CN101596609A - Topping machanism - Google Patents
Topping machanism Download PDFInfo
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- CN101596609A CN101596609A CNA2009101427338A CN200910142733A CN101596609A CN 101596609 A CN101596609 A CN 101596609A CN A2009101427338 A CNA2009101427338 A CN A2009101427338A CN 200910142733 A CN200910142733 A CN 200910142733A CN 101596609 A CN101596609 A CN 101596609A
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- cutting tool
- topping machanism
- cutting
- mentioned
- storage facility
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- 238000001514 detection method Methods 0.000 claims abstract description 15
- 235000012431 wafers Nutrition 0.000 description 22
- 239000002173 cutting fluid Substances 0.000 description 6
- 230000003321 amplification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002372 labelling Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
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Abstract
The invention provides a kind of topping machanism, this topping machanism do not give workshop and purchasing department increase burden just in due course machine order an amount of cutting tool.Above-mentioned topping machanism comprises: chuck table, and it keeps machined object; And cutting member, its cutting tool is mounted to and can rotates, and this cutting tool cuts the machined object that remains on the above-mentioned chuck table, and above-mentioned topping machanism is characterised in that, this topping machanism comprises: the cutting tool collecting storage facility, and it can take in the cutting tool of a plurality of replacing usefulness; Detection means, it detects the quantity that is accommodated in the cutting tool in the above-mentioned cutting tool collecting storage facility; And inform member, it produces alert signal when the quantity by the detected cutting tool of above-mentioned detection means is lower than predefined predetermined quantity.
Description
Technical field
The present invention relates to easily to realize the topping machanism of the stock control of cutting tool.
Background technology
Integrated circuit), LSI (Large Scale Integration: the machined objects such as semiconductor wafer of a plurality of devices such as large scale integrated circuit) about dividing the mode come and be formed with IC (Integrated Circuit: with the preset lines of cutting apart that is called as spacing track from the teeth outwards, be divided into device one by one by the topping machanism (cutter sweep) that cutting tool is installed, these devices are widely used in electrical equipments such as mobile phone, personal computers.
The cutting tool that is installed on topping machanism is running stores, when utilizing the cutter sensor to detect the wearing and tearing of the tipping of cutting edge or scheduled volume, need be replaced with new cutting tool.It is inefficent preserving for stock control as the stock in large quantities owing to the cutting tool that will change usefulness, so generally be that the user orders an amount of cutting tool termly.
Patent documentation 1: No. 2688623 communique of Japan's special permission
But, may not be an amount of the ordering of request that be in due course from the workshop, can repeat to order and cause overstock or incur loss through delay and cause short supply the opportunity of ordering on the contrary, there is the problem that causes productivity ratio to reduce thus.
Summary of the invention
The present invention finishes in view of such problem, its purpose be to provide not to workshop and purchasing department increase burden just in due course machine order the topping machanism of an amount of cutting tool.
According to the present invention, a kind of topping machanism is provided, it comprises: chuck table, it keeps machined object; And cutting member, its cutting tool is mounted to and can rotates, and this cutting tool cuts the machined object that remains on the above-mentioned chuck table, and above-mentioned topping machanism is characterised in that, this topping machanism comprises: the cutting tool collecting storage facility, and it can take in the cutting tool of a plurality of replacing usefulness; Detection means, it detects the quantity that is accommodated in the cutting tool in the above-mentioned cutting tool collecting storage facility; And inform member, it produces alert signal when the quantity by the detected cutting tool of above-mentioned detection means is lower than predefined predetermined quantity.
According to the present invention, owing to detection means detects the volume residual that is accommodated in the cutting tool in the cutting tool collecting storage facility, and when being lower than predefined quantity, produce alert signal, carry out ordering of cutting tool so can be in due course.
Description of drawings
Fig. 1 is the stereoscopic figure of the related topping machanism of an embodiment of the invention.
Fig. 2 be expression with framework integrated the stereogram of wafer.
Fig. 3 is expression main axle unit and the exploded perspective view that should be installed in the relation between the cutting tool on the main shaft.
Fig. 4 is the amplification stereogram of cutting member.
Fig. 5 is the exploded perspective view that expression is accommodated in cutting tool the state in the storage case.
Fig. 6 is the vertical view of storage case.
Fig. 7 is the cutaway view of the detection means of first embodiment of the invention.
Fig. 8 is the vertical view of the detection means of second embodiment of the invention.
