CN1952640A - Frequency multiplication conversion efficiency testing device for centrosymmetric material micro-nano structure device - Google Patents
Frequency multiplication conversion efficiency testing device for centrosymmetric material micro-nano structure device Download PDFInfo
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Abstract
A frequency doubling conversion efficiency testing device for a centrosymmetric material micro-nano structure device comprises a laser, a collimation and beam expanding system, a polaroid, an incident diaphragm, an alignment microscope, a product bearing table, a horizontal angle rotating table, a multi-dimensional adjusting table, a frequency doubling optical filter, a shielding cover, a laser power meter and a large base table, wherein laser emitted by the laser passes through the collimation and beam expanding system, the polaroid and the incident diaphragm, the alignment microscope observes the frequency doubling optical filter after being adjusted and aligned by the horizontal angle rotating table and the multi-dimensional adjusting table to emit a tested sample, the frequency doubling optical filter is subjected to frequency doubling by the tested sample, the laser power meter receives and measures and displays a light intensity value of the frequency doubling optical filter, and the frequency doubling conversion efficiency is obtained by comparing the light intensity value detected when the tested sample and the optical filter are not placed. The position of the measured sample is rapidly adjusted by the multidimensional adjusting platform and the horizontal angle rotating platform, the adjustment is convenient, the measurement precision is high, and the application and popularization are easy.
Description
Technical field
The present invention is a kind of centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, belongs to nonlinear device conversion efficiency technical field of measurement and test.
Background technology
Continuous progress along with optical lasers technology and microstructure process technology, the device for non-linear optical that not only is applied to fields such as laser freuqency doubling constantly produces, be used widely, and produced the device for non-linear optical that constitutes with the centro-symmetry dielectric micro-nano structure, also can produce frequency-doubled effect.The appearance that has the optical non-linear effect micro-nano structure in the centro-symmetry dielectric, making can be integrated with other photonic device non-linear components such as frequency transformations on same linear material substrate, as laser instrument, waveguide and detector or the like, form full optical information loop integrated mix with photoelectron integrated etc., it is little, in light weight and but high-performance micro-system that function is very complete satisfies application demand to form volume.Yet, common optically nonlinear crystal device conversion efficiency test can not be surveyed the device that is made of the centro-symmetry dielectric micro-nano structure, can not be with the nonlinear optical coefficients analyzer by measuring nonlinear optical coefficients, and relevant conductance etc., converse conversion efficiency.For research produces nonlinear frequency transformation efficiently with the centro-symmetry dielectric micro-nano structure, overcome the deficiency of above-mentioned technology, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation has been invented in research.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome above-mentioned the deficiencies in the prior art, provide a kind of simple in structure, practical centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, tested structure devices is placed on the monitor station, measures conversion efficiency through adjusting to observe.
Technical solution of the present invention is: centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, it is characterized in that comprising: laser instrument, collimating and beam expanding system, polaroid, the incident light hurdle, aligming microscope, object placement desk, sample, the horizontal angle universal stage, multidimensional adjusting table, the frequency multiplication optical filter, block cover, the laser powermeter probe, laser powermeter and big base frame, laser instrument, collimating and beam expanding system, polaroid, the incident light hurdle, place and be placed on the big base frame successively, aligming microscope vertically is placed on the top of sample (7) light entrance, is used to observe the alignment case that laser is injected the sample inlet; Multidimensional adjusting table, laser powermeter probe and laser powermeter are placed on the big base frame successively, fixedly the sample object placement desk of sample is placed on the horizontal angle universal stage, the horizontal angle universal stage is placed on the multidimensional adjusting table, the frequency multiplication optical filter is positioned at the front end of laser powermeter probe, between laser instrument and laser powermeter, be covered with and block cover, with the influence that prevents that external veiling glare from measuring light intensity signal; The laser that laser instrument penetrates is earlier by the collimating and beam expanding system collimator and extender, then by polaroid and incident light hurdle, observe by the aligming microscope of vertically placing again, adjustment by horizontal angle universal stage and multidimensional adjusting table is aimed at, inject sample by the light beam that the incident light hurdle sends, inject the laser powermeter probe through the frequency doubled light after the sample frequency multiplication by the optical filtering of frequency multiplication optical filter, be converted to electric signal after the probe reception, send into laser powermeter, demonstrate the light intensity magnitude of double-frequency laser by the laser powermeter measurement, the light intensity value that detects when not placing sample with optical filter is compared again, can obtain frequency-doubling conversion efficiency.
