CN102162935B - Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine - Google Patents
Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine Download PDFInfo
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- CN102162935B CN102162935B CN2010106135983A CN201010613598A CN102162935B CN 102162935 B CN102162935 B CN 102162935B CN 2010106135983 A CN2010106135983 A CN 2010106135983A CN 201010613598 A CN201010613598 A CN 201010613598A CN 102162935 B CN102162935 B CN 102162935B
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- suction nozzle
- shell
- adjustable vacuum
- worm screw
- loam cake
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Abstract
The invention provides an adjustable vacuum sucker device for assembling and adjusting a lens of a photoetching machine and relates to the technical field of the manufacturing, assembly and adjustment of projection objective lens of deep ultraviolet photoetching machines. By the adjustable vacuum sucker device, the problem that lenses, lens barrels and lens frames of different dimensions cannot be reliably absorbed and transported in the process of processing and assembling photoetching projection objective lenses is solved. The adjustable vacuum sucker device comprises an adaptive joint, an upper cover, a shell, a worm wheel, a worm screw, an adjusting handle, shift pins, a connecting rod and rubber suction nozzles. The three shift pins which are circumferentially and uniformly distributed are driven to rotate through the meshing driving of the worm wheel and the worm screw; and the shift pins shift the connecting rod to make the centrosymmetrical three rubber suction nozzles synchronously moved from the center to the periphery. The sucker device has a simple structure, steplessly adjustable suction ranges, large adjustment ranges and capability of self locking, and the rubber suction nozzles do not damage the surfaces of sucked workpieces. The sucker device can be used for sucking optics lenses and the suction of parts such as the lens frames and the like with annular end faces, has a simple structure, can be used for nondestructive clamping, is continuously adjustable, and can simultaneously suck the lenses and the lens frames.
Description
Technical field
The present invention relates to deep-UV lithography machine projection objective camera lens and make and the integration techno logy field, be specifically related to a kind of adjustable vacuum chuck device that can be used for different size eyeglass in the photoetching projection objective lens process and assemble process, lens barrel and picture frame carrying.
Background technology
The processing and manufacturing of photoetching projection objective lens is very accurate, a complicated process with assembling; No matter be correct grinding, polishing and the detection of eyeglass; Still the Precision Machining and the detection of picture frame; And the clamping of eyeglass and picture frame in the assembling process, all need frequent with the carrying back and forth between different process equipments and checkout equipment of eyeglass, picture frame.In this process, want strict guarantee can not produce damage to the optical surface of eyeglass and location, the matching surface of picture frame.
The bore of optical element is often between 50-350mm in the photoetching projection objective lens; Small-bore optical mirror slip adopts single suction nozzle to draw usually; The part that eyeglass contacts with suction nozzle is the endless belt at the edge of eyeglass, can avoid like this effective optical surface of optical element center section is produced damage as far as possible.Yet for the eyeglass of different size, this method needs the different suction nozzles of corresponding size.
For the carrying of picture frame, usual way is the mode that adopts a dead lift or mechanical arm.The weight of lithographic objective picture frame have more than ten kilograms, a dead lift take time and effort and also reliability not high, easy injuring part.Adopt the external cylindrical surface of the common clamping picture frame of mechanical arm, when picture frame is fitted into lens barrel, can't pack into; And this mode is rigidity contact, the matching surface of injuring part easily.Though adopt the vacuum rubber sucker can protect the end face of picture frame, because the end face of picture frame is an annular, the intermediate portion is a hollow, can't directly use single suction nozzle to accomplish the absorption of picture frame.
Summary of the invention
The present invention provides a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for for optical element and mechanical component in the processing and manufacturing that solves existing photoetching projection objective lens and the assembling process are picking and placeing the problem that causes damage with the handling process element surface.