Label declaration
2: topping machanism; 18: chuck table; 24: cutting member; 26: main shaft; 28: cutting tool; 29: the cutting tool collecting storage facility; 31: signal tower (signal tower); 78: storage case; 96: laser range finder; 110: optical sensor.
The specific embodiment
Below, the embodiment that present invention will be described in detail with reference to the accompanying.Fig. 1 represents and can be divided into the outward appearance of the topping machanism 2 of chip (device) one by one by cutting semiconductor chip.
Be provided with in the front surface side of topping machanism 2 and be used for importing the control member 4 to the indication of device such as processing conditions by the operator.Be provided with display members 6 such as CRT on device top, this display member 6 is used to show to operator's guide picture and the image that obtains by shooting member shooting described later.
As shown in Figure 2, the first spacing track S1 and the second spacing track S2 are formed on the surface as the wafer W of cutting object orthogonally, and a large amount of device D is formed on the wafer W in the mode that is demarcated by the first spacing track S1 and the second spacing track S2.
Wafer W sticks on the cutting belt T as splicing tape, and the outer peripheral edges portion of cutting belt T sticks on the ring-shaped frame F.Thus, wafer W becomes through cutting belt T and is bearing in state on the framework F, has taken in many pieces of (for example 25 pieces) wafers in wafer case 8 as shown in Figure 1.Wafer case 8 is loaded on the box lift 9 that can move up and down.
Be equipped with to take out of at the rear of wafer case 8 and move into member 10, the wafer after the wafer W before this is taken out of and moves into member 10 and will cut is taken out of from wafer case 8 and will be cut is moved in the wafer case 8.In wafer case 8 and take out of move into be provided with between the member 10 interim mounting as the zone of taking out of the wafer of moving into object, be interim put area 12, be equipped with position alignment member 14 in interim put area 12, this position alignment member 14 is used for wafer W is positioned the fixed position.
Near interim put area 12, be equipped with conveyance member 16, this conveyance member 16 has the revoliving arm that framework F that absorption becomes one with wafer W carries out conveyance, the wafer W of taking out of interim put area 12 is adsorbed also conveyance to chuck table 18 by conveyance member 16, and by these chuck table 18 attractions, and framework F is fixed by a plurality of fixed components 19, thus, described wafer W is maintained on the chuck table 18.
Chuck table 18 constitutes and can rotate and can move back and forth on X-direction, is equipped with calibrated component 20 above the mobile route of the X-direction of chuck table 18, and this calibrated component 20 is used to detect the spacing track that should cut of wafer W.
Calibrated component 20 has the shooting member 22 that the surface of wafer W is taken, and according to the image of obtaining by shooting, can detect the spacing track that should cut by pattern match processing such as (pattern matching).In display member 6, show the image of obtaining by shooting member 22.
Be equipped with cutting member 24 in the left side of calibrated component 20, the wafer W that 24 pairs of this cutting members remain on the chuck table 18 is implemented machining.Cutting member 24 constitutes one with calibrated component 20, and both move on Y direction and Z-direction in linkage.
The front end that cutting member 24 constitutes at the main shaft 26 that can rotate is equipped with cutting tool 28, and cutting member 24 can move on Y direction and Z-direction.Cutting tool 28 is positioned on the extended line of X-direction of shooting member 22.
With reference to Fig. 3, show expression and be fixed with the main shaft 26 of tool fitting 36 and the exploded perspective view of the relation of the installation between the cutting tool 28.Taken in main shaft 26 in the mode that can rotate in the collar bush 32 of main axle unit 30, this main shaft 26 is driven by not shown servomotor and rotates.
Tool fitting 36 constitutes by boss portion 38 with holding flange 40 that boss portion 38 forms.On boss portion 38, be formed with external screw thread 42.And tool fitting 36 has installing hole.
Installing hole is inserted on the front end minor diameter part of main shaft 26, the external thread spiro fastening that nut 44 and front end minor diameter part at main shaft 26 are formed carries out fastening, and thus, tool fitting 36 just is installed in the leading section of main shaft 26 as illustrated in fig. 3.
The installing hole 52 of cutting tool 28 is inserted on the boss portion 38 of tool fitting 36, the external screw thread 42 of hold-down nut 54 and boss portion 38 is screwed togather carry out fasteningly, thus, cutting tool 28 is installed on the main shaft 26.
