CN102135425A - Leveling gauge - Google Patents
Leveling gauge Download PDFInfo
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- CN102135425A CN102135425A CN2010105630343A CN201010563034A CN102135425A CN 102135425 A CN102135425 A CN 102135425A CN 2010105630343 A CN2010105630343 A CN 2010105630343A CN 201010563034 A CN201010563034 A CN 201010563034A CN 102135425 A CN102135425 A CN 102135425A
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- light
- level meter
- bubble
- window
- photo detector
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- 239000007788 liquid Substances 0.000 claims abstract description 9
- 238000012790 confirmation Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 3
- 210000002683 foot Anatomy 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 229910001651 emery Inorganic materials 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000008093 supporting effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention provides a leveling gauge, which can be operated by one worker and has a simple structure and a low cost. The leveling gauge comprises a window forming a curved plane where liquids and bubbles are sealed. Through the window, the position of the bubbles can be ensured by the eyes. Thus the leveling can be ensured. The leveling gauge is characterized in that the leveling gauge comprises a luminous element equipped above the center of the window forming a curved plane, a light receiving element for receiving the light sent from the luminous element and reflected at the interface between the bubbles and the liquids, and an acoustical generator for sound generation when the light receiving element receives the reflected light.
Description
Technical field
The present invention relates to be used for critically measuring the level meter of the degree of tilt of the precision machined processing unit (plant) that for example carries out wafer in the semiconductor workshop.
Background technology
Semiconductor wafer is formed with IC (integrated circuit: integrated circuit) on the surface, large scale integrated circuit) LSI (large-scale integration: a large amount of device such as, and each device comes by cutting apart preset lines (spacing track) division, utilizing grinding attachment the back side of this semiconductor wafer to be carried out after thereby grinding is processed into preset thickness with semiconductor wafer, thereby utilize cutter sweep to cut semiconductor wafer is divided into device one by one cutting apart preset lines, the device after cutting apart is used in mobile phone, electrical equipments such as personal computer.
Grinding attachment or cutter sweep possess at least: chuck table, and this chuck table has the maintenance face that is used to keep wafer; Tool member, this tool member are used for the wafer that remains in this chuck table is carried out grinding or cutting; And the working fluid supply member, this working fluid supply member is used for wafer is supplied with working fluid.
This processing unit (plant) is being arranged under the situation in workshop, level meter is being set, making the bolt that is provided with that is assemblied in foot in the mode that can rotate rotate the maintenance face of making level, thereby carry out horizontal adjustment at the maintenance face of chuck table.
The level meter that has as lower member in speciallyying permit No. 4325916 communique, Japan is disclosed: a plurality of inclination sensors, and described a plurality of inclination sensors are measured a plurality of degree of tilt respectively; Means of storage, this means of storage are used for storing predetermined degree of tilt data; And display member, this display member is used for display image.
This level meter constitutes: in display with circle and * mark shows the degree of tilt of ad-hoc location two-dimensionally, can to judge from which direction adjusting, hummer is rung intuitively to the degree of tilt of this ad-hoc location with the same sensation of the level meter that uses bubble.
Patent documentation 1: No. 4325916 communique of Japan's special permission
But, in level meter in the past, on one side the situation at the center of the bubble of Visual Confirmation level meter arrival is on one side carried out the horizontal adjustment of processing unit (plant), for the leveling (level goes out) of carrying out processing unit (plant), at least need two operators, have inefficient problem.
And, though patent documentation 1 disclosed level meter constitutes hummer is rung,, there are the complex structure and the expensive problem of level meter.
Summary of the invention
The present invention makes in view of this problem, and the simple in structure and cheap level meter that provides a kind of operator one people just can handle is provided its purpose.
According to the present invention, a kind of level meter is provided, wherein, in forming the window of flexure plane, enclose liquid to be arranged and enclose bubble is arranged, thereby level can be confirmed in the position that sees through this window Visual Confirmation bubble, it is characterized in that described level meter possesses: light-emitting component, this light-emitting component is provided in the top at the center of the described window that forms flexure plane; Photo detector, the reflected light that this photo detector obtains reflecting from the interface generation of light between described bubble and described liquid of described light-emitting component ejaculation receives; And acoustical generator, when described photo detector received described reflected light, this acoustical generator was sounded.
The sound that preferred acoustical generator sends changes according to the light quantity that photo detector receives, and acoustical generator is exported maximum sound when the center of bubble is consistent with the center of the window that forms flexure plane.