A kind ofly be used for the adjustable vacuum chuck device that photoetching machine lens is debug; This device comprises adaptor sub, loam cake, shell, worm gear, worm screw, adjusting handle, finger, locating ring, bearing pin, connecting rod, suction nozzle joint, rubber suction nozzle and vaccum suction pipe; Said adaptor sub and loam cake are fastenedly connected, and shell is fixed on and covers; Said loam cake bottom is to have outer threaded quill shaft; The internal thread of said locating ring cooperates with the external thread of quill shaft; Said locating ring to being positioned on the quill shaft, being provided with worm-wheel shaft detent mechanism and supporting worm screw and adjusting handle on the said shell, said worm screw is fixed on the detent mechanism of shell and with worm gear and is meshed; Said worm gear is provided with pilot hole, and said pilot hole cooperates with finger; Said bearing pin is fixed on the lower end of shell, and an end of said connecting rod is connected with bearing pin, and the other end of connecting rod and suction nozzle joint are fixed; Said suction nozzle joint is connected with vaccum suction pipe with the rubber suction nozzle; The centre of said connecting rod is provided with slit, and the end of finger stretches in the slit.
Principle of work of the present invention: the present invention effectively combines the suction nozzle combination and the adjustment structure of group switching centre symmetry, can realize absorption and carrying to the part of different size, shape through the radial position of adjustment suction nozzle.Adaptor sub also vacuumizes to realize the sticking to optics or mechanical component suction nozzle through vaccum suction pipe as the link of sucker and suspender the time.Shell and loam cake tighten together through screw and adaptor sub, and bearing pin one end is fixed on outer casing bottom, and the other end links to each other with connecting rod.The connecting rod of governor motion can be swung certain angle around bearing pin under the promotion of finger.Concrete adjustment process: turn the adjusting handle rotary worm, worm gear is rotated around quill shaft through engaged transmission.The rotation of worm gear drives three fingers that circumferentially are uniformly distributed with and rotates, and finger is stirred connecting rod respectively and rotated around bearing pin, and finger can slide in slit when connecting rod rotated.Feasible three suction nozzles that circumferentially are uniformly distributed with of the swing of connecting rod are the peripheral same moved further of mind-set therefrom, and the angle of rotating through adjusting handle control worm gear just can realize suction nozzle is opened big or small control.
Beneficial effect of the present invention: Acetabula device of the present invention clamping, adjustable continuously simple in structure, harmless, this device absorption scope can steplessly be adjusted, and setting range is big, and the rubber suction nozzle is to being inhaled the surface of the work not damaged; And itself has auto-lock function worm-and-wheel gear, guarantees any position absorption workpiece of sucker in the absorption scope; The present invention not only can be used for optical mirror slip can also be used for the sticking that picture frame etc. has the part of annular end face, according to the also replaceable different suction nozzle of size difference of drawing workpiece.
Description of drawings
Fig. 1 is a kind of agent structure synoptic diagram that is used for the adjustable vacuum chuck device that photoetching machine lens debugs of the present invention;
Fig. 2 surveys synoptic diagram for the axle of Fig. 1 of the present invention;
Fig. 3 is a kind of cut-open view of adjustable vacuum chuck device on the Y-Z plane that photoetching machine lens is debug that be used for of the present invention;
Fig. 4 is a kind of inner structure synoptic diagram that is used for the worm screw part of the adjustable vacuum chuck device that photoetching machine lens debugs of the present invention;
Fig. 5 is the structural representation of a kind of suction nozzle that is used for the adjustable vacuum chuck device that photoetching machine lens debugs of the present invention when swinging to maximum angle.
Among the figure: 1, adaptor sub, 2, loam cake, 3, shell, 4, worm gear, 5, worm screw, 6, adjusting handle 7, finger; 8, locating ring, 9, bearing pin, 10, connecting rod, 11, the suction nozzle joint, 12, the rubber suction nozzle, 13, vaccum suction pipe; 14, register pin, 15, slit, 2-1, flange disk, 2-1-1, inner ring screw, 2-1-2, outer ring screw, 2-2, quill shaft; 2-2-1, external thread, 3-1, support ring, 3-2, boss, 3-3, snap ring, 5-1, draw-in groove.
