CN1021836C - Ion plating technology for titanium carbonitride coatings - Google Patents
Ion plating technology for titanium carbonitride coatings Download PDFInfo
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- CN1021836C CN1021836C CN 91102459 CN91102459A CN1021836C CN 1021836 C CN1021836 C CN 1021836C CN 91102459 CN91102459 CN 91102459 CN 91102459 A CN91102459 A CN 91102459A CN 1021836 C CN1021836 C CN 1021836C
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Abstract
The present invention belongs to a carbon titanium nitride ion coating process in a physical vapor deposition process. The existing decorative coating process is a process which only solves and improves some specific single color tone. The carbon titanium nitride ion coating process combines a surface color tone technique, an interface bonding force technique, etc. The carbon titanium nitride ion coating process uses a unique process which uses variable parameter layered transition and multiple color tone to obtain a series of apparent color tone, such as golden color, purple, brown, gun color, black, etc.; simultaneously, good interface bonding force is guaranteed. The carbon titanium nitride ion coating process is suitable for different decorative coating of clocks, eyeglasses, stationery, jewelry, hardware, handicraft, etc., by using iron, steel, copper, aluminum, an aluminum alloy and similar metals thereof as backing materials.
Description
The invention belongs to titanium carbonitride ion plating technology in the physical gas-phase deposition.
So-called ion plating means that in vacuum chamber metallic substance and reactant gases are evaporated and ionization simultaneously, and at electric field action deposit chemical combination on the plating piece surface, be formed with wear-resisting and corrosion resistance nature and the alloy and the compound coating of color and luster attractive in appearance arranged.
The method of ion plating is owing to its quality of coating excellence, interface binding power and good uniformity are widely used in functional coating and decorative coatings such as wear-resisting, corrosion-resistant and high temperature resistant.Plating titanium nitride (TiN) coating hard and compact, wear-resisting, corrosion-resistant, it is exactly like gold in appearance, and luminance brightness is good, at home and abroad is extensive use of at present.
Adopt physical vapor deposition or chemical gaseous phase depositing process to prepare in the technology of decorative coating in recent years both at home and abroad, be only limited to the tone that solves or improve a certain color, basically adopt individual layer technology, as patents such as United States Patent (USP), Britain and Japan [US 4420498(1983), GB2195664(A) (1988); GB2196021(A) (1988); The clear 62-170560(1986 of Jp)] solved the Technology that simulating golden colour is transferred respectively.English Patent [GB 2170821(A) (1986)], and Japanese Patent [clear 62-146255(A) (1987), clear 61-183458(A) (1986)] solved the single coating technology of TiNC black coating respectively.In addition, Japanese Patent [clear 61-170559(A) (1986)] though adopted the TiN+TiC+TiN three stacked technologies that add, because its purpose is the bonding force problem of solution instrument plating hardened layer, and consideration top layer, end tone problem.
Improve quality of coating and increase new decorative colour for further at present, constantly opening up new coating.Titanium carbonitride promptly is wherein a kind of, and its rete densification is hard, can take into account hardness and flexible requirement (TiN good toughness and hardness is poor slightly, TiC then hardness height and toughness is poor slightly).Particularly titanium carbonitride is as ornament layer, and the toning scope is wide, can produce gold, black and all intermediate colors therebetween, and as purple, brown, rifle look (iron gray) and grey, and every kind of shade is adjustable.Because the good characteristic that titanium carbonitride had makes it have purposes widely.Yet, preparation then exists two technological difficulties if having the titanium carbonitride coating of above-mentioned characteristic: the one, how to improve interface binding power; The 2nd, how to guarantee correct tone as decorative coating.
One, interface binding power problem.During preparation titanium carbonitride coating, generally adopt nitrogen (N
2) and hydrocarbon polymer [as acetylene (C
2H
2) or methane (CH
4) etc.] make reactant gases, but because the hydrocarbon polymer ionization level is low, the titanium carbonitride coating internal stress of formation is big, and hole is arranged between coating and the base material, thereby causes bonding force poor.Improving plating piece temperature and bias voltage and current density is to improve the effective way of interface binding power.But when the plating piece temperature was too high, some material was the effusion pollutent, thereby had a strong impact on the tone and the gloss of decorative coating, and therefore, controlled temperature that is to say well, and the measure that improves bonding force should not influence correct tone.
