CN102193322A - Detection device and adjusting method for objective lens roof of photo-etching machine - Google Patents
Detection device and adjusting method for objective lens roof of photo-etching machine Download PDFInfo
- Publication number
- CN102193322A CN102193322A CN 201010118854 CN201010118854A CN102193322A CN 102193322 A CN102193322 A CN 102193322A CN 201010118854 CN201010118854 CN 201010118854 CN 201010118854 A CN201010118854 A CN 201010118854A CN 102193322 A CN102193322 A CN 102193322A
- Authority
- CN
- China
- Prior art keywords
- collimator
- frock
- auto
- reference mirror
- object lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention relates to a detection device and an adjusting method for an objective lens roof of a photo-etching machine. The device comprises a lower plate component, an upper plate component, an auto-collimating telescope and an objective lens roof reference lens, wherein an emergent beam of the auto-collimating telescope is sent to the lower plate component; one part of the light beam sent to the lower plate component is directly reflected to the auto-collimating telescope by the lower plate component; the other part of the light beam is reflected to the upper plate component by the lower plate component; the light beam which reaches the upper plate component is repeatedly reflected by the upper plate component and then is reflected to the objective lens roof reference lens; and then the light beam is reflected to the auto-collimating telescope along the original light path after being reflected by the objective lens roof reference lens. According to the detection device and the adjusting method for the objective lens roof of the photo-etching machine provided by the invention, by detecting the parallel degree of the emergent beam of the auto-collimating telescope and the reflected light beam of the objective lens roof reference lens, the position of the upper surface of the objective lens roof in the Rz direction can be adjusted. Besides, the adjusting precision is high.
Description
Technical field
The present invention relates to litho machine, relate in particular to a kind of pick-up unit and method of adjustment of photo-etching machine objective lens top board.
Background technology
In the complete machine integrating process of litho machine, the installation and measuring of most of parts, parts all needs to adopt high precision to adjust frock, to realize the integrated precision of litho machine.
Referring to Fig. 1, be that three-dimensional system of coordinate is set up on the XY plane with the plane at the upper surface place of the main substrate 41 of litho machine, hand thumb is pointed to Z axle positive dirction, all the other four refer to clench fist, and all the other four refer to that the direction of clenching fist is defined as the Rz direction, in like manner defines Rx, Ry direction.In litho machine, the measuring basis of Rz is on the mask platform interferometer, object lens 42 tops are provided with object lens top board 43, the installation accuracy of the upper surface of object lens top board 43 on the Rz direction directly influences the installation accuracy of mask prealignment sensor, if object lens top board 43 is installed the installation accuracy of then direct ectocrine vertex plate not in place to the mask platform interferometer, thereby influence the installation accuracy of mask platform interferometer, finally influence the exposure productive rate of litho machine.
Far away from object lens interface register pin 44 to distance between the locating surface of object lens top board 43, usually about 800mm, if adopt traditional mechanical detection frock, precision can only reach ± 700urad about, precision index far below product demand, and litho machine complex structure, space layout compactness, the pick-up unit of photo-etching machine objective lens top board can't online detection and adjust the position of upper surface on the Rz direction of object lens top board 43 in the prior art.
At above problem, be necessary to design a kind of simple in structure, modularization, easily detachable pick-up unit, to satisfy the needs of parts in the litho machine being debug and detected maintenance.
Summary of the invention
The object of the present invention is to provide a kind of pick-up unit and method of adjustment of photo-etching machine objective lens top board, this apparatus structure is simple, easily assembling, and it is long to detect stroke, is fit to the position of upper surface on the Rz direction of online detection and adjustment object lens top board, the precision height.
To achieve the above object, the invention provides a kind of pick-up unit of photo-etching machine objective lens top board, it is characterized in that, comprise following board component, go up board component, auto-collimator and object lens top board reference mirror; The outgoing beam of described auto-collimator incides on the described board component down, a light beam part that incides described board component down is directly by the described described auto-collimator of board component reflected back down, remainder is then injected the described board component of going up after the reflection of described board component down, inject the described light beam of going up board component and be mapped on the described object lens top board reference mirror after board component repeatedly reflects, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path through described going up.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, described board component down comprises frock lower plate, a plurality of tool locating pin, Amici prism, frock reference mirror and the sextuple seat of adjusting; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole; Described frock reference mirror is arranged on the upper surface of described frock lower plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to the upper surface of described frock lower plate; The described sextuple seat of adjusting is arranged on the upper surface of described frock lower plate; Described Amici prism is arranged on described sextuple the adjustment on the seat.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, the centre of described Amici prism is provided with a translucent half reflection film, and the upper surface of this translucent half reflection film and described Amici prism is at 45, and a side of described Amici prism is coated with translucent half reflection film.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, the bottom of described tool locating pin is provided with register pin bulb interface.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, the described board component of going up comprises frock upper plate, sextuple seat and the Amici prism adjusted; The described sextuple seat of adjusting is arranged on the described frock upper plate; Described Amici prism is arranged on described sextuple the adjustment on the seat.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, the described board component of going up also comprises the frock reference mirror, and described frock reference mirror is arranged on the described frock upper plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to described frock upper plate.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, described Amici prism is five jiaos of Amici prisms.
