 2 or 3 described single particle experiment heavy ion beam current diagnostic devices, it is characterized in that: described monitor group comprises four road Au Si surface barrier detectors, be evenly distributed on inlet light hurdle around, the spacing of the spacing of Au Si surface barrier detector and left and right sides Au Si surface barrier detector equates up and down.
5. single particle experiment heavy ion beam current diagnostic device as claimed in claim 4 is characterized in that: the preceding collimating aperture diameter of every road Au Si surface barrier detector of described monitor group is Φ 3mm, up and down with left and right sides Au Si surface barrier detector difference spacing 96mm.
6. as claim 2 or 3 described single particle experiment heavy ion beam current diagnostic devices, it is characterized in that: described sample photodetector group comprises five road Au Si surface barrier detectors, is the center with a detector, and all the other four detectors are in its peripheral evenly setting.
7. single particle experiment heavy ion beam current diagnostic device as claimed in claim 6 is characterized in that: the preceding collimating aperture diameter of every road Au Si surface barrier detector of described sample photodetector group is Φ 3mm, and the spacing of No. four detectors that the periphery is adjacent is 50mm.
8. one kind is utilized single particle experiment heavy ion beam current diagnostic device to carry out the method that sample irradiation fluence is measured, and comprises the steps:
Step 1, monitor group and sample photodetector group all are arranged in the sample irradiation target chamber, the Au Si surface barrier detector of monitor group be distributed in inlet light hurdle around, arbitrary Au Si surface barrier detector S1 in the sample photodetector group is moved to beam center by the sample mobile control system, an optional Au Si surface barrier detector M1 in the monitor group, simultaneously M1, S1 are surveyed counting, obtain fluence scale-up factor K by following formula
In the formula, N
S1The counting of the unit area that is measured for the S1 detector, N
M1The counting of the unit area that is measured for the M1 detector;
Step 2 is removed detector S1, and irradiation sample uses detector M1 supervision line fluence simultaneously, pushes away and obtain sample irradiation fluence by fluence scale-up factor K by following formula is counter,
N
sample＝K×N
M1′
In the formula, N
M1 'The counting of the unit area that is measured for M1 detector in irradiation sample, N
SampleIrradiation fluence for the sample unit area.
9. method of utilizing single particle experiment heavy ion beam current diagnostic device to carry out heavy ion beam spot size and uniformity measurement, it is characterized in that: carry out level and vertical scan direction at the irradiation sample place along beam profile by arbitrary Au Si surface barrier detector in the sample mobile control system control sample photodetector group, survey the heavy ion fluence by this detector simultaneously, determine the size of heavy ion beam spot according to the situation of change of the shift position coordinate of detector and heavy ion fluence, when the heavy ion fluence takes place greater than 50% variation, determine that the detector current location is in the edge of heavy ion beam spot.
10. method of carrying out heavy ion beam spot size and uniformity measurement as claimed in claim 9, it is characterized in that: after the size of determining the heavy ion beam spot, can obtain to restraint the spot center, by the sample mobile control system central detector of sample photodetector group is moved to bundle spot center, utilize No. five detectors while counterweight ion beam spot to carry out the scanning survey of fixed intervals then, behind the end of scan data that measured in the sweep limit are handled, each scanning position point is surveyed counting deduct all scanning position points and surveys behind the mean value of counting divided by this mean value, the Two dimensional Distribution situation of spot fluence distribution heterogeneity and position relation is restrainted in acquisition.