Two, the tone problem of titanium carbonitride coating.Titanium nitride coating is made reactant gases with nitrogen, and titanium carbide coating is made reactant gases with acetylene or methane.These two kinds of coating are binary compound, and its toning scope is very little, are single tone basically, are golden yellow substantially as titanium nitride; And titanium carbide is the grey black look substantially.If use nitrogen and acetylene (or methane) to make reactant gases simultaneously, then form the titanium carbonitride ternary compound.Because titanium, nitrogen, the toning of carbon ternary, the variable range of color has been widened greatly.But, obtain the positive various decoration looks of desired tone, titanium, nitrogen, carbon must be selected best proportioning corresponding of all kinds, and different hydrocarbon polymers, the processing condition of coating differ greatly, and when some needed to increase carbon content than dark colour in particular for acquisition, the bonding force between coating and the base material obviously descended, just, again interface binding power has been produced influence during toning.
Find out by above-mentioned: guarantee that some technical measures that tone and interface binding power are taked are conflicting.In the past,, and limited the practical application of titanium carbonitride ion plating because this problem end can solve well.
The objective of the invention is to, a kind of coating outward appearance tone that had both guaranteed to obtain series is provided, guarantee interface binding power again, be applicable to the ion plating of the titanium carbonitride coating of common metal base material.
Experimental installation used in the present invention as shown in Figure 1.Wherein, 1 is the vacuum-coating chamber; 2 is the vacuum arc evaporation source assembly; 3 for there being the plating piece anchor clamps of revolution and rotation; 4 is the heated baking device; 5 is Ar, N
2And C
2H
2(or CH
4) inlet pipe; 6 is the evaporation source arc power; 7 is grid bias power supply; 8 is heating power supply; 9 is bleed line.
During plated film, treat that vacuum is evacuated to 6.5 * 10
-3Handkerchief starts baking and is heated to proper temperature (starting the rotation of plating piece anchor clamps simultaneously), and the startup arc evaporation source that continues applies bias voltage between plating piece anchor clamps and the evaporation source and begins coatings.At first only logical Ar gas to 3.9 * 10
-1Handkerchief plating Ti layer, the second layer leads to N
2Gas plating TiN layer, later requirement, N according to different colours
2/ C
2H
2Adopt different ratios to divide several layers plating TiNC layer, transit to titanium, nitrogen, the carbon proportioning of tone that the top layer requires gradually.During the delaminating process, evaporation source electric current and bias voltage be respective change also.Preceding which floor evaporation source electric current and bias voltage are got bigger numerical, to guarantee the bonding force of coating; Which floor two parameter the back gets than fractional value, to guarantee the gloss on surface.
The present invention guarantees that the ion plating of titanium carbonitride coating color harmony interface binding power is characterised in that: adopt variable element layering and the polynary tone technology of variable element.
The particular content of this technology comprises: the titanium carbonitride coating of gold, purple, brown, grey, rifle look, black and corresponding depth distinct colors is corresponding to titanium nitrogen, carbon proportioning that respectively should the best, promptly corresponding to certain titanium vaporator rate (characterizing with the evaporation source current value); Certain coating vacuum tightness is (with N
2+ C
2H
2Dividing potential drop characterizes); Certain N
2And C
2H
2(or CH
4) ratio (characterizing with its flux values respectively).Under the situation of having determined titanium vaporator rate and coating vacuum, the TiNC coating of gold, purple, brown, grey, rifle look, black and corresponding depth distinct colors is promptly corresponding to this N respectively
2/ C
2H
2(or N
2/ CH
4) ratio, for guaranteeing interface binding power simultaneously, adopt the processing method of variable element layering transition.Based on above-mentioned 2 points, the present invention is divided into 2+i level with the whole coating of TiNC of gold, purple, brown, grey, rifle look, black and corresponding depth distinct colors, variable element layering transition is finished continuously, has guaranteed good bonding force and color and luster attractive in appearance simultaneously.The first layer preplating Ti, second layer plating TiN, later i layer plating TiNC.When plating TiNC, with N
2And C
2H
2Flow respectively be divided into i value, be about to N
2/ C
2H
2Ratio be divided into i value, N
2Flow is by (N
2) 1 become (N
2) i, reduce gradually with darkening; C
2H
2Flow is by (C
2H
2) 1 become (C
2H
2) i, increasing gradually with darkening, last one deck is corresponding to the best proportioning of titanium, nitrogen, carbon of requirement color.Before which floor selects big evaporation source electric current and higher workpiece bias for use, to increase interfacial diffusion and to improve bonding force; Which floor selects less evaporation source electric current and low workpiece bias for use at last, to guarantee the top layer good gloss is arranged.For guaranteeing the tone on top layer, the coating time of last one deck is longer.