The laser beam that described this device laser instrument penetrates, before this by the collimating and beam expanding system collimator and extender that comprises focus lamp and collimating mirror, laser beam focuses on the focus O of focus lamp earlier by focus lamp
1Point, the scioptics front focus also is positioned at O again
1The collimating mirror of point makes laser beam obtain expanding bundle and collimation, obtaining expanding bundle and collimated laser light bundle adjusts by polaroid and rotation, make the desired direction of polarization direction and sample consistent, inject the alignment case of sample entrance port is observed by the infrared aligming microscope of seeing of the replaceable service band of vertical placement by the laser beam on incident light hurdle, position deviation is adjusted by horizontal angle universal stage and multidimensional adjusting table, the object space refractive power small reflector of aligming microscope is with 120 ° of placements, do not stop that laser beam injects sample.
Described this proving installation sample pack into object placement desk and adjust the position after, before formal survey measurements, hide and block cover, with the influence that prevents that external veiling glare from measuring light intensity signal, frequency doubled light is vertically injected the frequency multiplication optical filter, receive by the laser powermeter probe, and the frequency multiplication optical filter is by frequency multiplication optical filter one, frequency multiplication optical filter two and frequency multiplication optical filter three are formed, frequency multiplication optical filter one is that an incident light is semi-transparent, all the other wave bands comprise the optical filter that the frequency doubled light wave band is all-trans, frequency multiplication optical filter two is a pair of incident light anti-optical filters of frequency doubled light half that are all-trans, and frequency multiplication optical filter three is be all-trans optical filters of frequency doubled light full impregnated of a pair of incident light.
Described this proving installation object placement desk is made up of the little pressing plate of sample, sample backing plate, support plate, is installed on the T oblique crank Z of horizontal angle universal stage the center O of sample
4Contour with laser beam axis and parallel.
Described proving installation horizontal angle universal stage is by steel ball one, the axle bed cover, horizontal retaining clip, vertical retaining clip, steel ball two, the T oblique crank Z, the axle head plate washer, snap lock collar plate washer, the snap lock collar, locking bed, the horizontal angle scale, the locking handwheel is formed, T oblique crank Z lower surface puts end face by steel ball one and axle bed and is connected, also be connected with axle bed cover inner cylinder face by steel ball two, the T oblique crank Z can be rolled with respect to axle bed interplanting horizontal angle beta to be rotated, the horizontal angle scale that is enclosed within axle bed cover external cylindrical surface is placed on going up of multidimensional adjusting table and adjusts on the plate, be carved with index line on the disk external cylindrical surface of T oblique crank Z, the rotation of sample can be read rotation β angle number, the axle bed cover is fixed on to be adjusted on the plate, the rotation of T oblique crank Z is adjusted the back by the collar of locking handwheel rotary tightening snap lock, embraces the lower end shaft locking of T oblique crank Z.
Described this proving installation multidimensional adjusting table is adjusted handwheel by the back, back lengthy motion picture spring hinge, base V-arrangement lower guideway, the V-arrangement upper rail, preceding lengthy motion picture spring hinge, adjust mounting, raise the bed rearrangement frame, the preceding handwheel of adjusting, X is to adjusting handwheel, adjusting little seat and extension spring forms, raise the bed rearrangement chord position in the top of adjusting mounting, adjust the top that mounting is positioned at the V-arrangement upper rail, the preceding handwheel of adjusting is positioned on the rise bed rearrangement frame, and with the threaded hole engagement of raising the bed rearrangement frame, back adjustment handwheel passes the macropore that raises the bed rearrangement frame and is positioned on the adjustment mounting, and with adjust the engagement of mounting threaded hole, raising the bed rearrangement frame is connected with the adjustment mounting by back lengthy motion picture spring hinge, adjusting mounting is connected with the V-arrangement upper rail by preceding lengthy motion picture spring hinge, the V-arrangement upper rail is connected with base V-arrangement lower guideway by V-way, and can in base V-arrangement lower guideway, move along the guide rail direction, base V-arrangement lower guideway is placed on the big base frame, the upper surface that raises the bed rearrangement frame is connected with the axle bed cover of horizontal angle universal stage, and lower surface is connected with locking bed, adjusting handwheel before the rotation can make rise bed rearrangement frame do the rotation of two directions up and down around back lengthy motion picture spring hinge, handwheel is adjusted in the rotation back can make the adjustment mounting do to rotate up and down around the preceding lengthy motion picture spring hinge that is connected with its side, adjusting little seat is fixed on the base V-arrangement lower guideway, extension spring one end hauls adjusts little seat, the other end hauls the V-arrangement upper rail, rotation X can make the V-arrangement upper rail make the X both forward and reverse directions to the adjustment handwheel and move, in a word, reaching multidimensional adjusting table can do the rotation of α angle to sample, can make XY simultaneously again and adjust to moving.
