CN102183316A - Real-time temperature monitoring instrument for tunable semiconductor laser absorption spectrum - Google Patents
Real-time temperature monitoring instrument for tunable semiconductor laser absorption spectrum Download PDFInfo
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- CN102183316A CN102183316A CN201010583531XA CN201010583531A CN102183316A CN 102183316 A CN102183316 A CN 102183316A CN 201010583531X A CN201010583531X A CN 201010583531XA CN 201010583531 A CN201010583531 A CN 201010583531A CN 102183316 A CN102183316 A CN 102183316A
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Abstract
The invention discloses a temperature monitoring instrument for a tunable semiconductor laser absorption spectrum. Infrared laser beams penetrate through a zone to be temperature-measured, and the temperature of a measured zone is obtained in real time by utilizing a characteristic absorption spectrum of water vapor in the zone. Laser is transmitted and emitted through singlemode fibers, penetrates through the zone to be temperature-measured after being subjected to collimation and beam expansion, and is then received and coupled to multimode fibers; and the coupled laser is received by a photoelectric detector and converted to electric signals, and temperature is obtained by acquisition processing and inversion.
Description
Technical field
The present invention relates to temperature monitoring instrument field, especially a kind of tunable semiconductor laser absorption spectrum temperature real-time monitor that is applicable to the combustion site environment.
Background technology
Temperature is one of most important parameter of burning efficiency measurement, and the measurement of temperature all occupies and consequence in the burning efficiency optimization and the fields such as toxic emission control, the control of engine combustion condition diagnosing of industrial combustion boiler.In recent years, China has done a large amount of retrofit works for improving combustion position to burner etc., but the combustion monitoring technology is still the link that falls behind relatively.The monitoring of fired state and new combustion model are set up and checking, all are badly in need of the temperature and isoparametric accurate in real time measurement of CO, CO2, O2 and NOx concentration of wanting the corresponding techniques means that the burning place is provided.Thereby the accurate real time on-line monitoring of temperature of combustion has great importance to burning optimization and burning control.
Existing thermometry totally is divided into two classes: contact and contactless.Widespread use is thermopair, black matrix cavate heat radiation pyrometer in the contact thermography.Loop two end nodes that thermopair utilizes two kinds of different conductors or semiconductor to form reach the thermoelectrical potential that local thermal equilibrium is respectively under the different temperatures environment, by demarcating thermometric, the fairly simple easy operating of this measurement mechanism, but oxidation, reducing atmosphere there are specific (special) requirements, have aging replacing problem; Black matrix cavate heat radiation pyrometer utilizes heatproof sapphire single-crystal optical fiber to make matrix material at end coated metal film formation blackbody chamber, when reaching local thermal equilibrium with flame, utilizes the spontaneous heating radiation in the blackbody chamber to adopt double-colored thermometry to measure local temperature; More than two kinds of contact type measurements be point type and invade and measure, field measurement needs multiple spot to distribute, and has difficulties in the reality and can impact the burning place, the thermally equilibrated requirement of local has simultaneously also limited the speed of its response.
The temperature of combustion field, particularly to the transient combustion temperature field, contact type measurement can be upset the long initial distribution of temperature, and the contact type measurement response speed is slower, can not realize the real-time measurement in temperature field.And for the burning gas temperature field that high flow velocities is arranged, contact type measurement can raise because of the heat energy temperature of gas percussion conversion, is measured as the static temperature in stagnation temperature rather than temperature field.Thereby need development to have the non-contact type temperature measurement technology of better transient response characteristic.
Traditional non-contact temperature measuring is divided into two kinds: the one, by the macroscopic property parameter thermometric of combustion medium, as acoustic method; The 2nd, utilize Fire Radiation characteristic optical method thermometric (brightness method, total radiation method, colourimetry); The acoustic method thermometric utilizes sound wave propagation rate in medium to change with gas temperature and finds the solution temperature or temperature field, thermometric is supposed based on ideal gas, institute's fire detecting flame temperature is the path medial temperature, influences such as the dust granules concentration of Actual combustion environment, size distribution, air-flow need be carried out modeling and corresponding correction is made in measurement, make its universality and precision be subjected to very big influence.Radiation temperature measurement is based on blackbody radiation law, Planck law, Wien's displacement law, this special fence-Boltzmann's law, and because of actual object all is not a black matrix, radiation temperature measurement is subjected to the influence of actual object emissivity.Total radiation temperature measurer, brightness temperature measurer, color comparison temperature measurement instrument respectively by the full spectral range built-up radiation of receiving target, measurement target near setted wavelength in the radiance in the narrow-band spectrum, two wave bands monochromatic radiation energy ratio determine target temperature.Wherein the total radiation thermometric is influenced greatly by emissivity, low-response, and precision is not high, and temperature-measuring range is less; It is high that brightness thermometric measuring accuracy is wanted relatively, is only applicable to high temperature measurement; The colourimetry measuring error is less, but influenced by dust on the light path, smog, guarantee that the absorptive rate of radiation of two wave bands is close, and selected wavelength can produce than mistake as there is the components selection absorption on light path.
