CN1952640A - Frequency multiplication conversion efficiency testing device for centrosymmetric material micro-nano structure device - Google Patents

Frequency multiplication conversion efficiency testing device for centrosymmetric material micro-nano structure device Download PDF

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CN1952640A
CN1952640A CN 200610114281 CN200610114281A CN1952640A CN 1952640 A CN1952640 A CN 1952640A CN 200610114281 CN200610114281 CN 200610114281 CN 200610114281 A CN200610114281 A CN 200610114281A CN 1952640 A CN1952640 A CN 1952640A
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laser
frequency
sample
light
adjustment
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CN100567931C (en
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陈旭南
李海颖
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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Abstract

中心对称材料微纳结构器件倍频转换效率测试装置,由激光器、准直扩束系统、偏振片、入射光栏、对准显微镜、承品台、水平角旋转台、多维调整台、倍频光滤光片、遮挡罩、激光功率计和大底台组成,激光器射出的激光通过准直扩束系统、偏振片和入射光栏,由对准显微镜观察经水平角旋转台和多维调整台调整对准射入被测样品,经被测样品倍频后的倍频光,被激光功率计接收并测量显示出倍频光的光强值,再与未放置被测样品和滤光片时检测的光强值相比,可得到倍频转换效率。被测样品的位置由多维调整台和水平角旋转台迅速调整,调整方便,测量精度高,易于应用推广。

Figure 200610114281

Frequency-doubling conversion efficiency test device for centrosymmetric material micro-nano structure devices, consisting of laser, collimator beam expander system, polarizer, incident light barrier, alignment microscope, receiving platform, horizontal angle rotation platform, multi-dimensional adjustment platform, frequency-doubling light It is composed of optical filter, mask, laser power meter and large bottom platform. The laser emitted by the laser passes through the collimator beam expander system, polarizer and incident light bar, and is observed by the alignment microscope through the horizontal angle rotation stage and the multi-dimensional adjustment stage to adjust the alignment. The frequency-doubled light that is injected into the sample under test and doubled by the sample under test is received by the laser power meter and measured to show the light intensity value of the frequency-doubled light, and then compared with the light intensity value detected when the sample under test and the filter are not placed. Compared with the light intensity value, the frequency doubling conversion efficiency can be obtained. The position of the sample to be tested is quickly adjusted by the multi-dimensional adjustment table and the horizontal angle rotation table, which is convenient to adjust, high in measurement accuracy, and easy to apply and popularize.

Figure 200610114281

Description

Centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation
Technical field
The present invention is a kind of centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, belongs to nonlinear device conversion efficiency technical field of measurement and test.
Background technology
Continuous progress along with optical lasers technology and microstructure process technology, the device for non-linear optical that not only is applied to fields such as laser freuqency doubling constantly produces, be used widely, and produced the device for non-linear optical that constitutes with the centro-symmetry dielectric micro-nano structure, also can produce frequency-doubled effect.The appearance that has the optical non-linear effect micro-nano structure in the centro-symmetry dielectric, making can be integrated with other photonic device non-linear components such as frequency transformations on same linear material substrate, as laser instrument, waveguide and detector or the like, form full optical information loop integrated mix with photoelectron integrated etc., it is little, in light weight and but high-performance micro-system that function is very complete satisfies application demand to form volume.Yet, common optically nonlinear crystal device conversion efficiency test can not be surveyed the device that is made of the centro-symmetry dielectric micro-nano structure, can not be with the nonlinear optical coefficients analyzer by measuring nonlinear optical coefficients, and relevant conductance etc., converse conversion efficiency.For research produces nonlinear frequency transformation efficiently with the centro-symmetry dielectric micro-nano structure, overcome the deficiency of above-mentioned technology, centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation has been invented in research.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome above-mentioned the deficiencies in the prior art, provide a kind of simple in structure, practical centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, tested structure devices is placed on the monitor station, measures conversion efficiency through adjusting to observe.
Technical solution of the present invention is: centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation, it is characterized in that comprising: laser instrument, collimating and beam expanding system, polaroid, the incident light hurdle, aligming microscope, object placement desk, sample, the horizontal angle universal stage, multidimensional adjusting table, the frequency multiplication optical filter, block cover, the laser powermeter probe, laser powermeter and big base frame, laser instrument, collimating and beam expanding system, polaroid, the incident light hurdle, place and be placed on the big base frame successively, aligming microscope vertically is placed on the top of sample (7) light entrance, is used to observe the alignment case that laser is injected the sample inlet; Multidimensional adjusting table, laser powermeter probe and laser powermeter are placed on the big base frame successively, fixedly the sample object placement desk of sample is placed on the horizontal angle universal stage, the horizontal angle universal stage is placed on the multidimensional adjusting table, the frequency multiplication optical filter is positioned at the front end of laser powermeter probe, between laser instrument and laser powermeter, be covered with and block cover, with the influence that prevents that external veiling glare from measuring light intensity signal; The laser that laser instrument penetrates is earlier by the collimating and beam expanding system collimator and extender, then by polaroid and incident light hurdle, observe by the aligming microscope of vertically placing again, adjustment by horizontal angle universal stage and multidimensional adjusting table is aimed at, inject sample by the light beam that the incident light hurdle sends, inject the laser powermeter probe through the frequency doubled light after the sample frequency multiplication by the optical filtering of frequency multiplication optical filter, be converted to electric signal after the probe reception, send into laser powermeter, demonstrate the light intensity magnitude of double-frequency laser by the laser powermeter measurement, the light intensity value that detects when not placing sample with optical filter is compared again, can obtain frequency-doubling conversion efficiency.