Described this proving installation incident light hurdle leads to light mouth section, be to be up and down a knife-edge otch, the hot spot cross section was a rectangle rectangle ABCD when laser passed the center on incident light hurdle, sample laser entrance port is A ' B ' C ' D ' rectangle rectangle, penetrating the laser beam that comes by the incident light hurdle injects in the sample entrance port, its incident beam should all inject in the A ' B ' C ' D ' rectangle of sample entrance port, by aligming microscope this is observed, adjust horizontal angle universal stage or multidimensional adjusting table and aim at.
Described this proving installation sample is made up of entrance port, internal microstructure, shell and exit portal, incident light is injected by the entrance port, after the frequency multiplication of internal microstructure, its frequency doubled light penetrates from exit portal, it is relevant with the incident angle β of incident light to penetrate the frequency multiplication light intensity, every kind of sample all has an optimal incident angle in fact, according to the best angle adjustment of precognition, also will mobile laser powermeter probe vertically be injected by the ejaculation frequency doubled light after adjustment.
Behind the position of described this proving installation by the adjustment sample, block cover in the screening, measure the light intensity I that shows double-frequency laser by laser powermeter
1Open and block cover, the sample and by the frequency multiplication optical filter that three optical filters are formed of taking away allows laser directly impinge perpendicularly on the laser powermeter probe, hides and blocks cover, is measured the light intensity I that shows laser by laser powermeter
2Then can calculate the efficiency eta of sample:
η＝I
1/I
2
The present invention compared with prior art has the following advantages:
(1) proving installation of the present invention is a proving installation simple in structure, practical, with low cost, easy to adjust.It has the incident light colimated light system, reliably observe introduce alignment system, rotating mechanism is sought at flexible multidimensional adjusting table and optimum orientation angle, conversion efficiency is measured in the position that can adjust tested sample very soon;
(2) this proving installation is low to the environmental baseline requirement, and the precision of measurement is higher, and common laboratory all can be set up, and is easy to promote.
Description of drawings
Fig. 1 is an embodiment of the invention centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation scantling plan;
Fig. 2 is embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table orthogonal view;
Fig. 3 is embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table side direction view;
Fig. 4 is an embodiment of the invention proving installation horizontal angle circumvolve lock set kit AA cut-open view;
Fig. 5 is logical light mouth amplification profile in embodiment of the invention incident light hurdle and the logical light mouth figure in laser alignment incident light hurdle;
Fig. 6 is embodiment of the invention sample laser entrance port figure;
Fig. 7 is an embodiment of the invention sample frequency multiplication micro-nano structure cross sectional plan view.
Embodiment
As shown in Figure 1, be embodiment of the invention centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation scantling plan, it by laser instrument 1, collimating and beam expanding system 2, polaroid 3, incident light hurdle 4, aligming microscope 5, object placement desk 6, sample 7, horizontal angle universal stage 8, multidimensional adjusting table 9, frequency doubled light optical filter 10, block cover 11, laser powermeter probe 12, detectable signal extension line 13, laser powermeter 14 and big base frame 15 and form.Laser instrument 1, collimating and beam expanding system 2, polaroid 3, incident light hurdle 4, aligming microscope 5, multidimensional adjusting table 9, block cover 11, laser powermeter probe 12 and laser powermeter 14 all are placed on the big base frame 15, laser instrument 1, collimating and beam expanding system 2, polaroid 3, the logical light center of incident light hurdle 4 and laser powermeter probe 12 is all contour with the laser axis that laser instrument 1 penetrates, aligming microscope 5 is vertically placed, be put on the big base frame 15 by 505 palms of microscope stand, sample 7 is placed on the object placement desk 6, object placement desk 6 is placed on the horizontal angle universal stage 8, and horizontal angle universal stage 8 is placed on the multidimensional adjusting table 9.The laser 101 that laser instrument 1 penetrates is by collimating and beam expanding system 2 beam-expanding collimations, by 3 of polaroids partially after again by incident light hurdle 4, by the observation of 5 pairs of laser entrance ports of aligming microscope and the adjustment of multidimensional adjusting table 9 and horizontal angle universal stage 8, make a certain size light beam inject sample 7, frequency doubled light 705 after frequency multiplication filters by frequency multiplication optical filter 10, receive by laser powermeter probe 12 again, be converted to electric signal and send into high-precision laser power meter 14, and measure the light intensity magnitude that demonstrates double-frequency laser 705 by laser powermeter 14 by detectable signal extension line 13.