In plating process process of the present invention, use polynary toning to solve the tone of TiNC coating.Prove that by experiment the toning scope of binary compound titanium nitride or titanium carbide is very limited, and uses N simultaneously
2And C
2H
2(or CH
4) to make the TiNC that reactant gases forms be ternary compound, C
2H
2Trace change and to cause that promptly its tone changes significantly.Therefore, regulate the ratio of titanium, nitrogen and carbon, the vaporator rate of promptly regulating Ti, N
2+ C
2H
2Dividing potential drop and N
2/ C
2H
2Ratio, just can prepare intermediate colors all from the golden yellow to black.Fig. 2 has represented Hunter aberration between TiN-TiNC.As can be seen, titanium-nitrogen layer is the reaction of 1 pair of nitrogen quantitative changeization of curve, and tonal variation almost is single golden yellow; And the curve II and the III hue change range of having added in the nitrogen after the acetylene gas are very wide, the influence that the difference of Here it is binary compound and ternary compound is brought.The curve II is for adding N
295CC/ branch+C
2H
2; The curve III is for adding N
285cc/ branch+C
2H
2
The coating of gold, purple, brown, grey, rifle look, black and corresponding depth distinct colors is corresponding to this titanium respectively, nitrogen, the best proportioning of carbon.During coating, by different level with N
2Dividing potential drop reduces gradually, C
2H
2Dividing potential drop increases gradually, and then color is deepened gradually, and last top layer is then corresponding to the pairing titanium of this color, nitrogen, the best proportioning of carbon.When Ti steam output (characterizing with the evaporation source electric current) and coating vacuum (are N
2+ C
2H
2When dividing potential drop) determining, this color is promptly corresponding to this N respectively
2/ C
2H
2Best ratio.The best proportioning of varicolored titanium, nitrogen, carbon is as follows:
Black evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio: Ti15～40%, N
210～25%, C40～80%,
Grey evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio: Ti15～40%, N
20.1～10%(N
2Also can be zero), C45～80%.
Rifle look evaporation source electric current 50A, N
2+ C
2H
2Dividing potential drop 1.6 * 10
-1Handkerchief, atomic ratio: Ti20～40%, N
20.1～10%(N
2Also can be zero), C45～80%.
Brown evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 2.6 * 10
-1Handkerchief, atomic ratio: Ti25～40%, N
225～60%, C5～10%.
Purple evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 3.3 * 10
-1Handkerchief, atomic ratio: Ti25～45%, N
230～65%, C2～4%.
Golden evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio: Ti30～50%, N
235～70%, C1～2%.
In plating process process of the present invention, adopt variable element layering transition, make the coating structure blind date, thereby strengthened interface binding power.Show that by experiment under reasonable technological parameter, titanium nitride coating and various base material have bonding force preferably, and titanium carbide and titanium carbonitride coating and base material bonding force are poor.From the matter structurology opinion, so-called interface binding power is good, be exactly two kinds of structure of matter blind dates, otherwise then its structure is dredged mutually.Improve the bonding force of two kinds of materials that structure do not blindly date, should adopt transition layer (one or more layers) to be solved.The variable element layering transition technology that the present invention proposes is decomposed into multilayer with whole coating exactly, adopts variable element transition successively, makes structure blind date between layer and the layer, thereby has improved the bonding force of coating and base material to greatest extent.Fig. 3 is the synoptic diagram of variable element layering transition technology, there is shown (1) Ti, (2) TiN, (3) TiN
1C
1, (4) TiN
2C
2, (5) TiNC, (6) each layer of TiNiCi.Adopt in the variable element layering transition technological coating process, increase carbon content gradually, reduce nitrogen content, last top layer is corresponding to the respectively desired titanium of this color, nitrogen, the best proportioning of carbon.Like this, just both guarantee the bonding force of coating and base material, guaranteed desired serial tone again.