The pick-up unit of above-mentioned photo-etching machine objective lens top board, wherein, described auto-collimator comprises graticule and auto-collimator object lens; Described graticule is arranged on the back focal plane place of described auto-collimator object lens, and this graticule is perpendicular to the optical axis of described auto-collimator object lens.
The pick-up unit of above-mentioned photo-etching machine objective lens top board wherein, is carved with X, Y to the index line picture on the described graticule, the zero-bit place of described index line picture overlaps with the focus of described auto-collimator object lens.
Another kind of technical scheme of the present invention is, uses the pick-up unit of above-mentioned photo-etching machine objective lens top board to adjust the method for object lens top board Rz to precision, may further comprise the steps: step S1, use the auto-collimator off-line to install and adjust board component down; Step S2 uses the auto-collimator off-line to install and adjusts upward board component; Step S3 is installed to described board component down on the object lens interface register pin; Step S4 is installed to auto-collimator on the litho machine; Step S5 is installed to the described board component of going up on the object lens top board; Step S6 is installed to object lens top board reference mirror on the described object lens top board; Step S7 adjusts described object lens top board; Step S8 dismantles described down board component down, goes up board component and object lens top board reference mirror.
Above-mentioned adjustment object lens top board Rz is to the method for precision, and wherein, described board component frock lower plate down, a plurality of tool locating pin, Amici prism, frock reference mirror and 6 DOF are adjusted seat; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole, described step S1 is specially: step S1.1, described frock reference mirror is installed on the described frock lower plate, during installation, the reflecting surface of described frock reference mirror is close to the lateral wall of a tool locating pin; Step S1.2 locatees described auto-collimator, makes the described auto-collimator emitted light beams can be by the described auto-collimator of reflecting surface reflected back of described frock reference mirror; Step S1.3, the described sextuple seat of adjusting is installed on the described frock lower plate, described Amici prism is installed to described sextuple the adjustment on the seat, uses described auto-collimator to adjust the described sextuple seat of adjusting, and the parallel sided that makes described Amici prism is in the reflecting surface of described frock reference mirror.
Above-mentioned adjustment object lens top board Rz is to the method for precision, and wherein, the described board component of going up comprises frock upper plate, sextuple seat, Amici prism and the frock reference mirror adjusted; Described step S2 is specially: step S2.1, described frock reference mirror is installed on the described frock upper plate, and during installation, the reflecting surface of described frock reference mirror is close to the sidewall of described frock upper plate; Step S2.2 locatees described auto-collimator, makes the described auto-collimator emitted light beams can be by the described auto-collimator of reflecting surface reflected back of described frock reference mirror; Step S2.3 is installed to the described sextuple seat of adjusting on the described frock upper plate, and described Amici prism is installed to described sextuple the adjustment on the seat, uses described auto-collimator to adjust the described sextuple seat of adjusting, and makes described Amici prism perpendicular to described frock upper plate; Step S3.4, dismounting is described frock reference mirror down.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S3 is specially: board component is enclosed within on the lateral wall of described photo-etching machine objective lens by the mounting hole of described frock lower plate under the described frock, and described tool locating pin is connected with described object lens interface register pin.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S4 is specially: allow on the Amici prism of the described frock lower plate of light beam directive that described auto-collimator penetrates, a light beam part that incides described Amici prism sees through described Amici prism and incides on the reflecting surface of described frock reference mirror, after the reflecting surface reflection of described frock reference mirror, return described auto-collimator along original optical path, observe described auto-collimator, adjust described auto-collimator, make the optical axis of the reflecting surface of described frock reference mirror, to lock the position of described auto-collimator perpendicular to described auto-collimator.
Above-mentioned adjustment object lens top board Rz is to the method for precision, and wherein, described object lens top board is provided with the upper plate component interface, and among the described step S5, the described board component of going up is installed on the described object lens top board by described upper plate component interface.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described object lens top board is provided with the reference mirror mechanical references, described object lens top board reference mirror is provided with reflecting surface, among the described step S6, the reflecting surface of described object lens top board reference mirror is close to described reference mirror mechanical references, guarantees the upper surface of the reflecting surface of described object lens top board reference mirror perpendicular to described object lens top board.
Above-mentioned adjustment object lens top board Rz is to the method for precision, wherein, described step S7 is specially: the light beam that allows described auto-collimator penetrate incides on the Amici prism of described board component down, and a light beam part that incides the described Amici prism of board component down is by the described auto-collimator of this Amici prism reflected back; A part sees through on the reflecting surface that this Amici prism incides the described frock reference mirror of board component down, is seen through the described Amici prism of board component down by the reflecting surface of this frock reference mirror reflection back and is returned described auto-collimator; After reflecting, some Amici prism by described board component down injects the described Amici prism of going up board component, incide the described light beam of going up the Amici prism of board component and after this Amici prism repeatedly reflects, inject described object lens top board reference mirror, and by described object lens top board reference mirror reflection, return described auto-collimator through described object lens top board reference mirror beam reflected along original optical path, observe described auto-collimator, adjust described object lens top board, make the reflecting surface beam reflected of described object lens top board reference mirror and the parallel beam that described auto-collimator penetrates.