The non-contact laser spectroscopic temperature measurement of new development, as Rayleigh scattering (RS) spectrum, Raman spectrum and coherent anti-stokes raman scattering spectroscopic methodology (CARS), planar laser induced fluorescence are sent out (PLIF) and absorption spectroscopy (AS).The laser spectrum thermometric is based on the whole that Boltzmann distributes except that Rayleigh Scattering Spectra, the population of different energy levels is counted difference under the different temperatures.The Raman spectrum thermometric is measured temperature by the Raman scattering light intensity distributions by measuring vertical or other direction molecules of incident light to the scattering of incident laser.CARS method thermometric, to heat balance system, the relevant anti-Stokes light of the corresponding certain strength of specified temp determines that its intensity comes thermometric.PLIF method thermometric arrives excited state with laser beam excitation atom or molecule, collect the fluorescence that produces to the low-lying level spontaneous radiation by unstable excited state in the vertical beam of light direction, utilize the relation of Boltzmann's mark and temperature to carry out temperature survey, the PLIF method can realize the temperature field instantaneous imaging of face.CRRS is relative higher with PLIF method measuring accuracy, but both optical texture complexity, Signal Regulation and difficult treatment, light source power requires high, is not suitable for actual industrial environment and uses.
The AS method is utilized the characteristic absorption of gas at infrared spectral region, adopts two-wire or many absorption lines to provide temperature information, and relative CARS of measuring accuracy and PLIF method are lower slightly.The measurement temperature is the static temperature under the average meaning in path, can provide the distribution in temperature field in conjunction with the CT algorithm by the measurement of mulitpath.Developing rapidly of the semiconductor laser with tunable light source of narrow linewidth promoted the development of high-resolution absorption spectrum technology, i.e. tunable semiconductor laser absorption spectrum (TDLAS) technology.Promptly carried out the research of TDLAS gas detection method in the eighties in last century abroad, the TDLAS combustion monitoring has been successfully applied to industrial combustion boiler and engine diagnostic.Domestic TDLAS combustion monitoring then is in the starting state.The TDLAS temp measuring system is realized simple, and optical fiber emission and coupling scheme make system adapt to measurement environment and miniaturization easily.Other measurement environment gas compositions there is not specific (special) requirements, be not subjected to the interference of other gas componants and variation thereof, only require required optical emitting of light path and receive window, possess certain anti-dust, smog interference performance, can realize non-invasive real-time online temperature monitoring, have the industrial environment application prospect.
Summary of the invention
The purpose of this invention is to provide a kind of tunable semiconductor laser absorption spectrum temperature monitor, to realize based on the non-intrusion type temperature survey of absorption spectroscopy to combustion site.
In order to achieve the above object, the technical solution adopted in the present invention is:
Tunable semiconductor laser absorption spectrum temperature monitor, include cabinet, it is characterized in that: be provided with red laser and Distributed Feedback Laser in the described cabinet, and with the combiner device of the outgoing combiner of red laser and Distributed Feedback Laser, also be provided with signal generating module in the described cabinet, and the laser temperature current control module that is electrically connected with described signal generating module respectively, lock-in amplifier, described laser temperature current control module output terminal is electrically connected with the temperature control end of described Distributed Feedback Laser, the output terminal of described signal generating module respectively with the input end of laser temperature current control module, the input end of lock-in amplifier is electrically connected, the FC/PC flange that is connected by optical fiber with described combiner device light-emitting window is installed on the described cabinet tank wall, the photodetector that output terminal is electrically connected with the input end of lock-in amplifier, being positioned at cabinet is outside equipped with a termination and goes into the single-mode fiber that closes Shu Guang of drawing red laser and Distributed Feedback Laser on the described FC/PC flange, the described single-mode fiber other end is connected to the beam-expanding collimation device of aiming at temperature area one side to be measured, be positioned at cabinet and also be provided with the receiving telescope of aiming at temperature area opposite side to be measured outward, described receiving telescope output terminal is connected with described photodetector input end by multimode optical fiber, and the emergent light of described single-mode fiber receives through being received telescope behind the temperature area to be measured.