The laser beam that described this device laser instrument penetrates, before this by the collimating and beam expanding system collimator and extender that comprises focus lamp and collimating mirror, laser beam focuses on the focus O of focus lamp earlier by focus lamp 1Point, the scioptics front focus also is positioned at O again 1The collimating mirror of point makes laser beam obtain expanding bundle and collimation, obtaining expanding bundle and collimated laser light bundle adjusts by polaroid and rotation, make the desired direction of polarization direction and sample consistent, inject the alignment case of sample entrance port is observed by the infrared aligming microscope of seeing of the replaceable service band of vertical placement by the laser beam on incident light hurdle, position deviation is adjusted by horizontal angle universal stage and multidimensional adjusting table, the object space refractive power small reflector of aligming microscope is with 120 ° of placements, do not stop that laser beam injects sample.
Described this proving installation sample pack into object placement desk and adjust the position after, before formal survey measurements, hide and block cover, with the influence that prevents that external veiling glare from measuring light intensity signal, frequency doubled light is vertically injected the frequency multiplication optical filter, receive by the laser powermeter probe, and the frequency multiplication optical filter is by frequency multiplication optical filter one, frequency multiplication optical filter two and frequency multiplication optical filter three are formed, frequency multiplication optical filter one is that an incident light is semi-transparent, all the other wave bands comprise the optical filter that the frequency doubled light wave band is all-trans, frequency multiplication optical filter two is a pair of incident light anti-optical filters of frequency doubled light half that are all-trans, and frequency multiplication optical filter three is be all-trans optical filters of frequency doubled light full impregnated of a pair of incident light.
Described this proving installation object placement desk is made up of the little pressing plate of sample, sample backing plate, support plate, is installed on the T oblique crank Z of horizontal angle universal stage the center O of sample 4Contour with laser beam axis and parallel.
Described proving installation horizontal angle universal stage is by steel ball one, the axle bed cover, horizontal retaining clip, vertical retaining clip, steel ball two, the T oblique crank Z, the axle head plate washer, snap lock collar plate washer, the snap lock collar, locking bed, the horizontal angle scale, the locking handwheel is formed, T oblique crank Z lower surface puts end face by steel ball one and axle bed and is connected, also be connected with axle bed cover inner cylinder face by steel ball two, the T oblique crank Z can be rolled with respect to axle bed interplanting horizontal angle beta to be rotated, the horizontal angle scale that is enclosed within axle bed cover external cylindrical surface is placed on going up of multidimensional adjusting table and adjusts on the plate, be carved with index line on the disk external cylindrical surface of T oblique crank Z, the rotation of sample can be read rotation β angle number, the axle bed cover is fixed on to be adjusted on the plate, the rotation of T oblique crank Z is adjusted the back by the collar of locking handwheel rotary tightening snap lock, embraces the lower end shaft locking of T oblique crank Z.
Described this proving installation multidimensional adjusting table is adjusted handwheel by the back, back lengthy motion picture spring hinge, base V-arrangement lower guideway, the V-arrangement upper rail, preceding lengthy motion picture spring hinge, adjust mounting, raise the bed rearrangement frame, the preceding handwheel of adjusting, X is to adjusting handwheel, adjusting little seat and extension spring forms, raise the bed rearrangement chord position in the top of adjusting mounting, adjust the top that mounting is positioned at the V-arrangement upper rail, the preceding handwheel of adjusting is positioned on the rise bed rearrangement frame, and with the threaded hole engagement of raising the bed rearrangement frame, back adjustment handwheel passes the macropore that raises the bed rearrangement frame and is positioned on the adjustment mounting, and with adjust the engagement of mounting threaded hole, raising the bed rearrangement frame is connected with the adjustment mounting by back lengthy motion picture spring hinge, adjusting mounting is connected with the V-arrangement upper rail by preceding lengthy motion picture spring hinge, the V-arrangement upper rail is connected with base V-arrangement lower guideway by V-way, and can in base V-arrangement lower guideway, move along the guide rail direction, base V-arrangement lower guideway is placed on the big base frame, the upper surface that raises the bed rearrangement frame is connected with the axle bed cover of horizontal angle universal stage, and lower surface is connected with locking bed, adjusting handwheel before the rotation can make rise bed rearrangement frame do the rotation of two directions up and down around back lengthy motion picture spring hinge, handwheel is adjusted in the rotation back can make the adjustment mounting do to rotate up and down around the preceding lengthy motion picture spring hinge that is connected with its side, adjusting little seat is fixed on the base V-arrangement lower guideway, extension spring one end hauls adjusts little seat, the other end hauls the V-arrangement upper rail, rotation X can make the V-arrangement upper rail make the X both forward and reverse directions to the adjustment handwheel and move, in a word, reaching multidimensional adjusting table can do the rotation of α angle to sample, can make XY simultaneously again and adjust to moving.
Described this proving installation incident light hurdle leads to light mouth section, be to be up and down a knife-edge otch, the hot spot cross section was a rectangle rectangle ABCD when laser passed the center on incident light hurdle, sample laser entrance port is A ' B ' C ' D ' rectangle rectangle, penetrating the laser beam that comes by the incident light hurdle injects in the sample entrance port, its incident beam should all inject in the A ' B ' C ' D ' rectangle of sample entrance port, by aligming microscope this is observed, adjust horizontal angle universal stage or multidimensional adjusting table and aim at.