According to the present invention, when utilizing level meter to detect level, owing in level meter, be assembled with acoustical generator, this acoustical generator receives the reflection of light light time that light-emitting component sends at photo detector and sounds, therefore, though simple in structure and cheap, operator one people just can confirm level according to sound, can efficiently processing unit (plant) be adjusted into level.
Description of drawings
Fig. 1 is the summary structural drawing of topping machanism.
Fig. 2 is the summary structural drawing of grinding attachment.
Fig. 3 is the stereographic map of the related level meter of embodiments of the present invention.
Fig. 4 is the stereographic map that level meter is arranged on the state on the chuck table of topping machanism.
Fig. 5 is the one-piece construction figure that the effect to the related level meter of embodiment describes.
Fig. 6 is based on the key diagram of the leveling of level meter, Fig. 6 (A) expression situation about tilting slightly from level wherein, the situation after the complete leveling of (B) expression of Fig. 6.
Label declaration
2: topping machanism; 18: chuck table; 28: cutting tool; 30: foot; 31: bolt is set; 32: grinding attachment; 40: the grinding unit; 66: chuck table; 74: foot; 75: bolt is set; 76: level meter; 80: the window that forms flexure plane; 82: cross curve; 82a: the intersection point of cross curve; 84: bubble; 88: optical sensor; 90: hummer; 92: light-emitting component; 94: photo detector.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are elaborated.Can use the outward appearance of the topping machanism 2 of level meter of the present invention when Fig. 1 represents to be provided with, thereby this topping machanism 2 can be divided into chip (device) one by one to semiconductor wafer cutting.
Front surface side at topping machanism 2 is provided with control member 4, and this control member 4 is used for importing the indication to device such as processing conditions by the operator.Cathode-ray tube (CRT)) be provided with the CRT that is used to show the image of taking to operator's guide picture or by shooting member described later (Cathode Ray Tube: display member 6 such as on device top.
Wafer W is pasted on the cutting belt T as splicing tape, and the outer peripheral edges portion of cutting belt T is pasted on ring-shaped frame F.Thus, wafer W forms the state that is supported on framework F via cutting belt T, has taken in multi-disc (for example 25) wafer in wafer case shown in Figure 18.Wafer case 8 is positioned on the box lifter 9 that can move up and down.
Be equipped with to take out of at the rear of wafer case 8 and move into member 10, this is taken out of the wafer W of moving into before member 10 will cut from wafer case 8 and takes out of, and the wafer after will cutting is moved into wafer case 8.In wafer case 8 and take out of to move into and be provided with interim put area 12 between the member 10, this interim put area 12 is to be used for interim mounting as the zone of taking out of the wafer of moving into object, is equipped with the paraposition components 14 of the position that makes the wafer W secured in alignment at interim put area 12.
Near interim put area 12, be equipped with conveyance member 16, this conveyance member 16 has the revoliving arm of the framework F that is used to adsorb also conveyance and wafer W one, the wafer W of being taken out of to interim put area 12 is adsorbed also conveyance to chuck table 18 by conveyance member 16, this wafer W is attracted by chuck table 18, and framework F is fixed by a plurality of fixed components 19, and wafer W is maintained on the chuck table 18 thus.
Chuck table 18 constitutes and can rotate and can move back and forth in X-direction, is equipped with calibrated component 20 above the mobile route of the X-direction of chuck table 18, and this calibrated component 20 is used to detect the spacing track that should cut of wafer W.
Calibrated component 20 possesses and is used for shooting member 22 that the surface of wafer W is taken, and this calibrated component 20 can detect the spacing track that should cut according to the image of being obtained by shooting by processing such as pattern match.The image that utilizes shooting member 22 to obtain is shown in display member 6.
Be equipped with the cutting member 24 that is used for the wafer W that remains in chuck table 18 is implemented cut in the left side of calibrated component 20.Cutting member 24 constitutes one with calibrated component 20, and the two moves in Y direction and Z-direction in linkage.
The end that cutting member 24 constitutes at the main shaft 26 that can rotate is equipped with cutting tool 28, and this cutting member 24 can move in Y direction and Z-direction.Cutting tool 28 is positioned on the extended line of X-direction of shooting member 22.
Under situation about topping machanism 2 being arranged in the semiconductor workshop, carry out Precision Machining in order to allow cutting tool 28, need correctly carry out after the leveling topping machanism 2 being set to chuck table 18.Therefore, as the back describes in detail, level meter mounting of the present invention on chuck table 18, is provided with the horizontal adjustment that bolt 31 carries out chuck table 18 thereby rotate each.
