CN102128649B - Fluidic flow meter without feedback channel - Google Patents
Fluidic flow meter without feedback channel Download PDFInfo
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- CN102128649B CN102128649B CN2011100512843A CN201110051284A CN102128649B CN 102128649 B CN102128649 B CN 102128649B CN 2011100512843 A CN2011100512843 A CN 2011100512843A CN 201110051284 A CN201110051284 A CN 201110051284A CN 102128649 B CN102128649 B CN 102128649B
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- 230000010355 oscillation Effects 0.000 claims description 44
- 239000012530 fluid Substances 0.000 claims description 24
- 230000000903 blocking effect Effects 0.000 claims description 19
- 239000007921 spray Substances 0.000 abstract 3
- 238000005516 engineering process Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a fluidic flow meter without a feedback channel. The fluidic flow meter comprises a fluidic oscillator, a base and a top cover, wherein a drainage groove, a spray nozzle and an oscillating cavity with an Omega-shaped fixed flow chocking body which are communicated with one another are arranged in the fluidic oscillator; the drainage groove extends into the oscillating cavity; the spray nozzle is communicated with the tail end of the drainage groove; the flow chocking body is positioned in the oscillating cavity, and the concave surface of the flow chocking body is opposite to the opening of the opening of the spray nozzle; the top cover is provided with a circular-hole inlet and a circular-hole outlet; the inlet is communicated with the front end of the drainage groove; and the outlet is communicated with the oscillating cavity. In the fluidic flow meter, a rectangular oscillating cavity with the Omega-shaped fixed flow chocking body is adopted, and jet current is oscillated stably and periodically by jet current vortex alternatively produced in a first oscillating volute chamber and a second oscillating volute chamber. Compared with the prior art, the fluidic flow meter has the advantages of lower flow measuring lower limit, capability of generating a stable and stronger oscillator signal on the inner side wall of a flow chocking arm and higher signal-to-noise ratio.
Description
Technical Field
The invention relates to a jet flow meter, in particular to a jet flow oscillator without a feedback channel.
Background
With the rapid development of electronic technology, the market needs a cheap flow sensor with good stability and repeatability, and the jet flow sensor greatly meets the market requirements to a certain extent. In recent years, the jet flow meter is gradually used as a household gas meter and a household water meter, the application range and the influence are continuously expanded, and the jet flow meter is expected to have good application prospect in the civil industry. However, the domestic research on the jet flow meter is less, and the development of the research on a novel jet flow meter, particularly the research on a micro-scale jet flow meter for measuring micro flow, has important significance.
The current jet flow meter mostly adopts a jet flow meter with a feedback channel, and comprises a shell, two downstream pieces, two feedback channels, a signal detection element and a detection circuit, wherein the jet flow meter is provided with the two symmetrical downstream pieces in the shell, when main jet flow is jetted from a nozzle, one of the two downstream pieces can be randomly attached due to the wall attachment effect, part of flow beams of the main jet flow enters the corresponding feedback channel, and feedback fluid acts on the main jet flow, so that the main jet flow is switched and attached to the other downstream piece, and another feedback cycle is started. The fluid oscillation is generated in such a circulating reciprocating way, and the fluid oscillation frequency is obtained by detecting the frequency of the electric signal, so that the flow speed and the flow of the fluid are indirectly obtained. The jet flow meter has no mechanical movable part, high anti-interference capacity, no influence of outer environment and certain advantages in certain places. However, due to the adoption of the structure with the feedback channel, the method has defects in the aspects of processing, manufacturing and application fields, and is mainly embodied in the following three aspects:
(1) fluidic flowmeters with feedback channels have high aspect ratio requirements. The jet flow meter is characterized in that the Stewart-Ha number is basically constant in a wide fluid flow speed range, and the oscillation frequency of the fluid in the jet flow meter is in a certain proportion to the flow speed to obtain the volume flow of the fluid. For fluidic flow meters with feedback channels, when the aspect ratio of the fluidic nozzle is too low, the free surface area of the jet is reduced to an extent that does not provide sufficient power to oscillate the fluid in the meter. Especially in a microsystem, certain processing materials and processing technologies cannot meet the design requirement of high aspect ratio, and the application field of the flowmeter in the microsystem is greatly limited.
