CN102161486B - 硅片切割废砂浆中硅与碳化硅分离回收装置及方法 - Google Patents
硅片切割废砂浆中硅与碳化硅分离回收装置及方法 Download PDFInfo
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- CN102161486B CN102161486B CN2011100413956A CN201110041395A CN102161486B CN 102161486 B CN102161486 B CN 102161486B CN 2011100413956 A CN2011100413956 A CN 2011100413956A CN 201110041395 A CN201110041395 A CN 201110041395A CN 102161486 B CN102161486 B CN 102161486B
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 131
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 128
- 239000010703 silicon Substances 0.000 title claims abstract description 126
- 239000004570 mortar (masonry) Substances 0.000 title claims abstract description 44
- 239000002699 waste material Substances 0.000 title claims abstract description 43
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 24
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title abstract description 16
- 235000012431 wafers Nutrition 0.000 title abstract 3
- 238000001962 electrophoresis Methods 0.000 claims abstract description 56
- 230000000694 effects Effects 0.000 claims abstract description 21
- 238000000926 separation method Methods 0.000 claims abstract description 17
- 239000007787 solid Substances 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 239000006185 dispersion Substances 0.000 claims abstract description 14
- 230000010355 oscillation Effects 0.000 claims abstract description 8
- 238000011084 recovery Methods 0.000 claims abstract description 8
- 239000007790 solid phase Substances 0.000 claims abstract description 8
- 239000002608 ionic liquid Substances 0.000 claims abstract description 6
- 239000012530 fluid Substances 0.000 claims description 27
- 239000012535 impurity Substances 0.000 claims description 19
- 239000002245 particle Substances 0.000 claims description 11
- 239000011856 silicon-based particle Substances 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- -1 alkyl imidazole Chemical compound 0.000 claims description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 claims description 4
- 235000019982 sodium hexametaphosphate Nutrition 0.000 claims description 4
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 claims description 4
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 claims description 4
- 235000006491 Acacia senegal Nutrition 0.000 claims description 3
- 241000978776 Senegalia senegal Species 0.000 claims description 3
- 229920000058 polyacrylate Polymers 0.000 claims description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 2
- 231100000956 nontoxicity Toxicity 0.000 claims description 2
- 238000001556 precipitation Methods 0.000 claims description 2
- 239000001488 sodium phosphate Substances 0.000 claims description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 claims description 2
- 229910000406 trisodium phosphate Inorganic materials 0.000 claims description 2
- 235000019801 trisodium phosphate Nutrition 0.000 claims description 2
- 230000005484 gravity Effects 0.000 abstract description 6
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 abstract description 4
- 229910052708 sodium Inorganic materials 0.000 abstract description 4
- 239000011734 sodium Substances 0.000 abstract description 4
- 231100000252 nontoxic Toxicity 0.000 abstract description 3
- 230000003000 nontoxic effect Effects 0.000 abstract description 3
- 239000002270 dispersing agent Substances 0.000 abstract description 2
- 239000013049 sediment Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 12
- 239000000243 solution Substances 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- 238000005374 membrane filtration Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000003912 environmental pollution Methods 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000003763 carbonization Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- MCTWTZJPVLRJOU-UHFFFAOYSA-N 1-methyl-1H-imidazole Chemical compound CN1C=CN=C1 MCTWTZJPVLRJOU-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical class FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- FJBFPHVGVWTDIP-UHFFFAOYSA-N dibromomethane Chemical compound BrCBr FJBFPHVGVWTDIP-UHFFFAOYSA-N 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000001117 sulphuric acid Substances 0.000 description 1
- 235000011149 sulphuric acid Nutrition 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
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- Electrostatic Separation (AREA)
Abstract
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CN2011100413956A CN102161486B (zh) | 2011-02-23 | 2011-02-23 | 硅片切割废砂浆中硅与碳化硅分离回收装置及方法 |
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CN2011100413956A CN102161486B (zh) | 2011-02-23 | 2011-02-23 | 硅片切割废砂浆中硅与碳化硅分离回收装置及方法 |
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CN102161486A CN102161486A (zh) | 2011-08-24 |
CN102161486B true CN102161486B (zh) | 2012-11-14 |
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Families Citing this family (5)
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CN102585987B (zh) * | 2011-12-28 | 2013-12-25 | 烟台大学 | 一种水晶切割用的水悬浮切割剂 |
CN103183349B (zh) * | 2011-12-31 | 2015-03-11 | 浙江昱辉阳光能源有限公司 | 硅片切割废砂浆中碳化硅和聚乙二醇切割液的回收方法 |
CN102659111B (zh) * | 2012-04-28 | 2014-06-25 | 南京远齐环保科技有限公司 | 一种硅片切割废砂浆中硅和碳化硅的回收方法 |
CN103773585B (zh) * | 2012-10-18 | 2015-11-04 | 奥克化学扬州有限公司 | 去除废砂浆再生液中铁的方法 |
CN113540602B (zh) * | 2021-06-22 | 2023-02-14 | 广东邦普循环科技有限公司 | 一种报废正极浆料的处理方法和应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101130237A (zh) * | 2007-09-11 | 2008-02-27 | 西安交通大学 | 一种从切割废砂浆中回收硅粉和碳化硅粉的方法 |
CN101792141A (zh) * | 2010-04-06 | 2010-08-04 | 西安交通大学 | 硅晶体加工过程中废砂浆的处理工艺 |
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CN202030529U (zh) * | 2011-02-23 | 2011-11-09 | 天津大学 | 硅片切割废砂浆中硅与碳化硅分离回收装置 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101130237A (zh) * | 2007-09-11 | 2008-02-27 | 西安交通大学 | 一种从切割废砂浆中回收硅粉和碳化硅粉的方法 |
CN101792141A (zh) * | 2010-04-06 | 2010-08-04 | 西安交通大学 | 硅晶体加工过程中废砂浆的处理工艺 |
Non-Patent Citations (2)
Title |
---|
Yung-FuWu et al..Separation of silicon and silicon carbide using an electrical field.《Separation and Purification Technology》.2009,第68卷第70-74页. * |
邢鹏飞等.单晶硅和多晶硅切割废料浆的回收.《材料与冶金学报》.2010,第9卷(第2期),第148-153页. * |
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Effective date of registration: 20201123 Address after: 3 / F, building 6, 30 Zilang Road (Langshan Industrial Park), Chongchuan District, Nantong City, Jiangsu Province 226000 Patentee after: ENOVE PRECISION PLASTICS CATHETER CO.,LTD. Address before: Room 1-2050, Block E, no.6, Huafeng Road, Huaming hi tech Industrial Zone, Dongli District, Tianjin Patentee before: Zhongzhi online Co.,Ltd. Effective date of registration: 20201123 Address after: Room 1-2050, Block E, no.6, Huafeng Road, Huaming hi tech Industrial Zone, Dongli District, Tianjin Patentee after: Zhongzhi online Co.,Ltd. Address before: 300072 Tianjin City, Nankai District Wei Jin Road No. 92, Tianjin University Patentee before: Tianjin University |
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Granted publication date: 20121114 |