CN102128649A - Fluidic flow meter without feedback channel - Google Patents
Fluidic flow meter without feedback channel Download PDFInfo
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- CN102128649A CN102128649A CN2011100512843A CN201110051284A CN102128649A CN 102128649 A CN102128649 A CN 102128649A CN 2011100512843 A CN2011100512843 A CN 2011100512843A CN 201110051284 A CN201110051284 A CN 201110051284A CN 102128649 A CN102128649 A CN 102128649A
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- choked flow
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Abstract
The invention discloses a fluidic flow meter without a feedback channel. The fluidic flow meter comprises a fluidic oscillator, a base and a top cover, wherein a drainage groove, a spray nozzle and an oscillating cavity with an Omega-shaped fixed flow chocking body which are communicated with one another are arranged in the fluidic oscillator; the drainage groove extends into the oscillating cavity; the spray nozzle is communicated with the tail end of the drainage groove; the flow chocking body is positioned in the oscillating cavity, and the concave surface of the flow chocking body is opposite to the opening of the opening of the spray nozzle; the top cover is provided with a circular-hole inlet and a circular-hole outlet; the inlet is communicated with the front end of the drainage groove; and the outlet is communicated with the oscillating cavity. In the fluidic flow meter, a rectangular oscillating cavity with the Omega-shaped fixed flow chocking body is adopted, and jet current is oscillated stably and periodically by jet current vortex alternatively produced in a first oscillating volute chamber and a second oscillating volute chamber. Compared with the prior art, the fluidic flow meter has the advantages of lower flow measuring lower limit, capability of generating a stable and stronger oscillator signal on the inner side wall of a flow chocking arm and higher signal-to-noise ratio.
Description
Technical field
The present invention relates to a kind of fluidic flowmeter, be specifically related to a kind of fluidic oscillator that does not have feedback channel.
Background technology
Along with developing rapidly of electronic technology, market demand cheapness, stability and the good flow sensor of repeatability, jet flow sensor has satisfied the requirement in market to a certain extent greatly.In recent years, fluidic flowmeter just progressively is used as domestic gas meter and domestic meter, and range of application and constantly expansion of influence, can predict, and fluidic flowmeter has good application prospects on civilian industry.Yet domestic research to fluidic flowmeter is less, carries out the research of novel jet flow flowmeter significant especially for the research of the microscale fluidic flowmeter that micrometeor is measured.
Present fluidic flowmeter adopts the fluidic flowmeter of band feedback channel more, it comprises housing, two following current parts, two feedback channels, signal detection component and testing circuits, fluidic flowmeter is provided with the following current part of two symmetries in housing, when power stream when nozzle is injected, because wall attachment effect can be attached to one in two following current parts arbitrarily, and a part of a fluid stream of power stream enters corresponding feedback channel, fed-back fluid acts on power stream, make it to switch and depend on another following current part, begun another feedback cycle.The generation fluid oscillating that so moves in circles obtains the fluid oscillating frequency by detecting the electric signal frequency, thus indirect flow rate of fluid and flow.This fluidic flowmeter non mechanical movable, antijamming capability is good, is not subjected to the influence of external environment, has certain advantage in certain occasion.But owing to adopt the structure of band feedback channel, aspect processing and fabricating and application, there is deficiency, is mainly reflected in following three aspects:
(1) jet flow of band feedback channel is in respect of the high-aspect-ratio requirement.Fluidic flowmeter is in the rate of flow of fluid scope of broad, and the Si Telaoha base is originally constant, and the oscillation frequency of fluid and flow velocity are the volumetric flow rate that certain proportion obtains fluid in the fluidic flowmeter.For the fluidic flowmeter of band feedback channel, when the depth-to-width ratio of jet nozzle is crossed when low, the Free Surface area of jet is reduced to can not provide enough power to make fluid oscillating in the flowmeter.Especially in micro-system, some rapidoprint and processing technology can not satisfy the designing requirement of high-aspect-ratio, have limited the application of flowmeter in micro-system greatly.
