CN102193322B - Detection device and adjusting method for objective lens roof of photo-etching machine - Google Patents
Detection device and adjusting method for objective lens roof of photo-etching machine Download PDFInfo
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- CN102193322B CN102193322B CN 201010118854 CN201010118854A CN102193322B CN 102193322 B CN102193322 B CN 102193322B CN 201010118854 CN201010118854 CN 201010118854 CN 201010118854 A CN201010118854 A CN 201010118854A CN 102193322 B CN102193322 B CN 102193322B
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- collimator
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- object lens
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Abstract
The invention relates to a detection device and an adjusting method for an objective lens roof of a photo-etching machine. The device comprises a lower plate component, an upper plate component, an auto-collimating telescope and an objective lens roof reference lens, wherein an emergent beam of the auto-collimating telescope is sent to the lower plate component; one part of the light beam sent to the lower plate component is directly reflected to the auto-collimating telescope by the lower plate component; the other part of the light beam is reflected to the upper plate component by the lower plate component; the light beam which reaches the upper plate component is repeatedly reflected by the upper plate component and then is reflected to the objective lens roof reference lens; and then the light beam is reflected to the auto-collimating telescope along the original light path after being reflected by the objective lens roof reference lens. According to the detection device and the adjusting method for the objective lens roof of the photo-etching machine provided by the invention, by detecting the parallel degree of the emergent beam of the auto-collimating telescope and the reflected light beam of the objective lens roof reference lens, the position of the upper surface of the objective lens roof in the Rz direction can be adjusted. Besides, the adjusting precision is high.
Description
Technical field
The present invention relates to litho machine, relate in particular to a kind of pick-up unit and method of adjustment of objective lens roof of photo-etching machine.
Background technology
In the complete machine integrating process of litho machine, the installation and measuring of most of parts, parts all needs to adopt high precision to adjust frock, to realize the integrated precision of litho machine.
Referring to Fig. 1, set up three-dimensional system of coordinate take the plane at the upper surface place of the main substrate 41 of litho machine as the XY plane, hand thumb is pointed to the Z axis positive dirction, all the other four fingers are clenched fist, and the direction that all the other four fingers are clenched fist is defined as the Rz direction, in like manner defines Rx, Ry direction.In litho machine, the measuring basis of Rz is on the mask platform interferometer, object lens 42 tops are provided with object lens top board 43, the installation accuracy of the upper surface of object lens top board 43 on the Rz direction directly affects the installation accuracy of mask prealignment sensor, if object lens top board 43 is installed then direct ectocrine vertex plate not in place to the installation accuracy of mask platform interferometer, thereby affect the installation accuracy of mask platform interferometer, finally affect the exposure productive rate of litho machine.
From object lens interface position pin 44 to distant between the locating surface of object lens top board 43, usually about 800mm, if adopt traditional mechanical detection frock, precision can only reach ± 700urad about, precision index far below product demand, and litho machine complex structure, space layout are compact, and the pick-up unit of objective lens roof of photo-etching machine can't detect and adjust the position of upper surface on the Rz direction of object lens top board 43 online in the prior art.
For above problem, be necessary to design a kind of simple in structure, modularization, easily detachable pick-up unit, to satisfy the needs of parts in the litho machine being debug and detected maintenance.
Summary of the invention
The object of the present invention is to provide a kind of pick-up unit and method of adjustment of objective lens roof of photo-etching machine, this apparatus structure is simple, and easily assembling detects stroke long, is fit to the online position of upper surface on the Rz direction of detecting and adjusting the object lens top board, and precision is high.
To achieve the above object, the invention provides a kind of pick-up unit of objective lens roof of photo-etching machine, it is characterized in that, comprise lower board component, upper board component, auto-collimator and object lens top board reference mirror; The outgoing beam of described auto-collimator incides on the described lower board component, a light beam part that incides described lower board component directly is reflected back described auto-collimator by described lower board component, remainder is then injected described upper board component after described lower board component reflection, inject the light beam of described upper board component through being mapped to behind the described upper board component Multi reflection on the described object lens top board reference mirror, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, described lower board component comprises frock lower plate, a plurality of tool locating pin, Amici prism, frock reference mirror and sextuple adjusting seat; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole; Described frock reference mirror is arranged on the upper surface of described frock lower plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to the upper surface of described frock lower plate; Described sextuple adjusting seat is arranged on the upper surface of described frock lower plate; Described Amici prism is arranged on the described sextuple adjusting seat.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, the centre of described Amici prism is provided with a translucent half reflection film, and the upper surface of this translucent half reflection film and described Amici prism is at 45 °, and a side of described Amici prism is coated with translucent half reflection film.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, the bottom of described tool locating pin is provided with register pin bulb interface.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, described upper board component comprises frock upper plate, sextuple adjusting seat and Amici prism; Described sextuple adjusting seat is arranged on the described frock upper plate; Described Amici prism is arranged on the described sextuple adjusting seat.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, described upper board component also comprises the frock reference mirror, and described frock reference mirror is arranged on the described frock upper plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to described frock upper plate.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, described Amici prism is five jiaos of Amici prisms.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine, wherein, described auto-collimator comprises graticule and auto-collimator object lens; Described graticule is arranged on the back focal plane place of described auto-collimator object lens, and this graticule is perpendicular to the optical axis of described auto-collimator object lens.