For guaranteeing the bonding force of coating and base material, the desired layering transition of the distinct colors number of plies has nothing in common with each other.Color darker (carbon content is bigger), then the number of plies of Yao Qiuing the more, the color shallow required transition layer number of times of healing more lacks.As previously mentioned under the situation that shades of colour evaporation source electric current and coating vacuum are determined, the number of plies of layering transition and the N of each layer
2/ C
2H
2Ratio is as follows:
Black TiNC coating divides 2～5 layers of transition; The N of each layer
2/ C
2H
2Be worth respectively by 3/1 → 1/1 → 1/2 → 1/3 → 1/4,
Grey TiNC coating divides 2～5 layers of transition; The N of each layer
2/ C
2H
2Value is respectively by 3/1 → 1/1 → 1/3 → 1/4 → pure C
2H
2
Rifle look TiNC coating divides 2～5 layers of transition; The N of each layer
2/ C
2H
2Value is respectively by 3/1 → 1/1 → 1/3 → 1/4 → pure C
2H
2.
Brown TiNC coating divides 1～3 layer of transition; The N of each layer
2/ C
2H
2Value is respectively by 10/1 → 7/1 → 5/1.
Purple TiNC coating divides 1～3 layer of transition; N
2/ C
2H
2Value is respectively by 30/1 → 25/1 → 20/1.
Golden TiNC coating is one deck; N
2/ C
2H
2Value is 100/1.
In plating process process of the present invention, adopt different vapor source electric currents and bias voltage parameter both to improve interface binding power, guaranteed the luminance brightness of coating surface again.Experiment showed, different bias voltages, bias current parameter microstructure and the interfacial state to coating, promptly hardness and the bonding force to coating has material impact.For TiNC coating, improve the current density and the bias voltage of workpiece to be plated, also can correspondingly improve the compactness and the bonding force of coating.But too high bias voltage can make surface brightness descend on the contrary.Therefore, in the coating process, adopt different evaporation source electric currents and bias voltage parameter, as preceding which floor adopt higher evaporation source electric current 80～150A and bias voltage 70～100V, to strengthen interfacial diffusion, improve bonding force; The low evaporation source electric current 50～60A of last which floor employing and bias voltage 30～50V are to guarantee surface brightness.
In plating process process of the present invention, use different reactant gasess, adopt different coating vacuum.Experiment showed, and adopt different hydrocarbon polymers to prepare titanium carbonitride coating as reactant gases, its coating vacuum that is fit to is widely different.Use C
2H
2And N
2Making reactant gases can be 1.3～1.3 * 10
-2Obtain TiNC coating under the handkerchief scope plated film vacuum, and use CH
4And N
2When making reactant gases, 1.3 * 10
-1The coating that forms under the above vacuum of handkerchief mainly is the mixolimnion of Ti and TiNC, only forms pure TiNC coating in 1.3 handkerchief scopes.Therefore adopt different reactant gasess should select different plated film vacuum for use, could obtain good coating performance and tone.The present invention C
2H
2+ N
2When making reactant gases, select 1.3 * 10 for use
-1Handkerchief to 5.3 * 10
-1The coating vacuum of handkerchief is best; Use CH
4+ N
2When making reactant gases, select for use 1.3 handkerchief to 3.9 handkerchief coating vacuum for best.As previously mentioned, distinct colors, selected coating vacuum is also inequality.