(2) be not suitable for detecting in the micro-system micrometeor, for micro-system, the irregular structure of the fluidic flowmeter inside of band feedback channel is more complicated comparatively speaking, and material processed and process technology are required than higher, be not easy to processing and manufacturing, so that manufacturing cost is relatively more expensive.
(3) with respect to power stream, the strength ratio of feedback channel internal pressure signal a little less than because feedback channel in fluid be the sub-fraction a fluid stream of power stream, detected signal is not obvious, is subjected to external interference easily, signal to noise ratio (S/N ratio) is lower.
Summary of the invention
The object of the present invention is to provide a kind of fluidic flowmeter that does not have feedback channel, to be used for the measurement of the fluid flow under macro-scale or the micro-scale.
For achieving the above object, the technical solution adopted in the present invention is:
The fluidic flowmeter of no feedback channel comprises the top cover, fluidic oscillator and the substrate that are provided with from top to bottom.Be provided with drainage trough, nozzle in the fluidic oscillator and have the fixedly rectangle vibration chamber of bluff body of ω shape; Described drainage trough, nozzle and rectangle vibration chamber are interconnected; Drainage trough is communicated with the vibration chamber by nozzle, and the concave surface that bluff body is positioned at vibration chamber and bluff body is relative with the opening of nozzle, is provided with the fluid oscillating sensor in the concave surface of bluff body; Described top cover has circle hole shape inlet and circle hole shape outlet, and inlet is communicated with the drainage trough front end, and outlet is communicated with the vibration chamber.
Say that further the bluff body of described ω shape comprises shunting point, the L shaped first choked flow arm, the L shaped second choked flow arm; Shunting point be positioned on the axis of nozzle and shunting point and nozzle opening over against; The first choked flow arm and the second choked flow arm lay respectively at the sharp both sides of shunting and are that axis of symmetry is and is symmetrical arranged with the axis of nozzle; One end of the first choked flow arm is connected with a side of shunting point, and an end of the second choked flow arm is connected with the opposite side of shunting point; The first choked flow arm forms the first vibration volute chamber with the sharp semi-surrounding of shunting, and the second choked flow arm forms the second vibration volute chamber with the sharp semi-surrounding of shunting; Described fluid oscillating sensor is separately positioned on the first choked flow arm and the second choked flow arm madial wall.
Further say, the axis of the center line of described inlet, the center line of outlet and nozzle is in the same plane, the diameter of inlet equates that with the width of drainage trough the center line of outlet is positioned at the rear of bluff body, and outlet diameter is 1.2～1.5 times of inlet diameter.
Compared with prior art, the beneficial effect that has of the present invention is:
1) fluidic flowmeter of the present invention adopts and has the fixedly rectangle vibration chamber of bluff body of ω shape, the jet whirlpool that utilization alternately produces in the first vibration volute chamber and the second vibration volute chamber makes the stable periodic oscillation of jet, has lower flow measurement lower limit compared to existing technology;
2) the fluid oscillating sensor of fluidic flowmeter of the present invention is installed on the fixedly choked flow arm madial wall of bluff body of ω shape, the direct alternating action of jet is in the first choked flow arm and the second choked flow arm, can produce stable, stronger oscillator signal at choked flow arm madial wall, have signal to noise ratio (S/N ratio) preferably;
3) fluidic flowmeter of the present invention movable member simple in structure, no, do not have strict depth-to-width ratio requirement, be convenient to especially processing and the making under the micro-dimension of various sizes, be particularly suitable for the small amount of flow measuring of microelectron-mechanical (MEMS) system.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is along the cut-open view of A-A line among Fig. 1.
Fig. 3 is the decomposing schematic representation of first kind of embodiment of the present invention.
Fig. 4 is the decomposing schematic representation of second kind of embodiment of the present invention.