11. as claim 9 or 10 described methods of carrying out heavy ion beam spot size and uniformity measurement, it is characterized in that: in irradiation sample, utilize monitor group halved tie simultaneously spot fluence to monitor, obtain the counting of each road Au Si surface barrier detector of monitor group respectively, by averaging, remove mean value after then each count value being subtracted mean value, obtain the each point relative deviation, whether real-time judge heavy ion beam spot fluence homogeneity satisfies testing requirements in view of the above, realizes the inhomogeneity real-time oversight of heavy ion beam spot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100517635A CN102200586A (en) | 2011-03-04 | 2011-03-04 | Heavy ion beam diagnosis device for single particle test and related measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100517635A CN102200586A (en) | 2011-03-04 | 2011-03-04 | Heavy ion beam diagnosis device for single particle test and related measurement method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102200586A true CN102200586A (en) | 2011-09-28 |
Family
ID=44661418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100517635A Pending CN102200586A (en) | 2011-03-04 | 2011-03-04 | Heavy ion beam diagnosis device for single particle test and related measurement method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102200586A (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102522352A (en) * | 2011-12-22 | 2012-06-27 | 上海宏力半导体制造有限公司 | Detection apparatus for stability of ion beam and detection method thereof |
| CN103091698A (en) * | 2013-01-23 | 2013-05-08 | 哈尔滨工业大学 | Test method of proton/electronic synthetical irradiation beam fluence |
| CN103207405A (en) * | 2013-05-03 | 2013-07-17 | 中国科学院上海应用物理研究所 | Beam cluster parameter measuring system for low-energy heavy ions and frequency resonance energy selection energy measuring method |
| CN103558865A (en) * | 2013-10-24 | 2014-02-05 | 中国原子能科学研究院 | Heavy-ion single-particle test sample layout and moving control method and system |
| CN103984002A (en) * | 2014-04-28 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | System and method for collecting section signal of H+ ions containing mixed ion currents |
| CN104166152A (en) * | 2014-08-18 | 2014-11-26 | 中国科学院上海应用物理研究所 | Self-triggering method for detecting abnormal beams of particle accelerator |
| CN104267426A (en) * | 2014-09-04 | 2015-01-07 | 北京大学 | Electronic beam spot measuring method and device |
| CN106546894A (en) * | 2016-10-09 | 2017-03-29 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for the method |
| CN106793447A (en) * | 2016-12-30 | 2017-05-31 | 中国科学技术大学 | A kind of fast two-dimensional Uniform Irradiation scan method |
| CN107144871A (en) * | 2017-05-08 | 2017-09-08 | 北京市化工职业病防治院 | Utilize the method for the track morphology of optical microscope inspection solid state nuclear track detector |
| CN107204211A (en) * | 2016-03-18 | 2017-09-26 | 国核（北京）科学技术研究院有限公司 | The Elevated temperature irradiation target chamber of temperature-controllable |
| CN108828647A (en) * | 2018-05-30 | 2018-11-16 | 中国原子能科学研究院 | It is a kind of for measuring the device of low energy ion beam streamer dose rate and uniformity |
| CN105738940B (en) * | 2016-04-26 | 2019-02-05 | 西北核技术研究所 | A kind of detector for beam profile uniformity on-line measurement |
| CN112562882A (en) * | 2020-12-07 | 2021-03-26 | 中国原子能科学研究院 | Heavy ion microbeam irradiation device, system and control method |
| CN112666596A (en) * | 2020-12-17 | 2021-04-16 | 中国工程物理研究院激光聚变研究中心 | Laser fusion neutron irradiation effect testing device |
| CN112946397A (en) * | 2021-02-09 | 2021-06-11 | 中国科学院近代物理研究所 | Air high-temperature test box for heavy ion irradiation of electronic device |
| CN113093261A (en) * | 2021-04-02 | 2021-07-09 | 中国科学院近代物理研究所 | Beam diagnosis interlocking system for beam terminal of heavy ion treatment device |
| CN113406686A (en) * | 2021-06-16 | 2021-09-17 | 中国科学院近代物理研究所 | Ion beam three-dimensional dose distribution detection device and method |
| CN113484899A (en) * | 2021-06-29 | 2021-10-08 | 中国科学院近代物理研究所 | Filament target and device for detecting beam corona and section in front of target |
