CN100563804C - Online method and the device thereof for preparing carbonic anhydride ion water - Google Patents
Online method and the device thereof for preparing carbonic anhydride ion water Download PDFInfo
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- CN100563804C CN100563804C CNB2008100244759A CN200810024475A CN100563804C CN 100563804 C CN100563804 C CN 100563804C CN B2008100244759 A CNB2008100244759 A CN B2008100244759A CN 200810024475 A CN200810024475 A CN 200810024475A CN 100563804 C CN100563804 C CN 100563804C
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Abstract
The present invention relates to a kind of online method and device thereof for preparing carbonic anhydride ion water, carbon dioxide mixes in three-way pipe with deionized water after via pressure-regulating valve, and tangentially enter in the mixing drum, mixture forms spiral vortex in the hybrid chamber of mixing drum, bubble in the mixture is broken up under action of centrifugal force, carbon dioxide is dissolved into forms ionized water in the deionized water, ionized water flows out by drain pipe, conductivity probe detects the electrical conductivity in the ionized water, and be input to these data in the controller and the electrical conductivity of setting comparison, controller is adjusted signal according to the difference output of two electrical conductivity, adjust the aperture of pressure-regulating valve, regulate the pressure of carbon dioxide, the ion concentration in the control ionized water.The present invention is simple in structure, the eddy current effect in mixing drum, and carbon dioxide is fully dissolved, and can increase substantially gas concentration lwevel in the made ionized water of control.
Description
Technical field
The present invention relates to a kind of online method and device thereof for preparing carbonic anhydride ion water, belong to semiconductor chip and make the field.
Background technology
In chip manufacturing proces, destroy for preventing that static from producing processed chip, need carry out ionize process to deionized water, to eliminate static.At normal temperatures, carbon dioxide can be partially dissolved in and produce hydrogen ion and carbanion formation ionized water in the deionized water.Because after this ionized water drying, ion wherein vapors away after becoming carbon dioxide, can residual any impurity on processed chip, so carbonic anhydride ion water is widely used in each processing step of chip manufacturing.Because chip manufacturing is very strict to the purity requirement of ionized water, therefore in the ionized water preparation process, must not use mechanical agitation to impel the dissolving of carbon dioxide in water.The method for preparing at present carbonic anhydride ion water, as shown in Figure 1, carbon dioxide by air inlet pipe 1 by behind magnetic valve 2 with feed tube 3 in deionized water in three-way pipe 4, mix, through one section long mixing duct 5 carbon dioxide is dissolved in again and forms ionized water in the deionized water, then by the electrical conductivity in the conductivity probe 7 detection ionized waters, promptly detect the ion concentration in the ionized water, and this electrical conductivity fed back in the controller 6, controller 6 is adjusted the break-make frequency of magnetic valve 2 to adjust the charge flow rate of carbon dioxide according to detection signal, thereby reach the ion concentration of making ionized water, mainly there is following shortcoming in the preparation method of above-mentioned ionized water:
1, carbon dioxide can not fully dissolve.Carbon dioxide and deionized water are to mix through long mixing duct after the mixed flow in three-way pipe again, owing to there is not mechanical agitation, most of carbon dioxide exists with bigger bubble form in ionized water, these bubbles have reduced the contact area of gas-liquid, make that carbon dioxide is difficult to fully be dissolved in the ionized water.Moreover, because these bubbles still exist, also have the process that continues dissolving conductivity probe after, cause to such an extent that the ion electrical conductivity of water and the controller demonstration reading of preparation is inconsistent.And these bubbles also can be detained in subsequent filters, influence the flow of filter.
2, it is bigger to make the ion concentration fluctuation of ionized water.This kind preparation method causes the hysteresis of detection signal, thereby influences the control ability of controller because of there being long mixing duct between gas-liquid mixed point and the test point, makes that the ion concentration fluctuation of ionized water is bigger.Moreover this preparation method controls the charge flow rate of carbon dioxide by the break-make frequency of magnetic valve, because the discontinuity break-make of magnetic valve makes that the fluctuation of flow of carbon dioxide gas amount is very big, so cause the ion concentration of ionized water to fluctuate bigger.
3, the carbon dioxide consumption is big.Because partial CO 2 gas is not dissolved in the water fully, but is trapped in the filter, thereby cause the waste of carbon dioxide.
Summary of the invention
The purpose of this invention is to provide a kind of simple in structurely, can promote the dissolving of carbon dioxide in deionized water, and can improve the online method and the device thereof for preparing carbonic anhydride ion water of the ion concentration stability of prepared ionized water.
The present invention is that the technical scheme that achieves the above object is: a kind of online method for preparing carbonic anhydride ion water, it is characterized in that: carbon dioxide mixes in three-way pipe with deionized water after via pressure-regulating valve, and tangentially enter in the mixing drum, mixture forms spiral vortex in the hybrid chamber of mixing drum, bubble in the mixture is broken up under action of centrifugal force, carbon dioxide is dissolved into forms ionized water in the deionized water, ionized water flows out by drain pipe, conductivity probe detects the electrical conductivity in the ionized water, and be input to these data in the controller and the electrical conductivity of setting comparison, controller is adjusted signal according to the difference output of two electrical conductivity, adjust the aperture of pressure-regulating valve, regulate the pressure of carbon dioxide, the ion concentration in the control ionized water.
The device of the online preparation carbonic anhydride ion water of the present invention comprises air inlet pipe, feed tube, three-way pipe, conductivity probe and controller, it is characterized in that: on the described air inlet pipe pressure-regulating valve is installed, air inlet pipe and feed tube are connected with two imports of three-way pipe respectively and communicate, the outlet of three-way pipe is connected with the tangential entry of airtight mixing drum and communicates, one side of drain pipe extends in the mixing drum, and the import of drain pipe communicates with hybrid chamber, conductivity probe is located on the drain pipe, conductivity probe is connected with the signal input part of controller, and the control end of controller is connected with the valve of pressure-regulating valve.
The present invention adopts the advantage after the technique scheme to be:
1, the carbon dioxide dissolving fully.The present invention adopts special-purpose mixing drum that carbon dioxide and deionized water are mixed, and the mixture of carbon dioxide and deionized water is tangentially to enter mixing drum, owing to be subjected to the restriction of barrel, mixture forms spiral vortex in hybrid chamber, bubble in the mixture is broken up under action of centrifugal force, increased the gas-liquid contact area greatly, thereby make carbon dioxide fully be dissolved in the deionized water, accelerate this dissolution velocity in ionized water of carbon dioxide gas.
2, improved the precision of control ion concentration.The present invention regulates the pressure of carbon dioxide by pressure-regulating valve, realize the control of the flow of carbon dioxide, since the flow of gas be proportional to gas pressure square, therefore the adjustments of gas pressure ratio is regulated flow higher sensitivity, so improve the precision of control ion concentration.The present invention adopts pressure-regulating valve can realize continuous adjusting, make more steady to the adjustment of carbon dioxide amount, more accurate to the ion concentration control of the ionized water that produces.
3, compact conformation.The mixing drum that the present invention adopts is simple in structure, with respect to mixing duct, fluid is short by the time, shortened the time-delay between control point and the test point effectively, can in time feed back to detection signal in the controller, and in time send the air inflow that control signal is adjusted carbon dioxide, thereby improved the precision of control ion concentration.
Description of drawings
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
Fig. 1 is the schematic diagram of former preparation carbon dioxide deionized water.
Fig. 2 is the schematic diagram that the present invention prepares the carbon dioxide deionized water.
Fig. 3 is the structural representation of mixing drum of the present invention.
Fig. 4 is the plan structure schematic diagram of Fig. 3.
Fig. 5 is the A-A sectional structure schematic diagram of Fig. 4.
Fig. 6 is the another kind of structural representation that the A-A of Fig. 4 analyses and observe.
Wherein: 1-air inlet pipe, 2-magnetic valve, 3-feed tube, 4-three-way pipe, 5-mixing duct, 6-controller, 7-conductivity probe, 8-pressure-regulating valve, 9-mixing drum, 9-1-tangential entry, 9-2-hybrid chamber, 10-drain pipe.
The specific embodiment
The online method for preparing carbonic anhydride ion water of the present invention, see shown in Figure 2, with carbon dioxide by through at first in three-way pipe, mixing with deionized water behind the pressure-regulating valve, mixture tangentially enters mixing drum with the speed greater than 15ml/s then, mixture forms spiral vortex in the hybrid chamber of mixing drum, bubble in the mixture is broken up under action of centrifugal force, carbon dioxide is dissolved into forms ionized water in the deionized water, ionized water is sent to specified point by drain pipe, conductivity probe detects the electrical conductivity in the ionized water, and be input to these data in the controller and the electrical conductivity of setting contrast, controller is adjusted signal according to the difference output of two electrical conductivity, adjust the aperture of pressure-regulating valve, regulate the feed pressure of carbon dioxide, the ion concentration of control ionized water.
See shown in Figure 2, the device of online preparation carbonic anhydride ion water of the present invention, comprise air inlet pipe 1, feed tube 3, three-way pipe 4, pressure-regulating valve 8, conductivity probe 7 and mixing drum 9 and controller 6, the import of air inlet pipe 1 communicates with carbon dioxide air source, pressure-regulating valve 8 is installed on the air inlet pipe 1, go into the pressure of mixing drum by pressure-regulating valve 8 control flow of carbon dioxide gas, to reach the flow of control carbon dioxide, the outlet of air inlet pipe 1 is connected with an import of three-way pipe 4 and communicates, the import of feed tube 3 communicates with deionized water source, feed tube 3 outlet is connected with another import of three-way pipe 4 and communicates, the outlet of three-way pipe 4 is connected with the tangential entry 9-1 of airtight mixing drum 9 and communicates, see shown in Fig. 3～6, one side of drain pipe 10 of the present invention extends in the mixing drum 9 and with hybrid chamber 9-2 and communicates, this drain pipe 10 can be illustrated in figure 5 as vertical cyclindrical shape, or as shown in Figure 6, drain pipe 10 in the mixing drum 9 is the awl cylindricality, and the auger of drain pipe 10 is positioned at the import department of drain pipe 10, by the reducing hybrid chamber, make mixture along with eddy current moves along barrel as far as possible, when abundant dissolved carbon dioxide gas, can further reduce the length of mixing drum.Conductivity probe 7 of the present invention is arranged on the drain pipe 10, conductivity probe 7 is connected with the signal input part of controller 6, the control end of controller 6 is connected with the valve of pressure-regulating valve 8, regulate the admission pressure of carbon dioxide, the concentration of carbonic anhydride ion in the control ionized water, controller 6 of the present invention adopts PID controller or other existing controller.
Claims (4)
1, a kind of online method for preparing carbonic anhydride ion water, it is characterized in that: carbon dioxide mixes in three-way pipe with deionized water after via pressure-regulating valve, and tangentially enter in the mixing drum, mixture forms spiral vortex in the hybrid chamber of mixing drum, bubble in the mixture is broken up under action of centrifugal force, carbon dioxide is dissolved into forms ionized water in the deionized water, ionized water flows out by drain pipe, conductivity probe detects the electrical conductivity in the ionized water, and be input to these data in the controller and the electrical conductivity of setting comparison, controller is adjusted signal according to the difference output of two electrical conductivity, adjust the aperture of pressure-regulating valve, regulate the pressure of carbon dioxide, the ion concentration in the control ionized water.
2, the online method for preparing carbonic anhydride ion water according to claim 1, it is characterized in that: described mixture tangentially enters mixing drum with the speed greater than 15ml/s.
3, a kind of device of online preparation carbonic anhydride ion water, comprise air inlet pipe (1), feed tube (3), three-way pipe (4), conductivity probe (7) and controller (6), it is characterized in that: pressure-regulating valve (8) is installed on the described air inlet pipe (1), air inlet pipe (1) and feed tube (3) are connected with two imports of three-way pipe (4) respectively and communicate, three-way pipe (4) outlet is connected with the tangential entry (9-1) of airtight mixing drum (9) and communicates, one side of drain pipe (10) extends in the mixing drum (9), and the import of drain pipe (10) communicates with hybrid chamber (9-2), conductivity probe (7) is arranged on the drain pipe (10), conductivity probe (7) is connected with the signal input part of controller (6), and the control end of controller (6) is connected with the valve of pressure-regulating valve (8).
4, the device of online preparation carbonic anhydride ion water according to claim 3, it is characterized in that: the described drain pipe (10) that is positioned at mixing drum (9) is the awl cylinder, and the tangential entry (9-1) on the mixing drum (9) is positioned at conelet one side of drain pipe (10).
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| CNB2008100244759A CN100563804C (en) | 2008-03-25 | 2008-03-25 | Online method and the device thereof for preparing carbonic anhydride ion water |
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| CNB2008100244759A CN100563804C (en) | 2008-03-25 | 2008-03-25 | Online method and the device thereof for preparing carbonic anhydride ion water |
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| CN101244863A CN101244863A (en) | 2008-08-20 |
| CN100563804C true CN100563804C (en) | 2009-12-02 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101788514B (en) * | 2009-12-29 | 2012-12-19 | 河南电力试验研究院 | Method for measuring characteristic fault gas of sulfur hexafluoride electrical equipment |
| CN102166486A (en) * | 2011-01-28 | 2011-08-31 | 常州瑞择微电子科技有限公司 | Method and device for preparing carbon dioxide ionized water |
| CN102145262A (en) * | 2011-01-28 | 2011-08-10 | 常州瑞择微电子科技有限公司 | Carbon dioxide ionized water foaming machine mixing unit |
| DE102015003777B3 (en) * | 2015-03-24 | 2016-03-31 | Messer Belgium NV | Method and device for controlled introduction of a gas into a fluid medium |
| CN105967434A (en) * | 2016-08-01 | 2016-09-28 | 无锡雷克雅未克科技有限公司 | Preparation device for carbonated nanometer water |
| JP6460283B2 (en) | 2016-12-20 | 2019-01-30 | Dic株式会社 | Specific resistance value adjusting device and specific resistance value adjusting method |
| CN109663518A (en) * | 2019-01-16 | 2019-04-23 | 凡吾科技(上海)有限公司 | The preparation method and preparation facilities of the gas liquid mixture of a kind of carbon dioxide and water |
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Assignee: Changzhou Ruize Microelectronics Technology Co., Ltd. Assignor: Changzhou Ruike Micro-Electronics Technology Co., Ltd. Contract record no.: 2010320000548 Denomination of invention: Method and device for on-line producing carbonic anhydride ion water Granted publication date: 20091202 License type: Exclusive License Open date: 20080820 Record date: 20100507 |
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Address after: 213022, Changzhou, Jiangsu province north of the Yangtze River North Road No. three building No. 25, West first floor Patentee after: Changzhou Ruike Micro-Electronics Technology Co., Ltd. Address before: 213022 room A316, No. 25 middle Changjiang Road, Xinbei District, Changzhou, Jiangsu Patentee before: Changzhou Ruike Micro-Electronics Technology Co., Ltd. |