CN102145262A - Carbon dioxide ionized water foaming machine mixing unit - Google Patents
Carbon dioxide ionized water foaming machine mixing unit Download PDFInfo
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- CN102145262A CN102145262A CN201110030327XA CN201110030327A CN102145262A CN 102145262 A CN102145262 A CN 102145262A CN 201110030327X A CN201110030327X A CN 201110030327XA CN 201110030327 A CN201110030327 A CN 201110030327A CN 102145262 A CN102145262 A CN 102145262A
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- ionized water
- water
- foaming machine
- carbon dioxide
- mixing chamber
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Abstract
The invention relates to the field of chip manufacturing and processing, and in particular relates to a carbon dioxide ionized water foaming machine for chip cleaning. The invention aims to provide a carbon dioxide ionized water foaming machine mixing unit which is of a simple structure and can effectively improve the ion concentration stability of the prepared ionized water. A carbon dioxide ionized water foaming machine mixing unit comprises a deionized water inlet, a secondary ionized water outlet, a primary ionized water inlet and a mixing cavity, wherein the mixing cavity is communicated with the deionized water inlet, the secondary ionized water outlet and the primary ionized water inlet respectively. The mixing unit provided by the invention is used as a secondary processing unit after the carbon dioxide ionized water is obtained, and facilitates the acquisition of the ionized water with a stable concentration; and moreover, bubbles in the ionized water can be released as much as possible after the processing of the mixing unit, and the chip cleaning operation is facilitated.
Description
Technical field
The present invention relates to the chip manufacturing manufacture field, relate to a kind of carbonic anhydride ion water foaming machine that chip cleans that is used for especially.
Background technology
In chip manufacturing equipment, destroy for preventing that static from producing processed chip, need carry out ionize process to deionized water, to eliminate static.At normal temperatures, carbon dioxide can be partially dissolved in and produce hydrogen ion and carbanion formation ionized water in the deionized water.Because after this ionized water drying, ion wherein vapors away after becoming carbon dioxide, can residual any impurity on processed chip.Therefore carbonic anhydride ion water is widely applied in each processing step of chip manufacturing.Because chip manufacturing is very strict to the purity requirement of ionized water, therefore in the ionized water preparation process, must not use mechanical means to impel the dissolving of carbon dioxide in water.The preparation carbonic anhydride ion water all has special-purpose foaming machine at present, carbon dioxide by air inlet pipe through magnetic valve with by feed tube in deionized water in three-way pipe, mix, through one section long mixing duct carbon dioxide is dissolved in again and forms ionized water in the water, detect the ion electrical conductivity of water by conductivity probe then, promptly detect the ion concentration in the water, and this electrical conductivity fed back in the controller, controller is adjusted the air inflow of the break-make frequency of magnetic valve with the adjustment carbon dioxide according to detection signal, thus the ion concentration of the ionized water of making.
The ionized water that above-mentioned foaming machine obtains is directly from the mixing tee pipe of carbon dioxide and deionized water, and the fluctuation of concentration of ionized water is bigger, and the ion underwater bubble is more, is unfavorable for that directly being used for carrying out chip cleans.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structurely, can effectively improve the carbonic anhydride ion water foaming machine mixed cell of the ion concentration stability of prepared ionized water.
The present invention is that the technical scheme that achieves the above object is:
A kind of carbonic anhydride ion water foaming machine mixed cell, have deionized water import, secondary ion water out, primary ions water inlet and mixing chamber, above-mentioned mixing chamber all is communicated with respectively with the above-mentioned deionization mouth of a river, secondary ion water out and primary ions water inlet.
Be provided with the check valve that can only deionized water passes through between above-mentioned deionized water import and the mixing chamber.
Be provided with spiral hybrid channel in the above-mentioned mixing chamber, the entrance point of above-mentioned hybrid channel is communicated with check valve, primary ions water inlet respectively, and the port of export of hybrid channel is communicated with mixing chamber.
Above-mentioned secondary ion water out place is provided with the conductivity probe that is used for detecting ion concentration.
Mixed cell of the present invention helps obtaining the ionized water of concentration stabilize as the after-treatment unit that obtains behind the carbonic anhydride ion water, and can discharge through ion underwater bubble behind the mixed cell as far as possible, has made things convenient for the washing and cleaning operation of chip.
Description of drawings
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
Fig. 1 is the structural representation of mixed cell of the present invention.
Fig. 2 is the generalized section of Fig. 1.
Fig. 3 be among Fig. 1 A-A to generalized section.
Fig. 4 be among Fig. 1 B-B to generalized section.
The specific embodiment
Carbonic anhydride ion water foaming machine mixed cell of the present invention is used for carrying out the secondary mixing of carbonic anhydride ion water, the ionized water that is about to obtain for the first time mixes with deionized water once more, obtain the ionized water of stable final desired concn, remove the bubble in the primary ions water simultaneously.
