CN102142823A - Quartz tuning fork machining method - Google Patents
Quartz tuning fork machining method Download PDFInfo
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- CN102142823A CN102142823A CN2010106173222A CN201010617322A CN102142823A CN 102142823 A CN102142823 A CN 102142823A CN 2010106173222 A CN2010106173222 A CN 2010106173222A CN 201010617322 A CN201010617322 A CN 201010617322A CN 102142823 A CN102142823 A CN 102142823A
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- tuning fork
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Abstract
The invention provides a quartz tuning fork machining method. The method is characterized by comprising the following steps of: A) grinding a raw material piece, namely grinding the raw material piece to a specified thickness; B) polishing, namely performing polishing treatment on the surface of the raw material piece to form a mirror surface; C) coating photoresist and performing photoetching, namely coating the photoresist on the raw material piece and making the photoresist form a tuning fork shape by utilizing a photoetching technology; D) corroding, namely putting the photoetched raw material piece into corrosive liquid; and E) cleaning, namely cleaning the photoresist remaining on the surface. The finished tuning fork has the size that: the length is 3,170 to 3,185 mu m; the width is 495 to 515 mu m; and the thickness is 125 to 145 mu m. In the method, the quartz tuning fork machined by utilizing a photoetching corrosion technology improves the machining precision of the quartz tuning fork and does not need to use a cutting machine so as to reduce the maintenance of the cutting machine.
Description
Technical field
The present invention relates to the processing method of quartz tuning-fork, particularly a kind of processing method of utilizing lithography corrosion technology processing quartz tuning-fork.
Background technology
Generally speaking, use wire cutting method cutting tuning fork, the operation principle of the method is: be to produce heat by spark discharge to fuse quartz, do not have machine cut power significantly in the processing.This method can the processing rigid alloy etc. all electric conducting materials, minimum corner radius is restricted, minimum angular radius is that the radius of wire electrode adds machining gap in the line cutting processing, utilize the thin plain conductor (copper wire or molybdenum filament) that moves to do electrode during the line cutting processing, quartz is carried out the pulse sparkover, a kind of process of excision forming.Yet the quartz tuning-fork ratio of precision of this method cutting processing is lower, and cutting back tuning fork thickness difference is 0.2～0.3 μ, and the resistance that is subjected to when vibration is big like this, causes precision low, have only about 100ppm, and the resistance height.
Summary of the invention
The low technical problem of precision when cutting tuning fork in order to solve wire cutting method, the present invention proposes following technical scheme:
A kind of processing method of quartz tuning-fork, procedure of processing is as follows:
A) material piece grinds, and material piece is ground to certain thickness, and thickness is 135～155 μ m;
B) the material piece surface finish that grinding is finished is handled in polishing, makes it become minute surface, and the thickness after the polishing is 125～145 μ m;
C) photoresist (positive glue) is coated in gluing photoetching on material piece, put into the photoetching machine, utilizes photoetching technique to make photoresist form the shape of tuning fork, specifically is of a size of length: 3170～3185 μ m, width: 495～515 μ m;
D) corrosion is put into corrosive liquid with the material piece after the photoetching;
E) clean the photoresist of flush away remained on surface.
As preferred version of the present invention, the thickness that material piece grinds in the described steps A is 135～155 μ m.
As preferred version of the present invention, the thickness among the described step B after the polishing is 125～145 μ m.
As preferred version of the present invention, institute's rubberised layer is photoresist (a positive glue) among the described step C.Put into mask aligner, the tuning fork that etches after the polishing is shaped as length: 3170～3185 μ m, width: 495～515 μ m;
As preferred version of the present invention, the corrosive liquid among the described step D is the mixed liquor of hydrofluoric acid (concentration is 30%～50%) and ammonium fluoride or ammonium acid fluoride (concentration is 30%～40%), and ratio is a hydrofluoric acid: ammonium fluoride or ammonium acid fluoride=1: 1～1.5.
As preferred version of the present invention, in the described step e, adopting concentration is the photoresist that 10% alkaline hydrogen sodium hydroxide solution is drawn remained on surface.
The processing method of quartz tuning-fork of the present invention, its beneficial effect that brings is:
1. use the tuning fork thickness difference of lithography corrosion technology processing to have only 0.11 μ～0.13 μ, precision reaches 50ppm; Resistance is low.
2. do not need wire cutting machine, reduced the maintenance of wire cutting machine.
Embodiment
Below preferred embodiment of the present invention is described in detail, thereby protection scope of the present invention is made more explicit defining so that advantages and features of the invention can be easier to be it will be appreciated by those skilled in the art that.
A kind of processing method of quartz tuning-fork, procedure of processing is as follows:
A) material piece grinds, and material piece is ground to certain thickness, and thickness is 135～155 μ m
B) the material piece surface finish that grinding is finished is handled in polishing, makes it become minute surface, and the thickness after the polishing is 125～145 μ m.
C) photoresist (positive glue) is coated in gluing photoetching on material piece, put into mask aligner, utilizes photoetching technique to make photoresist form the shape of tuning fork; Specifically be of a size of length: 3170～3185 μ m, width: 495～515 μ m;
D) corrosion is put into corrosive liquid with the material piece after the photoetching;
E) clean the photoresist of flush away remained on surface.
Wherein, need to prove that the grinding thickness of material piece is 135～155 μ m in the described steps A; Thickness among the step B after the polishing is 125～145 μ m; The gluing glue-line is photoresist (a positive glue) among the step C; Formed tuning fork is shaped as length behind the photo-etching machine exposal: 3170～3185 μ m, width: 495～515 μ m; Corrosive liquid among the described step D is the mixed liquor of hydrofluoric acid (concentration is 30%～50%) and ammonium fluoride or ammonium acid fluoride (concentration is 30%～40%), and ratio is a hydrofluoric acid: ammonium fluoride or ammonium acid fluoride=1: 1～1.5; In the described step e, adopt the photoresist of alkaline hydrogen sodium oxide molybdena flush away remained on surface.