| CN114488262A (en) * | 2022-01-19 | 2022-05-13 | 西北核技术研究所 | Detector for measuring beam energy of accelerator and calibration and test method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1952640A (en) * | 2006-11-03 | 2007-04-25 | 中国科学院光电技术研究所 | Second harmonic conversion efficiency testing device for centrosymmetry material micro & nano structure device |
| CN202102117U (en) * | 2011-03-04 | 2012-01-04 | 中国原子能科学研究院 | Single particle test heavy ion beam diagnostic device |
-
2011
- 2011-03-04 CN CN2011100517635A patent/CN102200586A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1952640A (en) * | 2006-11-03 | 2007-04-25 | 中国科学院光电技术研究所 | Second harmonic conversion efficiency testing device for centrosymmetry material micro & nano structure device |
| CN202102117U (en) * | 2011-03-04 | 2012-01-04 | 中国原子能科学研究院 | Single particle test heavy ion beam diagnostic device |
Non-Patent Citations (2)
| Title |
|---|
| 沈东军 等: "重离子单粒子效应专用辐照装置的束斑均匀性测试", 《中国原子能科学研究院年报》, 31 December 2009 (2009-12-31) * |
| 沈东军 等: "重离子单粒子翻转截面测量不确定度浅析", 《中国原子能科学研究院年报》, 31 December 2009 (2009-12-31) * |
Cited By (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102522352B (en) * | 2011-12-22 | 2016-01-27 | 上海华虹宏力半导体制造有限公司 | The checkout gear of apparatus for stability of ion beam and detection method |
| CN102522352A (en) * | 2011-12-22 | 2012-06-27 | 上海宏力半导体制造有限公司 | Detection apparatus for stability of ion beam and detection method thereof |
| CN103091698A (en) * | 2013-01-23 | 2013-05-08 | 哈尔滨工业大学 | Test method of proton/electronic synthetical irradiation beam fluence |
| CN103091698B (en) * | 2013-01-23 | 2015-08-19 | 哈尔滨工业大学 | The detection method of one kind of proton/electronics synthesis irradiation beams streamer amount |
| CN103207405A (en) * | 2013-05-03 | 2013-07-17 | 中国科学院上海应用物理研究所 | Beam cluster parameter measuring system for low-energy heavy ions and frequency resonance energy selection energy measuring method |
| CN103558865A (en) * | 2013-10-24 | 2014-02-05 | 中国原子能科学研究院 | Heavy-ion single-particle test sample layout and moving control method and system |
| CN103558865B (en) * | 2013-10-24 | 2016-07-20 | 中国原子能科学研究院 | A kind of heavy ion single-particle test sample layout and control method for movement and system |
| CN103984002A (en) * | 2014-04-28 | 2014-08-13 | 中国工程物理研究院流体物理研究所 | System and method for collecting section signal of H+ ions containing mixed ion currents |
| CN104166152A (en) * | 2014-08-18 | 2014-11-26 | 中国科学院上海应用物理研究所 | Self-triggering method for detecting abnormal beams of particle accelerator |
| CN104166152B (en) * | 2014-08-18 | 2016-07-06 | 中国科学院上海应用物理研究所 | A kind of detect particle accelerator line abnormal from triggering method |
| CN104267426A (en) * | 2014-09-04 | 2015-01-07 | 北京大学 | Electronic beam spot measuring method and device |
| CN104267426B (en) * | 2014-09-04 | 2017-04-19 | 北京大学软件与微电子学院无锡产学研合作教育基地 | Electronic beam spot measuring method and device |
| CN107204211A (en) * | 2016-03-18 | 2017-09-26 | 国核（北京）科学技术研究院有限公司 | The Elevated temperature irradiation target chamber of temperature-controllable |
| CN105738940B (en) * | 2016-04-26 | 2019-02-05 | 西北核技术研究所 | A kind of detector for beam profile uniformity on-line measurement |
| CN106546894A (en) * | 2016-10-09 | 2017-03-29 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for the method |
| CN106546894B (en) * | 2016-10-09 | 2019-05-24 | 中国原子能科学研究院 | A kind of heavy ion microbeam localization method and the chip for this method |
| CN106793447A (en) * | 2016-12-30 | 2017-05-31 | 中国科学技术大学 | A kind of fast two-dimensional Uniform Irradiation scan method |
| CN106793447B (en) * | 2016-12-30 | 2019-10-25 | 中国科学技术大学 | A kind of fast two-dimensional Uniform Irradiation scan method |
| CN107144871A (en) * | 2017-05-08 | 2017-09-08 | 北京市化工职业病防治院 | Utilize the method for the track morphology of optical microscope inspection solid state nuclear track detector |
| CN107144871B (en) * | 2017-05-08 | 2019-05-14 | 北京市化工职业病防治院 | Utilize the method for the track morphology of optical microscope inspection solid state nuclear track detector |
| CN108828647A (en) * | 2018-05-30 | 2018-11-16 | 中国原子能科学研究院 | It is a kind of for measuring the device of low energy ion beam streamer dose rate and uniformity |