By last Fig. 1 as can be known, the laser beam 101 that laser instrument 1 penetrates at first is by collimating and beam expanding system 2 collimator and extenders, and its collimating and beam expanding system 2 comprises focus lamp 201 and collimating mirror 202, and laser beam 101 focuses on the back focus O of focus lamp 201 by behind the focus lamp 201
1Point, the scioptics front focus also is positioned at O again
1Behind the collimating mirror 202 of point, make laser beam 101 obtain expanding bundle and collimation.Obtain expansion bundle and collimated laser light Shu Chuizhi and inject polaroid 3, polaroid 3 can rotate around optical axis, and is consistent with sample 7 desired directions to adjust the polarization direction.
By last Fig. 1 also as can be known, its optical axis O
5O
6Vertically the aligming microscope of placing 5 is the infrared viewing the seen microscopes by replaceable service band, by small reflector 501, object lens 502, lens barrel 503, eyepiece 504 and mirror holder 505 are formed, object space refractive power small reflector 501 is placed on the top of laser beam 402 by 505 palms of mirror holder, and relative 120 ° of inclined, do not stop that laser beam 402 injects sample, mirror holder 505 also props up to have slapped and comprises object lens 502, eyepiece 504 and lens barrel 503, by finely tuning microscopical object distance, we can observe the alignment case that laser is injected the sample inlet at emergent pupil 506 places.
By Fig. 1 also as can be known, sample pack into object placement desk 6 and observe adjust the position after, before formal survey measurements, hide and block cover 11, blocking cover 11 is that a front has laser 101 and goes into perforation, back bottom have detectable signal extension line 13 the hole and above have aligming microscope 5 and observe with outside the hole, all the other two sides all do not have perforate, and the outer cover of inwall blacking, with the influence that prevents that external veiling glare from measuring light intensity signal.Frequency multiplication optical filter 10 is contained on the laser powermeter probe 12 by frequency doubled light optical filter picture frame 1004.And frequency multiplication optical filter 10 is by the frequency multiplication optical filter 1 that is put in the place ahead, frequency multiplication optical filter 2 1002 in the middle of being put in is formed with the frequency multiplication optical filter that is put in the back 3 1003, frequency multiplication optical filter 1 be one semi-transparent to incident light, all the other wave bands comprise the optical filter that the frequency doubled light wave band is all-trans, frequency multiplication optical filter 2 1002 be one to the incident light anti-optical filter of frequency doubled light half that is all-trans, can make frequency doubled light encourage conversion incident light frequency back and forth at sample 7, frequency multiplication optical filter 3 1003 be one to the be all-trans optical filter of frequency doubled light full impregnated of incident light, also play and encourage the householder transformation effect back and forth, make the frequency conversion better effects if.
As shown in Figures 2 and 3, be embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table orthogonal view and side direction view.Its object placement desk 6 is made up of the little pressing plate 601 of sample, sample backing plate 602, support plate 603, and little pressing plate 601 can be pressed in sample 7 and backing plate 602 on the support plate 603, makes the center O of sample 7 by the height of adjusting backing plate 602
4The fundamental sum laser beam axis is contour, and sample 7 is parallel with laser beam axis 402, and support plate 603 is positioned on the horizontal angle universal stage 8, and is connected with the T oblique crank Z upper surface of horizontal angle universal stage 8.