Described this proving installation sample is made up of entrance port, internal microstructure, shell and exit portal, incident light is injected by the entrance port, after the frequency multiplication of internal microstructure, its frequency doubled light penetrates from exit portal, it is relevant with the incident angle β of incident light to penetrate the frequency multiplication light intensity, every kind of sample all has an optimal incident angle in fact, according to the best angle adjustment of precognition, also will mobile laser powermeter probe vertically be injected by the ejaculation frequency doubled light after adjustment.
Behind the position of described this proving installation by the adjustment sample, block cover in the screening, measure the light intensity I that shows double-frequency laser by laser powermeter 1Open and block cover, the sample and by the frequency multiplication optical filter that three optical filters are formed of taking away allows laser directly impinge perpendicularly on the laser powermeter probe, hides and blocks cover, is measured the light intensity I that shows laser by laser powermeter 2Then can calculate the efficiency eta of sample:
η=I 1/I 2
The present invention compared with prior art has the following advantages:
(1) proving installation of the present invention is a proving installation simple in structure, practical, with low cost, easy to adjust.It has the incident light colimated light system, reliably observe introduce alignment system, rotating mechanism is sought at flexible multidimensional adjusting table and optimum orientation angle, conversion efficiency is measured in the position that can adjust tested sample very soon;
(2) this proving installation is low to the environmental baseline requirement, and the precision of measurement is higher, and common laboratory all can be set up, and is easy to promote.
Description of drawings
Fig. 1 is an embodiment of the invention centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation scantling plan;
Fig. 2 is embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table orthogonal view;
Fig. 3 is embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table side direction view;
Fig. 4 is an embodiment of the invention proving installation horizontal angle circumvolve lock set kit AA cut-open view;
Fig. 5 is logical light mouth amplification profile in embodiment of the invention incident light hurdle and the logical light mouth figure in laser alignment incident light hurdle;
Fig. 6 is embodiment of the invention sample laser entrance port figure;
Fig. 7 is an embodiment of the invention sample frequency multiplication micro-nano structure cross sectional plan view.
Embodiment
As shown in Figure 1, be embodiment of the invention centro-symmetry dielectric micro-nano structure device frequency-doubling conversion efficiency proving installation scantling plan, it by laser instrument 1, collimating and beam expanding system 2, polaroid 3, incident light hurdle 4, aligming microscope 5, object placement desk 6, sample 7, horizontal angle universal stage 8, multidimensional adjusting table 9, frequency doubled light optical filter 10, block cover 11, laser powermeter probe 12, detectable signal extension line 13, laser powermeter 14 and big base frame 15 and form.Laser instrument 1, collimating and beam expanding system 2, polaroid 3, incident light hurdle 4, aligming microscope 5, multidimensional adjusting table 9, block cover 11, laser powermeter probe 12 and laser powermeter 14 all are placed on the big base frame 15, laser instrument 1, collimating and beam expanding system 2, polaroid 3, the logical light center of incident light hurdle 4 and laser powermeter probe 12 is all contour with the laser axis that laser instrument 1 penetrates, aligming microscope 5 is vertically placed, be put on the big base frame 15 by 505 palms of microscope stand, sample 7 is placed on the object placement desk 6, object placement desk 6 is placed on the horizontal angle universal stage 8, and horizontal angle universal stage 8 is placed on the multidimensional adjusting table 9.The laser 101 that laser instrument 1 penetrates is by collimating and beam expanding system 2 beam-expanding collimations, by 3 of polaroids partially after again by incident light hurdle 4, by the observation of 5 pairs of laser entrance ports of aligming microscope and the adjustment of multidimensional adjusting table 9 and horizontal angle universal stage 8, make a certain size light beam inject sample 7, frequency doubled light 705 after frequency multiplication filters by frequency multiplication optical filter 10, receive by laser powermeter probe 12 again, be converted to electric signal and send into high-precision laser power meter 14, and measure the light intensity magnitude that demonstrates double-frequency laser 705 by laser powermeter 14 by detectable signal extension line 13.
By last Fig. 1 as can be known, the laser beam 101 that laser instrument 1 penetrates at first is by collimating and beam expanding system 2 collimator and extenders, and its collimating and beam expanding system 2 comprises focus lamp 201 and collimating mirror 202, and laser beam 101 focuses on the back focus O of focus lamp 201 by behind the focus lamp 201 1Point, the scioptics front focus also is positioned at O again 1Behind the collimating mirror 202 of point, make laser beam 101 obtain expanding bundle and collimation.Obtain expansion bundle and collimated laser light Shu Chuizhi and inject polaroid 3, polaroid 3 can rotate around optical axis, and is consistent with sample 7 desired directions to adjust the polarization direction.
By last Fig. 1 also as can be known, its optical axis O 5O 6Vertically the aligming microscope of placing 5 is the infrared viewing the seen microscopes by replaceable service band, by small reflector 501, object lens 502, lens barrel 503, eyepiece 504 and mirror holder 505 are formed, object space refractive power small reflector 501 is placed on the top of laser beam 402 by 505 palms of mirror holder, and relative 120 ° of inclined, do not stop that laser beam 402 injects sample, mirror holder 505 also props up to have slapped and comprises object lens 502, eyepiece 504 and lens barrel 503, by finely tuning microscopical object distance, we can observe the alignment case that laser is injected the sample inlet at emergent pupil 506 places.