The pick-up unit of above-mentioned objective lens roof of photo-etching machine wherein, is carved with X, Y-direction index line picture on the described graticule, the zero-bit place of described index line picture overlaps with the focus of described auto-collimator object lens.
Another kind of technical scheme of the present invention is, uses the pick-up unit of above-mentioned objective lens roof of photo-etching machine to adjust object lens top board Rz to the method for precision, may further comprise the steps: step S1, use the auto-collimator off-line to install and adjust lower board component; Step S2 uses the auto-collimator off-line to install and adjusts upper board component; Step S3 is installed to described lower board component on the object lens interface position pin; Step S4 is installed to auto-collimator on the litho machine; Step S5 is installed to described upper board component on the object lens top board; Step S6 is installed to object lens top board reference mirror on the described object lens top board; Step S7 adjusts described object lens top board; Step S8, dismounting lower described lower board component, upper board component and object lens top board reference mirror.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, and described lower board component frock lower plate, a plurality of tool locating pin, Amici prism, frock reference mirror and sextuple adjusting seat; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole, described step S1 is specially: step S1.1, described frock reference mirror is installed on the described frock lower plate, during installation, the reflecting surface of described frock reference mirror is close to the lateral wall of a tool locating pin; Step S1.2 locates described auto-collimator, makes the light beam of described auto-collimator emission be reflected back described auto-collimator by the reflecting surface of described frock reference mirror; Step S1.3, described sextuple adjusting seat is installed on the described frock lower plate, described Amici prism is installed on the described sextuple adjusting seat, uses described auto-collimator to adjust described sextuple adjusting seat, makes the parallel sided of described Amici prism in the reflecting surface of described frock reference mirror.
Above-mentioned adjustment object lens top board Rz is to the method for precision, and wherein, described upper board component comprises frock upper plate, sextuple adjusting seat, Amici prism and frock reference mirror; Described step S2 is specially: step S2.1, described frock reference mirror is installed on the described frock upper plate, and during installation, the reflecting surface of described frock reference mirror is close to the sidewall of described frock upper plate; Step S2.2 locates described auto-collimator, makes the light beam of described auto-collimator emission be reflected back described auto-collimator by the reflecting surface of described frock reference mirror; Step S2.3 is installed to described sextuple adjusting seat on the described frock upper plate, and described Amici prism is installed on the described sextuple adjusting seat, uses described auto-collimator to adjust described sextuple adjusting seat, makes described Amici prism perpendicular to described frock upper plate; Step S3.4, the lower described frock reference mirror of dismounting.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S3 is specially: board component is enclosed within on the lateral wall of described photo-etching machine objective lens by the mounting hole of described frock lower plate under the described frock, and described tool locating pin is connected with described object lens interface position pin.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S4 is specially: allow on the Amici prism of the described frock lower plate of light beam directive that described auto-collimator penetrates, a light beam part that incides described Amici prism sees through described Amici prism and incides on the reflecting surface of described frock reference mirror, after the reflecting surface reflection of described frock reference mirror, return described auto-collimator along original optical path, observe described auto-collimator, adjust described auto-collimator, make the reflecting surface of described frock reference mirror perpendicular to the optical axis of described auto-collimator, to lock the position of described auto-collimator.
