CN1021389C - 用于制造场致发射阴极的方法 - Google Patents

用于制造场致发射阴极的方法 Download PDF

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Publication number
CN1021389C
CN1021389C CN91104165.6A CN91104165A CN1021389C CN 1021389 C CN1021389 C CN 1021389C CN 91104165 A CN91104165 A CN 91104165A CN 1021389 C CN1021389 C CN 1021389C
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CN
China
Prior art keywords
tip
field emission
layer
etching
emission cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN91104165.6A
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English (en)
Chinese (zh)
Other versions
CN1058295A (zh
Inventor
史蒂文·M·齐默尔曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
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International Business Machines Corp
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Publication of CN1058295A publication Critical patent/CN1058295A/zh
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Publication of CN1021389C publication Critical patent/CN1021389C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
CN91104165.6A 1990-07-18 1991-06-18 用于制造场致发射阴极的方法 Expired - Lifetime CN1021389C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55521390A 1990-07-18 1990-07-18
US07/555,213 1990-07-18

Publications (2)

Publication Number Publication Date
CN1058295A CN1058295A (zh) 1992-01-29
CN1021389C true CN1021389C (zh) 1993-06-23

Family

ID=24216420

Family Applications (1)

Application Number Title Priority Date Filing Date
CN91104165.6A Expired - Lifetime CN1021389C (zh) 1990-07-18 1991-06-18 用于制造场致发射阴极的方法

Country Status (12)

Country Link
EP (1) EP0539365B1 (da)
JP (1) JP2602584B2 (da)
KR (1) KR950001485B1 (da)
CN (1) CN1021389C (da)
AU (1) AU639342B2 (da)
CA (1) CA2085982C (da)
DE (1) DE69030589T2 (da)
DK (1) DK0539365T3 (da)
ES (1) ES2100178T3 (da)
MY (1) MY106537A (da)
NZ (1) NZ238590A (da)
WO (1) WO1992002031A1 (da)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9210419D0 (en) * 1992-05-15 1992-07-01 Marconi Gec Ltd Cathode structures
US5795208A (en) * 1994-10-11 1998-08-18 Yamaha Corporation Manufacture of electron emitter by replica technique
US5599749A (en) * 1994-10-21 1997-02-04 Yamaha Corporation Manufacture of micro electron emitter
KR100343205B1 (ko) * 2000-04-26 2002-07-10 김순택 카본나노튜브를 이용한 삼극 전계 방출 어레이 및 그 제작방법
US6986693B2 (en) 2003-03-26 2006-01-17 Lucent Technologies Inc. Group III-nitride layers with patterned surfaces
US7952109B2 (en) 2006-07-10 2011-05-31 Alcatel-Lucent Usa Inc. Light-emitting crystal structures
US7266257B1 (en) 2006-07-12 2007-09-04 Lucent Technologies Inc. Reducing crosstalk in free-space optical communications
CN104064434A (zh) * 2013-03-22 2014-09-24 海洋王照明科技股份有限公司 一种场发射平面光源及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3753022A (en) * 1971-04-26 1973-08-14 Us Army Miniature, directed, electron-beam source
DE2951287A1 (de) * 1979-12-20 1981-07-02 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Verfahren zur herstellung von ebenen oberflaechen mit feinsten spitzen im mikrometer-bereich
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
US4721885A (en) * 1987-02-11 1988-01-26 Sri International Very high speed integrated microelectronic tubes
US5012153A (en) * 1989-12-22 1991-04-30 Atkinson Gary M Split collector vacuum field effect transistor
US5100355A (en) * 1991-06-28 1992-03-31 Bell Communications Research, Inc. Microminiature tapered all-metal structures

Also Published As

Publication number Publication date
AU7849491A (en) 1992-01-23
CA2085982A1 (en) 1992-01-19
DK0539365T3 (da) 1997-10-27
AU639342B2 (en) 1993-07-22
DE69030589D1 (de) 1997-05-28
ES2100178T3 (es) 1997-06-16
JPH05507580A (ja) 1993-10-28
WO1992002031A1 (en) 1992-02-06
EP0539365B1 (en) 1997-04-23
CN1058295A (zh) 1992-01-29
DE69030589T2 (de) 1997-11-13
KR950001485B1 (en) 1995-02-25
JP2602584B2 (ja) 1997-04-23
EP0539365A1 (en) 1993-05-05
CA2085982C (en) 1999-03-09
NZ238590A (en) 1993-07-27
MY106537A (en) 1995-06-30

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C15 Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993)
OR01 Other related matters
C17 Cessation of patent right
CX01 Expiry of patent term

Expiration termination date: 20110618

Granted publication date: 19930623