Described tunable semiconductor laser absorption spectrum temperature monitor is characterized in that: described beam-expanding collimation device, receiving telescope are with the optical axis setting.
Described tunable semiconductor laser absorption spectrum temperature monitor is characterized in that: the capture card signal port that is electrically connected with the output terminal of the output terminal of described lock-in amplifier, signal generating module also is installed on the described cabinet tank wall.
Described tunable semiconductor laser absorption spectrum temperature monitor is characterized in that: be provided with the D.C. regulated power supply to each power unit power supply in the cabinet in the described cabinet, the ac plug that is electrically connected with D.C. regulated power supply also is installed on the cabinet tank wall.
Described tunable semiconductor laser absorption spectrum temperature monitor is characterized in that: the fan to the cabinet inside air-supply is installed on the described cabinet tank wall.
Described tunable semiconductor laser absorption spectrum temperature monitor is characterized in that: be provided with narrow band pass filter in the described receiving telescope.
The invention provides a kind of tunable semiconductor laser absorption spectrum temperature monitor, designed and to be applied to combustion field, contained the non-intrusion type temperature of the real-time online of steam temperature place and accurately measured.Laser passes temperature area to be measured behind single-mode fiber outgoing collimator and extender, be coupled to behind the multimode optical fiber by receiving telescope signal is transferred back to outside data acquisition and processing section, is converted to electric signal after photodetector receives and handles the inverting temperature.Two characteristic absorption lines of single laser scans steam have comprised temperature information in the absorption under the temperature of place to be measured, are used for temperature survey.Among the present invention, the little optical window that transmits and receives is only required at temperature area to be measured scene, gets final product so that beam-expanding collimation device and receiving telescope to be installed.The present invention makes the present invention be applied to burn the place easily to the resistivity of place dust, smog etc., comprises that the non-invasive temperature of the real-time online that has flow velocity in the place accurately measures.
The present invention utilizes near infrared tunable semiconductor laser absorption spectrum technology, and the fiber coupling technique in conjunction with being applicable to site environment utilizes wavelength-modulation technique, surveys the harmonic signal that has gas absorption information, inverting temperature after the acquisition process.The high-resolution of tunable semiconductor laser absorption spectrum, the interference that makes it remove other environmental gas composition by careful absorption line selection cancellation easily; Adopt wavelength-modulation technique, can effectively eliminate the interference of low-frequency noise, thus insensitive to the low frequency background radiation of measurement environment, and measurement result can not be subjected to the influence of background radiation and fluctuation thereof; Because the temperature retrieval utilization is that absorption line intensity ratio varies with temperature, thereby the influence of fading factors such as scattering that the dust in the measurement light path, smog etc. bring Laser Transmission will be by cancellation when doing absorption intensity ratio, as long as the intensity noise of received signal is enough, can not impact, make the technical program have certain anti-dust interference performance measurement.
The present invention only need because of the non-contacting characteristics of optics, can not impact measured zone at the on-the-spot optical observation window that transmits and receives that is provided with of temperature area to be measured; System adopts the Optical Fiber Transmission mode, makes monitor of the present invention can separate the pulpit of putting into away from temperature area to be measured scene with temperature area to be measured scene with outside data acquisition and processing section; The real-time online temperature survey of the measurement environment that the present invention can be used in the combustion field that contains dust, have certain flow rate.
Description of drawings
Fig. 1 is a structural system block diagram of the present invention.
Fig. 2 is that selected steam infrared signature absorbs the strong ratio of line with variation of temperature.
Fig. 3 is that selected steam infrared signature is absorbed in the second harmonic signal under the different temperatures.
Embodiment
As shown in Figure 1.Tunable semiconductor laser absorption spectrum temperature real-time monitor, include cabinet 2, be provided with red laser 6 and Distributed Feedback Laser 7 in the cabinet 2, and with the combiner device 8 of the outgoing combiner of red laser 6 and Distributed Feedback Laser 7, also be provided with signal generating module 16 in the cabinet 2, and the laser temperature current control module 5 that is electrically connected with signal generating module 16 respectively, lock-in amplifier 15, laser temperature current control module 5 output terminals are electrically connected with the temperature control end of Distributed Feedback Laser 7, the output terminal of signal generating module 16 respectively with the input end of laser temperature current control module 5, the input end of lock-in amplifier 15 is electrically connected, the FC/PC flange 10 that is connected by optical fiber with combiner device 8 light-emitting windows is installed on cabinet 2 tank walls, the photodetector 9 that output terminal is electrically connected with the input end of lock-in amplifier 15, being positioned at cabinet 2 is outside equipped with a termination and goes into the single-mode fiber that closes Shu Guang 20 of drawing red laser 6 and Distributed Feedback Laser 7 on the FC/PC flange 10, single-mode fiber 20 other ends are connected to the beam-expanding collimation device 22 of aiming at temperature area to be measured 23 1 sides that are in zone, outfield 21, be positioned at the cabinet 2 outer receiving telescopes 25 of aiming at temperature area to be measured 23 opposite sides that are in zone, outfield 21 that also are provided with, receiving telescope 25 output terminals are connected with photodetector 9 input ends by multimode optical fiber 26, and the emergent light of single-mode fiber 20 receives through being received telescope 25 behind the temperature area to be measured.