Above-mentioned adjustment object lens top board Rz is to the method for precision, and wherein, described object lens top board is provided with the upper plate component interface, and among the described step S5, described upper board component is installed on the described object lens top board by described upper plate component interface.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described object lens top board is provided with the reference mirror mechanical references, described object lens top board reference mirror is provided with reflecting surface, among the described step S6, the reflecting surface of described object lens top board reference mirror is close to described reference mirror mechanical references, guarantees that the reflecting surface of described object lens top board reference mirror is perpendicular to the upper surface of described object lens top board.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S7 is specially: the light beam that allows described auto-collimator penetrate incides on the Amici prism of described lower board component, and a light beam part that incides the Amici prism of described lower board component is reflected back described auto-collimator by this Amici prism; A part sees through on the reflecting surface of frock reference mirror that this Amici prism incides described lower board component, and the Amici prism that is seen through described lower board component after the reflection of the reflecting surface of this frock reference mirror returns described auto-collimator; After being reflected by the Amici prism of described lower board component, some injects the Amici prism of described upper board component, the light beam that incides the Amici prism of described upper board component is injected described object lens top board reference mirror behind this Amici prism Multi reflection, and by described object lens top board reference mirror reflection, light beam through described object lens top board reference mirror reflection returns described auto-collimator along original optical path, observe described auto-collimator, adjust described object lens top board, make the light beam of reflecting surface reflection of described object lens top board reference mirror parallel with the light beam of described auto-collimator ejaculation.
The pick-up unit of objective lens roof of photo-etching machine of the present invention and method of adjustment, each modular construction of this device is simple, easily assembling, can effectively evade litho machine space constraint condition, can detect online and adjust the position of upper surface on the Rz direction of object lens top board; This method of adjusting object lens top board Rz direction is easy and simple to handle; The mode that the method adopts machinery location and optical detection to engage detects stroke long, and the adjustment precision is high, the adjustment precision can be controlled in ± 365urad in.
Description of drawings
The pick-up unit of objective lens roof of photo-etching machine of the present invention and method of adjustment are provided by following embodiment and accompanying drawing.
Fig. 1 is the schematic diagram of photo-etching machine objective lens in the prior art;
Fig. 2 is the structural representation of lower board component among the present invention;
Fig. 3 is the structural representation of upper board component among the present invention;
Fig. 4 is the structural representation of auto-collimator among the present invention;
Fig. 5 is the structural representation of graticule among the present invention;
The fundamental diagram of auto-collimator among Fig. 6 the present invention;
Fig. 7 is the scheme of installation that descends board component and auto-collimator among the present invention;
Fig. 8 is the vertical view of object lens top board among the present invention;
Fig. 9 is the scheme of installation of upper board component among the present invention.
Embodiment
Below with reference to Fig. 2～Fig. 9 pick-up unit and the method for adjustment of objective lens roof of photo-etching machine of the present invention are described in further detail.
The pick-up unit of objective lens roof of photo-etching machine of the present invention comprises lower board component, upper board component, auto-collimator and object lens top board reference mirror;
The outgoing beam of described auto-collimator incides on the described lower board component, a light beam part that incides described lower board component directly is reflected back described auto-collimator by described lower board component, remainder is then injected described upper board component after described lower board component reflection, inject the light beam of described upper board component through being mapped to behind the described upper board component Multi reflection on the described object lens top board reference mirror, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path.
Referring to Fig. 2, described lower board component comprises frock lower plate 11, a plurality of tool locating pin 12, Amici prism 13, frock reference mirror 14 and sextuple adjusting seat 15;
The central authorities of described frock lower plate 11 are provided with a mounting hole 111;
Described a plurality of tool locating pin 12 passes described frock lower plate 11, is arranged on the excircle of described mounting hole 111;
The bottom of described tool locating pin 12 is provided with register pin bulb interface 121;
Described frock reference mirror 14 is arranged on the upper surface of described frock lower plate 11, and the reflecting surface 141 of this frock reference mirror 14 is close to the lateral wall of a tool locating pin 12, makes described frock reference mirror 14 perpendicular to the upper surface of described frock lower plate 11;
Described sextuple adjusting seat 15 is arranged on the upper surface of described frock lower plate 11;
Described Amici prism 13 is arranged on the described sextuple adjusting seat 15;
The centre of described Amici prism 13 is provided with a translucent half reflection film 131, and this translucent half reflection film 131 is at 45 ° with the upper surface of described Amici prism 13, and a side 132 of described Amici prism 13 is coated with translucent half reflection film.