With reference to Fig. 4, show the amplification stereogram of the cutting member 24 that cutting tool 28 is installed.Label 60 is the cutter hood that cover cutting tool 28, is equipped with on this cutter hood 60 along the not shown nozzle of cutting fluid of the side elongation of cutting tool 28.Cutting fluid is fed into not shown nozzle of cutting fluid through managing 72.
Label 62 is loading and unloading covers, and it is installed on the cutter hood 60 by screw 64.The nozzle of cutting fluid 70 that extends along the side of cutting tool 28 when loading and unloading cover 62 has on being installed to cutter hood 60.Cutting fluid is fed into nozzle of cutting fluid 70 through managing 74.
Label 66 is that cutter detects piece, and it is installed on the cutter hood 60 by screw 68.In cutter detection piece 66, the not shown cutter sensor that is made of light-emitting component and photo detector is installed, detects the state of the cutting edge 50 of cutting tool 28 by this cutter sensor.
Detecting under the situation of the tipping of cutting edge 50 or the wearing and tearing more than the scheduled volume, cutting tool 28 is replaced with new cutting tool by the cutter sensor.Label 76 is the adjustment screws that are used to adjust the position of cutter sensor.
Fig. 5 is the exploded perspective view that expression is accommodated in cutting tool 28 situation in the storage case 78.Storage case 78 is made of the molded product of resin, and it is preferably transparent.
Formed hook 88 at lid on 82,, covered 82 and remain on closing state with respect to body shell 80 by this hook 88 is engaged with the snap fit tabs 90 that forms on body shell 80.
Fig. 6 represents the vertical view of storage case 78, but is pasted with the adhesive labeling 92 of the kind of determining cutting tool 28 at the predetermined position of the lid 82 of storage case 78, but is printed with the bar code of the kind that for example is used for determining cutter 28 on adhesive labeling 92.
Referring again to Fig. 1, cutting tool collecting storage facility 29 is installed in the front surface side of topping machanism 2.The 31st, signal tower, it constitutes: when the aftermentioned detection means that is arranged at cutting tool collecting storage facility 29 detects piece number of the cutting tool in the cutting tool collecting storage facility 29 when predetermined piece number is following, these signal tower 31 bright lamps are ordered new cutting tool to urge the operator.
(A) of Fig. 7 shows the cutaway view of the cutting tool collecting storage facility of the detection means with first embodiment of the invention.(B) of Fig. 7 is the amplification view of detection means part.Cutting tool collecting storage facility 29 has opposed end wall 29a, 29b, and the inside of this cutting tool collecting storage facility 29 is separated plate 93 and is separated into two cavitys.
Dividing a plurality of cutting tools 28 of taking in replacing usefulness in the cavity that forms by end wall 29a and demarcation strip 93, these a plurality of cutting tools 28 are accommodated in respectively in the storage case 78.On the other hand, dividing in another cavity that forms, clamp the helical spring 94 of pair demarcation strip 93 to the left application of force by end wall 29b and demarcation strip 93.
Along with piece number that is accommodated in the cutting tool 28 in the storage case 78 reduces, demarcation strip 93 is pushed by helical spring 94 and is slided to left.Label 96 is that it comes measuring distance according to known principle of triangulation by laser beam irradiation member 98 and the laser range finder that constituted by light member 100.
When using the laser range finder 96 detected distances of demarcation strip 93 that arrive when predetermined value is above, a piece number that is accommodated in the cutting tool in the cutting tool collecting storage facility 29 becomes predetermined piece below the number, thereby light signal tower 31 among Fig. 1, order cutting tool to urge the operator.Scheme also can be to show the necessity or the sound of ordering that gives a warning on the picture of display member 6 as an alternative.
As other replacement scheme, both can (Local Area Network: LAN) purchasing department in company such as circuit necessity of ordering with regard to cutting tool have been got in touch, and perhaps also can constitute by the manufacturer to cutting tool such as the Internet wire and automatically order by LAN.Also can be provided with and use the contactless distance measuring unit of ultrasonic wave or magnetic etc. to replace laser range finder 96.
Fig. 8 shows the cutting tool collecting storage facility of second embodiment of the invention and the vertical view of detection means.The cutting tool collecting storage facility 102 of present embodiment also is installed in for example front surface side of topping machanism 2.In the present embodiment, between the end wall 102a of cutting tool collecting storage facility 102 and plate 104, take in a plurality of cutting tools 28, these a plurality of cutting tools 28 are accommodated in respectively in the storage case 78, clamp helical spring 94 between end wall 102b and plate 104,94 pairs of plates 104 of this helical spring are to the left application of force.