Among the figure: 1. fluidic oscillator, 2. inlet, 3. drainage trough, 4. nozzle, 5. bluff body, 50. the shunting point, 51. first choked flow arms, 52. second choked flow arms, 53. first vibration volute chambers, 54. second vibration volute chambers, 55. the fluid oscillating sensor, 6. the vibration chamber 7. exports 8. top cover, 9. substrate.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
As depicted in figs. 1 and 2, the invention provides a kind of fluidic flowmeter that does not have feedback channel, it comprises:
1) fluidic oscillator 1, substrate 9, top cover 8; Be provided with drainage trough 3, nozzle 4 in the fluidic oscillator 1 and have the fixedly rectangle vibration chamber 6 of bluff body 5 of ω shape, drainage trough 3, nozzle 4 and rectangle vibration chamber 6 are interconnected; Nozzle 4 is a convergent nozzle, nozzle 4 and 3 smooth connections of drainage trough.The axis in drainage trough 3, nozzle 4, bluff body 5 and vibration chamber 6 overlaps, and the degree of depth in drainage trough 3, nozzle 4, vibration chamber 6 is identical with the height of bluff body 5; Drainage trough 3 extends in the vibration chamber 6, and drainage trough 3 is communicated with nozzle 4, and nozzle 4 is communicated with vibration chamber 6; The concave surface that bluff body 5 is positioned at vibration chamber 6 and bluff body 5 is relative with the opening of nozzle 4; Top cover 8 has circle hole shape inlet 2 and circle hole shape outlet 7, and inlet 2 is communicated with drainage trough 3 front ends, exports 7 and is communicated with the chamber that vibrates; Bluff body 5 is fixedlyed connected with substrate 9, and fluidic oscillator 1 is tightly connected with substrate 9 and top cover 8 respectively.
2) bluff body 5 of ω shape comprises shunting point 50, the L shaped first choked flow arm 51, the L shaped second choked flow arm 52; Shunting point 50 be positioned on the axis of nozzle 4 and shunting point 50 and nozzle 4 openings over against; The first choked flow arm 51 lays respectively at sharp 50 both sides of shunting with the second choked flow arm 52 and the first choked flow arm 51 links to each other with shunting point 50 respectively with the second choked flow arm 52; The first choked flow arm 51 forms the first vibration volute chamber, 53, the second choked flow arms 51 with sharp 50 semi-surroundings of shunting and forms the second vibration volute chamber 53 with sharp 50 semi-surroundings of shunting; Be interconnected between the first vibration volute chamber 53, the second vibration volute chamber 54 and the vibration chamber 6; The first choked flow arm 51 and the second choked flow arm, 52 madial walls are equipped with the fluid oscillating sensor 55 of senses flow bulk oscillation frequency.
3) center line of inlet 2, the center line of outlet 7 and the axis of nozzle 4 are in the same plane, and the diameter of inlet 2 equates that with the width of drainage trough 3 center line of outlet 7 is positioned at the rear of bluff body 5, export 7 diameters 1.2～1.5 times for inlet 2 diameters.