| CN108828647B (en) * | 2018-05-30 | 2020-11-10 | 中国原子能科学研究院 | Device for measuring low-energy ion beam fluence rate and uniformity |
| CN112562882A (en) * | 2020-12-07 | 2021-03-26 | 中国原子能科学研究院 | Heavy ion microbeam irradiation device, system and control method |
| CN112666596A (en) * | 2020-12-17 | 2021-04-16 | 中国工程物理研究院激光聚变研究中心 | Laser fusion neutron irradiation effect testing device |
| CN112666596B (en) * | 2020-12-17 | 2022-03-22 | 中国工程物理研究院激光聚变研究中心 | Laser fusion neutron irradiation effect testing device |
| CN112946397A (en) * | 2021-02-09 | 2021-06-11 | 中国科学院近代物理研究所 | Air high-temperature test box for heavy ion irradiation of electronic device |
| CN112946397B (en) * | 2021-02-09 | 2024-05-07 | 中国科学院近代物理研究所 | Air high-temperature test box for heavy ion irradiation of electronic device |
| CN113093261A (en) * | 2021-04-02 | 2021-07-09 | 中国科学院近代物理研究所 | Beam diagnosis interlocking system for beam terminal of heavy ion treatment device |
| CN113406686A (en) * | 2021-06-16 | 2021-09-17 | 中国科学院近代物理研究所 | Ion beam three-dimensional dose distribution detection device and method |
| CN113484899A (en) * | 2021-06-29 | 2021-10-08 | 中国科学院近代物理研究所 | Filament target and device for detecting beam corona and section in front of target |
| CN113484899B (en) * | 2021-06-29 | 2022-06-28 | 中国科学院近代物理研究所 | Wire target and device for detecting toe-in halo and section of target |
| CN114488262A (en) * | 2022-01-19 | 2022-05-13 | 西北核技术研究所 | Detector for measuring beam energy of accelerator and calibration and test method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102200586A (en) | Heavy ion beam diagnosis device for single particle test and related measurement method | |
| CN105116435B (en) | A kind of ion thruster beam testing method based on faraday probe array | |
| KR102208231B1 (en) | Muon detector array stations | |
| CN106226759B (en) | A kind of tracking Stabilily parameter device and method | |
| CN1333466A (en) | Semiconductor device test method and apparatus | |
| CN105403581B (en) | The radionetric survey method of film thickness distribution and its uniformity | |
| US20100181470A1 (en) | Ion beam angle calibration and emittance measurement system for ribbon beams | |
| CN103292748A (en) | Multi-substrate combining detection method based on laser measurement | |
| CN104280562B (en) | Automatic analysing apparatus | |
| Attié et al. | Characterization of resistive Micromegas detectors for the upgrade of the T2K Near Detector Time Projection Chambers | |
| CN202102117U (en) | Single particle test heavy ion beam diagnostic device | |
| CN105593967A (en) | Method of reducing the thickness of target sample | |
| WO2020175654A1 (en) | Nondestructive testing system and nondestructive testing method | |
| JP2022516141A (en) | A method for performing non-destructive inspection of the uniformity of crystal orientation inside the diffractive device and the work. | |
| CN108445525A (en) | Face pixelated array detector, radiation detecting system and radiation field detection method | |
| CN111077561B (en) | Residual gas charged particle beam monitoring device and method thereof | |
| US7875860B2 (en) | Charged particle beam profile measurement | |
| CN103018318A (en) | Measuring method for distribution coefficient of zircon microelement and zircon magma microelement | |
| CN104338244A (en) | Beam monitor system and particle beam irradiation system | |
| CN107607464A (en) | The on-line monitoring method and hollow cathode of a kind of hollow cathode corrosion rate touch the preparation method for holding the pole life-span | |
| Antonuccio et al. | The muon portal project: design and construction of a scanning portal based on muon tomography | |
| Peng et al. | Measurements of the targeting accuracy of the Gray Laboratory charged-particle microbeam | |
| CN100382272C (en) | Semiconductor device tester | |
| CN206420798U (en) | A kind of three-dimensional calibration measurement apparatus for neutron diffraction stress analysis | |
| CN110879409B (en) | Detector for monitoring density distribution of wide charged particle beams in real time |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110928 |