CN102172887A - 抛光头 - Google Patents
抛光头 Download PDFInfo
- Publication number
- CN102172887A CN102172887A CN 201110039266 CN201110039266A CN102172887A CN 102172887 A CN102172887 A CN 102172887A CN 201110039266 CN201110039266 CN 201110039266 CN 201110039266 A CN201110039266 A CN 201110039266A CN 102172887 A CN102172887 A CN 102172887A
- Authority
- CN
- China
- Prior art keywords
- retaining ring
- pedestal
- rubbing head
- flexible membrane
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title abstract description 42
- 239000012528 membrane Substances 0.000 claims abstract description 24
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 44
- 230000004888 barrier function Effects 0.000 claims description 25
- 238000004891 communication Methods 0.000 claims description 14
- 238000007598 dipping method Methods 0.000 claims description 5
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 3
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- 229920001084 poly(chloroprene) Polymers 0.000 claims description 3
- 229920002530 polyetherether ketone Polymers 0.000 claims description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 11
- 239000000126 substance Substances 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract 5
- 238000005299 abrasion Methods 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000007517 polishing process Methods 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110039266 CN102172887B (zh) | 2011-02-16 | 2011-02-16 | 抛光头 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110039266 CN102172887B (zh) | 2011-02-16 | 2011-02-16 | 抛光头 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102172887A true CN102172887A (zh) | 2011-09-07 |
CN102172887B CN102172887B (zh) | 2013-01-30 |
Family
ID=44516230
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201110039266 Active CN102172887B (zh) | 2011-02-16 | 2011-02-16 | 抛光头 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102172887B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103659548A (zh) * | 2013-12-06 | 2014-03-26 | 清华大学 | 抛光头 |
CN103889656A (zh) * | 2011-09-12 | 2014-06-25 | 应用材料公司 | 具有复合塑胶部分的载体头部 |
CN107127670A (zh) * | 2017-06-06 | 2017-09-05 | 陈婷 | 一种便于更换抛光头的抛光机 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010053665A1 (en) * | 2000-05-18 | 2001-12-20 | Lee Sang-Yeoul | Polishing head of a chemical and mechanical polishing apparatus |
CN1440321A (zh) * | 2000-05-12 | 2003-09-03 | 多平面技术公司 | 具有独立限位环和多区域压力控制结构的气动隔膜式抛光头及其使用方法 |
US20040087254A1 (en) * | 1995-06-09 | 2004-05-06 | Norman Shendon | Fluid-pressure regulated wafer polishing head |
JP2004311506A (ja) * | 2003-04-02 | 2004-11-04 | Shin Etsu Handotai Co Ltd | ウエーハ研磨装置及びその研磨ヘッド並びにウエーハ研磨方法 |
-
2011
- 2011-02-16 CN CN 201110039266 patent/CN102172887B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040087254A1 (en) * | 1995-06-09 | 2004-05-06 | Norman Shendon | Fluid-pressure regulated wafer polishing head |
CN1440321A (zh) * | 2000-05-12 | 2003-09-03 | 多平面技术公司 | 具有独立限位环和多区域压力控制结构的气动隔膜式抛光头及其使用方法 |
US20010053665A1 (en) * | 2000-05-18 | 2001-12-20 | Lee Sang-Yeoul | Polishing head of a chemical and mechanical polishing apparatus |
JP2004311506A (ja) * | 2003-04-02 | 2004-11-04 | Shin Etsu Handotai Co Ltd | ウエーハ研磨装置及びその研磨ヘッド並びにウエーハ研磨方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103889656A (zh) * | 2011-09-12 | 2014-06-25 | 应用材料公司 | 具有复合塑胶部分的载体头部 |
CN103889656B (zh) * | 2011-09-12 | 2017-03-15 | 应用材料公司 | 具有复合塑胶部分的载体头部 |
US10052739B2 (en) | 2011-09-12 | 2018-08-21 | Applied Materials, Inc. | Carrier head with composite plastic portions |
CN103659548A (zh) * | 2013-12-06 | 2014-03-26 | 清华大学 | 抛光头 |
CN107127670A (zh) * | 2017-06-06 | 2017-09-05 | 陈婷 | 一种便于更换抛光头的抛光机 |
CN107127670B (zh) * | 2017-06-06 | 2019-01-11 | 江苏省徐州华泰工具有限责任公司 | 一种便于更换抛光头的抛光机 |
Also Published As
Publication number | Publication date |
---|---|
CN102172887B (zh) | 2013-01-30 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED Free format text: FORMER OWNER: TSINGHUA UNIVERSITY Effective date: 20150202 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100084 HAIDIAN, BEIJING TO: 300350 JINNAN, TIANJIN |
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TR01 | Transfer of patent right |
Effective date of registration: 20150202 Address after: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee after: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Address before: 100084 Haidian District 100084-82 mailbox Beijing Patentee before: Tsinghua University |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Application of polishing head in chemico-mechanical polishing technology and polishing method of chemico-mechanical Effective date of registration: 20180206 Granted publication date: 20130130 Pledgee: Tsinghua Holdings Co., Ltd. Pledgor: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Registration number: 2018120000003 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191022 Granted publication date: 20130130 Pledgee: Tsinghua Holdings Co., Ltd. Pledgor: TIANJIN HWATSING TECHNOLOGY COMPANY LIMITED (HWATSING CO., LTD.) Registration number: 2018120000003 |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, No. 8, building 9, ha Hing Road, Haihe science and Technology Park, Jinnan District, Tianjin Patentee before: TSINGHUA University |