With reference to Fig. 2, be illustrated in the summary structure that to use the grinding attachment 32 of level meter of the present invention in the leveling operation when being provided with.Label 34 is housings of grinding attachment 32, erects at the rear of housing 34 and is provided with column 36.Be fixed with the pair of guide rails 38 of extending at above-below direction at column 36.
Grinding unit (grinding member) 40 is assembled into and can moves at above-below direction along this a pair of guide rail 38.Grinding unit 40 has main spindle box 42 and is used to keep the support 44 of main spindle box 42, and support 44 is installed on the mobile foundation 46 that moves at above-below direction along pair of guide rails 38.
Grinding attachment 32 possesses the grinding unit feed mechanism 62 that is made of ball-screw 58 and pulse motor 60, and this grinding unit feed mechanism 62 makes grinding unit 40 move at above-below direction along pair of guide rails 38.When driving pulse motor 60, ball-screw 58 rotation, mobile foundation 46 moves at above-below direction.
Upper surface at housing 34 is formed with recess 34a, and chuck table mechanism 64 is equipped on this recess 34a.Chuck table mechanism 64 has chuck table 66, and this chuck table mechanism 64 by not shown travel mechanism wafer loading position A and and grinding unit 40 opposed grinding position B between move in Y direction.Label 68,70 is a corrugated cover.Be equipped with the guidance panel 72 that operator for grinding attachment 32 imports grinding condition etc. at the front side of housing 34.
For wafer W similarly is ground to tens microns thickness, need carry out tight leveling to the chuck table 66 of grinding attachment 32.Therefore, level meter mounting of the present invention on chuck table 66, is provided with the horizontal adjustment that bolt 75 carries out chuck table 66 thereby rotate each.
Below, with reference to Fig. 3 to Fig. 6 the related level meter 76 of embodiments of the present invention is elaborated.With reference to Fig. 3, Fig. 3 represents the stereographic map of level meter 76, and level meter 76 has the window 80 that forms flexure plane at the central portion of the upper surface 78a of main body 78.
Enclosing in window 80 has liquid, and inclosure has bubble 84.Window 80 has cross curve 82, when the intersection point 82a of the center of bubble 84 and this cross curve 82 on time, level meter 76 and mounting have the carrying plane of level meter 76 to be in level.
Erect the support unit 86 that is provided with L shaped shape from the main body 78 of level meter 76, optical sensor 88 is installed opposed to each other at the end of support unit 86 and the intersection point 82a of cross curve 82.As shown in Figure 5, optical sensor 88 is made of light-emitting component 92 and photo detector 94.
Light-emitting component 92 is connected with power supply 100, photo detector 94 is connected with voltage detection department 96, utilize these voltage detection department 96 detected voltages to amplify, ring so that be equipped on the hummer 90 of the main body 78 of level meter 76 by the voltage amplification portion 98 that is connected with power supply 100.
Below, the situation of horizontal adjustment of using the related level meter 76 of embodiments of the present invention to carry out the chuck table 18 of topping machanism shown in Figure 12 is described.At first, as shown in Figure 4, level meter 76 is positioned on the chuck table 18.Under this state, bolt 31 is set so that the center of bubble 84 is consistent with highly adjusting with the intersection point 82a of cross curve 82 thereby rotate each.
Shown in Fig. 6 (A), overlapping but under the not on all four situation at bubble 84 with the intersection point 82a of cross curve 82, the interface of the light that penetrates from light-emitting component 92 between the liquid in bubble 84 and the window 80 that is enclosed in curved shape is reflected, and a catoptrical part is by photo detector 94 receptions.
Photo detector 94 produces photocurrent accordingly with light income, and this photocurrent converts voltage to by voltage detection department 96, thereby detects the voltage corresponding with photocurrent.Utilize voltage detection department 96 detected voltages to amplify, thereby hummer 90 is rung by voltage amplification portion 98.But under the situation shown in (A) of Fig. 6, the light income of photo detector 94 is little, so hummer 90 is rung with smaller sound.
The adjustment of bolt 31 further is set as the operator, when thereby the center that makes bubble 84 is consistent with the intersection point 82a of cross curve 82, shown in Fig. 6 (B), the light that penetrates from light-emitting component 92 between bubble 84 and liquid reflection takes place at the interface and the catoptrical major part that obtains is all received by photo detector 94.Therefore, photo detector 94 produces the bigger photocurrent corresponding with light income, thereby hummer 90 is rung with bigger sound.