Horizontal angle universal stage 8 is made up of steel ball 1, axle bed cover 802, horizontal retaining clip 803, vertical retaining clip 804, steel ball 2 805, T oblique crank Z 806, axle head plate washer 807, snap lock collar plate washer 808, snap lock collar 809, locking bed 810, horizontal angle scale 811, locking handwheel 812.T oblique crank Z 806 lower surfaces are overlapped 802 upper surfaces by steel ball 1 and its horizontal retaining clip 803 with axle bed and are connected, also overlapping 802 inner cylinder faces by steel ball 2 805 and its vertical retaining clip 804 with axle bed is connected, make T oblique crank Z 806 overlap 802 and do horizontal angle beta rolling rotation with respect to axle bed, horizontal angle scale 811 is enclosed within axle bed and overlaps 802 external cylindrical surfaces, and be placed on upward adjustment plate 907 upper surfaces of multidimensional adjusting table 9, static relatively to T oblique crank Z 806, be carved with index line on the disk external cylindrical surface of T oblique crank Z 806, therefore when the object placement desk 6 that is fixed with sample 7 is followed 806 rotations of T oblique crank Z, just can read the β angle number of sample 7 rotations from horizontal angle scale 811, axle head plate washer 807 is fixed on the T oblique crank Z 806, prevent that T oblique crank Z 806 is when 802 rotations of axle bed cover or break away from mutually at ordinary times, axle bed cover 802 is to be fixed on going up of multidimensional adjusting table 9 to adjust on the plate 907, T oblique crank Z 806 is adjusted the back around 802 rotations of axle bed cover, and stable to stop at this position motionless be the (see figure 4) of locking by locking handwheel 812, Fig. 4 is the AA sectional view of Fig. 3, as seen from the figure, the big portion of snap lock collar 809 is thin circles, the part that thickness is big has an elongated slot E, vertical elongated slot E makes to have a unthreaded hole and a screw, the screw rod of locking handwheel 812 can pass this unthreaded hole, screw flight can mesh with the screw of snap lock collar 809, snap lock collar 809 wraps on the face of cylinder of lower end axle of T oblique crank Z 806, the polished rod of locking handwheel 812 also passes locking bed 810, and the screw thread that makes its front end is spun on the screw thread of snap lock collar 809, its screw thread end face is pressed on the other end of snap lock collar 809, when rotation lock handwheel 812, its screw flight can tighten up snap lock collar 809, make and embrace the face of cylinder of the lower end axle of the T oblique crank Z 806 of portion within it, T oblique crank Z 806 relative locking beds 810 just can not relatively rotate like this, and locking bed 810 is to fixedly connected with the lower surface of adjusting plate 907 of going up of multidimensional adjusting table 9, can not remake the rotation of β angle so sample 7 just is locked.
Multidimensional adjusting table 9 is made up of to adjusting handwheel 909, the little seat 910 of adjustment and extension spring 911 back adjustment handwheel 901, back lengthy motion picture spring hinge 902, base V-arrangement lower guideway 903, V-arrangement upper rail 904, preceding lengthy motion picture spring hinge 905, adjustment mounting 906, rise bed rearrangement frame 907, preceding adjustment handwheel 908, X.Raise bed rearrangement frame 907 and be positioned at the top of adjusting mounting 906, adjust the top that mounting 906 is positioned at V-arrangement upper rail 904, the preceding handwheel 908 of adjusting is positioned on the rise bed rearrangement frame 907, and with the threaded hole engagement of raising bed rearrangement frame 907, back adjustment handwheel 901 passes the macropore that raises bed rearrangement frame 907 and is positioned on the adjustment mounting 906, and with adjust the engagement of mounting 906 threaded holes, raising bed rearrangement frame 907 is connected with adjustment mounting 906 by back lengthy motion picture spring hinge 902, adjusting mounting 906 is connected with V-arrangement upper rail 904 by preceding lengthy motion picture spring hinge 905, V-arrangement upper rail 904 is connected with base V-arrangement lower guideway 903 by V-way, and can in base V-arrangement lower guideway 903, move along the guide rail direction, base V-arrangement lower guideway 903 is placed on the big base frame 15, the upper surface that raises bed rearrangement frame 907 is connected with the axle bed cover 802 of horizontal angle universal stage 8, and lower surface is connected with locking bed 810, palm horizontal angle universal stage 8 and above sample 7 parts thereof.Because of withstanding on, the screw head of preceding adjustment handwheel 908 adjusts on the mounting 906, so the rotation by preceding adjustment handwheel 908 can make with the rise bed rearrangement frame 907 of its screw-threaded engagement and do the rotation of two directions up and down around back lengthy motion picture spring hinge 902, because back lengthy motion picture spring hinge 902 is at the side that raises bed rearrangement frame 907, the rotation of raising bed rearrangement frame 907 not only changes the height direction of sample 7, but also can oscilaltion.In like manner, the screw rod of adjusting handwheel 901 because of the back withstands on the V-arrangement upper rail 904, handwheel 901 is adjusted in the rotation back can make adjustment mounting 906 do to rotate up and down around the preceding lengthy motion picture spring hinge 905 that is connected with its side, make adjust mounting 906 and more than comprise that sample 7 makes the height directions and rotate, but also can oscilaltion, thereby sample 7 can be done the α angle around X-axis and rotate adjustment in the YOZ plane, also can do to adjust up and down along the Z axle.Owing to be fixed on the base V-arrangement lower guideway 903 to the little seat 910 of the adjustment of adjusting handwheel 909 engagements with X, X withstands on the V-arrangement upper rail 904 to the screw rod of adjusting handwheel 909, extension spring 911 1 ends haul adjusts little seat 910, the other end hauls V-arrangement upper rail 904, rotation X can make V-arrangement upper rail 904 make the X both forward and reverse directions along the guide rail of base V-arrangement lower guideway 903 to move to adjusting handwheel 909, moves adjustment at directions X as both forward and reverse directions thereby drive sample 7.In a word, multidimensional adjusting table 9 is reached to do the rotation adjustment of α angle to sample 7, can make XY simultaneously and adjust to moving.