See Fig. 1, Fig. 2, Fig. 3 and Fig. 4, mixed cell is " L " type substantially, have deionized water import 1, secondary ion water out 2, primary ions water inlet 7 and mixing chamber 4, above-mentioned deionized water import, secondary ion water out and primary ions water inlet are communicated with mixing chamber respectively, mixing for the first time the ionized water that obtains enters mixing chamber by the primary ions water inlet and carries out second with deionized water and mix, go out from the secondary ion water out then, obtain the ionized water of desired concn.
In order to prevent that the ionized water refluence in the mixing chamber 4 from entering the deionized water pipeline, between deionized water import 1 and mixing chamber, be provided with check valve 5, check valve can only allow deionized water by entering in the mixing chamber.Also be provided with spiral hybrid channel 6 in the mixing chamber, the entrance point of above-mentioned hybrid channel is communicated with check valve 5, primary ions water inlet 7 respectively, the port of export of hybrid channel is communicated with mixing chamber, and the hybrid channel can guarantee that mixing the ionized water that obtains for the first time fully mixes with deionized water.
The ionized water that mixes through secondary is flowed out from secondary ion water out 2 by mixing chamber, and secondary ion water out place is provided with conductivity probe 3 and is used for detecting the ionized water concentration of mixing for the second time, guarantees to reach the concentration value of setting.The connection of this novel mixed cell in the liquid road for convenience used, and also is provided with deionized water outlet 11 with deionized water import 1 opposite side on the mixed cell.
Obviously, the above-mentioned specific embodiment of the present invention only is for example of the present invention clearly is described, and is not to be qualification to embodiment of the present invention.For those of ordinary skill in the field, can also be easy to make other pro forma variation on the basis of the above description or substitute, and these changes or substitute also will be included within the protection domain that the present invention determines.
Claims (4)
1. carbonic anhydride ion water foaming machine mixed cell, it is characterized in that: have deionized water import (1), secondary ion water out (2), primary ions water inlet (7) and mixing chamber (4), above-mentioned mixing chamber all is communicated with respectively with the above-mentioned deionization mouth of a river, secondary ion water out and primary ions water inlet.
2. carbonic anhydride ion water foaming machine mixed cell according to claim 1 is characterized in that: be provided with the check valve (5) that can only deionized water passes through between above-mentioned deionized water import (1) and the mixing chamber (4).
3. carbonic anhydride ion water foaming machine mixed cell according to claim 1, it is characterized in that: be provided with spiral hybrid channel (6) in the above-mentioned mixing chamber, the entrance point of above-mentioned hybrid channel is communicated with check valve (5), primary ions water inlet (7) respectively, and the port of export of hybrid channel is communicated with mixing chamber.
4. carbonic anhydride ion water foaming machine mixed cell according to claim 1 is characterized in that: above-mentioned secondary ion water out (2) locates to be provided with the conductivity probe (3) that is used for detecting ion concentration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110030327XA CN102145262A (en) | 2011-01-28 | 2011-01-28 | Carbon dioxide ionized water foaming machine mixing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110030327XA CN102145262A (en) | 2011-01-28 | 2011-01-28 | Carbon dioxide ionized water foaming machine mixing unit |
Publications (1)
| Publication Number | Publication Date |
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| CN102145262A true CN102145262A (en) | 2011-08-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110030327XA Pending CN102145262A (en) | 2011-01-28 | 2011-01-28 | Carbon dioxide ionized water foaming machine mixing unit |
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| CN (1) | CN102145262A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008049001A2 (en) * | 2006-10-17 | 2008-04-24 | Mks Intruments, Inc. | Devices, systems, and methods for carbonation of deionized water |
| CN101244863A (en) * | 2008-03-25 | 2008-08-20 | 常州瑞科微电子科技有限公司 | Method and device for on-line producing carbonic anhydride ion water |
| CN201376902Y (en) * | 2009-02-27 | 2010-01-06 | 深圳市超纯环保科技有限公司 | Ultra-pure water antistatic device |
| KR20100108730A (en) * | 2009-03-30 | 2010-10-08 | (주)케이씨이앤씨 | Functional water plants |
| CN201997265U (en) * | 2011-01-28 | 2011-10-05 | 常州瑞择微电子科技有限公司 | Mixing unit of carbon dioxide ionized water foaming machine |
-
2011
- 2011-01-28 CN CN201110030327XA patent/CN102145262A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008049001A2 (en) * | 2006-10-17 | 2008-04-24 | Mks Intruments, Inc. | Devices, systems, and methods for carbonation of deionized water |
| CN101244863A (en) * | 2008-03-25 | 2008-08-20 | 常州瑞科微电子科技有限公司 | Method and device for on-line producing carbonic anhydride ion water |
| CN201376902Y (en) * | 2009-02-27 | 2010-01-06 | 深圳市超纯环保科技有限公司 | Ultra-pure water antistatic device |
| KR20100108730A (en) * | 2009-03-30 | 2010-10-08 | (주)케이씨이앤씨 | Functional water plants |
| CN201997265U (en) * | 2011-01-28 | 2011-10-05 | 常州瑞择微电子科技有限公司 | Mixing unit of carbon dioxide ionized water foaming machine |
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Application publication date: 20110810 |