Embodiment
Embodiment one, combination Fig. 1 to Fig. 5 explain this embodiment; A kind of adjustable vacuum cup that is used for the photoetching machine lens manufacturing and debugs; This device comprises adaptor sub 1, loam cake 2, shell 3, worm gear 4, worm screw 5, adjusting handle 6, finger 7, locating ring 8, bearing pin 9, connecting rod 10, suction nozzle joint 11, rubber suction nozzle 12 and vaccum suction pipe 13; Said adaptor sub 1 is fastenedly connected with loam cake 2, and shell 3 is fixed on the loam cake 2; Said loam cake 2 bottoms are the quill shaft 2-2 that have external thread 2-2-1; The internal thread of said locating ring 8 cooperates with the external thread of quill shaft 2-2; Said locating ring 8 on quill shaft 2-2, is provided with worm gear 4 axial location detent mechanism and supports worm screw 5 and adjusting handle 6 on the said shell 3, said worm screw 5 is fixed on the detent mechanism of shell 3 and with worm gear 4 and is meshed; Said worm gear 4 is provided with pilot hole, and said pilot hole cooperates with finger 7; Said bearing pin 9 is fixed on the lower end of shell 3, and an end of said connecting rod 10 is connected with bearing pin 9, and the other end of connecting rod 10 and suction nozzle joint 11 are fixing; Said suction nozzle joint 11 is connected with vaccum suction pipe 13 with rubber suction nozzle 12.
The top of the loam cake 2 described in this embodiment is flange disk 2-1; The Internal and external cycle of said flange disk 2-1 is processed with inner ring threaded hole and outer ring threaded hole respectively; Through the inner ring threaded hole that adaptor sub 1 and loam cake 2 is fastening, through the outer ring threaded hole shell 3 is fixed on the loam cake 2.In conjunction with Fig. 1 and Fig. 2; The top of said loam cake 2 is flange disk 2-1; The bottom is to have externally threaded quill shaft 2-2; Be processed with two groups of threaded holes on inside and outside two circles of flange disk 2-1, inner ring screw 2-1-1 tightens up adaptor sub 1 and loam cake 2 through the threaded hole of inner ring, and outer ring screw 2-1-2 is fixed on shell 3 on the loam cake 2 through the outer ring threaded hole; The terminal external thread 2-2-1 of said quill shaft 2-2 matches with the internal thread of locating ring 8; Said vaccum suction pipe 13 couples together adaptor sub 1 and rubber suction nozzle 12 in quill shaft 2-2, and said adaptor sub 1 can be controlled bleeding and exitting of vaccum suction pipe 13, and vacuum cup and suspender are coupled together; Said adaptor sub 1, loam cake 2, shell 3 have been formed the supporting construction of whole sucker.
In conjunction with Fig. 3 and Fig. 4, the said locating ring 8 of this embodiment is axially fixed in worm gear 4 on the quill shaft 2-2 of loam cake 2, and allows worm gear 4 on quill shaft 2-2, to rotate; Said shell 3 inside have a pair of support ring 3-1 that stretches to be used for supporting worm screw 5; The outside of homonymy has a boss 3-2 to support adjusting handle 6; The draw-in groove 5-1 of said worm screw 5 is fixed on the support ring 3-1 of shell 3 through snap ring 3-3; Thereby worm screw 5 and worm gear 4 are meshed, on said worm screw 5 and the adjusting handle 6 pin-and-hole are arranged all, the two is fixed together through register pin 14; Rotate adjusting handle 6 worm screw 5 is rotated under the support of support ring 3-1, turn an angle around quill shaft 2-2 thereby drive worm gear 4; Because the worm and gear transmission itself has auto-lock function, rotate angle arbitrarily so can drive worm gear through adjusting handle 6; There are three pilot holes that circumferentially are uniformly distributed with to match on the said worm gear 4 with corresponding three fingers 7; The end of said finger 7 can stretch in the slit 15 in the middle of the connecting rod 10 just, and finger 7 is very little with the gap that slit 15 forms, and said finger 7 can slide in slit 15, and the rotation of said worm gear 4 then drives finger 7 and rotates around quill shaft; Above-mentioned characteristic has been formed the adjustment structure of sucker.