Utilize lithography corrosion technology processing quartz tuning-fork, material piece is ground to the thickness of 135～155 μ m, polishing makes its surface be minute surface again, then resist coating on the good material piece of surface treatment, photoresist is a positive photoresist, the characteristic of the positive photoresist light of serving as reasons produce to decompose, put into photo-etching machine exposal after, go out the tuning fork shape in the photoresist surface etch, specifically be of a size of length: 3170～3185 μ m, width: 495～515 μ m; Put into corrosive liquid, utilize quartzy (Sio2) and corrosive liquid reaction, and the principle that glue and corrosive liquid can not react, the partial corrosion of gluing is not fallen, be processed into the tuning fork shape.Use the photoresist of alkaline hydrogen sodium hydroxide solution flush away remained on surface at last.
The above; it only is the specific embodiment of the present invention; but protection scope of the present invention is not limited thereto; any those of ordinary skill in the art are in the disclosed technical scope of the present invention; variation or the replacement that can expect without creative work all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range that claims were limited.
Claims (6)
1. the processing method of a quartz tuning-fork is characterized in that, procedure of processing is as follows:
A) material piece grinds, and material piece is ground to certain thickness;
B) the material piece surface finish that grinding is finished is handled in polishing, makes it become minute surface;
C) photoresist is coated in gluing photoetching on material piece, utilize photoetching technique to make photoresist form the shape of tuning fork;
D) corrosion is put into corrosive liquid with the material piece after the photoetching;
E) clean the photoresist of flush away remained on surface.
2. the processing method of a kind of quartz tuning-fork according to claim 1 is characterized in that, the thickness that material piece grinds in the described steps A is 135～155 μ m.
3. the processing method of a kind of quartz tuning-fork according to claim 1 is characterized in that, the thickness among the described step B after the material piece polishing is 125～145 μ m.
4. the processing method of a kind of quartz tuning-fork according to claim 1 is characterized in that, the glue-line that is coated with among the described step C is a photoresist, and this photoresist is a positive photoresist; Put into the photoetching machine, utilize photoetching technique to make photoresist form the tuning fork shape; Specifically be of a size of length: 3170～3185 μ m, width: 495～515 μ m.
5. the processing method of a kind of quartz tuning-fork according to claim 1, it is characterized in that, corrosive liquid among the described step D is the mixed liquor of hydrofluoric acid (concentration is 30%～50%) and ammonium fluoride or ammonium acid fluoride (concentration is 30%～40%), and ratio is a hydrofluoric acid: ammonium fluoride or ammonium acid fluoride=1: 1～1.5.
6. the processing method of a kind of quartz tuning-fork according to claim 1 is characterized in that, in the described step e, adopting concentration is that 10% alkaline hydrogen sodium hydroxide solution is washed residual photoresist off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106173222A CN102142823A (en) | 2010-12-31 | 2010-12-31 | Quartz tuning fork machining method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106173222A CN102142823A (en) | 2010-12-31 | 2010-12-31 | Quartz tuning fork machining method |
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| Publication Number | Publication Date |
|---|---|
| CN102142823A true CN102142823A (en) | 2011-08-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010106173222A Pending CN102142823A (en) | 2010-12-31 | 2010-12-31 | Quartz tuning fork machining method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105522281A (en) * | 2016-01-12 | 2016-04-27 | 北京无线电计量测试研究所 | Laser ablation processing method for quartz crystal |
| CN105634430A (en) * | 2015-12-22 | 2016-06-01 | 温州市华中仪表有限公司 | Processing technology for aluminum tuning fork |
| CN106087066A (en) * | 2016-06-15 | 2016-11-09 | 廊坊中电熊猫晶体科技有限公司 | A kind of method improving quartz crystal slice surface roughness |
| CN113376961A (en) * | 2021-06-09 | 2021-09-10 | 浙江一晶科技股份有限公司 | Method for processing quartz tuning fork |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1906847A (en) * | 2004-09-17 | 2007-01-31 | 西铁城时计株式会社 | Oscillator manufacturing method |
| CN1933326A (en) * | 2001-08-31 | 2007-03-21 | 株式会社大真空 | Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
-
2010
- 2010-12-31 CN CN2010106173222A patent/CN102142823A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1933326A (en) * | 2001-08-31 | 2007-03-21 | 株式会社大真空 | Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
| CN1906847A (en) * | 2004-09-17 | 2007-01-31 | 西铁城时计株式会社 | Oscillator manufacturing method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105634430A (en) * | 2015-12-22 | 2016-06-01 | 温州市华中仪表有限公司 | Processing technology for aluminum tuning fork |
| CN105634430B (en) * | 2015-12-22 | 2018-03-23 | 温州市华中仪表有限公司 | Aluminum tuning fork processing technology |
| CN105522281A (en) * | 2016-01-12 | 2016-04-27 | 北京无线电计量测试研究所 | Laser ablation processing method for quartz crystal |
| CN105522281B (en) * | 2016-01-12 | 2018-04-03 | 北京无线电计量测试研究所 | A kind of laser ablation processing method of quartz crystal |
| CN106087066A (en) * | 2016-06-15 | 2016-11-09 | 廊坊中电熊猫晶体科技有限公司 | A kind of method improving quartz crystal slice surface roughness |
| CN113376961A (en) * | 2021-06-09 | 2021-09-10 | 浙江一晶科技股份有限公司 | Method for processing quartz tuning fork |
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Application publication date: 20110803 |