Referring to Fig. 3, described upper board component comprises frock upper plate 21, sextuple adjusting seat 22, Amici prism 23 and frock reference mirror 24;
Described frock upper plate 21 is " L " font, comprises transverse slat 213 and vertical plate 214, and described vertical plate 214 is perpendicular to described transverse slat 213, and this vertical plate 214 is arranged on an end of described transverse slat 213;
Described frock reference mirror 24 is arranged on the upper surface of described transverse slat 213, and the reflecting surface 241 of this frock reference mirror 24 is close to the side surface of described vertical plate 214, makes described frock reference mirror 24 perpendicular to the upper surface of described transverse slat 213;
Described sextuple adjusting seat 22 is arranged on the upper surface of described transverse slat 213;
Described Amici prism 23 is arranged on the described sextuple adjusting seat 22;
Described Amici prism 23 is five jiaos of Amici prisms;
Described transverse slat 213 is provided with light hole 211, and described vertical plate 214 is provided with light hole 212, and described sextuple adjusting seat 22 is provided with light hole 221, and the light hole 221 of described sextuple adjusting seat 22 is communicated with the light hole 211 of described transverse slat 213.
Referring to Fig. 4, described auto-collimator 30 comprises graticule 31 and auto-collimator object lens 32;
Described graticule 31 is arranged on the back focal plane place of described auto-collimator object lens 32, and this graticule 31 is perpendicular to the optical axis OA of described auto-collimator object lens 32.
The center of described auto-collimator object lens 32 is O, and the back focus of described auto-collimator object lens 32 is F ', and the back focal length of these auto-collimator object lens 32 is f '.
Referring to Fig. 5, be carved with X, Y-direction index line picture on the described graticule 31, the zero-bit place of described index line picture overlaps with the back focus F ' of described auto-collimator object lens 32.
The light beam that described auto-collimator 30 penetrates is parallel beam.
In conjunction with Fig. 4 and Fig. 6, the principle of work of described auto-collimator 30 is described: after a plane mirror 50 is arranged on described auto-collimator 30, the parallel beam of described auto-collimator 30 outgoing can be reflected by described plane mirror 50 after being mapped to described plane mirror 50, the light beam that reflects converges through the auto-collimator object lens 32 of described auto-collimator 30, at graticule 31 formation one hot spot of described auto-collimator 30; If the reflecting surface of described plane mirror 50 is perpendicular to the optical axis OA of described auto-collimator object lens 32, the parallel beam of described auto-collimator 30 outgoing returns described auto-collimator 30 along original optical path after described plane mirror 50 reflections, zero-bit place (the back focus F ' that is described auto-collimator object lens 32 locates) at the index line picture of described graticule 31 forms a hot spot, as shown in Figure 4; If an angle α is arranged between the optical axis OA of the reflecting surface of described plane mirror 50 and described auto-collimator object lens 32, angle between the normal of the light beam that is then reflected by described plane mirror 50 and the reflecting surface of described plane mirror 50 is 2 α, the hot spot that the light beam that reflects forms at described graticule 31 looks like to have a displacement L with respect to the index line of described graticule 31, as shown in Figure 6.
By laws of geometrical optics as can be known, the relational expression of angle α and displacement L is as follows: L=2f ' α, be α=L/2f ', wherein, f ' is the back focal length of described auto-collimator object lens 32, α is the pitch angle of the reflecting surface of described plane mirror 50, therefore, can calculate by hot spot the inclined angle alpha of the reflecting surface of described plane mirror 50 with respect to the displacement L of index line picture.
Each modular construction of the pick-up unit of objective lens roof of photo-etching machine of the present invention is simple, easily assembling, can effectively evade litho machine space constraint condition, can detect online and adjust the position of upper surface on the Rz direction of object lens top board.