(2) The fluidic flowmeter is not suitable for detecting the micro-flow in a micro-system, and for the micro-system, the irregular structure inside the fluidic flowmeter with the feedback channel is relatively complex, the requirements on the processed material and the processing technology are high, and the fluidic flowmeter is inconvenient to process and manufacture, so that the manufacturing cost is relatively expensive.
(3) Compared with the main jet flow, the strength of the pressure signal in the feedback channel is weaker, because the fluid in the feedback channel is a small part of the flow beam of the main jet flow, the detected signal is not obvious, the external interference is easy to happen, and the signal-to-noise ratio is lower.
Disclosure of Invention
The invention aims to provide a jet flow meter without a feedback channel, which is used for measuring the fluid flow at a macroscopic scale or a microscopic scale.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the jet flow meter without the feedback channel comprises a top cover, a jet flow oscillator and a substrate which are arranged from top to bottom. A drainage groove, a nozzle and a rectangular oscillation cavity with an omega-shaped fixed flow-blocking body are arranged in the jet oscillator; the drainage groove, the nozzle and the rectangular oscillation cavity are communicated with each other; the flow blocking body is positioned in the oscillation cavity, the concave surface of the flow blocking body is opposite to the opening of the nozzle, and a fluid oscillation sensor is arranged in the concave surface of the flow blocking body; the top cover is provided with a round hole-shaped inlet and a round hole-shaped outlet, the inlet is communicated with the front end of the drainage groove, and the outlet is communicated with the oscillation cavity.
Furthermore, the omega-shaped choke body comprises a shunt tip, an L-shaped first choke arm and an L-shaped second choke arm; the flow dividing tip is positioned on the central axis of the nozzle and is opposite to the opening of the nozzle; the first flow-resisting arm and the second flow-resisting arm are respectively positioned at two sides of the flow-dividing tip and are symmetrically arranged by taking the central axis of the nozzle as a symmetric axis; one end of the first flow-resisting arm is connected with one side of the shunt tip, and one end of the second flow-resisting arm is connected with the other side of the shunt tip; the first flow blocking arm and the flow dividing tip are semi-enclosed to form a first oscillating vortex chamber, and the second flow blocking arm and the flow dividing tip are semi-enclosed to form a second oscillating vortex chamber; the fluid oscillation sensors are respectively arranged on the inner side walls of the first choke arm and the second choke arm.
Furthermore, the central line of the inlet, the central line of the outlet and the central axis of the nozzle are in the same plane, the diameter of the inlet is equal to the width of the drainage groove, the central line of the outlet is positioned behind the flow blocking body, and the diameter of the outlet is 1.2-1.5 times of that of the inlet.
Compared with the prior art, the invention has the beneficial effects that:
1) the jet flow meter adopts the rectangular oscillation cavity with the omega-shaped fixed bluff body, utilizes jet flow vortexes alternately generated in the first oscillation vortex chamber and the second oscillation vortex chamber to enable jet flow to oscillate stably and periodically, and has lower flow measurement lower limit compared with the prior art;
2) the fluid oscillation sensor of the jet flow meter is arranged on the inner side wall of the flow blocking arm of the omega-shaped fixed flow blocking body, jet flow directly acts on the first flow blocking arm and the second flow blocking arm in an alternating mode, stable and strong oscillation signals can be generated on the inner side wall of the flow blocking arm, and the signal-to-noise ratio is good;
3) the jet flow meter has simple structure, no movable parts and no strict depth-to-width ratio requirement, is convenient for processing and manufacturing under various sizes, especially micro sizes, and is particularly suitable for micro flow measurement of a Micro Electro Mechanical System (MEMS).
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a sectional view taken along line a-a of fig. 1.
Fig. 3 is an exploded view of the first embodiment of the present invention.
Fig. 4 is an exploded view of a second embodiment of the present invention.