Beam-expanding collimation device 22, receiving telescope 25 are with the optical axis setting.The capture card signal port 11 that is electrically connected with the output terminal of the output terminal of lock-in amplifier 15, signal generating module 16 also is installed on cabinet 2 tank walls.Be provided with D.C. regulated power supply 4 in the cabinet 2, the ac plug 3 that is electrically connected with D.C. regulated power supply 4 also is installed on cabinet 2 tank walls to each power unit power supply in the cabinet 2.Fan 17 to cabinet 2 inner blower is installed on cabinet 2 tank walls.Be provided with narrow band pass filter 24 in the receiving telescope 25.
The cabinet outer setting has industrial computer 13, and cabinet and industrial computer are put into pulpit 1 jointly.The capture card 12 of industrial computer 13 is connected with received signal with capture card signal port on the cabinet tank wall, and the external display of industrial computer 13 14 is with video data.Red laser switch 18 and cabinet master switch 19 also are installed on the cabinet tank wall.
The present invention utilizes steam and near the more close a pair of absorption line line strong ratio of the v1+v3 of transition frequently band 1.4 μ m to come the inverting temperature with the temperature monotone variation.More close because of the absorption line of selecting, can adopt single semiconductor laser to realize two scannings that absorb line.By the benchmark job state of laser temperature current control module 5 control Distributed Feedback Lasers 7, change the center wavelength of light that of laser instrument by the adjusting of laser works temperature and the basic bias current of laser instrument.Serrated signal that signal generating module 16 produces and high frequency sinusoidal signal are added on the bias current of Distributed Feedback Laser 7, serrated signal periodically changes the length scanning of injection current size property performance period of laser instrument, and selected two absorption lines are crossed in multiple scanning like this.Die Jia sinusoidal signal is carried out high frequency modulated to electric current on this basis, realizes the modulation (having produced intensity modulated simultaneously) that laser instrument is gone out optical wavelength.The emergent light of Distributed Feedback Laser 7 and red laser 6 synthesizes a branch of smooth outgoing through combiner device 8, and ruddiness is used for the assisted modulation of outer light path.The emergent light that closes behind the bundle is coupled in the single-mode fiber 21 through the FC/PC of system chassis 2 bump joint 10, expands the emission of bundle back at beam-expanding collimation device 22, passes temperature area 23 to be measured.Laser in temperature area 23 to be measured after the water vapor absorption is coupled in the multimode optical fiber 26 by receiving telescope 25, Laser Transmission is gone back to pulpit 1, wherein narrow band pass filter 24 is a bandpass filter of selecting the infrared band of thermometric for use, place in the receiving telescope 25, be used for filtering the radiation background of removing existence in the temperature area 23 to be measured, prevent that photodetector 9 is saturated, the filtration of radiation background has simultaneously also improved noise; Photodetector 9 is converted to electric signal with light signal and sends into lock-in amplifier 15, signal generating module 16 will be sent to lock-in amplifier 15 working frequency references with the same frequency sinusoidal signal of sinusoidal signal on the Distributed Feedback Laser 7 that is added to simultaneously, lock-in amplifier 15 demodulates the harmonic signal components of the twice reference frequency in the signal, i.e. second harmonic signal (as shown in Figure 3).The capture card 12 that enters industrial computer 13 through capture card signal port 11 with synchronous trigger pip of serrated signal and second harmonic signal that signal generating module 16 provides, collection by programmed control capture card 12, extract spectral information after the collection original signal averages and handles and obtain the ratio (as shown in Figure 2) of selected two absorption line intensities, thereby be finally inversed by temperature.
Inversion result shows on display 14 software interfaces.When initial light path is regulated, open red laser switch 18, utilize ruddiness to adjust beam-expanding collimation device 22, receiving telescope 25 makes it coaxial; Close red laser switch 18 then, utilize infrared light and photodetector detector signal or infrared light power meter to do further to regulate.