Using the pick-up unit of above-mentioned objective lens roof of photo-etching machine to adjust object lens top board Rz may further comprise the steps to the method for precision:
Step 1, off-line are installed and are adjusted lower board component;
Step 1.1, on experiment porch, described frock reference mirror 14 is installed on the described frock lower plate 11, during installation, the reflecting surface 141 of described frock reference mirror 14 is close to the lateral wall of a tool locating pin 12, make described frock reference mirror 14 perpendicular to the upper surface of described frock lower plate 11, namely utilize the described frock reference mirror 14 in lateral wall (mechanical references) location of described tool locating pin 12;
Step 1.2 is located described auto-collimator 30;
Allow the reflecting surface 141 of the described frock reference mirror 14 of parallel beam directive of described auto-collimator 30 emissions, adjust described auto-collimator 30, make the parallel beam of described auto-collimator 30 emissions be reflected back described auto-collimator 30 by the reflecting surface 141 of described frock reference mirror 14, and the position of fixing described auto-collimator 30;
Step 1.3, described sextuple adjusting seat 15 is installed on the described frock lower plate 11, again described Amici prism 13 is installed on the described sextuple adjusting seat 15, whether parallelly with the reflecting surface 141 of described frock reference mirror 14 use auto-collimator to detect the side 132 of described Amici prism 13: to allow the Amici prism 13 of the described lower board component of parallel beam directive of described auto-collimator 30 emissions, the light beam that a part incides described Amici prism 13 is mapped on the side 132 of described Amici prism 13 through behind the translucent half reflection film 131 of described Amici prism 13, incide a light beam part on the side 132 of described Amici prism 13 by side 132 reflections of described Amici prism 13, another part sees through the side 132 of described Amici prism 13, light beam through 132 reflections of the side of described Amici prism 13 returns described auto-collimator 30 through described translucent half reflection film 131, graticule 31 at described auto-collimator 30 forms a hot spot, such as the B among Fig. 5, the light beam that sees through the side 132 of described Amici prism 13 is mapped on the reflecting surface 141 of frock reference mirror 14 of described lower board component, after the reflecting surface reflection of described frock reference mirror 14, see through the side 132 of described Amici prism 13, described translucent half reflection film 131 returns described auto-collimator 30, form a hot spot at described graticule 31, such as the C among Fig. 5, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, the side 132 that then shows described Amici prism 13 is not parallel with the reflecting surface 141 of described frock reference mirror 14, depart from first the displacement of the Y ' axle of described index line picture according to hot spot, adjust the sextuple adjusting seat 15 of described lower board component, until hot spot overlaps with the Y ' axle of described index line picture, such as the B ' among Fig. 5 and C ', at this moment, described lower board component is finished Rx, adjustment on the Ry direction, then depart from the displacement of the X ' axle of described index line picture according to hot spot, adjust the sextuple adjusting seat 15 of described lower board component, until hot spot is positioned at the zero-bit place of described index line picture, at this moment, described lower board component is finished the adjustment on the Rz direction, and described lower board component is modulated to desirable precision;
Step 2, off-line are installed and are adjusted upper board component;
Step 2.1, on experiment porch, described frock reference mirror 24 is installed to described frock upper plate 21, during installation, the reflecting surface 241 of described frock reference mirror 24 is close to the side surface of described vertical plate 214, make described frock reference mirror 24 perpendicular to the upper surface of the transverse slat 213 of described frock upper plate 21, namely utilize the described frock reference mirror 24 in upper surface (mechanical references) location of the transverse slat 213 of described frock upper plate 21;
Step 2.2 is located described auto-collimator 30;
Allow the reflecting surface 241 of the described frock reference mirror 24 of parallel beam directive of described auto-collimator 30 emissions, adjust described auto-collimator 30, make the parallel beam of described auto-collimator 30 emissions be reflected back described auto-collimator 30 by the reflecting surface 141 of described frock reference mirror 14, and the position of fixing described auto-collimator 30;
Step 2.3, described sextuple adjusting seat 22 is installed on the described frock upper plate 21, again described Amici prism 23 is installed on the described sextuple adjusting seat 22, use auto-collimator 30 to adjust the position of described Amici prism 23: to allow the Amici prism 23 of the described upper board component of parallel beam directive of described auto-collimator 30 emissions, incide on the reflecting surface 241 of light beam through the frock reference mirror 24 that is mapped to described upper board component behind the described Amici prism 23 of described Amici prism 23, by reflecting surface 241 reflections of described frock reference mirror 24, see through described Amici prism 23 through the light beam of reflecting surface 241 reflection of described frock reference mirror 24 and return described auto-collimator 30, graticule 31 at described auto-collimator 30 forms a hot spot, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, show that then described Amici prism 23 is not orthogonal to the upper surface of described frock upper plate 21, depart from first the displacement of the Y ' axle of described index line picture according to hot spot, adjust the sextuple adjusting seat 22 of described upper board component, until hot spot overlaps with the Y ' axle of described index line picture, at this moment, described upper board component is finished Rx, adjustment on the Ry direction, then depart from the displacement of the X ' axle of described index line picture according to hot spot, adjust the sextuple adjusting seat 22 of described upper board component, until hot spot is positioned at the zero-bit place of described index line picture, at this moment, described upper board component is finished the adjustment on the Rz direction, and described upper board component is modulated to desirable precision;