In addition, installation and measuring sheet 112 on plate 104 is installed the optical sensor 110 that is made of light-emitting component 106 and photo detector 108 in the precalculated position of cutting tool collecting storage facility 102.
When the quantity of the cutting tool in the cutting tool collecting storage facility 102 reduced, plate 104 was moved to left by helical spring 94 application of forces.When the quantity of cutting tool was lower than predefined predetermined piece of number, detection lug 112 was inserted between light-emitting component 106 and the photo detector 108, thus the cut-out optical signal.Therewith correspondingly, signal tower 31 bright lamps, thus urge the operator to order cutting tool.
Particularly, though not shown, also can be in cutting tool collecting storage facility 29 the erection weight sensor, detect a piece number by the weight that is accommodated in the cutting tool in the cutting tool collecting storage facility 29.
Claims (1)
1. topping machanism, it comprises: chuck table, it keeps machined object; And cutting member, its cutting tool is mounted to and can rotates, and this cutting tool cuts the machined object that remains on the above-mentioned chuck table, and above-mentioned topping machanism is characterised in that,
This topping machanism comprises:
The cutting tool collecting storage facility, it can take in the cutting tool of a plurality of replacing usefulness;
Detection means, it detects the quantity that is accommodated in the cutting tool in the above-mentioned cutting tool collecting storage facility; And
Inform member, it produces alert signal when the quantity by the detected cutting tool of above-mentioned detection means is lower than predefined predetermined quantity.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008146710 | 2008-06-04 | ||
| JP2008-146710 | 2008-06-04 | ||
| JP2008146710A JP5295645B2 (en) | 2008-06-04 | 2008-06-04 | Cutting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101596609A true CN101596609A (en) | 2009-12-09 |
| CN101596609B CN101596609B (en) | 2012-11-28 |
Family
ID=41418301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101427338A Active CN101596609B (en) | 2008-06-04 | 2009-06-02 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5295645B2 (en) |
| CN (1) | CN101596609B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102950230A (en) * | 2012-11-19 | 2013-03-06 | 无锡九条龙汽车设备有限公司 | Adjustable transistor die-cutting positioning plate |
| CN112317784A (en) * | 2020-10-21 | 2021-02-05 | 长春理工大学 | Laser-assisted frequency doubling quick tool servo turning functional surface device and method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6851688B2 (en) * | 2017-04-21 | 2021-03-31 | 株式会社ディスコ | How to manage machining tools |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07276227A (en) * | 1994-04-06 | 1995-10-24 | Disco Abrasive Syst Ltd | Automatic blade changer |
| JP2904414B1 (en) * | 1998-05-22 | 1999-06-14 | 株式会社東京精密 | Automatic blade replacement system |
| JP3801325B2 (en) * | 1997-10-31 | 2006-07-26 | 株式会社荏原製作所 | Polishing apparatus and semiconductor wafer polishing method |
| JP4387010B2 (en) * | 1999-11-10 | 2009-12-16 | 株式会社ディスコ | Cutting equipment |
| JP2002337042A (en) * | 2001-05-11 | 2002-11-26 | Olympus Optical Co Ltd | Cutter defect detecting method |
| JP4580846B2 (en) * | 2005-08-26 | 2010-11-17 | ヤマザキマザック株式会社 | NC machine tool |
-
2008
- 2008-06-04 JP JP2008146710A patent/JP5295645B2/en active Active
-
2009
- 2009-06-02 CN CN2009101427338A patent/CN101596609B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102950230A (en) * | 2012-11-19 | 2013-03-06 | 无锡九条龙汽车设备有限公司 | Adjustable transistor die-cutting positioning plate |
| CN102950230B (en) * | 2012-11-19 | 2015-08-05 | 江苏高博智融科技有限公司 | A kind of adjustable triode cross cutting location-plate |
| CN112317784A (en) * | 2020-10-21 | 2021-02-05 | 长春理工大学 | Laser-assisted frequency doubling quick tool servo turning functional surface device and method |
| CN112317784B (en) * | 2020-10-21 | 2023-03-14 | 长春理工大学 | Method for servo turning functional surface of laser-assisted frequency doubling fast tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009295727A (en) | 2009-12-17 |
| JP5295645B2 (en) | 2013-09-18 |
| CN101596609B (en) | 2012-11-28 |
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