By Fig. 1 also as can be known, sample pack into object placement desk 6 and observe adjust the position after, before formal survey measurements, hide and block cover 11, blocking cover 11 is that a front has laser 101 and goes into perforation, back bottom have detectable signal extension line 13 the hole and above have aligming microscope 5 and observe with outside the hole, all the other two sides all do not have perforate, and the outer cover of inwall blacking, with the influence that prevents that external veiling glare from measuring light intensity signal.Frequency multiplication optical filter 10 is contained on the laser powermeter probe 12 by frequency doubled light optical filter picture frame 1004.And frequency multiplication optical filter 10 is by the frequency multiplication optical filter 1 that is put in the place ahead, frequency multiplication optical filter 2 1002 in the middle of being put in is formed with the frequency multiplication optical filter that is put in the back 3 1003, frequency multiplication optical filter 1 be one semi-transparent to incident light, all the other wave bands comprise the optical filter that the frequency doubled light wave band is all-trans, frequency multiplication optical filter 2 1002 be one to the incident light anti-optical filter of frequency doubled light half that is all-trans, can make frequency doubled light encourage conversion incident light frequency back and forth at sample 7, frequency multiplication optical filter 3 1003 be one to the be all-trans optical filter of frequency doubled light full impregnated of incident light, also play and encourage the householder transformation effect back and forth, make the frequency conversion better effects if.
As shown in Figures 2 and 3, be embodiment of the invention proving installation object placement desk, horizontal angle universal stage and multidimensional adjusting table orthogonal view and side direction view.Its object placement desk 6 is made up of the little pressing plate 601 of sample, sample backing plate 602, support plate 603, and little pressing plate 601 can be pressed in sample 7 and backing plate 602 on the support plate 603, makes the center O of sample 7 by the height of adjusting backing plate 602 4The fundamental sum laser beam axis is contour, and sample 7 is parallel with laser beam axis 402, and support plate 603 is positioned on the horizontal angle universal stage 8, and is connected with the T oblique crank Z upper surface of horizontal angle universal stage 8.
Horizontal angle universal stage 8 is made up of steel ball 1, axle bed cover 802, horizontal retaining clip 803, vertical retaining clip 804, steel ball 2 805, T oblique crank Z 806, axle head plate washer 807, snap lock collar plate washer 808, snap lock collar 809, locking bed 810, horizontal angle scale 811, locking handwheel 812.T oblique crank Z 806 lower surfaces are overlapped 802 upper surfaces by steel ball 1 and its horizontal retaining clip 803 with axle bed and are connected, also overlapping 802 inner cylinder faces by steel ball 2 805 and its vertical retaining clip 804 with axle bed is connected, make T oblique crank Z 806 overlap 802 and do horizontal angle beta rolling rotation with respect to axle bed, horizontal angle scale 811 is enclosed within axle bed and overlaps 802 external cylindrical surfaces, and be placed on upward adjustment plate 907 upper surfaces of multidimensional adjusting table 9, static relatively to T oblique crank Z 806, be carved with index line on the disk external cylindrical surface of T oblique crank Z 806, therefore when the object placement desk 6 that is fixed with sample 7 is followed 806 rotations of T oblique crank Z, just can read the β angle number of sample 7 rotations from horizontal angle scale 811, axle head plate washer 807 is fixed on the T oblique crank Z 806, prevent that T oblique crank Z 806 is when 802 rotations of axle bed cover or break away from mutually at ordinary times, axle bed cover 802 is to be fixed on going up of multidimensional adjusting table 9 to adjust on the plate 907, T oblique crank Z 806 is adjusted the back around 802 rotations of axle bed cover, and stable to stop at this position motionless be the (see figure 4) of locking by locking handwheel 812, Fig. 4 is the AA sectional view of Fig. 3, as seen from the figure, the big portion of snap lock collar 809 is thin circles, the part that thickness is big has an elongated slot E, vertical elongated slot E makes to have a unthreaded hole and a screw, the screw rod of locking handwheel 812 can pass this unthreaded hole, screw flight can mesh with the screw of snap lock collar 809, snap lock collar 809 wraps on the face of cylinder of lower end axle of T oblique crank Z 806, the polished rod of locking handwheel 812 also passes locking bed 810, and the screw thread that makes its front end is spun on the screw thread of snap lock collar 809, its screw thread end face is pressed on the other end of snap lock collar 809, when rotation lock handwheel 812, its screw flight can tighten up snap lock collar 809, make and embrace the face of cylinder of the lower end axle of the T oblique crank Z 806 of portion within it, T oblique crank Z 806 relative locking beds 810 just can not relatively rotate like this, and locking bed 810 is to fixedly connected with the lower surface of adjusting plate 907 of going up of multidimensional adjusting table 9, can not remake the rotation of β angle so sample 7 just is locked.