Step 3, the frock reference mirror 24 of the lower described upper board component of dismounting;
Step 4 is installed described lower board component;
Referring to Fig. 7, described lower board component is enclosed within on the lateral wall of described photo-etching machine objective lens by the mounting hole 111 of frock lower plate 11 central authorities of described lower board component, the tool locating pin 12 of described lower board component is connected with the object lens interface position pin 44 of litho machine main substrate 41, the register pin bulb interface 121 of described tool locating pin 12 bottoms cooperates with the register pin bulb 441 on described object lens interface position pin 44 tops, guaranteed to install the precision of described lower board component by machining, made described lower board component be in ideal position with respect to the photo-etching machine objective lens interface;
Step 5 is installed described auto-collimator 30;
Referring to Fig. 7, described auto-collimator 30 is installed on the main substrate 41 of litho machine, the parallel beam of described auto-collimator 30 outgoing is incided on the Amici prism 13 of described lower board component, a light beam part that incides described Amici prism 13 sees through the translucent half reflection film 131 of described Amici prism 13, the side 132 of described Amici prism 13 is incided on the reflecting surface 141 of described frock reference mirror 14, after the reflecting surface reflection of described frock reference mirror 14, see through the side 132 of described Amici prism 13, described translucent half reflection film 131 returns described auto-collimator 30, form a hot spot at described graticule 31, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, the optical axis OA out of plumb that then shows reflecting surface 141 with the auto-collimator object lens 32 of described auto-collimator 30 of described frock reference mirror 14, adjust described auto-collimator 30, make hot spot be positioned at the zero-bit place of described index line picture, show that namely the reflecting surface 141 of described frock reference mirror 14 perpendicular to the optical axis OA of described auto-collimator object lens 32, locks the position of described auto-collimator 30;
Step 6 is installed described upper board component;
Referring to Fig. 8, the object lens top board 43 of litho machine is provided with upper plate component interface 45, described upper board component is installed on the described object lens top board 43 by described upper plate component interface 45, and described upper plate component interface 45 is set, and is guaranteed to install the precision of described upper board component by machining;
Step 9, installation material vertex plate reference mirror 60;
Referring to Fig. 8, the object lens top board 43 of litho machine is provided with reference mirror mechanical references 47, described object lens top board reference mirror 60 is installed on the described object lens top board 43, the reflecting surface 61 of described object lens top board reference mirror 60 is close to described reference mirror mechanical references 47, guarantee that the reflecting surface 61 of described object lens top board reference mirror 60 is perpendicular to the upper surface of described object lens top board 43, described reference mirror mechanical references 47 is set, is guaranteed to install the precision of described object lens top board reference mirror 60 by machining;
The parallel beam of described auto-collimator 30 outgoing incides on the translucent half reflection film 131 of Amici prism 13 of described lower board component, part light beam sees through described translucent half reflection film 131 and is mapped on the described side 132, and remaining is by described translucent half reflection film 131 reflections;
A light beam part that incides on the described side 132 is directly reflected by this side 132, and remaining then sees through this side 132; Light beam through 132 reflections of described side returns described auto-collimator 30 through described translucent half reflection film 131, forms a hot spot at described graticule 31; The light beam that sees through described side 132 is injected the reflecting surface 141 of described frock reference mirror 14, after reflecting surface 141 reflections of described frock reference mirror 14, return described auto-collimator 30 through described side 132, described translucent half reflection film 131, form a hot spot at described graticule 31;
Pass through the light hole 211 of transverse slat 213 through the light beam of described translucent half reflection film 131 reflections, the light hole 221 of described sextuple adjusting seat 22 is injected described Amici prism 23, light hole 212 by vertical plate 214 behind 23 liang of secondary reflections of described Amici prism is mapped on the reflecting surface 61 of described object lens top board reference mirror 60, the light beam that incides on the reflecting surface 61 of described object lens top board reference mirror 60 is penetrated back described Amici prism 23 after reflecting surface 61 reflections of described object lens top board reference mirror 60, again behind 23 liang of secondary reflections of described Amici prism, penetrate back described translucent half reflection film 131, the light beam of penetrating back described translucent half reflection film 131 returns described auto-collimator 30 after described translucent half reflection film 131 reflections, form a hot spot at described graticule 31;
Detect the zero-bit place whether three hot spots are positioned at described index line picture, if hot spot is not positioned at the zero-bit place of described index line picture, the parallel beam that the light beam of reflecting surface 61 reflection of described object lens top board reference mirror 60 and 30 outgoing of described auto-collimator then are described is not parallel, the upper surface that is described object lens top board 43 does not satisfy integrated accuracy requirement on the Rz direction, described object lens top board 43Rz degree of freedom is adjusted, make three hot spots all be positioned at the zero-bit place of described index line picture, at this moment, the light beam of reflecting surface 61 reflections of described object lens top board reference mirror 60 is parallel with the parallel beam of described auto-collimator 30 outgoing, has finished the adjustment of described object lens top board 43Rz direction;
It is easy and simple to handle to the method for precision that the present invention adjusts object lens top board Rz.