The pick-up unit of photo-etching machine objective lens top board of the present invention and method of adjustment, each modular construction of this device is simple, easily assembling, can effectively evade litho machine space constraint condition, the position of upper surface on the Rz direction of online detection of energy and adjustment object lens top board; This method of adjusting object lens top board Rz direction is easy and simple to handle; The mode that this method adopts mechanical positioning and optical detection to engage, it is long to detect stroke, adjusts the precision height, the adjustment precision can be controlled in ± 365urad in.
Description of drawings
The pick-up unit of photo-etching machine objective lens top board of the present invention and method of adjustment are provided by following embodiment and accompanying drawing.
Fig. 1 is the synoptic diagram of photo-etching machine objective lens in the prior art;
Fig. 2 is the structural representation of following board component among the present invention;
Fig. 3 is a structural representation of going up board component among the present invention;
Fig. 4 is the structural representation of auto-collimator among the present invention;
Fig. 5 is the structural representation of graticule among the present invention;
The fundamental diagram of auto-collimator among Fig. 6 the present invention;
Fig. 7 is the scheme of installation that descends board component and auto-collimator among the present invention;
Fig. 8 is the vertical view of object lens top board among the present invention;
Fig. 9 is a scheme of installation of going up board component among the present invention.
Embodiment
Below with reference to Fig. 2～Fig. 9 the pick-up unit and the method for adjustment of photo-etching machine objective lens top board of the present invention are described in further detail.
The pick-up unit of photo-etching machine objective lens top board of the present invention comprises following board component, goes up board component, auto-collimator and object lens top board reference mirror;
The outgoing beam of described auto-collimator incides on the described board component down, a light beam part that incides described board component down is directly by the described described auto-collimator of board component reflected back down, remainder is then injected the described board component of going up after the reflection of described board component down, inject the described light beam of going up board component and be mapped on the described object lens top board reference mirror after board component repeatedly reflects, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path through described going up.
Referring to Fig. 2, described board component down comprises frock lower plate 11, a plurality of tool locating pin 12, Amici prism 13, frock reference mirror 14 and the sextuple seat 15 of adjusting;
The central authorities of described frock lower plate 11 are provided with a mounting hole 111;
Described a plurality of tool locating pin 12 passes described frock lower plate 11, is arranged on the excircle of described mounting hole 111;
The bottom of described tool locating pin 12 is provided with register pin bulb interface 121;
Described frock reference mirror 14 is arranged on the upper surface of described frock lower plate 11, and the reflecting surface 141 of this frock reference mirror 14 is close to the lateral wall of a tool locating pin 12, makes the upper surface of described frock reference mirror 14 perpendicular to described frock lower plate 11;
The described sextuple seat 15 of adjusting is arranged on the upper surface of described frock lower plate 11;
Described Amici prism 13 is arranged on described sextuple the adjustment on the seat 15;
The centre of described Amici prism 13 is provided with a translucent half reflection film 131, and this translucent half reflection film 131 is at 45 with the upper surface of described Amici prism 13, and a side 132 of described Amici prism 13 is coated with translucent half reflection film.
Referring to Fig. 3, the described board component of going up comprises frock upper plate 21, sextuple seat 22, Amici prism 23 and the frock reference mirror 24 adjusted;
Described frock upper plate 21 is " L " font, comprises transverse slat 213 and vertical plate 214, and described vertical plate 214 is perpendicular to described transverse slat 213, and this vertical plate 214 is arranged on an end of described transverse slat 213;
Described frock reference mirror 24 is arranged on the upper surface of described transverse slat 213, and the reflecting surface 241 of this frock reference mirror 24 is close to the side surface of described vertical plate 214, makes the upper surface of described frock reference mirror 24 perpendicular to described transverse slat 213;
The described sextuple seat 22 of adjusting is arranged on the upper surface of described transverse slat 213;
Described Amici prism 23 is arranged on described sextuple the adjustment on the seat 22;
Described Amici prism 23 is five jiaos of Amici prisms;
Described transverse slat 213 is provided with light hole 211, and described vertical plate 214 is provided with light hole 212, and the described sextuple seat 22 of adjusting is provided with light hole 221, and the described sextuple light hole 221 of adjusting seat 22 is communicated with the light hole 211 of described transverse slat 213.
Referring to Fig. 4, described auto-collimator 30 comprises graticule 31 and auto-collimator object lens 32;
Described graticule 31 is arranged on the back focal plane place of described auto-collimator object lens 32, and this graticule 31 is perpendicular to the optical axis OA of described auto-collimator object lens 32.
The center of described auto-collimator object lens 32 is O, and the back focus of described auto-collimator object lens 32 is F ', and the back focal length of these auto-collimator object lens 32 is f '.