When measuring fluid, the fluidic flowmeter that the present invention does not have feedback channel is installed in the pipeline for the treatment of fluid measured, and fluid vertically enters in the drainage trough 3 of fluidic oscillator 1 through the inlet 2 on the top cover 8, and fluid is injected vibration chamber 6 through nozzle 4 then; The power stream that enters vibration chamber 6 is shunted point and 50 is divided into two strands of jets, two strands of jets enter the effect that the first vibration volute chamber 53 and 54, two strands of jets of the second vibration volute chamber are subjected to L shaped first choked flow arm 51 and the L shaped second choked flow arm 52 subsequently respectively and form and two strands of reverse jets of power stream at the first vibration volute chamber 53 and the second vibration volute chamber 54 respectively; Power stream and two strands of reverse jets form convection current, the instability of convection current can cause the slight deflection of power stream, and yawing moment is at random (supposing that power stream is at first towards the 52 direction deflections of the second choked flow arm), one jet that enters the first vibration volute chamber 53 reduces gradually and form the whirlpool that is rotated counterclockwise at the first vibration volute chamber 53 under the effect of shunting point 50, along with the deflection of the increase power stream of whirlpool aggravates gradually; When power stream deflected to the second choked flow arm, 52 ends protruding, whirlpool was subjected to the projection of the second choked flow arm, 52 ends simultaneously and the interference of shunting point 50 fades away, and at this moment power stream begins deflection in the opposite direction; In the time of near the reverse deflection of power stream is back to shunting point 50, begin to form the whirlpool that turns clockwise at the second vibration volute chamber 54, power stream continues deflection under the promotion of whirlpool, deflect to the projection of the first choked flow arm, 51 ends gradually ... so move in circles, power stream is vibration back and forth between the first choked flow arm 51 and the second choked flow arm 52, the pressure signal that the cycle changes on the first choked flow arm 51 and the second choked flow arm, 52 madial walls is installed in the fluid oscillating sensor 55 of the first choked flow arm 51 and the second choked flow arm, 52 madial walls and accepts, thereby obtains the frequency of fluidic oscillation
The frequency of fluidic oscillation
Rate of flow of fluid with the flow nozzle place
Be following linear relationship:
Wherein,
Be the Si Telaoha number,
Be characteristic length (width of desirable nozzle 4 is as characteristic length).
If the height of nozzle 4 is
, pipeline flow is
, then have:
The instrument coefficient of fluidic flowmeter of the present invention
For:
(1) and (2) substitution (3) is got:
For the fluidic flowmeter of the present invention of given physical dimension, Si Telaoha number
, nozzle 4 height
And the width of nozzle 4
All be confirmable, so the instrument coefficient of fluidic flowmeter of the present invention
Also be confirmable.
Embodiment 1:
For pipe diameter is the flow measurement of 30mm, and this example adopts structure processing the present invention as shown in Figure 3 not have the fluidic flowmeter of feedback channel.With aluminium as material, the drainage trough 3(drainage trough width that utilizes accurate line cutting technology to process hollow out on fluidic oscillator 1 is 30mm), nozzle 4 and the vibration chamber 6, cut out same thickness ω form drag fluid 5 and the chip piezoeletric quartz sensor is installed as fluid oscillating sensor 55, and to process diameter on aluminum top 8 be that the through hole of 30mm is as the through hole of inlet 2, the 40mm lead channels as outlet 7 and corresponding piezoeletric quartz sensor at the first choked flow arm 51 and the second choked flow arm, 52 madial walls.Bluff body 5 is welded in the substrate 9 that is all aluminum material, and with packing washer and screw successively with fluidic oscillator 1 and top cover 8 sealing and fixing in substrate 9.
Embodiment 2:
For pipe diameter is the microchannel flow measurement of 500 μ m, and this example adopts structure processing the present invention as shown in Figure 4 not have the microjet flowmeter of feedback channel, and this routine fluidic oscillator 1 is directly processed in substrate 9 inside as different from Example 1.As material, utilize the wet etching technique of silicon to process the structure of fluidic oscillator 1 with silicon chip in substrate 9, concrete processing process is: at the upper surface growth SiO of substrate 9
2Masking layer, resist coating, photoetching is developed, corrosion SiO
2, wet etching silicon is removed SiO at last
2Masking layer.Piezoresistive pressure sensor is installed in the first choked flow arm 51 and the second choked flow arm, 52 madial walls as fluid oscillating sensor 55 by bonding techniques, and utilizes integrated circuit technique to process the lead-in wire of piezoresistive pressure sensor.The through hole that on silicon chip top cover 8, processes 500 μ m with tapping and plugging machine as the through hole of inlet 2,600 μ m as outlet 7.At last by bonding techniques with silicon chip top cover 8 and substrate 9 sealing-ins that are processed with fluidic oscillator 1.