Multidimensional adjusting table 9 is made up of to adjusting handwheel 909, the little seat 910 of adjustment and extension spring 911 back adjustment handwheel 901, back lengthy motion picture spring hinge 902, base V-arrangement lower guideway 903, V-arrangement upper rail 904, preceding lengthy motion picture spring hinge 905, adjustment mounting 906, rise bed rearrangement frame 907, preceding adjustment handwheel 908, X.Raise bed rearrangement frame 907 and be positioned at the top of adjusting mounting 906, adjust the top that mounting 906 is positioned at V-arrangement upper rail 904, the preceding handwheel 908 of adjusting is positioned on the rise bed rearrangement frame 907, and with the threaded hole engagement of raising bed rearrangement frame 907, back adjustment handwheel 901 passes the macropore that raises bed rearrangement frame 907 and is positioned on the adjustment mounting 906, and with adjust the engagement of mounting 906 threaded holes, raising bed rearrangement frame 907 is connected with adjustment mounting 906 by back lengthy motion picture spring hinge 902, adjusting mounting 906 is connected with V-arrangement upper rail 904 by preceding lengthy motion picture spring hinge 905, V-arrangement upper rail 904 is connected with base V-arrangement lower guideway 903 by V-way, and can in base V-arrangement lower guideway 903, move along the guide rail direction, base V-arrangement lower guideway 903 is placed on the big base frame 15, the upper surface that raises bed rearrangement frame 907 is connected with the axle bed cover 802 of horizontal angle universal stage 8, and lower surface is connected with locking bed 810, palm horizontal angle universal stage 8 and above sample 7 parts thereof.Because of withstanding on, the screw head of preceding adjustment handwheel 908 adjusts on the mounting 906, so the rotation by preceding adjustment handwheel 908 can make with the rise bed rearrangement frame 907 of its screw-threaded engagement and do the rotation of two directions up and down around back lengthy motion picture spring hinge 902, because back lengthy motion picture spring hinge 902 is at the side that raises bed rearrangement frame 907, the rotation of raising bed rearrangement frame 907 not only changes the height direction of sample 7, but also can oscilaltion.In like manner, the screw rod of adjusting handwheel 901 because of the back withstands on the V-arrangement upper rail 904, handwheel 901 is adjusted in the rotation back can make adjustment mounting 906 do to rotate up and down around the preceding lengthy motion picture spring hinge 905 that is connected with its side, make adjust mounting 906 and more than comprise that sample 7 makes the height directions and rotate, but also can oscilaltion, thereby sample 7 can be done the α angle around X-axis and rotate adjustment in the YOZ plane, also can do to adjust up and down along the Z axle.Owing to be fixed on the base V-arrangement lower guideway 903 to the little seat 910 of the adjustment of adjusting handwheel 909 engagements with X, X withstands on the V-arrangement upper rail 904 to the screw rod of adjusting handwheel 909, extension spring 911 1 ends haul adjusts little seat 910, the other end hauls V-arrangement upper rail 904, rotation X can make V-arrangement upper rail 904 make the X both forward and reverse directions along the guide rail of base V-arrangement lower guideway 903 to move to adjusting handwheel 909, moves adjustment at directions X as both forward and reverse directions thereby drive sample 7.In a word, multidimensional adjusting table 9 is reached to do the rotation adjustment of α angle to sample 7, can make XY simultaneously and adjust to moving.
As shown in Figure 5, be logical light mouth amplification profile in embodiment of the invention incident light hurdle and the logical light mouth figure in laser alignment incident light hurdle.Left side figure is incident light hurdle 4 logical light mouth amplification profiles, and the logical light mouth in light hurdle is to be up and down a knife-edge otch 403.The right is the central point O that laser passes incident light hurdle 4 2The time hot spot sectional view (being equipped with the profile line part), hot spot cross section 401 is the rectangle rectangle of ABCD as seen from the figure.
As shown in Figure 6, be embodiment of the invention sample laser entrance port figure.As seen from the figure, sample 7 laser entrance ports 701 are A ' B ' C ' D ' rectangle rectangle (rectangle rectangles of outside), penetrate next laser beam 402 along central point 0 by incident light hurdle 4 3Inject in sample 7 entrance ports, the hot spot cross section is equipped with profile line rectangle rectangle partly in being, its incident beam all injects in sample 7 entrance port A ' B ' C ' D ' rectangles, can observe this by aligming microscope 5, adjusting horizontal angle universal stage 8 or the multidimensional adjusting table 9 above-mentioned relevant handwheels that illustrated reaches, when the hot spot section A BCD that sends when incident light hurdle 4 is excessive, the incident light hurdle that replaceable hot spot cross section is little, in a word, whole light are all injected in sample 7 entrance port A ' B ' C ' D '.
As shown in Figure 7, be embodiment of the invention sample frequency multiplication micro-nano structure cross sectional plan view.Sample 7 is generally by entrance port 701, internal microstructure 702, shell 703 and exit portal 704 are formed, incident light 402 is injected by entrance port 701, after the frequency multiplication of internal microstructure 702, its frequency doubled light 705 penetrates from exit portal 704, the intensity that penetrates frequency doubled light 705 is relevant with the incident angle β of incident light, therefore, when the laser that adjustment is penetrated by incident light hurdle 4 is all injected sample 7 laser entrance ports, be also noted that and rotate the incident angle that horizontal angle universal stage 8 is adjusted incident light, different sample 7 its optimal incident angle in fact β are different, can progressively adjust according to the incident angle of precognition.After adjusting incident angle and locking, also to pop one's head in 12 by mobile laser powermeter, make ejaculation frequency doubled light 705 can vertically inject laser powermeter probe 12.