Referring to Fig. 5, be carved with X, Y to the index line picture on the described graticule 31, the zero-bit place of described index line picture overlaps with the back focus F ' of described auto-collimator object lens 32.
The light beam that described auto-collimator 30 penetrates is a parallel beam.
In conjunction with Fig. 4 and Fig. 6, the principle of work of described auto-collimator 30 is described: after a plane mirror 50 is arranged on described auto-collimator 30, the parallel beam of described auto-collimator 30 outgoing can be reflected by described plane mirror 50 after being mapped to described plane mirror 50, the light beam that reflects converges through the auto-collimator object lens 32 of described auto-collimator 30, forms a hot spot on the graticule 31 of described auto-collimator 30; If the reflecting surface of described plane mirror 50 is perpendicular to the optical axis OA of described auto-collimator object lens 32, the parallel beam of described auto-collimator 30 outgoing returns described auto-collimator 30 along original optical path after described plane mirror 50 reflections, zero-bit place (the back focus F ' that is described auto-collimator object lens 32 locates) at the index line picture of described graticule 31 forms a hot spot, as shown in Figure 4; If between the optical axis OA of the reflecting surface of described plane mirror 50 and described auto-collimator object lens 32 an angle α is arranged, then the angle between the normal of the reflecting surface of light beam that is reflected by described plane mirror 50 and described plane mirror 50 is 2 α, the hot spot that the light beam that reflects forms on described graticule 31 looks like to have a displacement L with respect to the index line of described graticule 31, as shown in Figure 6.
By laws of geometrical optics as can be known, the relational expression of angle α and displacement L is as follows: L=2f ' α, be α=L/2f ', wherein, f ' is the back focal length of described auto-collimator object lens 32, α is the pitch angle of the reflecting surface of described plane mirror 50, therefore, can calculate the inclined angle alpha of the reflecting surface of described plane mirror 50 by hot spot with respect to the displacement L of index line picture.
Each modular construction of the pick-up unit of photo-etching machine objective lens top board of the present invention is simple, easily assembling, can effectively evade litho machine space constraint condition, the position of upper surface on the Rz direction of online detection of energy and adjustment object lens top board.
Use the pick-up unit adjustment object lens top board Rz of above-mentioned photo-etching machine objective lens top board to may further comprise the steps to the method for precision:
Step 1, off-line are installed and are adjusted board component down;
Step 1.1, on experiment porch, described frock reference mirror 14 is installed on the described frock lower plate 11, during installation, the reflecting surface 141 of described frock reference mirror 14 is close to the lateral wall of a tool locating pin 12, make the upper surface of described frock reference mirror 14, promptly utilize the described frock reference mirror 14 in lateral wall (mechanical references) location of described tool locating pin 12 perpendicular to described frock lower plate 11;
Step 1.2 is located described auto-collimator 30;
Allow the reflecting surface 141 of the described frock reference mirror 14 of parallel beam directive of described auto-collimator 30 emissions, adjust described auto-collimator 30, make the parallel beam of described auto-collimator 30 emissions can be by the described auto-collimator 30 of reflecting surface 141 reflected backs of described frock reference mirror 14, and the position of fixing described auto-collimator 30;
Step 1.3, the described sextuple seat 15 of adjusting is installed on the described frock lower plate 11, again described Amici prism 13 is installed to described sextuple the adjustment on the seat 15, whether with the reflecting surface 141 of described frock reference mirror 14 parallel: allow the described Amici prism 13 of board component down of parallel beam directive of described auto-collimator 30 emissions if using auto-collimator to detect the side 132 of described Amici prism 13, the light beam that a part incides described Amici prism 13 is mapped on the side 132 of described Amici prism 13 through behind the translucent half reflection film 131 of described Amici prism 13, incide a light beam part on the side 132 of described Amici prism 13 by side 132 reflections of described Amici prism 13, another part sees through the side 132 of described Amici prism 13, see through described translucent half reflection film 131 through the side of described Amici prism 13 132 beam reflected and return described auto-collimator 30, on the graticule 31 of described auto-collimator 30, form a hot spot, as the B among Fig. 5, the light beam that sees through the side 132 of described Amici prism 13 is mapped on the reflecting surface 141 of the described frock reference mirror 14 of board component down, after the reflecting surface reflection of described frock reference mirror 14, see through the side 132 of described Amici prism 13, described translucent half reflection film 131 returns described auto-collimator 30, on described graticule 31, form a hot spot, as the C among Fig. 5, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, the side 132 that then shows described Amici prism 13 is not parallel with the reflecting surface 141 of described frock reference mirror 14, depart from the displacement of the Y ' axle of described index line picture earlier according to hot spot, adjust the 6 DOF of described board component down and adjust seat 15, overlap with the Y ' axle of described index line picture until hot spot, as B ' among Fig. 5 and C ', at this moment, described board component is down finished Rx, adjustment on the Ry direction, then depart from the displacement of the X ' axle of described index line picture according to hot spot, adjust the 6 DOF of described board component down and adjust seat 15, be positioned at the zero-bit place of described index line picture until hot spot, at this moment, described board component is down finished the adjustment on the Rz direction, and described board component down is modulated to desirable precision;
Step 2, off-line are installed to adjust and are gone up board component;