In plating process process of the present invention,, adopt different coating temperature for different body materials.The temperature of workpiece is an important parameter that obtains high quality layer during coating.Different base materials, its coating temperature that is fit to differs greatly, thereby must strictly grasp.Steel and the thermal adaptation of iron-based material are wide, select 150～280 ℃ coating temperature when making decorative coating for use, 180～250 ℃ better, and to base materials such as copper, aluminium, zinc-aluminiums, because it contains the LMP material of high composition, thereby its coating temperature selects 70～200 ℃ for use, and 100～180 ℃ better, otherwise can have a strong impact on film performance and tone.
In addition, also it is pointed out that the surfaceness of workpiece to be plated and the processing quality before the plating, film performance and interface binding power are had material impact.Copper, aluminium, zinc-aluminium base material should have the pre-plating layer (copper, nickel, more than chromium 15 μ) of good quality.Workpiece must conscientious polishing, cleaning and drying before carrying out coating.
In order to further specify plating process of the present invention, enumerate the following example.
Embodiment one
Stainless steel substrate such as watchcase or ball for health, black TiNC coating.Vacuum is evacuated to 6.5 * 10
-3Handkerchief, plating piece temperature remain on 250 ℃.Use C
2H
2+ N
2Make reactant gases, dividing potential drop remains on 5.3 * 10
-1Handkerchief begins coating.The parameter of each layer is as follows:
The only logical Ar gas of the first layer, plating Ti, evaporation source electric current 70A, bias voltage 70V plated 3 minutes;
The only logical N of the second layer
2Gas, plating TiN, evaporation source electric current 70A, bias voltage 70V plated 3 minutes;
The 3rd layer of logical N
2And C
2H
2(N
2/ C
2H
2=3/1), evaporation source electric current 70A, bias voltage 70V plated 4 minutes;
The 4th layer of logical N
2And C
2H
2, reduce N
2, increase C
2H
2(N
2/ C
2H
2=1/1), evaporation source electric current 70A, bias voltage 70V plated 4 minutes;
Layer 6 (N
2/ C
2H
2=1/4), with Ti, N
2, C optimum proportion plating top layer, evaporation source electric current 60A, bias voltage 50V plated 10 minutes.
Embodiment two
Copper base material nickel plating chromium watchcase, black TiNC coating.The plating piece temperature remains on below 180 ℃, and other parameters and embodiment are together.
Embodiment three
Aluminium zinc base material nickel plating watchcase, black TiNC coating.The plating piece temperature remains on below 150 ℃, and other parameters and embodiment are together.
Embodiment four
The stainless steel substrate watchcase, rifle look (shallow iron gray) TiNC coating.Vacuum is evacuated to 6.5 * 10
-3Handkerchief, the plating piece temperature keeps 250 ℃, N
2+ C
2H
2Dividing potential drop 1.6 * 10
-1Handkerchief, each layer parameter is as follows:
The only logical Ar gas of the first layer, plating Ti, evaporation source electric current 70A, workpiece bias 70V plated 3 minutes;
The only logical N of the second layer
2Gas, plating TiN, evaporation source electric current 70A, workpiece bias 70V plated 3 minutes;
The 3rd layer of logical N
2And C
2H
2(N
2/ C
2H
2=3/1), evaporation source electric current 70A, bias voltage 70V plated 4 minutes;
The 4th layer is reduced N
2, increase C
2H
2(N
2/ C
2H
2=1/1), evaporation source electric current 70A, workpiece bias 70V plated 4 minutes;
The only logical C of layer 6
2H
2, evaporation source electric current 60A, working bias voltage 50V plated 10 minutes.
Embodiment five
The stainless steel substrate watchcase, brown TiNC coating.Vacuum is evacuated to 6.5 * 10
-3Handkerchief, plating piece temperature remain on 250 ℃, N
2+ C
2H
2Dividing potential drop 2.6 * 10
-1Handkerchief, each layer parameter is as follows:
The only logical Ar gas of the first layer, plating Ti, evaporation source electric current 70A, workpiece bias 70V plated 3 minutes;
The only logical N of the second layer
2Gas, plating TiN, evaporation source electric current 70A, working bias voltage 70V plated 4 minutes;
The 3rd layer of logical N
2And C
2H
2(N
2/ C
2H
2=10/1), plating TiNC, evaporation source electric current 70A, working bias voltage 70V plated 4 minutes;
The 4th layer is reduced N
2, increase C
2H
2(N
2/ C
2H
2=7/1), evaporation source electric current 60A, workpiece bias 50V plated 4 minutes;
Layer 5 (N
2/ C
2H
2=5/1), with brown Ti, N
2, C best ratio plating top layer, evaporation source electric current 60A, working bias voltage 50V plated 10 minutes.