The present invention adjusts object lens top board Rz to the mode that the method for precision adopts machinery location and optical detection to engage, and detects stroke long, and the adjustment precision is high, the adjustment precision can be controlled in ± 365urad in.
Claims (17)
1. the pick-up unit of an objective lens roof of photo-etching machine is characterized in that, comprises lower board component, upper board component, auto-collimator and is installed in object lens top board reference mirror on the object lens top board;
The outgoing beam of described auto-collimator incides on the described lower board component, the light beam that incides described lower board component directly is reflected back described auto-collimator by described lower board component through the Amici prism part in the described lower board component, remainder is then injected described upper board component after described lower board component reflection, inject the light beam of described upper board component through being mapped to behind the described upper board component Multi reflection on the described object lens top board reference mirror, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path.
2. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 1 is characterized in that, described lower board component also comprises frock lower plate, a plurality of tool locating pin, frock reference mirror and sextuple adjusting seat;
Described frock lower plate is provided with a mounting hole;
Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole;
Described frock reference mirror is arranged on the upper surface of described frock lower plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to the upper surface of described frock lower plate;
Described sextuple adjusting seat is arranged on the upper surface of described frock lower plate;
Described Amici prism is arranged on the described sextuple adjusting seat.
3. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 2, it is characterized in that, the centre of described Amici prism is provided with a translucent half reflection film, and the upper surface of this translucent half reflection film and described Amici prism is at 45 °, and a side of described Amici prism is coated with translucent half reflection film.
4. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 2 is characterized in that, the bottom of described tool locating pin is provided with register pin bulb interface.
5. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 1 is characterized in that, described upper board component comprises frock upper plate, sextuple adjusting seat and Amici prism;
Described sextuple adjusting seat is arranged on the described frock upper plate;
Described Amici prism is arranged on the described sextuple adjusting seat.
6. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 5, it is characterized in that, described upper board component also comprises the frock reference mirror, and described frock reference mirror is arranged on the described frock upper plate, this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to described frock upper plate.
7. such as the pick-up unit of claim 5 or 6 described objective lens roof of photo-etching machines, it is characterized in that, described Amici prism is five jiaos of Amici prisms.
8. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 1 is characterized in that, described auto-collimator comprises graticule and auto-collimator object lens;
Described graticule is arranged on the back focal plane place of described auto-collimator object lens, and this graticule is perpendicular to the optical axis of described auto-collimator object lens.
9. the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 8 is characterized in that, is carved with X, Y-direction index line picture on the described graticule, and the zero-bit place of described index line picture overlaps with the focus of described auto-collimator object lens.
10. one kind is used the pick-up unit of objective lens roof of photo-etching machine as claimed in claim 1 to adjust object lens top board Rz to the method for precision, it is characterized in that, may further comprise the steps:
Step S1 uses the auto-collimator off-line to install and adjusts lower board component;
Step S2 uses the auto-collimator off-line to install and adjusts upper board component;
Step S3 is installed to described lower board component on the object lens interface position pin;
Step S4 is installed to auto-collimator on the litho machine;
Step S5 is installed to described upper board component on the object lens top board;
Step S6 is installed to object lens top board reference mirror on the described object lens top board;
Step S7 adjusts described object lens top board;
Step S8, dismounting lower described lower board component, upper board component and object lens top board reference mirror.
11. adjustment object lens top board Rz as claimed in claim 10 is characterized in that to the method for precision, described lower board component comprises frock lower plate, a plurality of tool locating pin, Amici prism, frock reference mirror and sextuple adjusting seat; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole, and described step S1 is specially:
Step S1.1 is installed to described frock reference mirror on the described frock lower plate, and during installation, the reflecting surface of described frock reference mirror is close to the lateral wall of a tool locating pin;
Step S1.2 locates described auto-collimator, makes the light beam of described auto-collimator emission be reflected back described auto-collimator by the reflecting surface of described frock reference mirror;
Step S1.3, described sextuple adjusting seat is installed on the described frock lower plate, described Amici prism is installed on the described sextuple adjusting seat, uses described auto-collimator to adjust described sextuple adjusting seat, makes the parallel sided of described Amici prism in the reflecting surface of described frock reference mirror.