Behind the position by above-mentioned adjustment sample 7, block cover 11 in the screening, measure the light intensity magnitude that shows double-frequency laser 705, the big short biography of the output intensity of double-frequency laser 705 is made I here by laser powermeter 14 1Open and block cover 11, the frequency multiplication optical filter 10 of taking sample 7 away and forming by three optical filters, allow laser 402 directly impinge perpendicularly on laser powermeter probe 12, block cover 11 on hiding again, measure the light intensity magnitude that shows laser 402 by laser powermeter 14, the light intensity magnitude of laser 402 note is made I here 2Laser loss when omitting incident and outgoing sample 7, and under the scattering loss situation that is filtered frequently, can calculate the relative efficiency eta of sample 7:
η=I 1/I 2

Claims (10)

1、中心对称材料微纳结构器件倍频转换效率测试装置,其特征在于包括:激光器(1)、准直扩束系统(2)、偏振片(3)、入射光栏(4)、对准显微镜(5)、承品台(6)、被测样品(7)、水平角旋转台(8)、多维调整台(9)、倍频滤光片(10)、遮挡罩(11)、激光功率计探头(12)、激光功率计(14)和大底台(15),激光器(1)、准直扩束系统(2)、偏振片(3)、入射光栏(4)、依次放置并安放于大底台(15)上,对准显微镜(5)竖直放置在被测样品(7)光线入口的上方,用于观察激光射入被测样品入口的对准情况;多维调整台(9)、激光功率计探头(12)和激光功率计(14)依次安放于大底台(15)上,固定被测样品(7)的样品承品台(6)安置在水平角旋转台(8)上,水平角旋转台(8)安置在多维调整台(9)上,倍频滤光片(10)位于激光功率计探头(12)的前端,在激光器(1)和激光功率计(14)之间罩有遮挡罩(11),以防止外来杂光对光强信号测量的影响;激光器(1)射出的激光先通过准直扩束系统(2)准直扩束,然后通过偏振片(3)和入射光栏(4),再通过竖直放置的对准显微镜(5)观察,由水平角旋转台(8)和多维调整台(9)的调整对准,由入射光栏(4)发出的光束射入被测样品(7),经过被测样品(7)倍频后的倍频光(705)通过倍频滤光片(10)滤光射入激光功率计探头(12),被探头接收后转换为电信号,送入激光功率计(14),由激光功率计(14)测量显示出倍频激光的光强大小,再与未放置被测样品和滤光片时检测的光强值相比,可得到倍频转换效率。1. The device for testing the frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices is characterized in that it includes: a laser (1), a collimator beam expander system (2), a polarizer (3), an incident aperture (4), an alignment Microscope (5), receiving table (6), tested sample (7), horizontal angle rotating table (8), multi-dimensional adjustment table (9), frequency doubling filter (10), shielding cover (11), laser Power meter probe (12), laser power meter (14) and large base (15), laser (1), collimator beam expander system (2), polarizer (3), incident aperture (4), placed in sequence And placed on the big bottom platform (15), the alignment microscope (5) is placed vertically above the light entrance of the sample under test (7), for observing the alignment of the laser beam into the entrance of the sample under test; the multi-dimensional adjustment table (9), the laser power meter probe (12) and the laser power meter (14) are placed on the large bottom platform (15) in sequence, and the sample receiving platform (6) for fixing the tested sample (7) is placed on the horizontal angle rotation platform (8), the horizontal angle rotating table (8) is placed on the multi-dimensional adjustment table (9), the frequency doubling filter (10) is located at the front end of the laser power meter probe (12), between the laser (1) and the laser power meter (14) is covered with a shield (11) to prevent the influence of extraneous stray light on the light intensity signal measurement; the laser light emitted by the laser (1) first passes through the collimated beam expander system (2) to collimate and expand the beam, and then passes through The polarizer (3) and the incident light barrier (4) are observed through the vertically placed alignment microscope (5), adjusted and aligned by the horizontal angle rotation stage (8) and the multi-dimensional adjustment stage (9), and the incident light The light beam emitted by the column (4) is injected into the sample under test (7), and the frequency-doubled light (705) after the frequency-doubling of the sample under test (7) is filtered by the frequency-multiplier filter (10) and injected into the laser power meter probe (12), after being received by the probe, it is converted into an electrical signal, sent to the laser power meter (14), and the light intensity of the frequency-doubled laser is shown by the laser power meter (14), and then compared with the unplaced sample to be tested and the filter The frequency doubling conversion efficiency can be obtained by comparing the light intensity value detected in one chip. 2、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征在于:所述的激光束(101)先通过聚焦镜(201)聚焦于聚焦镜的焦点O1点,再通过透镜前焦点也位于O1点的准直镜(202)使激光束(101)得到扩束和准直,得到扩束和准直的激光束通过偏振片(3)及旋转调整,使偏振方向与被测样品(7)所要求的方向一致;通过入射光栏(4)的激光束(402)射入被测样品入射口的对准情况由竖直放置可更换工作波段的可见到红外对准显微镜(5)观察,位置偏离由水平角旋转台(8)和多维调整台(9)来调整,对准显微镜(5)的物方折光小反射镜(501)以120°放置,不阻挡激光束(402)射入被测样品。2. The device for testing the frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, characterized in that: the laser beam (101) first passes through the focusing mirror (201) to focus on the focal point O1 of the focusing mirror Point, the collimating mirror (202) that also is positioned at O 1 point by the front focus of the lens makes the laser beam (101) obtain beam expansion and collimation, and the laser beam that obtains beam expansion and collimation passes through polarizer (3) and rotation adjustment , so that the polarization direction is consistent with the direction required by the measured sample (7); the alignment of the laser beam (402) passing through the incident light barrier (4) entering the entrance of the measured sample is determined by the vertical placement of the replaceable working band It can be seen that the infrared alignment microscope (5) is observed, and the position deviation is adjusted by the horizontal angle rotation stage (8) and the multi-dimensional adjustment stage (9). placed so as not to block the laser beam (402) from entering the sample to be tested. 