Step 2.1, on experiment porch, described frock reference mirror 24 is installed to described frock upper plate 21, during installation, the reflecting surface 241 of described frock reference mirror 24 is close to the side surface of described vertical plate 214, make the upper surface of described frock reference mirror 24, promptly utilize the described frock reference mirror 24 in upper surface (mechanical references) location of the transverse slat 213 of described frock upper plate 21 perpendicular to the transverse slat 213 of described frock upper plate 21;
Step 2.2 is located described auto-collimator 30;
Allow the reflecting surface 241 of the described frock reference mirror 24 of parallel beam directive of described auto-collimator 30 emissions, adjust described auto-collimator 30, make the parallel beam of described auto-collimator 30 emissions can be by the described auto-collimator 30 of reflecting surface 141 reflected backs of described frock reference mirror 14, and the position of fixing described auto-collimator 30;
Step 2.3, the described sextuple seat 22 of adjusting is installed on the described frock upper plate 21, again described Amici prism 23 is installed to described sextuple the adjustment on the seat 22, use auto-collimator 30 to adjust the position of described Amici prism 23: the described Amici prism 23 of going up board component of parallel beam directive that allows described auto-collimator 30 launch, the light beam that incides described Amici prism 23 is through on the reflecting surface 241 that is mapped to the described upward frock reference mirror 24 of board component behind the described Amici prism 23, by reflecting surface 241 reflections of described frock reference mirror 24, reflecting surface 241 beam reflected through described frock reference mirror 24 are returned described auto-collimator 30 through described Amici prism 23, on the graticule 31 of described auto-collimator 30, form a hot spot, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, show that then described Amici prism 23 is not orthogonal to the upper surface of described frock upper plate 21, depart from the displacement of the Y ' axle of described index line picture earlier according to hot spot, adjust the described 6 DOF of going up board component and adjust seat 22, overlap with the Y ' axle of described index line picture until hot spot, at this moment, the described board component of going up is finished Rx, adjustment on the Ry direction, then depart from the displacement of the X ' axle of described index line picture according to hot spot, adjust the described 6 DOF of going up board component and adjust seat 22, be positioned at the zero-bit place of described index line picture until hot spot, at this moment, described upward board component is finished the adjustment on the Rz direction, the described modulated extremely desirable precision of board component that goes up;
Step 3, the down described frock reference mirror 24 of going up board component of dismounting;
Step 4 is installed described board component down;
Referring to Fig. 7, described board component down is enclosed within on the lateral wall of described photo-etching machine objective lens by the described mounting hole 111 of frock lower plate 11 central authorities of board component down, the described tool locating pin 12 of board component down is connected with the object lens interface register pin 44 of litho machine main substrate 41, the register pin bulb interface 121 of described tool locating pin 12 bottoms cooperates with the register pin bulb 441 on described object lens interface register pin 44 tops, guaranteed to install the described precision of board component down by machining, made described board component down be in ideal position with respect to the photo-etching machine objective lens interface;
Step 5 is installed described auto-collimator 30;
Referring to Fig. 7, described auto-collimator 30 is installed on the main substrate 41 of litho machine, the parallel beam of described auto-collimator 30 outgoing is incided on the Amici prism 13 of described board component down, a light beam part that incides described Amici prism 13 sees through the translucent half reflection film 131 of described Amici prism 13, the side 132 of described Amici prism 13 is incided on the reflecting surface 141 of described frock reference mirror 14, after the reflecting surface reflection of described frock reference mirror 14, see through the side 132 of described Amici prism 13, described translucent half reflection film 131 returns described auto-collimator 30, on described graticule 31, form a hot spot, if hot spot is not or not the zero-bit place of the index line picture of described graticule 31, the optical axis OA out of plumb that then shows reflecting surface 141 with the auto-collimator object lens 32 of described auto-collimator 30 of described frock reference mirror 14, adjust described auto-collimator 30, make hot spot be positioned at the zero-bit place of described index line picture, promptly show the optical axis OA of the reflecting surface 141 of described frock reference mirror 14, lock the position of described auto-collimator 30 perpendicular to described auto-collimator object lens 32;
Step 6 is installed the described board component of going up;
Referring to Fig. 8, the object lens top board 43 of litho machine is provided with upper plate component interface 45, the described board component of going up is installed on the described object lens top board 43 by described upper plate component interface 45, and described upper plate component interface 45 is set, and guarantees to install the described precision that goes up board component by machining;
Step 9, installation material vertex plate reference mirror 60;
Referring to Fig. 8, the object lens top board 43 of litho machine is provided with reference mirror mechanical references 47, described object lens top board reference mirror 60 is installed on the described object lens top board 43, the reflecting surface 61 of described object lens top board reference mirror 60 is close to described reference mirror mechanical references 47, guarantee the upper surface of the reflecting surface 61 of described object lens top board reference mirror 60 perpendicular to described object lens top board 43, described reference mirror mechanical references 47 is set, guarantees to install the precision of described object lens top board reference mirror 60 by machining;
Step 10 is adjusted described object lens top board 43;