Bearing pin 9 described in this embodiment, connecting rod 10, suction nozzle joint 11, rubber suction nozzle 12 have been formed the absorption structure of sucker, and said connecting rod 10 can rotate around bearing pin 9 under the stirring of finger 7, and the angle and direction of three connecting rod 10 rotations is all identical; Said suction nozzle joint 11 is used for connecting vaccum suction pipe 13 and fixing rubber suction nozzle 12; When rubber suction nozzle 12 inner air are evacuated through vaccum suction pipe 13; Rubber suction nozzle 12 will suck the surface of workpiece; Otherwise 12 of rubber suction nozzles unclamp workpiece, because the characteristic of elastomeric material itself, rubber suction nozzle 12 can not produce damage to optics or mechanical workpieces surface; Said worm gear 4 drives finger 7 when quill shaft rotates, and finger 7 drivening rods 10 rotate around each self-corresponding bearing pin 9, and three 12 of suction nozzles magnify to certain position.
Acetabula device described in this embodiment not only can be drawn optical mirror slip under the situation that suction nozzle 12 draws in, can also allow suction nozzle 12 to open certain limit to realize the absorption to the picture frame end face.
The described rubber suction nozzle of this embodiment 12 is processed by soft rubber material, and described rubber suction nozzle 12 is not limited to three, and according to the different application occasion, the number of rubber suction nozzle 12 can be four, six or more.The big I of rubber suction nozzle 12 is changed according to different parts, and is narrower such as the upper surface endless belt of picture frame, and can be replaced with the rubber suction nozzle 12 less than the size of endless belt width this moment, to realize the absorption for picture frame in the light projection photoetching objective lens.
Claims (7)
1. one kind is used for the adjustable vacuum chuck device that photoetching machine lens is debug; This device comprises adaptor sub (1), loam cake (2), shell (3), worm gear (4), worm screw (5), adjusting handle (6), finger (7), locating ring (8), bearing pin (9), connecting rod (10), suction nozzle joint (11), rubber suction nozzle (12) and vaccum suction pipe (13), it is characterized in that:
Said adaptor sub (1) is fastenedly connected with loam cake (2), and shell (3) is fixed on the loam cake (2); Said loam cake (2) bottom is to have externally threaded quill shaft (2-2); The internal thread of said locating ring (8) cooperates with the external thread of quill shaft (2-2);
Said locating ring (8) on quill shaft (2-2), is provided with worm gear (4) axial location detent mechanism and supports worm screw (5) and adjusting handle (6) on the said shell (3), said worm screw (5) is fixed on the detent mechanism of shell (3) and with worm gear (4) and is meshed; Said worm gear (4) is provided with pilot hole, and said pilot hole cooperates with finger (7);
Said bearing pin (9) is fixed on the lower end of shell (3), and an end of said connecting rod (10) is connected with bearing pin (9), and the other end of connecting rod (10) and suction nozzle joint (11) are fixing; Said suction nozzle joint (11) is connected with vaccum suction pipe (13) with rubber suction nozzle (12); The centre of said connecting rod (10) is provided with slit (15), and the end of finger (7) stretches in the slit (15).
2. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 1; It is characterized in that; It also comprises register pin (14), on said worm screw (5) and the adjusting handle (6) pin-and-hole is set all, and said worm screw (5) and adjusting handle (6) are fixing through register pin (14).
3. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 1; It is characterized in that; The top of said loam cake (2) is flange disk (2-1); The Internal and external cycle of said flange disk (2-1) is processed with inner ring threaded hole and outer ring threaded hole respectively, and inner ring screw (2-1-1) is fastening with adaptor sub (1) and loam cake (2) through the inner ring threaded hole, and outer ring screw (2-1-2) is fixed on shell (3) on the loam cake (2) through the outer ring threaded hole.
4. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 1; It is characterized in that; It is inner support ring (3-1) and outside boss (3-2) that said shell (3) is gone up the detent mechanism that is provided with; Said support ring (3-1) is used for supporting worm screw (5), and boss (3-2) is used to support adjusting handle (6).
5. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 4; It is characterized in that; It also comprises snap ring (3-3); The draw-in groove (5-1) of worm screw (5) is fixed on the support ring (3-1) in the shell (3) through snap ring (3-3), realizes the engagement of worm screw (5) and worm gear (4).
6. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 1 is characterized in that said rubber suction nozzle (12) is processed by soft rubber material.
7. a kind of adjustable vacuum chuck device that photoetching machine lens is debug that is used for according to claim 1 is characterized in that, the number of said rubber suction nozzle (12) is three, four or six.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106135983A CN102162935B (en) | 2010-12-30 | 2010-12-30 | Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106135983A CN102162935B (en) | 2010-12-30 | 2010-12-30 | Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102162935A CN102162935A (en) | 2011-08-24 |
| CN102162935B true CN102162935B (en) | 2012-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010106135983A Expired - Fee Related CN102162935B (en) | 2010-12-30 | 2010-12-30 | Adjustable vacuum sucker device for assembling and adjusting lens of photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102162935B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102402131A (en) * | 2011-11-11 | 2012-04-04 | 深南电路有限公司 | Exposure system |
| CN103376666B (en) * | 2012-04-20 | 2015-07-22 | 上海微电子装备有限公司 | Lithography machine projection objective assembly tool based on integrated main substrate and measurement bracket |
| CN103909415A (en) * | 2014-04-08 | 2014-07-09 | 吴俊伟 | LED sucker mounting plate for assembly lines |
| CN103909420B (en) * | 2014-04-08 | 2018-07-06 | 东莞唯度电子科技服务有限公司 | A kind of sucker installing plate of assembly line with LED |
| CN107797388B (en) * | 2016-08-30 | 2020-12-04 | 上海微电子装备（集团）股份有限公司 | Single lens adjustment system |
| CN107263372B (en) * | 2017-06-29 | 2023-03-14 | 河南中光学集团有限公司 | Special spanner for lens protective glass |
| CN110441880A (en) * | 2019-08-08 | 2019-11-12 | 安庆师范大学 | A kind of radial positioning mechanism of center of optical element |
| CN115343918B (en) * | 2022-10-19 | 2022-12-30 | 江苏嘉洛精仪智能科技有限公司 | Adjustable vacuum chuck device for assembling and adjusting lens of photoetching machine |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2386455Y (en) * | 1999-07-15 | 2000-07-05 | 中国科学院上海光学精密机械研究所 | Precision adjusting rotary platform |
| CN1908735A (en) * | 2006-08-11 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Adjustable stand for precision optics mechanics |
| CN101201461A (en) * | 2007-12-19 | 2008-06-18 | 中国科学院长春光学精密机械与物理研究所 | Six-dimension intelligent regulating device and method for synchrotron radiation light beam line |
-
2010
- 2010-12-30 CN CN2010106135983A patent/CN102162935B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2386455Y (en) * | 1999-07-15 | 2000-07-05 | 中国科学院上海光学精密机械研究所 | Precision adjusting rotary platform |
| CN1908735A (en) * | 2006-08-11 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Adjustable stand for precision optics mechanics |
| CN101201461A (en) * | 2007-12-19 | 2008-06-18 | 中国科学院长春光学精密机械与物理研究所 | Six-dimension intelligent regulating device and method for synchrotron radiation light beam line |
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| CN102162935A (en) | 2011-08-24 |
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| SE01 | Entry into force of request for substantive examination | ||
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Granted publication date: 20120613 Termination date: 20131230 |