Embodiment six
The stainless steel substrate watchcase, purple TiNC coating.Vacuum is evacuated to 6.5 * 10
-3Handkerchief, plating piece temperature remain on 250 ℃, N
2+ C
2H
2Dividing potential drop 3.3 * 10
-1Handkerchief, each layer parameter is as follows:
The only logical Ar gas of the first layer, plating Ti, evaporation source electric current 70A, workpiece bias 70V plated 3 minutes;
The only logical N of the second layer
2Gas, plating TiN, evaporation source electric current 70A, working bias voltage 70V plated 4 minutes;
The 3rd layer of logical N
2And C
2H
2(N
2/ C
2H
2=30/1), plating TiNC, evaporation source electric current 60A, working bias voltage 50V plated 4 minutes;
The 4th layer of logical N
2And C
2H
2(N
2/ C
2H
2=20/1), with the Ti of purple, N
2, C best ratio plating top layer, evaporation source electric current 60A, workpiece bias 50V plated 15 minutes;
Embodiment seven
The stainless steel elastic watchband, simulating golden colour TiNC coating.Vacuum is evacuated to 6.5 * 10
-3Handkerchief, plating piece temperature be below 180 ℃, N
2+ C
2H
2Dividing potential drop 3.9 * 10
-1Handkerchief, each layer parameter is as follows:
The only logical Ar gas of the first layer, plating Ti, evaporation source electric current 70A, workpiece bias 70V plated 3 minutes;
The second layer leads to N
2Gas, plating Ti, evaporation source electric current 70A, working bias voltage 70V plated 4 minutes;
The 3rd layer of (N
2/ C
2H
2=100/1), with golden Ti, N
2, C best ratio plating top layer, evaporation source electric current 60A, working bias voltage 50V plated 15 minutes.
The present invention adopts the polynary toning ion plating of variable element layering transition prepared TiNC series coating, effect is remarkable, both guaranteed interface binding power, guaranteed desired tone again, and it is in extensive range to mix colours, can prepare simulating golden colour, black and all intermediate colors between the two, tone just, luminance brightness is good.The bonding force of coating and base material approaches the bonding force of TiN coating and base material.Process repeatability is stable, applicable to steel, iron, copper, aluminium, zinc-aluminium with and similar metal be the various decorative coatings such as clock and watch, glasses, stationery, jewellery, five metals and handicraft of base material, have broad application prospects.
Claims (3)
1, a kind of titanium carbonitride coating ion plating is characterized in that adopting carbon, nitrogen, the toning of titanium ternary, variable element layering transition, and to form titanium carbonitride coating on metal base, this method comprises:
(1) adopt the ternary toning can produce the decorative coating of gold, purple, brown, grey, rifle look, black and corresponding depth different colours, the titanium carbonitride coating of every kind of color is corresponding to every kind of definite titanium, nitrogen, carbon proportioning,
Black evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio:
Ti15～40%，N
210～25%，C40～80%，
Grey evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio:
Ti15～40%，N
20.1～10%，C45～80%，
Rifle look evaporation source electric current 50A, N
2+ C
2H
2Dividing potential drop 1.6 * 10
-1Handkerchief, atomic ratio: Ti20～40%, N
20.1～10%, C45～80%,
Brown evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 2.6 * 10
-1Handkerchief, atomic ratio:
Ti25～40%，N
225～60%，C5～10%，
Purple evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 3.3 * 10
-1Handkerchief, atomic ratio: Ti25～45%, N
230～65%, C2～4%,
Golden evaporation source electric current 60A, N
2+ C
2H
2Dividing potential drop 5.3 * 10
-1Handkerchief, atomic ratio:
Ti30～50%，N
235～70%，C1～2%；