The parallel beam of described auto-collimator 30 outgoing incides on the translucent half reflection film 131 of the described Amici prism 13 of board component down, part light beam sees through described translucent half reflection film 131 and is mapped on the described side 132, and remaining is by described translucent half reflection film 131 reflections;
A light beam part that incides on the described side 132 is directly reflected by this side 132, and remaining then sees through this side 132; See through described translucent half reflection film 131 through described side 132 beam reflected and return described auto-collimator 30, on described graticule 31, form a hot spot; The light beam that sees through described side 132 is injected the reflecting surface 141 of described frock reference mirror 14, after reflecting surface 141 reflections of described frock reference mirror 14, return described auto-collimator 30, on described graticule 31, form a hot spot through described side 132, described translucent half reflection film 131;
Through the light hole 211 of described translucent half reflection film 131 beam reflected by transverse slat 213, the described sextuple light hole 221 of adjusting seat 22 is injected described Amici prism 23, light hole 212 by vertical plate 214 behind 23 liang of secondary reflections of described Amici prism is mapped on the reflecting surface 61 of described object lens top board reference mirror 60, the light beam that incides on the reflecting surface 61 of described object lens top board reference mirror 60 is penetrated back described Amici prism 23 after reflecting surface 61 reflections of described object lens top board reference mirror 60, behind 23 liang of secondary reflections of described Amici prism, penetrate back described translucent half reflection film 131 once more, the light beam of penetrating back described translucent half reflection film 131 returns described auto-collimator 30 after described translucent half reflection film 131 reflections, form a hot spot on described graticule 31;
Detect the zero-bit place whether three hot spots are positioned at described index line picture, if hot spot is not positioned at the zero-bit place of described index line picture, the parallel beam that reflecting surface 61 beam reflected of described object lens top board reference mirror 60 and 30 outgoing of described auto-collimator then are described is not parallel, the upper surface that is described object lens top board 43 does not satisfy integrated accuracy requirement on the Rz direction, described object lens top board 43Rz degree of freedom is adjusted, make three hot spots all be positioned at the zero-bit place of described index line picture, at this moment, reflecting surface 61 beam reflected of described object lens top board reference mirror 60 are parallel with the parallel beam of described auto-collimator 30 outgoing, finished the adjustment of described object lens top board 43Rz direction;
Step 10 is dismantled described down board component down, is gone up board component and object lens top board reference mirror 60.
It is easy and simple to handle to the method for precision that the present invention adjusts object lens top board Rz.
The present invention adjusts the mode that object lens top board Rz adopts mechanical positioning and optical detection to engage to the method for precision, and it is long to detect stroke, adjusts the precision height, the adjustment precision can be controlled in ± 365urad in.
Claims (17)
1. the pick-up unit of a photo-etching machine objective lens top board is characterized in that, comprises following board component, goes up board component, auto-collimator and object lens top board reference mirror;
The outgoing beam of described auto-collimator incides on the described board component down, a light beam part that incides described board component down is directly by the described described auto-collimator of board component reflected back down, remainder is then injected the described board component of going up after the reflection of described board component down, inject the described light beam of going up board component and be mapped on the described object lens top board reference mirror after board component repeatedly reflects, after described object lens top board reference mirror reflection, return described auto-collimator along original optical path through described going up.
2. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 1 is characterized in that, described board component down comprises frock lower plate, a plurality of tool locating pin, Amici prism, frock reference mirror and the sextuple seat of adjusting;
Described frock lower plate is provided with a mounting hole;
Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole;
Described frock reference mirror is arranged on the upper surface of described frock lower plate, and this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to the upper surface of described frock lower plate;
The described sextuple seat of adjusting is arranged on the upper surface of described frock lower plate;
Described Amici prism is arranged on described sextuple the adjustment on the seat.
3. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 2, it is characterized in that, the centre of described Amici prism is provided with a translucent half reflection film, and the upper surface of this translucent half reflection film and described Amici prism is at 45, and a side of described Amici prism is coated with translucent half reflection film.
4. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 2 is characterized in that, the bottom of described tool locating pin is provided with register pin bulb interface.
5. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 1 is characterized in that, the described board component of going up comprises frock upper plate, sextuple seat and the Amici prism adjusted;
The described sextuple seat of adjusting is arranged on the described frock upper plate;
Described Amici prism is arranged on described sextuple the adjustment on the seat.
6. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 5, it is characterized in that the described board component of going up also comprises the frock reference mirror, described frock reference mirror is arranged on the described frock upper plate, this frock reference mirror is provided with reflecting surface, and described reflecting surface is perpendicular to described frock upper plate.
7. as the pick-up unit of claim 5 or 6 described photo-etching machine objective lens top boards, it is characterized in that described Amici prism is five jiaos of Amici prisms.
8. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 1 is characterized in that, described auto-collimator comprises graticule and auto-collimator object lens;
Described graticule is arranged on the back focal plane place of described auto-collimator object lens, and this graticule is perpendicular to the optical axis of described auto-collimator object lens.
9. the pick-up unit of photo-etching machine objective lens top board as claimed in claim 8 is characterized in that, is carved with X, Y on the described graticule to the index line picture, and the zero-bit place of described index line picture overlaps with the focus of described auto-collimator object lens.
10. one kind is used the pick-up unit of photo-etching machine objective lens top board as claimed in claim 1 to adjust the method for object lens top board Rz to precision, it is characterized in that, may further comprise the steps:
Step S1 uses the auto-collimator off-line to install and adjusts board component down;
Step S2 uses the auto-collimator off-line to install and adjusts upward board component;
Step S3 is installed to described board component down on the object lens interface register pin;
Step S4 is installed to auto-collimator on the litho machine;
Step S5 is installed to the described board component of going up on the object lens top board;
Step S6 is installed to object lens top board reference mirror on the described object lens top board;
Step S7 adjusts described object lens top board;
Step S8 dismantles described down board component down, goes up board component and object lens top board reference mirror.
11. adjustment object lens top board Rz as claimed in claim 10 is characterized in that to the method for precision, described board component frock lower plate down, a plurality of tool locating pin, Amici prism, frock reference mirror and the sextuple seat of adjusting; Described frock lower plate is provided with a mounting hole; Described a plurality of tool locating pin passes described frock lower plate, is arranged on the excircle of described mounting hole, and described step S1 is specially:
Step S1.1 is installed to described frock reference mirror on the described frock lower plate, and during installation, the reflecting surface of described frock reference mirror is close to the lateral wall of a tool locating pin;
Step S1.2 locatees described auto-collimator, makes the described auto-collimator emitted light beams can be by the described auto-collimator of reflecting surface reflected back of described frock reference mirror;
Step S1.3, the described sextuple seat of adjusting is installed on the described frock lower plate, described Amici prism is installed to described sextuple the adjustment on the seat, uses described auto-collimator to adjust the described sextuple seat of adjusting, and the parallel sided that makes described Amici prism is in the reflecting surface of described frock reference mirror.
12. adjustment object lens top board Rz as claimed in claim 11 is characterized in that to the method for precision the described board component of going up comprises frock upper plate, sextuple seat, Amici prism and the frock reference mirror adjusted; Described step S2 is specially:
Step S2.1 is installed to described frock reference mirror on the described frock upper plate, and during installation, the reflecting surface of described frock reference mirror is close to the sidewall of described frock upper plate;
Step S2.2 locatees described auto-collimator, makes the described auto-collimator emitted light beams can be by the described auto-collimator of reflecting surface reflected back of described frock reference mirror;
Step S2.3 is installed to the described sextuple seat of adjusting on the described frock upper plate, and described Amici prism is installed to described sextuple the adjustment on the seat, uses described auto-collimator to adjust the described sextuple seat of adjusting, and makes described Amici prism perpendicular to described frock upper plate;
Step S3.4, dismounting is described frock reference mirror down.
13. adjustment object lens top board Rz as claimed in claim 11 is to the method for precision, it is characterized in that, described step S3 is specially: board component is enclosed within on the lateral wall of described photo-etching machine objective lens by the mounting hole of described frock lower plate under the described frock, and described tool locating pin is connected with described object lens interface register pin.
14. adjustment object lens top board Rz as claimed in claim 11 is to the method for precision, it is characterized in that, described step S4 is specially: allow on the Amici prism of the described frock lower plate of light beam directive that described auto-collimator penetrates, a light beam part that incides described Amici prism sees through described Amici prism and incides on the reflecting surface of described frock reference mirror, after the reflecting surface reflection of described frock reference mirror, return described auto-collimator along original optical path, observe described auto-collimator, adjust described auto-collimator, make the optical axis of the reflecting surface of described frock reference mirror, to lock the position of described auto-collimator perpendicular to described auto-collimator.
15. adjustment object lens top board Rz as claimed in claim 10 is characterized in that to the method for precision described object lens top board is provided with the upper plate component interface, among the described step S5, the described board component of going up is installed on the described object lens top board by described upper plate component interface.
16. adjustment object lens top board Rz as claimed in claim 10 is to the method for precision, it is characterized in that, described object lens top board is provided with the reference mirror mechanical references, described object lens top board reference mirror is provided with reflecting surface, among the described step S6, the reflecting surface of described object lens top board reference mirror is close to described reference mirror mechanical references, guarantees the upper surface of the reflecting surface of described object lens top board reference mirror perpendicular to described object lens top board.