3、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的倍频滤光片(10)由倍频滤光片一(1001)、倍频滤光片二(1002)和倍频滤光片三(1003)组成,倍频滤光片一(1001)是一入射光半透,其余波段包括倍频光波段全反的滤光片,倍频滤光片二(1002)是一对入射光全反倍频光半反的滤光片,倍频滤光片三(1003)是一对入射光全反倍频光全透的滤光片。3. The device for testing frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: said frequency doubling filter (10) consists of frequency doubling filter one (1001), Frequency-doubling filter 2 (1002) and frequency-doubling filter 3 (1003), frequency-doubling filter 1 (1001) is a filter that is semi-transparent to incident light, and the rest of the bands include frequency-doubling light bands. , frequency doubling filter 2 (1002) is a pair of incident light full inversion frequency doubling light semi-reflective filter, frequency doubling filter three (1003) is a pair of incident light all inversion frequency doubling light fully transparent filter light sheet. 4、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的承品台(6)由样品小压板(601)、样品垫板(602)、支板(603)组成,安装在水平角旋转台(8)的T形轴上,被测样品(7)的中心O4和激光光轴(402)等高并且平行。4. The device for testing the frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: the receiving table (6) is composed of a small sample pressure plate (601), a sample backing plate (602 ), a support plate (603), installed on the T-shaped shaft of the horizontal angle rotary table (8), the center O of the sample (7) to be tested ( 7 ) and the laser optical axis (402) are of equal height and parallel. 5、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的水平角旋转台(8)由第一钢球(801)、轴座套(802)、水平保持夹(803)、垂直保持夹(804)、第二钢球(805)、T形轴(806)、轴端档板(807)、弹性锁紧圈档板(808)、弹性锁紧圈(809)、锁紧座(810)、水平角度盘(811)、锁紧手轮(812)组成,T形轴(806)下端面通过第一钢球(801)与轴座套(802)上端面连接,还通过第二钢球(805)与轴座套(802)内圆柱面连接,使T形轴(806)可相对于轴座套(802)作水平角β滚动旋转,套在轴座套(802)外圆柱面的水平角度盘(811)放置在多维调整台(9)的上调整板(907)上,T形轴(806)的圆盘外圆柱面上刻有指标线,被测样品(7)的旋转可读出旋转β角度数,轴座套(802)固定在上调整板(907)上,T形轴(806)旋转调整后靠锁紧手轮(812)旋转收紧弹性锁紧圈(809),抱住T形轴的下端轴锁紧。5. The device for testing the frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: the horizontal angle rotating table (8) is composed of a first steel ball (801), a shaft seat sleeve (802), horizontal holding clip (803), vertical holding clip (804), second steel ball (805), T-shaped shaft (806), shaft end baffle (807), elastic locking ring baffle (808) , an elastic locking ring (809), a locking seat (810), a horizontal angle plate (811), and a locking hand wheel (812). The lower end of the T-shaped shaft (806) passes through the first steel ball (801) and the shaft The upper end surface of the seat sleeve (802) is connected, and the second steel ball (805) is also connected with the inner cylindrical surface of the shaft seat sleeve (802), so that the T-shaped shaft (806) can make a horizontal angle β relative to the shaft seat sleeve (802) Rolling and rotating, the horizontal angle plate (811) set on the outer cylindrical surface of the shaft seat sleeve (802) is placed on the upper adjustment plate (907) of the multi-dimensional adjustment table (9), and the outer cylindrical surface of the disc of the T-shaped shaft (806) There is an index line engraved on it, the rotation of the tested sample (7) can read the number of rotation β angles, the shaft seat sleeve (802) is fixed on the upper adjustment plate (907), and the T-shape shaft (806) is rotated and adjusted by locking The hand wheel (812) rotates and tightens the elastic locking ring (809), and hugs the lower end of the T-shaped shaft for locking. 6、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的多维调整台(9)由后调整手轮(901)、后长片簧铰链(902)、底座V形下导轨(903)、V形上导轨(904)、前长片簧铰链(905)、调整座架(906)、上调整座架(907)、前调整手轮(908)、X向调整手轮(909)、调整小座(910)和拉簧(911)组成,上调整座架(907)位于调整座架(906)的上方,调整座架(906)位于V形上导轨(904)的上方,前调整手轮(908)位于上调整座架(907)上,并与上调整座架(907)的螺纹孔啮合,后调整手轮(901)穿过上调整座架(907)的大孔位于调整座架(906)上,并与调整座架(906)螺纹孔啮合,上调整座架(907)通过后长片簧铰链(902)与调整座架(906)连接,调整座架(906)通过前长片簧铰链(905)与V形上导轨(904)连接,V形上导轨(904)通过V形导轨与底座V形下导轨(903)连接,并可在底座V形下导轨(903)中沿导轨方向移动,底座V形下导轨(903)安置在大底台(15)上,上调整座架(907)的上表面与水平角旋转台(8)的轴座套(802)连接,而下表面与锁紧座(810)连接,旋转前调整手轮(908)可使上调整座架(907)绕后长片簧铰链(902)作上下两方向的转动,旋转后调整手轮(901)可使调整座架(906)绕与其侧边连接的前长片簧铰链(905)作上下转动,调整小座(910)固定在底座V形下导轨(903)上,拉簧(911)一端拉着调整小座(910),另一端拉着V形上导轨(904),旋转X向调整手轮(909)可使V形上导轨(904)作X正反方向移动,总之,达到多维调整台(9)能对被测样品(7)作α角转动,同时又能作XY向移动调整。6. The device for testing frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: said multi-dimensional adjustment table (9) is composed of a rear adjustment hand wheel (901), a rear long leaf spring Hinge (902), base V-shaped lower guide rail (903), V-shaped upper guide rail (904), front long leaf spring hinge (905), adjustment seat frame (906), upper adjustment seat frame (907), front adjustment handwheel (908), X-direction adjustment handwheel (909), adjustment seat (910) and extension spring (911), the upper adjustment seat (907) is located above the adjustment seat (906), and the adjustment seat (906) Located above the V-shaped upper guide rail (904), the front adjustment handwheel (908) is located on the upper adjustment mount (907) and engages with the threaded hole of the upper adjustment mount (907), and the rear adjustment handwheel (901) wears The large hole of the upper adjustment seat (907) is located on the adjustment seat (906), and is engaged with the threaded hole of the adjustment seat (906). The upper adjustment seat (907) passes through the rear long leaf spring hinge (902) and the adjustment The seat frame (906) is connected, and the seat frame (906) is adjusted to be connected with the V-shaped upper guide rail (904) by the front long leaf spring hinge (905), and the V-shaped upper guide rail (904) is passed through the V-shaped guide rail and the base V-shaped lower guide rail ( 903) is connected, and can move along the guide rail direction in the V-shaped lower guide rail (903) of the base, the V-shaped lower guide rail (903) of the base is placed on the big base (15), and the upper surface of the upper adjustment seat frame (907) and The shaft seat sleeve (802) of the horizontal angle rotating table (8) is connected, and the lower surface is connected with the locking seat (810), and the front adjustment hand wheel (908) can be rotated so that the upper adjustment seat frame (907) can be wound around the rear long leaf spring The hinge (902) rotates up and down. After the rotation, the adjustment hand wheel (901) can make the adjustment seat frame (906) rotate up and down around the front long leaf spring hinge (905) connected to its side, and the small seat (910) can be adjusted. ) is fixed on the V-shaped lower guide rail (903) of the base, one end of the tension spring (911) pulls the adjustment seat (910), and the other end pulls the V-shaped upper guide rail (904), and the X-direction adjustment hand wheel (909) can be rotated. Make the V-shaped upper guide rail (904) move in the positive and negative direction in X direction. In a word, the multi-dimensional adjustment table (9) can rotate the tested sample (7) at an angle of α, and can also move and adjust in XY direction at the same time. 7、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的入射光栏(4)通光口剖面,是上下为一刀形切口,激光穿过入射光栏(4)的中心时光斑截面为一长方形矩形ABCD,被测样品激光入射口是A′B′C′D′长方形矩形。7. The device for testing the frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: the section of the light opening of the incident light barrier (4) is a knife-shaped cut up and down, and the laser When passing through the center of the incident light barrier (4), the spot section is a rectangular rectangle ABCD, and the laser entrance of the sample to be measured is a rectangular rectangle A'B'C'D'. 8、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的遮挡罩(11)是一前面开有激光(101)入射孔,后面下边开有探测信号引出线(13)的孔和上面开有对准显微镜(5)观察用孔外,其余两侧面都无开孔,且内壁涂黑的外罩,以防止外来杂光对光强信号测量的影响。8. The device for testing frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: said shield (11) is a laser (101) incident hole opened on the front, and the lower side of the back is Outside the hole with the detection signal lead-out line (13) and the observation hole with the alignment microscope (5) on it, the other two sides have no openings, and the inner wall is painted black to prevent external stray light from affecting the light intensity signal. Measuring impact. 9、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述的被测样品(7)由入射口(701)、内部微结构(702)、外壳(703)和出射口(704)组成,入射光(402)由入射口(701)射入,经内部微结构(702)的倍频后,其倍频光(705)从出射口(704)射出,射出倍频光(705)的强度与入射光的入射角度β有关,每种被测样品(7)都有一个最佳入射角度,根据预知的最佳角度调整,在调整后还要移动激光功率计探头(12)使射出倍频光(705)垂直射入。9. The device for testing frequency doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: said sample to be tested (7) consists of an entrance (701), an internal microstructure (702) , housing (703) and exit port (704), the incident light (402) enters from the entrance port (701), and after frequency doubling by the internal microstructure (702), its frequency-doubled light (705) passes through the exit port ( 704) is emitted, and the intensity of the emitted frequency-doubled light (705) is related to the incident angle β of the incident light. Each sample (7) to be tested has an optimal incident angle, which is adjusted according to the predicted optimal angle. It is necessary to move the laser power meter probe (12) to make the emitted frequency doubled light (705) vertically incident. 10、根据权利要求1所述的中心对称材料微纳结构器件倍频转换效率测试装置,其特征还在于:所述光强的测量为通过调整被测样品(7)的位置后,遮上遮挡罩(11),由激光功率计(14)测量显示倍频激光(705)的光强l1,打开遮挡罩(11),拿去被测样品(7)和由三个滤光片组成的倍频滤光片(10),让激光(402)直接垂直入射到激光功率计探头(12),再遮上遮挡罩(11),由激光功率计(14)测量显示激光(402)的光强l2,则可计算出被测样品(7)的转换效率η=l1/l210. The device for testing the frequency-doubling conversion efficiency of centrosymmetric material micro-nano structure devices according to claim 1, further characterized in that: the light intensity is measured by adjusting the position of the tested sample (7) and covering it with a shield cover (11), the laser power meter (14) measures and displays the light intensity l1 of the frequency-doubled laser (705), opens the cover (11), and takes the sample to be tested (7) and the optical filter composed of three filters. The frequency doubling filter (10) allows the laser light (402) to directly enter the laser power meter probe (12) vertically, then cover the shield (11), and measure and display the light of the laser light (402) by the laser power meter (14). If l 2 is stronger, then the conversion efficiency η=l 1 /l 2 of the tested sample (7) can be calculated.
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