(2) whole coating is divided into the 2+i level, and variable element layering transition is finished continuously, the titanizing of the first layer elder generation, and second layer titanium-nitride, the titanium carbonitride of each layer plating later on, one deck titanium carbonitride is corresponding to titanium, nitrogen, the carbon proportioning of requirement color at last,
The N of varicolored level and each layer
2/ C
2H
2Value is,
Black TiNC coating divides 2～5 layers of transition, the N of each layer
2/ C
2H
2Be worth respectively by 3/1 → 1/1 → 1/2 → 1/3 → 1/4,
Grey TiNC coating divides 2～5 layers of transition, the N of each layer
2/ C
2H
2Be worth respectively by 3/1 → 1/1 → 1/3 → 1/4 → 1/100,
Rifle look TiNC coating divides 2～5 layers of transition, the N of each layer
2/ C
2H
2Be worth respectively by 3/1 → 1/1 → 1/3 → 1/4 → 1/100,
Brown TiNC coating divides 1～3 layer of transition, the N of each layer
2/ C
2H
2Be worth respectively by 10/1 → 7/1 → 5/1,
Purple TiNC coating divides 1～3 layer of transition, the N of each layer
2/ C
2H
2Be worth respectively by 30/1 → 25/1 → 20/1,
Golden TiNC coating is one deck, N
2/ C
2H
2Value is 100/1,
During coating, preceding which floor evaporation source electric current is got 80～150A, workpiece bias 70～100V, and last two-layer evaporation source electric current is got 50～60A, workpiece bias 30～50V.
2, ion plating technology for titanium carbonitride coatings as claimed in claim 1 when it is characterized in that adopting different hydrocarbon polymers to make reactant gases, is used CH
4Replaced C
2H
2Make reactant gases, the coating vacuum is at 1.3～11.7 handkerchiefs, and 1.3～3.9 handkerchiefs are better.
3,, it is characterized in that said metal base is steel, iron, copper, aluminium, zinc-aluminium and similar metal thereof as claim 1,2 described any ion plating technology for titanium carbonitride coatings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91102459 CN1021836C (en) | 1991-04-20 | 1991-04-20 | Ion plating technology for titanium carbonitride coatings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91102459 CN1021836C (en) | 1991-04-20 | 1991-04-20 | Ion plating technology for titanium carbonitride coatings |
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| Publication Number | Publication Date |
|---|---|
| CN1055957A CN1055957A (en) | 1991-11-06 |
| CN1021836C true CN1021836C (en) | 1993-08-18 |
Family
ID=4905617
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|---|---|---|---|
| CN 91102459 Expired - Fee Related CN1021836C (en) | 1991-04-20 | 1991-04-20 | Ion plating technology for titanium carbonitride coatings |
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|---|---|---|---|---|
| CN100358842C (en) * | 2005-09-08 | 2008-01-02 | 陕西科技大学 | Oil drop glaze preparation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1040556C (en) * | 1994-06-01 | 1998-11-04 | 中国原子能科学研究院 | Target making process of low-activity surface-intensity radioactive source |
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| CN102153135A (en) * | 2010-12-30 | 2011-08-17 | 重庆大学 | Method for preparing titanium carbonitride from ilmenite with high impurity content |
| CN102766845B (en) * | 2012-07-09 | 2015-02-25 | 珠海承鸥卫浴用品有限公司 | Metal surface PVD (Physical Vapor Deposition) decorative coating method |
| CN102877065B (en) * | 2012-09-26 | 2014-12-10 | 广州海鸥卫浴用品股份有限公司 | Method for depositing coating |
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| CN111842085A (en) * | 2020-06-24 | 2020-10-30 | 肇庆宏旺金属实业有限公司 | Preparation method of brown fingerprint-resistant stainless steel |
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-
1991
- 1991-04-20 CN CN 91102459 patent/CN1021836C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100358842C (en) * | 2005-09-08 | 2008-01-02 | 陕西科技大学 | Oil drop glaze preparation method |
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| Publication number | Publication date |
|---|---|
| CN1055957A (en) | 1991-11-06 |
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