In the figure: 1. the jet flow oscillator comprises a jet flow oscillator, 2, an inlet, 3, a drainage groove, 4, a nozzle, 5, a bluff body, 50, a diversion tip, 51, a first bluff arm, 52, a second bluff arm, 53, a first oscillating volute chamber, 54, a second oscillating volute chamber, 55, a fluid oscillation sensor, 6, an oscillation cavity, 7, an outlet, 8, a top cover and 9, a substrate.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1 and 2, the present invention provides a fluidic flow meter without a feedback channel, comprising:
1) a fluidic oscillator 1, a substrate 9, a top cover 8; a drainage groove 3, a nozzle 4 and a rectangular oscillation cavity 6 with an omega-shaped fixed choke body 5 are arranged in the jet oscillator 1, and the drainage groove 3, the nozzle 4 and the rectangular oscillation cavity 6 are communicated with each other; the nozzle 4 is a convergent nozzle, and the nozzle 4 is smoothly connected with the drainage groove 3. The central axes of the drainage groove 3, the nozzle 4, the flow blocking body 5 and the oscillation cavity 6 are overlapped, and the depths of the drainage groove 3, the nozzle 4 and the oscillation cavity 6 are the same as the height of the flow blocking body 5; the drainage groove 3 extends into the oscillation cavity 6, the drainage groove 3 is communicated with the nozzle 4, and the nozzle 4 is communicated with the oscillation cavity 6; the flow blocking body 5 is positioned in the oscillation cavity 6, and the concave surface of the flow blocking body 5 is opposite to the opening of the nozzle 4; the top cover 8 is provided with a round hole-shaped inlet 2 and a round hole-shaped outlet 7, the inlet 2 is communicated with the front end of the drainage groove 3, and the outlet 7 is communicated with the oscillation cavity; the bluff body 5 is fixedly connected with the base 9, and the fluidic oscillator 1 is respectively connected with the base 9 and the top cover 8 in a sealing way.
2) The omega-shaped spoiler 5 comprises a shunt tip 50, an L-shaped first spoiler arm 51 and an L-shaped second spoiler arm 52; the flow dividing tip 50 is positioned on the central axis of the nozzle 4, and the flow dividing tip 50 is opposite to the opening of the nozzle 4; the first spoiler arm 51 and the second spoiler arm 52 are respectively located on both sides of the shunt tip 50 and the first spoiler arm 51 and the second spoiler arm 52 are respectively connected to the shunt tip 50; the first choke arm 51 and the splitter tip 50 are semi-enclosed to form a first oscillating volute 53, and the second choke arm 51 and the splitter tip 50 are semi-enclosed to form a second oscillating volute 53; the first oscillating volute chamber 53, the second oscillating volute chamber 54 and the oscillating cavity 6 are communicated with each other; the inner side walls of the first choke arm 51 and the second choke arm 52 are mounted with a fluidic oscillation sensor 55 that senses the fluidic oscillation frequency.
3) The central line of the inlet 2, the central line of the outlet 7 and the central axis of the nozzle 4 are in the same plane, the diameter of the inlet 2 is equal to the width of the drainage groove 3, the central line of the outlet 7 is positioned behind the flow blocking body 5, and the diameter of the outlet 7 is 1.2-1.5 times that of the inlet 2.