12. adjustment object lens top board Rz as claimed in claim 11 is characterized in that to the method for precision, described upper board component comprises frock upper plate, sextuple adjusting seat, Amici prism and frock reference mirror; Described step S2 is specially:
Step S2.1 is installed to described frock reference mirror on the described frock upper plate, and during installation, the reflecting surface of described frock reference mirror is close to the sidewall of described frock upper plate;
Step S2.2 locates described auto-collimator, makes the light beam of described auto-collimator emission be reflected back described auto-collimator by the reflecting surface of described frock reference mirror;
Step S2.3 is installed to described sextuple adjusting seat on the described frock upper plate, and described Amici prism is installed on the described sextuple adjusting seat, uses described auto-collimator to adjust described sextuple adjusting seat, makes described Amici prism perpendicular to described frock upper plate;
Step S3.4, the lower described frock reference mirror of dismounting.
13. adjustment object lens top board Rz as claimed in claim 11 is to the method for precision, it is characterized in that, described step S3 is specially: board component is enclosed within on the lateral wall of described photo-etching machine objective lens by the mounting hole of described frock lower plate under the described frock, and described tool locating pin is connected with described object lens interface position pin.
14. adjustment object lens top board Rz as claimed in claim 11 is to the method for precision, it is characterized in that, described step S4 is specially: allow on the Amici prism of the described frock lower plate of light beam directive that described auto-collimator penetrates, a light beam part that incides described Amici prism sees through described Amici prism and incides on the reflecting surface of described frock reference mirror, after the reflecting surface reflection of described frock reference mirror, return described auto-collimator along original optical path, observe described auto-collimator, adjust described auto-collimator, make the reflecting surface of described frock reference mirror perpendicular to the optical axis of described auto-collimator, to lock the position of described auto-collimator.
15. adjustment object lens top board Rz as claimed in claim 10 is characterized in that to the method for precision, described object lens top board is provided with the upper plate component interface, and among the described step S5, described upper board component is installed on the described object lens top board by described upper plate component interface.
16. adjustment object lens top board Rz as claimed in claim 10 is to the method for precision, it is characterized in that, described object lens top board is provided with the reference mirror mechanical references, described object lens top board reference mirror is provided with reflecting surface, among the described step S6, the reflecting surface of described object lens top board reference mirror is close to described reference mirror mechanical references, guarantees that the reflecting surface of described object lens top board reference mirror is perpendicular to the upper surface of described object lens top board.
17. adjustment object lens top board Rz as claimed in claim 12 is to the method for precision, it is characterized in that, described step S7 is specially: the light beam that allows described auto-collimator penetrate incides on the Amici prism of described lower board component, and a light beam part that incides the Amici prism of described lower board component is reflected back described auto-collimator by this Amici prism; A part sees through on the reflecting surface of frock reference mirror that this Amici prism incides described lower board component, and the Amici prism that is seen through described lower board component after the reflection of the reflecting surface of this frock reference mirror returns described auto-collimator; After being reflected by the Amici prism of described lower board component, some injects the Amici prism of described upper board component, the light beam that incides the Amici prism of described upper board component is injected described object lens top board reference mirror behind this Amici prism Multi reflection, and by described object lens top board reference mirror reflection, light beam through described object lens top board reference mirror reflection returns described auto-collimator along original optical path, observe described auto-collimator, adjust described object lens top board, make the light beam of reflecting surface reflection of described object lens top board reference mirror parallel with the light beam of described auto-collimator ejaculation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118854 CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118854 CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
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| CN102193322A CN102193322A (en) | 2011-09-21 |
| CN102193322B true CN102193322B (en) | 2013-01-23 |
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| CN 201010118854 Active CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108507497A (en) * | 2017-02-28 | 2018-09-07 | 北京卓力新航科技有限责任公司 | Cannon multibarrel axis parallel degree optical alignment set |
| CN111999037A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院西安光学精密机械研究所 | Optical detection device and method for optical telescope system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225686A (en) * | 1990-09-12 | 1993-07-06 | Canon Kabushiki Kaisha | Positioning method and positioning mechanism for use in exposure apparatus |
| CN1399796A (en) * | 1999-11-24 | 2003-02-26 | 微激光系统公司 | Method and apparatus for personalization of semiconductor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08306620A (en) * | 1995-05-10 | 1996-11-22 | Nikon Corp | Projection aligner |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225686A (en) * | 1990-09-12 | 1993-07-06 | Canon Kabushiki Kaisha | Positioning method and positioning mechanism for use in exposure apparatus |
| CN1399796A (en) * | 1999-11-24 | 2003-02-26 | 微激光系统公司 | Method and apparatus for personalization of semiconductor |
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