As shown in Figure 5, be logical light mouth amplification profile in embodiment of the invention incident light hurdle and the logical light mouth figure in laser alignment incident light hurdle.Left side figure is incident light hurdle 4 logical light mouth amplification profiles, and the logical light mouth in light hurdle is to be up and down a knife-edge otch 403.The right is the central point O that laser passes incident light hurdle 4
2The time hot spot sectional view (being equipped with the profile line part), hot spot cross section 401 is the rectangle rectangle of ABCD as seen from the figure.
As shown in Figure 6, be embodiment of the invention sample laser entrance port figure.As seen from the figure, sample 7 laser entrance ports 701 are A ' B ' C ' D ' rectangle rectangle (rectangle rectangles of outside), penetrate next laser beam 402 along central point 0 by incident light hurdle 4
3Inject in sample 7 entrance ports, the hot spot cross section is equipped with profile line rectangle rectangle partly in being, its incident beam all injects in sample 7 entrance port A ' B ' C ' D ' rectangles, can observe this by aligming microscope 5, adjusting horizontal angle universal stage 8 or the multidimensional adjusting table 9 above-mentioned relevant handwheels that illustrated reaches, when the hot spot section A BCD that sends when incident light hurdle 4 is excessive, the incident light hurdle that replaceable hot spot cross section is little, in a word, whole light are all injected in sample 7 entrance port A ' B ' C ' D '.
As shown in Figure 7, be embodiment of the invention sample frequency multiplication micro-nano structure cross sectional plan view.Sample 7 is generally by entrance port 701, internal microstructure 702, shell 703 and exit portal 704 are formed, incident light 402 is injected by entrance port 701, after the frequency multiplication of internal microstructure 702, its frequency doubled light 705 penetrates from exit portal 704, the intensity that penetrates frequency doubled light 705 is relevant with the incident angle β of incident light, therefore, when the laser that adjustment is penetrated by incident light hurdle 4 is all injected sample 7 laser entrance ports, be also noted that and rotate the incident angle that horizontal angle universal stage 8 is adjusted incident light, different sample 7 its optimal incident angle in fact β are different, can progressively adjust according to the incident angle of precognition.After adjusting incident angle and locking, also to pop one's head in 12 by mobile laser powermeter, make ejaculation frequency doubled light 705 can vertically inject laser powermeter probe 12.