When measuring fluid, the jet flow meter without a feedback channel is arranged in a pipeline of the fluid to be measured, the fluid vertically enters the drainage groove 3 of the jet flow oscillator 1 through the inlet 2 on the top cover 8, and then the fluid is jetted into the oscillation cavity 6 through the nozzle 4; the main jet flow entering the oscillation cavity 6 is divided into two jet flows by the flow dividing tip 50, the two jet flows enter the first oscillation vortex chamber 53 and the second oscillation vortex chamber 54 respectively, and then the two jet flows are acted by the L-shaped first flow blocking arm 51 and the L-shaped second flow blocking arm 52 to form two jet flows opposite to the main jet flow in the first oscillation vortex chamber 53 and the second oscillation vortex chamber 54 respectively; the main jet forms convection with the two opposite jets, the instability of the convection causes a slight deflection of the main jet, and the deflection direction is random (assuming that the main jet is deflected first towards the second choke arm 52), one jet entering the first oscillating volute 53 gradually decreases and forms a counterclockwise vortex in the first oscillating volute 53 under the action of the flow dividing tip 50, and the deflection of the main jet gradually increases with the increase of the vortex; when the main jet is deflected to the projection of the end of the second spoiler arm 52, the swirl is simultaneously influenced by the projection and the splitter tip of the end of the second spoiler arm 5250, when the main jet starts to deflect in the opposite direction; when the main jet flow deflects reversely and returns to the vicinity of the diversion tip 50, a clockwise rotating vortex is formed at the second oscillating volute 54, the main jet flow is deflected continuously under the pushing of the vortex, the protrusion … … gradually deflected to the tail end of the first flow-resisting arm 51 reciprocates circularly, the main jet flow oscillates back and forth between the first flow-resisting arm 51 and the second flow-resisting arm 52, periodically-changed pressure signals on the inner side walls of the first flow-resisting arm 51 and the second flow-resisting arm 52 are received by the fluid oscillation sensor 55 arranged on the inner side walls of the first flow-resisting arm 51 and the second flow-resisting arm 52, and the frequency of jet flow oscillation is obtained
。
Frequency of jet oscillation
With the fluid flow rate at the meter nozzle
The following linear relationship is present:
wherein,
is the number of the Strahaha,
the characteristic length (the width of the nozzle 4 can be taken as the characteristic length).
Let the height of the nozzle 4 be
The flow rate of the pipeline is
Then, there are:
meter coefficient of the jet flow meter
Comprises the following steps:
substituting (1) and (2) into (3) to obtain:
(3)
stewartha number for a given structural size of the jet flowmeter of the invention
Height of the nozzle 4
And the width of the nozzle 4
Are determinable, and therefore the meter factor of the fluidic flow meter of the present inventionMay also be determined.
Example 1:
for the flow measurement of 30mm pipe diameter, the jet flow meter without feedback channel of the invention is processed by the structure shown in fig. 3. The method comprises the steps of processing a hollowed-out drainage groove 3 (the width of the drainage groove is 30 mm), a nozzle 4 and an oscillation cavity 6 on a fluidic oscillator 1 by using an accurate linear cutting technology, cutting out omega-shaped resistance fluid 5 with the same thickness, mounting a chip type piezoelectric crystal sensor on the inner side walls of a first resistance arm 51 and a second resistance arm 52 to serve as a fluid oscillation sensor 55, and processing a through hole with the diameter of 30mm on an aluminum top cover 8 to serve as an inlet 2 and a through hole with the diameter of 40mm to serve as an outlet 7 and a lead channel of the corresponding piezoelectric crystal sensor. The bluff body 5 is welded to a base 9, which is also made of aluminum, and the fluidic oscillator 1 and the top cover 8 are in turn sealingly fastened to the base 9 by means of sealing washers and screws.
Example 2:
for the micro-channel flow measurement with the pipe diameter of 500 μm, the micro-fluidic flow meter without the feedback channel of the invention is processed by adopting the structure shown in fig. 4, and the fluidic oscillator 1 is directly processed inside the substrate 9 in the embodiment, which is different from the embodiment 1. The structure of the fluidic oscillator 1 is processed on the substrate 9 by using a silicon wafer as a material and utilizing a silicon wet etching technology, and the specific processing technological process comprises the following steps: growing SiO on the upper surface of the substrate 92Masking, applying photoresist, photolithography, developing, etching SiO2Wet etching of silicon and final SiO removal2A masking layer. The piezoresistive pressure sensor is mounted on the inner side walls of the first choke arm 51 and the second choke arm 52 as a fluidic oscillation sensor 55 by a bonding technology, and the lead of the piezoresistive pressure sensor is processed by an integrated circuit technology. A500 μm through hole was formed as an inlet 2 and a 600 μm through hole was formed as an outlet 7 in the top cover 8 of the silicon wafer by a punch. And finally, sealing the silicon chip top cover 8 with the substrate 9 processed with the jet oscillator 1 by a bonding technology.