Like this, because constituting the intensity of the sound that makes hummer 90 changes according to the light quantity that photo detector 94 receives, therefore, the operator can judge whether the center of bubble 84 is consistent with the intersection point 82a of cross curve 82 by the sound of differentiating hummer 90, thereby people just can implement the installation setting of topping machanism 2.In the present embodiment, adopted hummer 90, still, also can adopt other acoustical generator such as electronics sound as acoustical generator.
In the above-described embodiment, to in the horizontal adjustment operation of the chuck table 18 of topping machanism 2, adopting the structure of level meter 76 of the present invention to be illustrated, but, in the horizontal adjustment operation of the chuck table 66 of grinding attachment shown in Figure 2 32, can use level meter 76 of the present invention too.And level meter 76 of the present invention equally also can be applied to other processing unit (plant) such as lapping device.
Claims (2)
1. level meter, wherein, enclosing in forming the window of flexure plane has liquid and inclosure that bubble is arranged, thus level can be confirmed in the position that sees through this window Visual Confirmation bubble, described level meter is characterised in that,
Described level meter possesses:
Light-emitting component, this light-emitting component is provided in the top at the center of the described window that forms flexure plane;
Photo detector, the reflected light that this photo detector obtains reflecting from the interface generation of light between described bubble and described liquid of described light-emitting component ejaculation receives; And
Acoustical generator, when described photo detector received described reflected light, this acoustical generator was sounded.
2. level meter according to claim 1, wherein,
The sound that described acoustical generator sends changes according to the light quantity that described photo detector receives, and described acoustical generator is exported maximum sound when the center of described bubble is consistent with the center of the described window that forms flexure plane.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009292948A JP2011133346A (en) | 2009-12-24 | 2009-12-24 | Level |
| JP2009-292948 | 2009-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102135425A true CN102135425A (en) | 2011-07-27 |
Family
ID=44295276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105630343A Pending CN102135425A (en) | 2009-12-24 | 2010-11-25 | Leveling gauge |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2011133346A (en) |
| CN (1) | CN102135425A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108871269B (en) * | 2018-03-15 | 2021-04-06 | 大族激光科技产业集团股份有限公司 | 3D printing laser galvanometer horizontal detection method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990013792A1 (en) * | 1987-11-09 | 1990-11-15 | Metrum Oy | Procedure and device for the detection of direction or angle |
| JPH08334493A (en) * | 1995-06-07 | 1996-12-17 | Shimadzu Corp | Liquid chromatograph mass spectroscope |
| JP3075190U (en) * | 2000-07-27 | 2001-02-09 | チクシ電気株式会社 | Level sensor |
| CN1624424A (en) * | 1996-12-12 | 2005-06-08 | 杜安·朱格尔 | Spirit level |
| CN1645070A (en) * | 2003-12-11 | 2005-07-27 | 梅特勒-托莱多有限公司 | Method and device for monitoring the alignment of a measuring instrument, and measuring instrument |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0648194B2 (en) * | 1983-12-08 | 1994-06-22 | 名古屋市 | Inclination detector |
| JPH06201381A (en) * | 1992-12-28 | 1994-07-19 | Taito Seiko Kk | Level guide |
| JPH10227635A (en) * | 1997-02-13 | 1998-08-25 | Yazaki Corp | Inclination sensor |
-
2009
- 2009-12-24 JP JP2009292948A patent/JP2011133346A/en active Pending
-
2010
- 2010-11-25 CN CN2010105630343A patent/CN102135425A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990013792A1 (en) * | 1987-11-09 | 1990-11-15 | Metrum Oy | Procedure and device for the detection of direction or angle |
| JPH08334493A (en) * | 1995-06-07 | 1996-12-17 | Shimadzu Corp | Liquid chromatograph mass spectroscope |
| CN1624424A (en) * | 1996-12-12 | 2005-06-08 | 杜安·朱格尔 | Spirit level |
| JP3075190U (en) * | 2000-07-27 | 2001-02-09 | チクシ電気株式会社 | Level sensor |
| CN1645070A (en) * | 2003-12-11 | 2005-07-27 | 梅特勒-托莱多有限公司 | Method and device for monitoring the alignment of a measuring instrument, and measuring instrument |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011133346A (en) | 2011-07-07 |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110727 |