Behind the position by above-mentioned adjustment sample 7, block cover 11 in the screening, measure the light intensity magnitude that shows double-frequency laser 705, the big short biography of the output intensity of double-frequency laser 705 is made I here by laser powermeter 14
1Open and block cover 11, the frequency multiplication optical filter 10 of taking sample 7 away and forming by three optical filters, allow laser 402 directly impinge perpendicularly on laser powermeter probe 12, block cover 11 on hiding again, measure the light intensity magnitude that shows laser 402 by laser powermeter 14, the light intensity magnitude of laser 402 note is made I here
2Laser loss when omitting incident and outgoing sample 7, and under the scattering loss situation that is filtered frequently, can calculate the relative efficiency eta of sample 7:
η＝I
1/I
2。
Claims (10)
1, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, it is characterized in that comprising: laser instrument (1), collimating and beam expanding system (2), polaroid (3), incident light hurdle (4), aligming microscope (5), object placement desk (6), sample (7), horizontal angle universal stage (8), multidimensional adjusting table (9), frequency multiplication optical filter (10), block cover (11), laser powermeter probe (12), laser powermeter (14) and big base frame (15), laser instrument (1), collimating and beam expanding system (2), polaroid (3), incident light hurdle (4), place successively and be placed on the big base frame (15), aligming microscope (5) vertically is placed on the top of sample (7) light entrance, is used to observe the alignment case that laser is injected the sample inlet; Multidimensional adjusting table (9), laser powermeter probe (12) and laser powermeter (14) are placed on the big base frame (15) successively, fixedly the sample object placement desk (6) of sample (7) is placed on the horizontal angle universal stage (8), horizontal angle universal stage (8) is placed on the multidimensional adjusting table (9), frequency multiplication optical filter (10) is positioned at the front end of laser powermeter probe (12), between laser instrument (1) and laser powermeter (14), be covered with and block cover (11), with the influence that prevents that external veiling glare from measuring light intensity signal; The laser that laser instrument (1) penetrates is earlier by collimating and beam expanding system (2) collimator and extender, then by polaroid (3) and incident light hurdle (4), observe by the aligming microscope of vertically placing (5) again, adjustment by horizontal angle universal stage (8) and multidimensional adjusting table (9) is aimed at, inject sample (7) by the light beam that send incident light hurdle (4), inject laser powermeter probe (12) through the frequency doubled light (705) after sample (7) frequency multiplication by frequency multiplication optical filter (10) optical filtering, be converted to electric signal after the probe reception, send into laser powermeter (14), measure the light intensity magnitude that demonstrates double-frequency laser by laser powermeter (14), the light intensity value that detects when not placing sample with optical filter is compared again, can obtain frequency-doubling conversion efficiency.
2, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1 is characterized in that: described laser beam (101) focuses on the focus O of focus lamp earlier by focus lamp (201)
1Point, the scioptics front focus also is positioned at O again
1The collimating mirror (202) of point makes laser beam (101) obtain expanding bundle and collimation, obtains expanding bundle and collimated laser light bundle and adjusts by polaroid (3) and rotation, makes the polarization direction consistent with the desired direction of sample (7); Inject the alignment case of sample entrance port is observed by the infrared aligming microscope (5) of seeing of the replaceable service band of vertical placement by the laser beam (402) of incident light hurdle (4), position deviation is adjusted by horizontal angle universal stage (8) and multidimensional adjusting table (9), the object space refractive power small reflector (501) of aligming microscope (5) is with 120 ° of placements, do not stop that laser beam (402) injects sample.
3, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described frequency multiplication optical filter (10) is by frequency multiplication optical filter one (1001), frequency multiplication optical filter two (1002) and frequency multiplication optical filter three (1003) are formed, frequency multiplication optical filter one (1001) is that an incident light is semi-transparent, all the other wave bands comprise the optical filter that the frequency doubled light wave band is all-trans, frequency multiplication optical filter two (1002) is a pair of incident light anti-optical filter of frequency doubled light half that is all-trans, and frequency multiplication optical filter three (1003) is the be all-trans optical filter of frequency doubled light full impregnated of a pair of incident light.
4, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described object placement desk (6) is made up of the little pressing plate of sample (601), sample backing plate (602), support plate (603), be installed on the T oblique crank Z of horizontal angle universal stage (8) center O of sample (7)
4Contour and parallel with laser beam axis (402).
5, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described horizontal angle universal stage (8) is by first steel ball (801), axle bed cover (802), horizontal retaining clip (803), vertical retaining clip (804), second steel ball (805), T oblique crank Z (806), axle head plate washer (807), snap lock collar plate washer (808), snap lock collar (809), locking bed (810), horizontal angle scale (811), locking handwheel (812) is formed, T oblique crank Z (806) lower surface is connected with axle bed cover (802) upper surface by first steel ball (801), also be connected with axle bed cover (802) inner cylinder face by second steel ball (805), make T oblique crank Z (806) do horizontal angle beta rolling rotation with respect to axle bed cover (802), the horizontal angle scale (811) that is enclosed within axle bed cover (802) external cylindrical surface is placed on going up of multidimensional adjusting table (9) and adjusts on the plate (907), be carved with index line on the disk external cylindrical surface of T oblique crank Z (806), the rotation of sample (7) can be read rotation β angle number, axle bed cover (802) is fixed on to be adjusted on the plate (907), T oblique crank Z (806) rotation is adjusted the back by locking handwheel (812) rotary tightening snap lock collar (809), embraces the lower end shaft locking of T oblique crank Z.
6, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described multidimensional adjusting table (9) is adjusted handwheel (901) by the back, back lengthy motion picture spring hinge (902), base V-arrangement lower guideway (903), V-arrangement upper rail (904), preceding lengthy motion picture spring hinge (905), adjust mounting (906), raise bed rearrangement frame (907), the preceding handwheel (908) of adjusting, X is to adjusting handwheel (909), adjusting little seat (910) and extension spring (911) forms, raise bed rearrangement frame (907) and be positioned at the top of adjusting mounting (906), adjust the top that mounting (906) is positioned at V-arrangement upper rail (904), the preceding handwheel (908) of adjusting is positioned on the rise bed rearrangement frame (907), and with the threaded hole engagement of raising bed rearrangement frame (907), back adjustment handwheel (901) passes the macropore that raises bed rearrangement frame (907) and is positioned on the adjustment mounting (906), and with adjust the engagement of mounting (906) threaded hole, raising bed rearrangement frame (907) is connected with adjustment mounting (906) by back lengthy motion picture spring hinge (902), adjusting mounting (906) is connected with V-arrangement upper rail (904) by preceding lengthy motion picture spring hinge (905), V-arrangement upper rail (904) is connected with base V-arrangement lower guideway (903) by V-way, and can in base V-arrangement lower guideway (903), move along the guide rail direction, base V-arrangement lower guideway (903) is placed on the big base frame (15), the upper surface that raises bed rearrangement frame (907) is connected with the axle bed cover (802) of horizontal angle universal stage (8), and lower surface is connected with locking bed (810), adjusting handwheel (908) before the rotation can make rise bed rearrangement frame (907) do the rotation of two directions up and down around back lengthy motion picture spring hinge (902), handwheel (901) is adjusted in the rotation back can make adjustment mounting (906) do to rotate up and down around the preceding lengthy motion picture spring hinge (905) that is connected with its side, adjusting little seat (910) is fixed on the base V-arrangement lower guideway (903), extension spring (911) one ends haul adjusts little seat (910), the other end hauls V-arrangement upper rail (904), rotation X can make V-arrangement upper rail (904) make the X both forward and reverse directions to adjustment handwheel (909) and move, in a word, reaching multidimensional adjusting table (9) can do the rotation of α angle to sample (7), can make XY simultaneously again and adjust to moving.
7, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described incident light hurdle (4) leads to light mouth section, be to be up and down a knife-edge otch, the hot spot cross section was a rectangle rectangle ABCD when laser passed the center on incident light hurdle (4), and sample laser entrance port is A ' B ' C ' D ' rectangle rectangle.
8, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: the described cover (11) that blocks is that a front has laser (101) and goes into perforation, back bottom have detectable signal extension line (13) the hole and above have aligming microscope (5) and observe with outside the hole, all the other two sides all do not have perforate, and the outer cover of inwall blacking is with the influence that prevents that external veiling glare from measuring light intensity signal.
9, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: described sample (7) is by entrance port (701), internal microstructure (702), shell (703) and exit portal (704) are formed, incident light (402) is injected by entrance port (701), after the frequency multiplication of internal microstructure (702), its frequency doubled light (705) penetrates from exit portal (704), the intensity that penetrates frequency doubled light (705) is relevant with the incident angle β of incident light, every kind of sample (7) all has an optimal incident angle in fact, according to the best angle adjustment of precognition, after adjustment, also to mobile laser powermeter probe (12) vertically be injected by ejaculation frequency doubled light (705).
10, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation according to claim 1, its feature also is: being measured as by behind the position of adjusting sample (7) of described light intensity, block cover (11) in the screening, measure the light intensity l that shows double-frequency laser (705) by laser powermeter (14)
1Open and block cover (11), the sample of taking away (7) and by the frequency multiplication optical filter (10) that three optical filters are formed allows laser (402) directly impinge perpendicularly on laser powermeter probe (12), block cover (11) on hiding again, measure the light intensity l that shows laser (402) by laser powermeter (14)
2, then can calculate the efficiency eta=l of sample (7)
1/ l
2
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