Claims (2)
1. Jet flowmeter who does not have feedback channel includes from last top cap (8), fluidic oscillator (1) and base (9) down set up, its characterized in that: a drainage groove (3), a nozzle (4) and a rectangular oscillation cavity (6) with an omega-shaped fixed choke body (5) are arranged in the jet oscillator (1); the drainage groove (3), the nozzle (4) and the rectangular oscillation cavity (6) are communicated with each other; the drainage groove (3) is communicated with the rectangular oscillation cavity (6) through the nozzle (4), the omega-shaped fixed flow-blocking body (5) is positioned in the rectangular oscillation cavity (6), the concave surface of the omega-shaped fixed flow-blocking body (5) is opposite to the opening of the nozzle (4), and a fluid oscillation sensor (55) is arranged in the concave surface of the omega-shaped fixed flow-blocking body (5); the top cover (8) is provided with a round hole-shaped inlet (2) and a round hole-shaped outlet (7), the inlet (2) is communicated with the front end of the drainage groove (3), and the outlet (7) is communicated with the rectangular oscillation cavity;
the omega-shaped fixed choke body (5) comprises a shunt tip (50), an L-shaped first choke arm (51) and an L-shaped second choke arm (52);
the flow dividing tip (50) is positioned on the central axis of the nozzle (4), and the flow dividing tip (50) is opposite to the opening of the nozzle (4);
the first flow-resisting arm (51) and the second flow-resisting arm (52) are respectively positioned at two sides of the flow-dividing tip (50) and are symmetrically arranged by taking the central axis of the nozzle (4) as a symmetric axis; one end of the first flow-resisting arm (51) is connected with one side of the shunt tip (50), and one end of the second flow-resisting arm (52) is connected with the other side of the shunt tip (50);
the first choke arm (51) and the shunt tip (50) are semi-enclosed to form a first oscillating volute chamber (53), and the second choke arm (51) and the shunt tip (50) are semi-enclosed to form a second oscillating volute chamber (53);
the fluid oscillation sensors (55) are respectively arranged on the inner side walls of the first choke arm (51) and the second choke arm (52).
2. The feedback channel-less fluidic flow meter of claim 1, wherein: the central line of the inlet (2), the central line of the outlet (7) and the central axis of the nozzle (4) are in the same plane, the diameter of the inlet (2) is equal to the width of the drainage groove (3), the central line of the outlet (7) is positioned behind the omega-shaped fixed flow blocking body (5), and the diameter of the outlet (7) is 1.2-1.5 times that of the inlet (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100512843A CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100512843A CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
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| Publication Number | Publication Date |
|---|---|
| CN102128649A CN102128649A (en) | 2011-07-20 |
| CN102128649B true CN102128649B (en) | 2012-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100512843A Expired - Fee Related CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
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| Country | Link |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113953132B (en) * | 2021-10-20 | 2022-07-29 | 中南大学 | Hydraulic jet oscillator element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241204A (en) * | 1999-02-25 | 2000-09-08 | Osaka Gas Co Ltd | Flow meter |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830620A (en) * | 1981-08-17 | 1983-02-23 | Kinmon Seisakusho:Kk | Flowmeter |
| JP3330253B2 (en) * | 1994-12-09 | 2002-09-30 | 株式会社リコー | Fluidic fluid element and fluidic flow meter and flow meter |
| FR2769957B1 (en) * | 1997-10-17 | 2001-11-30 | Schlumberger Ind Sa | FLUID OSCILLATOR WITH EXTENDED SLOT |
| CN202041233U (en) * | 2011-03-03 | 2011-11-16 | 中国计量学院 | Jet flow meter without feedback channel |
-
2011
- 2011-03-03 CN CN2011100512843A patent/CN102128649B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241204A (en) * | 1999-02-25 | 2000-09-08 | Osaka Gas Co Ltd | Flow meter |
Non-Patent Citations (3)
| Title |
|---|
| JP昭58-30620A 1983.02.23 |
| JP特开2000-241204A 2000.09.08 |
| JP特开平8-210886A 1996.08.20 |
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