As shown in Figure 2.Fig. 2 is that the strong ratio of the selected water vapor absorption line of thermometric line is with the variation of temperature curve.The strong ratio of line is the monotonic quantity of temperature, and the actual strong ratio of line that records promptly can be used to the inverting temperature.
As shown in Figure 3.Fig. 3 (is labeled as line1 respectively for selected two water vapor absorption lines under the different temperatures, line2) second harmonic signal has carried out normalization by an amplitude (being the peak value of second harmonic) that absorbs line line1 central wavelength wherein to second harmonic among the figure.
Claims (6)
1. tunable semiconductor laser absorption spectrum temperature real-time monitor, include cabinet, it is characterized in that: be provided with red laser and Distributed Feedback Laser in the described cabinet, and with the combiner device of the outgoing combiner of red laser and Distributed Feedback Laser, also be provided with signal generating module in the described cabinet, and the laser temperature current control module that is electrically connected with described signal generating module respectively, lock-in amplifier, described laser temperature current control module output terminal is electrically connected with the temperature control end of described Distributed Feedback Laser, the output terminal of described signal generating module respectively with the input end of laser temperature current control module, the input end of lock-in amplifier is electrically connected, the FC/PC flange that is connected by optical fiber with described combiner device light-emitting window is installed on the described cabinet tank wall, the photodetector that output terminal is electrically connected with the input end of lock-in amplifier, being positioned at cabinet is outside equipped with a termination and goes into the single-mode fiber that closes Shu Guang of drawing red laser and Distributed Feedback Laser on the described FC/PC flange, the described single-mode fiber other end is connected to the beam-expanding collimation device of aiming at temperature area one side to be measured, be positioned at cabinet and also be provided with the receiving telescope of aiming at temperature area opposite side to be measured outward, described receiving telescope output terminal is connected with described photodetector input end by multimode optical fiber, and the emergent light of described single-mode fiber receives through being received telescope behind the temperature area to be measured.
2. tunable semiconductor laser absorption spectrum temperature real-time monitor according to claim 1, it is characterized in that: described beam-expanding collimation device, receiving telescope are with the optical axis setting.
3. tunable semiconductor laser absorption spectrum temperature real-time monitor according to claim 1 is characterized in that: the capture card signal port that is electrically connected with the output terminal of the output terminal of described lock-in amplifier, signal generating module also is installed on the described cabinet tank wall.
4. tunable semiconductor laser absorption spectrum temperature real-time monitor according to claim 1, it is characterized in that: be provided with D.C. regulated power supply in the described cabinet, the ac plug that is electrically connected with D.C. regulated power supply also is installed on the cabinet tank wall to each power unit power supply in the cabinet.
5. tunable semiconductor laser absorption spectrum temperature real-time monitor according to claim 1 is characterized in that: the fan to the cabinet inside air-supply is installed on the described cabinet tank wall.
6. tunable semiconductor laser absorption spectrum temperature real-time monitor according to claim 1 is characterized in that: be provided with narrow band pass filter in the described receiving telescope.
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| CN102495021A (en) * | 2011-12-12 | 2012-06-13 | 山东大学 | System and method for detecting trace amount of steam based on two absorption peaks |
| CN103557886A (en) * | 2013-10-29 | 2014-02-05 | 东南大学 | Method for simultaneously measuring distribution of high-temperature gas two-dimensional transient temperature field and concentration field based on hyper spectrum |
| CN103592253A (en) * | 2013-11-06 | 2014-02-19 | 安徽皖仪科技股份有限公司 | Laser gas analyzer for precise temperature compensation in concentration of gas to be measured |
| CN104677426A (en) * | 2015-03-18 | 2015-06-03 | 华北电力大学 | Mixed gas temperature/concentration field measuring method and device based on acousto-optic fusion |
| CN105441909A (en) * | 2014-07-08 | 2016-03-30 | 中微半导体设备(上海)有限公司 | Temperature detection system and temperature detection method and MOCVD (metal organic chemical vapor deposition) device with temperature detection system |
| CN105841824A (en) * | 2016-03-23 | 2016-08-10 | 东南大学 | Non-contact portable temperature real-time measurement device and measurement method thereof |
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| CN107906555A (en) * | 2017-10-12 | 2018-04-13 | 上海交通大学 | Optimized control method of combustion based on multiline absorption spectrum tomography technology |
| CN108267240A (en) * | 2016-12-30 | 2018-07-10 | 中国科学院上海硅酸盐研究所 | A kind of laser assisted radiometric temperature measurement device and measuring method |
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