17. adjustment object lens top board Rz as claimed in claim 12 is to the method for precision, it is characterized in that, described step S7 is specially: the light beam that allows described auto-collimator penetrate incides on the Amici prism of described board component down, and a light beam part that incides the described Amici prism of board component down is by the described auto-collimator of this Amici prism reflected back; A part sees through on the reflecting surface that this Amici prism incides the described frock reference mirror of board component down, is seen through the described Amici prism of board component down by the reflecting surface of this frock reference mirror reflection back and is returned described auto-collimator; After reflecting, some Amici prism by described board component down injects the described Amici prism of going up board component, incide the described light beam of going up the Amici prism of board component and after this Amici prism repeatedly reflects, inject described object lens top board reference mirror, and by described object lens top board reference mirror reflection, return described auto-collimator through described object lens top board reference mirror beam reflected along original optical path, observe described auto-collimator, adjust described object lens top board, make the reflecting surface beam reflected of described object lens top board reference mirror and the parallel beam that described auto-collimator penetrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118854 CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010118854 CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102193322A true CN102193322A (en) | 2011-09-21 |
| CN102193322B CN102193322B (en) | 2013-01-23 |
Family
ID=44601648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010118854 Active CN102193322B (en) | 2010-03-05 | 2010-03-05 | Detection device and adjusting method for objective lens roof of photo-etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102193322B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507497A (en) * | 2017-02-28 | 2018-09-07 | 北京卓力新航科技有限责任公司 | Cannon multibarrel axis parallel degree optical alignment set |
| CN111999037A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院西安光学精密机械研究所 | Optical detection device and method for optical telescope system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225686A (en) * | 1990-09-12 | 1993-07-06 | Canon Kabushiki Kaisha | Positioning method and positioning mechanism for use in exposure apparatus |
| JPH08306620A (en) * | 1995-05-10 | 1996-11-22 | Nikon Corp | Projection aligner |
| CN1399796A (en) * | 1999-11-24 | 2003-02-26 | 微激光系统公司 | Method and apparatus for personalization of semiconductor |
-
2010
- 2010-03-05 CN CN 201010118854 patent/CN102193322B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225686A (en) * | 1990-09-12 | 1993-07-06 | Canon Kabushiki Kaisha | Positioning method and positioning mechanism for use in exposure apparatus |
| JPH08306620A (en) * | 1995-05-10 | 1996-11-22 | Nikon Corp | Projection aligner |
| CN1399796A (en) * | 1999-11-24 | 2003-02-26 | 微激光系统公司 | Method and apparatus for personalization of semiconductor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507497A (en) * | 2017-02-28 | 2018-09-07 | 北京卓力新航科技有限责任公司 | Cannon multibarrel axis parallel degree optical alignment set |
| CN111999037A (en) * | 2020-08-10 | 2020-11-27 | 中国科学院西安光学精密机械研究所 | Optical detection device and method for optical telescope system |
| CN111999037B (en) * | 2020-08-10 | 2024-05-31 | 中国科学院西安光学精密机械研究所 | Optical detection device and method for optical telescope system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102193322B (en) | 2013-01-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9964717B2 (en) | Device and method for aligning and bonding lens array and PD array with high precision | |
| TWI460394B (en) | Three-dimensional image measuring apparatus | |
| CN103837080B (en) | Sub-micrometer precision coaxial confocal towards micro assemby is directed at detection method and device | |
| CN107607041B (en) | One kind being used for six geometric error measuring devices of turntable | |
| CN106767540B (en) | A kind of intersection measurement camera optical axis and reflecting mirror angle error scaling method | |
| CN103201617A (en) | Method for inspecting substrate | |
| CN106441112A (en) | Range-variable laser trigonometry displacement measuring device and method | |
| CN102549377A (en) | Flat bed scan module, flat bed scan system, jig for measuring alignment errors of a flat bed scan module, and method for measuring alignment errors of a flat bed scan module using same | |
| CN104749901A (en) | Focusing and leveling device | |
| CN1808625B (en) | Flat roof device | |
| CN101403865A (en) | Pre-aligning system for mask of photo-etching machine | |
| CN109950191A (en) | A kind of vision system and alignment methods of double-sided alignment | |
| CN101963766B (en) | Mask pre-aligning device and method for photoetching machine | |
| CN101539397A (en) | Method for measuring three-dimensional attitude of object on precision-optical basis | |
| CN109581827A (en) | Photoetching projection objective lens optimal focal plane detection device and method | |
| CN106919007B (en) | A kind of alignment calibration integrated system | |
| CN102566295A (en) | Lithography device and method for measuring multi-light spot zero offset | |
| CN102193322B (en) | Detection device and adjusting method for objective lens roof of photo-etching machine | |
| CN107664833B (en) | Machine vision system for aligning substrate and aligning device | |
| CN209198786U (en) | A kind of adjustment device of doubly telecentric camera lens verticality | |
| CN108519063B (en) | Double-range composite laser measuring head device and surface measuring method thereof | |
| CN107728316B (en) | With the Equivalent analysis method of off-axis three reflecting optical systems imaging law | |
| CN103063201A (en) | Three-dimensional pose detection device and measurement method | |
| CN109277695A (en) | A kind of laser coaxial vision system suitable for stereochemical structure workpiece | |
| CN102207694A (en) | Imaging adjustment unit and focusing and leveling control system using the unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |