CN212017420U - Carbon dioxide deionized water foaming machine - Google Patents
Carbon dioxide deionized water foaming machine Download PDFInfo
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- CN212017420U CN212017420U CN202020539794.XU CN202020539794U CN212017420U CN 212017420 U CN212017420 U CN 212017420U CN 202020539794 U CN202020539794 U CN 202020539794U CN 212017420 U CN212017420 U CN 212017420U
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- carbon dioxide
- deionized water
- gas
- connecting pipe
- liquid mixing
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Abstract
The utility model relates to a carbon dioxide deionized water foaming machine, it includes the organism, is provided with control panel on the organism, and the intercommunication has deionized water inlet tube and carbon dioxide intake pipe on the organism, is provided with the gas-liquid mixing section of thick bamboo in the organism, and deionized water inlet tube and carbon dioxide intake pipe are linked together with the gas-liquid mixing section of thick bamboo, and the gas-liquid mixing section of thick bamboo intercommunication has the deionized water outlet pipe, and carbon dioxide intake pipe intercommunication has the connecting pipe, and inside the connecting pipe extended to the gas-liquid mixing section of thick bamboo. The utility model provides a inside carbon dioxide gas enters into gas-liquid mixing section of thick bamboo from the connecting pipe, a plurality of ventholes on the connecting pipe can be even scatter carbon dioxide gas, carbon dioxide gas can be even enter into the deionized water to can be abundant mix with the deionized water, make carbon dioxide gas and the abundant mixture of deionized water dissolve, can play better cleaning process's effect at the in-process that carries out cleaning process to the chip.
Description
Technical Field
The utility model belongs to the technical field of the technique of chip processing and specifically relates to a carbon dioxide deionized water foaming machine is related to.
Background
In a chip manufacturing apparatus, in order to prevent static electricity from damaging a processed chip, deionized water needs to be ionized to eliminate static electricity. At normal temperature, carbon dioxide can be partially dissolved in deionized water to generate hydrogen ions and carbonate ions to form deionized water. After the deionized water is dried, ions in the deionized water are changed into carbon dioxide and then are volatilized, so that no impurities are left on a processed chip. So carbon dioxide deionized water is widely used in various process steps of chip manufacturing. Because the purity of the deionized water is strictly required in chip manufacturing, mechanical means cannot be used to promote the dissolution of carbon dioxide in water in the deionized water preparation process.
The existing method for preparing carbon dioxide deionized water is that carbon dioxide gas is mixed in a tee pipe through an electromagnetic valve and deionized water in a liquid inlet pipe through an air inlet pipe, the carbon dioxide gas is dissolved in water through a long section of mixing pipeline to form deionized water, then the conductivity of the deionized water is detected through a conductivity probe, namely the ion concentration in the water is detected, the conductivity is fed back to a controller, and the controller adjusts the on-off frequency of the electromagnetic valve according to a detection signal to adjust the air input of the carbon dioxide, so that the ion concentration of the prepared deionized water is controlled.
The carbon dioxide gas of the carbon dioxide deionized water in the technical scheme can not be fully dissolved. The carbon dioxide gas and deionized water are mixed in the tee joint and then are mixed through a longer mixing pipeline, most of the carbon dioxide exists in the water in a larger bubble form due to lack of a stirring means, and the bubbles reduce the gas-liquid contact area, so that the carbon dioxide gas is difficult to be fully dissolved in the water.
SUMMERY OF THE UTILITY MODEL
The not enough to prior art exists, the utility model aims at providing a carbon dioxide deionized water foaming machine, this foaming machine can make carbon dioxide gas and the abundant mixture of deionized water dissolve, can play better cleaning treatment effect to the chip.
The above object of the present invention is achieved by the following technical solutions:
the utility model provides a carbon dioxide deionized water foaming machine, includes the organism, be provided with control panel on the organism, the intercommunication has deionized water inlet tube and carbon dioxide intake pipe on the organism, be provided with the gas-liquid mixing section of thick bamboo in the organism, deionized water inlet tube and carbon dioxide intake pipe are linked together with the gas-liquid mixing section of thick bamboo, the gas-liquid mixing section of thick bamboo intercommunication has the deionized water outlet pipe, carbon dioxide intake pipe intercommunication has the connecting pipe, inside the connecting pipe extends to the gas-liquid mixing section of thick bamboo, a plurality of ventholes have been seted up on.
Through adopting above-mentioned technical scheme, when making carbon dioxide and deionized water mix, inside carbon dioxide gas entered into gas-liquid mixing section of thick bamboo from the connecting pipe, a plurality of ventholes on the connecting pipe can be even scatter carbon dioxide gas, carbon dioxide gas can be even enter into in the deionized water to can be abundant mix with the deionized water, make the abundant mixture of carbon dioxide gas and deionized water dissolve, can play better cleaning process's effect at the in-process that washs the processing to the chip.
The present invention may be further configured in a preferred embodiment as: the connecting pipe is a coiled pipe.
Through adopting above-mentioned technical scheme, the setting of coiled pipe can make the connecting pipe extend at the length of gas-liquid mixing section of thick bamboo, enlarges the area of contact of connecting pipe and deionized water to can make the venthole distribute more evenly in gas-liquid mixing section of thick bamboo, when carbon dioxide enters into inside the gas-liquid mixing section of thick bamboo, carbon dioxide can carry out abundant mixture with the deionized water, makes the abundant mixture of carbon dioxide gas and deionized water.
The present invention may be further configured in a preferred embodiment as: the connecting pipe is in a spiral coil tubular shape.
Through adopting above-mentioned technical scheme, the distribution that the spiral helicine setting of connecting pipe can be even is in gas-liquid mixing section of thick bamboo, and when carbon dioxide entered into gas-liquid mixing section of thick bamboo in from the connecting pipe, carbon dioxide gas can be even enter into the deionized water from the connecting pipe in to can make carbon dioxide gas and the abundant mixture of deionized water dissolve, can play better cleaning process's effect at the in-process that washs the processing to the chip.
The present invention may be further configured in a preferred embodiment as: the connecting pipe extends from the lower part to the upper part of the gas-liquid mixing cylinder, and the spiral space at the upper part of the connecting pipe is gradually reduced.
Through adopting above-mentioned technical scheme, the comparatively even distribution of connecting pipe is in gas-liquid mixing section of thick bamboo to can extend to gas-liquid mixing section of thick bamboo's upper end, make abundant and the deionized water of carbon dioxide mix, guarantee carbon dioxide deionized water's preparation effect.
The present invention may be further configured in a preferred embodiment as: the opening direction of the air outlet hole is arranged downwards.
Through adopting above-mentioned technical scheme, when the venthole opening was downward, carbon dioxide was when entering into deionized water inside, and carbon dioxide gas can upwards move, and at the in-process that removes, carbon dioxide gas can carry out abundant mixture with deionized water.
The present invention may be further configured in a preferred embodiment as: the number of the air outlet holes is gradually reduced from bottom to top.
By adopting the technical scheme: when carbon dioxide gas enters the gas-liquid mixing cylinder, most of the carbon dioxide gas directly enters the bottom of the gas-liquid mixing cylinder when entering the gas-liquid mixing cylinder, so that the carbon dioxide gas can be fully mixed with deionized water, the preparation of the carbon dioxide deionized water is more uniform, and the preparation effect of the carbon dioxide deionized water is ensured.
The present invention may be further configured in a preferred embodiment as: the inner wall of the connecting pipe is connected with a waterproof breathable film.
Through adopting above-mentioned technical scheme, waterproof ventilated membrane can play certain separation effect to the deionized water, when mixing carbon dioxide and deionized water, waterproof ventilated membrane can prevent that the deionized water from entering into the connecting tube, can make the abundant mixture of carbon dioxide and deionized water.
The present invention may be further configured in a preferred embodiment as: and a pressure regulating valve is arranged on the carbon dioxide inlet pipe.
Through adopting above-mentioned technical scheme, the air input of carbon dioxide can be adjusted according to the content of carbon dioxide in the carbon dioxide deionized water to pressure regulating valve's setting to can guarantee that carbon dioxide content keeps in stable numerical range in the carbon dioxide deionized water, thereby guarantee the clearance quality of carbon dioxide deionized water.
To sum up, the utility model discloses a following at least one useful technological effect:
1. carbon dioxide gas enters the gas-liquid mixing cylinder from the connecting pipe, the plurality of gas outlets on the connecting pipe can uniformly disperse the carbon dioxide gas, and the carbon dioxide gas can uniformly enter deionized water, so that the carbon dioxide gas can be fully mixed with the deionized water, the carbon dioxide gas and the deionized water are fully mixed and dissolved, and a better cleaning treatment effect can be achieved in the process of cleaning the chip;
2. the length of the connecting pipe in the gas-liquid mixing cylinder can be extended by the aid of the coiled pipe and the spiral coil pipe, and the contact area of the connecting pipe and deionized water is enlarged, so that the gas outlet holes can be distributed more uniformly in the gas-liquid mixing cylinder, and when carbon dioxide enters the gas-liquid mixing cylinder, the carbon dioxide can be fully mixed with the deionized water, so that the carbon dioxide is fully mixed with the deionized water;
3. when the opening of the air outlet is downward, carbon dioxide gas can move upward when the carbon dioxide enters the deionized water, and the carbon dioxide gas can be fully mixed with the deionized water in the moving process;
4. when carbon dioxide gas enters the gas-liquid mixing cylinder, most of the carbon dioxide gas directly enters the bottom of the gas-liquid mixing cylinder when entering the gas-liquid mixing cylinder, so that the carbon dioxide gas can be fully mixed with deionized water, the preparation of the carbon dioxide deionized water is more uniform, and the preparation effect of the carbon dioxide deionized water is ensured.
Drawings
FIG. 1 is a schematic view of the overall construction of a foaming machine;
FIG. 2 is a schematic view of the internal piping of the foaming machine;
FIG. 3 is a schematic view showing the structure of a connecting pipe inside a gas-liquid mixing cylinder in the first embodiment;
FIG. 4 is a schematic view showing the structure of the connecting pipe inside the gas-liquid mixing cylinder in the second embodiment.
In the figure, 1, a machine body; 2. a control panel; 3. a deionized water inlet pipe; 4. a carbon dioxide inlet pipe; 5. a gas-liquid mixing cylinder; 6. a deionized water outlet pipe; 7. a connecting pipe; 8. an air outlet; 9. a pressure regulating valve.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The first embodiment is as follows: referring to fig. 1, for the utility model discloses a carbon dioxide deionized water foaming machine, including organism 1, be provided with control panel 2 on the organism 1, the intercommunication has deionized water inlet tube 3 and carbon dioxide intake pipe 4 on the organism 1.
Referring to fig. 2, be provided with gas-liquid mixture section of thick bamboo 5 in the organism 1, the water pump can be connected to deionized water inlet tube 3, the water pump drives the deionized water operation, one side of organism 1 is connected with the carbon dioxide steel bottle, carbon dioxide intake pipe 4 is linked together with the carbon dioxide steel bottle, carbon dioxide in the carbon dioxide steel bottle can enter into the deionized water through carbon dioxide intake pipe 4, be provided with pressure regulating valve 9 in the carbon dioxide intake pipe 4, pressure regulating valve 9 can play the regulating action to the air input of carbon dioxide, make the proportion of carbon dioxide keep in stable numerical range in the carbon.
Referring to fig. 2, a deionized water inlet pipe 3 and a carbon dioxide inlet pipe 4 are communicated with a gas-liquid mixing cylinder 5, deionized water and carbon dioxide can enter the gas-liquid mixing cylinder 5, the carbon dioxide and the deionized water are fully mixed in the gas-liquid mixing cylinder 5, the gas-liquid mixing cylinder 5 is communicated with a deionized water outlet pipe 6, the carbon dioxide and the deionized water after dissolution and mixing are discharged from the deionized water outlet pipe 6, the carbon dioxide inlet pipe 4 is communicated with a connecting pipe 7, and the connecting pipe 7 extends to the inside of the gas-liquid mixing cylinder 5.
Referring to fig. 3, connecting pipe 7 is the coiled pipe, a plurality of ventholes 8 have been seted up on connecting pipe 7, venthole 8's opening direction sets up down, venthole 8 that carbon dioxide in the carbon dioxide intake pipe 4 can follow on the connecting pipe 7 enters into gas-liquid mixing section of thick bamboo 5 in, 8 equipartitions of a plurality of ventholes set up, thereby can be with carbon dioxide more even transport to gas-liquid mixing section of thick bamboo 5 in, the inner wall connection of connecting pipe 7 has waterproof ventilated membrane, the setting of waterproof ventilated membrane can prevent that water from entering into connecting pipe 7, guarantee that carbon dioxide is smooth to enter into in the deionized water.
The implementation principle of the embodiment is as follows: deionized water and carbon dioxide gas enter the gas-liquid mixing cylinder 5 to be mixed and dissolved, and carbon dioxide enters the deionized water in a small bubble shape and can be fully mixed and dissolved with the deionized water.
Example two: the utility model provides a carbon dioxide deionized water foaming machine, refer to fig. 4, with embodiment one difference lies in, connecting pipe 7 is the setting of spiral coil pipe form, connecting pipe 7 extends to the upper portion from the lower part of gas-liquid mixing section of thick bamboo 5, the spiral interval on connecting pipe 7 upper portion diminishes gradually, the quantity of venthole 8 reduces gradually from bottom to top, carbon dioxide enters into gas-liquid mixing section of thick bamboo 5 in from connecting pipe 7 that the heliciform distributes, carbon dioxide gas can be more even and the interior deionized water of gas-liquid mixing section of thick bamboo 5 mixes.
The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.
Claims (8)
1. The utility model provides a carbon dioxide deionized water foaming machine, includes organism (1), be provided with control panel (2) on organism (1), the intercommunication has deionized water inlet tube (3) and carbon dioxide intake pipe (4) on organism (1), be provided with gas-liquid mixing section of thick bamboo (5) in organism (1), deionized water inlet tube (3) and carbon dioxide intake pipe (4) are linked together with gas-liquid mixing section of thick bamboo (5), gas-liquid mixing section of thick bamboo (5) intercommunication has deionized water outlet pipe (6), its characterized in that: carbon dioxide intake pipe (4) intercommunication has connecting pipe (7), inside connecting pipe (7) extended to gas-liquid mixing section of thick bamboo (5), a plurality of ventholes (8) have been seted up on connecting pipe (7).
2. The carbon dioxide deionized water foaming machine according to claim 1, characterized in that: the connecting pipe (7) is a coiled pipe.
3. The carbon dioxide deionized water foaming machine according to claim 1, characterized in that: the connecting pipe (7) is arranged in a spiral coil pipe shape.
4. The carbon dioxide deionized water foaming machine according to claim 3, characterized in that: the connecting pipe (7) extends from the lower part to the upper part of the gas-liquid mixing cylinder (5), and the spiral distance at the upper part of the connecting pipe (7) is gradually reduced.
5. The carbon dioxide deionized water foaming machine according to claim 2 or 4, characterized in that: the opening direction of the air outlet hole (8) is arranged downwards.
6. The carbon dioxide deionized water foaming machine according to claim 4, characterized in that: the number of the air outlet holes (8) is gradually reduced from bottom to top.
7. The carbon dioxide deionized water foaming machine according to claim 5, characterized in that: the inner wall of the connecting pipe (7) is connected with a waterproof breathable film.
8. The carbon dioxide deionized water foaming machine according to claim 1, characterized in that: and a pressure regulating valve (9) is arranged on the carbon dioxide inlet pipe (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020539794.XU CN212017420U (en) | 2020-04-13 | 2020-04-13 | Carbon dioxide deionized water foaming machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020539794.XU CN212017420U (en) | 2020-04-13 | 2020-04-13 | Carbon dioxide deionized water foaming machine |
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| CN212017420U true CN212017420U (en) | 2020-11-27 |
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| CN202020539794.XU Active CN212017420U (en) | 2020-04-13 | 2020-04-13 | Carbon dioxide deionized water foaming machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116903117A (en) * | 2023-07-10 | 2023-10-20 | 苏州智程半导体科技股份有限公司 | Ultrapure water antistatic device |
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2020
- 2020-04-13 CN CN202020539794.XU patent/CN212017420U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116903117A (en) * | 2023-07-10 | 2023-10-20 | 苏州智程半导体科技股份有限公司 | Ultrapure water antistatic device |
| CN116903117B (en) * | 2023-07-10 | 2024-09-24 | 苏州智程半导体科技股份有限公司 | Ultrapure water antistatic device |
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