Claims (3)
1. the fluidic flowmeter that does not have feedback channel, comprise the top cover (8), fluidic oscillator (1) and the substrate (9) that are provided with from top to bottom, it is characterized in that: be provided with drainage trough (3), nozzle (4) in the fluidic oscillator (1) and have the fixedly rectangle vibration chamber (6) of bluff body (5) of ω shape; Described drainage trough (3), nozzle (4) and rectangle vibration chamber (6) are interconnected; Drainage trough (3) is communicated with vibration chamber (6) by nozzle (4), and the concave surface that bluff body (5) is positioned at vibration chamber (6) and bluff body (5) is relative with the opening of nozzle (4), is provided with fluid oscillating sensor (55) in the concave surface of bluff body (5); Described top cover (8) has circle hole shape inlet (2) and circle hole shape outlet (7), and inlet (2) is communicated with drainage trough (3) front end, and outlet (7) is communicated with the vibration chamber.
2. the fluidic flowmeter of no feedback channel according to claim 1 is characterized in that: the bluff body of described ω shape (5) comprises shunting point (50), the L shaped first choked flow arm (51), the L shaped second choked flow arm (52);
Shunting point (50) be positioned on the axis of nozzle (4) and shunting point (50) and nozzle (4) opening over against;
The first choked flow arm (51) and the second choked flow arm (52) lay respectively at shunting point (50) both sides and are that axis of symmetry is and is symmetrical arranged with the axis of nozzle (4); One end of the first choked flow arm (51) is connected with a side of shunting point (50), and an end of the second choked flow arm (52) is connected with the opposite side of shunting point (50);
The first choked flow arm (51) forms the first vibration volute chamber (53) with shunting point (50) semi-surrounding, and the second choked flow arm (51) forms the second vibration volute chamber (53) with shunting point (50) semi-surrounding;
Described fluid oscillating sensor (55) is separately positioned on the first choked flow arm (51) and second choked flow arm (52) madial wall.
3. the fluidic flowmeter of no feedback channel according to claim 1, it is characterized in that: the center line of the center line of described inlet (2), outlet (7) and the axis of nozzle (4) are in the same plane, the diameter of inlet (2) equates with the width of drainage trough (3), the center line of outlet (7) is positioned at the rear of bluff body (5), and outlet (7) diameter is 1.2～1.5 times of inlet (2) diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100512843A CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100512843A CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102128649A true CN102128649A (en) | 2011-07-20 |
| CN102128649B CN102128649B (en) | 2012-11-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100512843A Expired - Fee Related CN102128649B (en) | 2011-03-03 | 2011-03-03 | Fluidic flow meter without feedback channel |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953132A (en) * | 2021-10-20 | 2022-01-21 | 中南大学 | Hydraulic jet oscillator element |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830620A (en) * | 1981-08-17 | 1983-02-23 | Kinmon Seisakusho:Kk | Flowmeter |
| JPH08210886A (en) * | 1994-12-09 | 1996-08-20 | Ricoh Co Ltd | Fluidic fluid control device, fluidic flowmeter, and flowmeter |
| FR2769957A1 (en) * | 1997-10-17 | 1999-04-23 | Schlumberger Ind Sa | Fluid oscillator with elongated opening |
| JP2000241204A (en) * | 1999-02-25 | 2000-09-08 | Osaka Gas Co Ltd | Flow meter |
| CN202041233U (en) * | 2011-03-03 | 2011-11-16 | 中国计量学院 | Jet flow meter without feedback channel |
-
2011
- 2011-03-03 CN CN2011100512843A patent/CN102128649B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830620A (en) * | 1981-08-17 | 1983-02-23 | Kinmon Seisakusho:Kk | Flowmeter |
| JPH08210886A (en) * | 1994-12-09 | 1996-08-20 | Ricoh Co Ltd | Fluidic fluid control device, fluidic flowmeter, and flowmeter |
| FR2769957A1 (en) * | 1997-10-17 | 1999-04-23 | Schlumberger Ind Sa | Fluid oscillator with elongated opening |
| JP2000241204A (en) * | 1999-02-25 | 2000-09-08 | Osaka Gas Co Ltd | Flow meter |
| CN202041233U (en) * | 2011-03-03 | 2011-11-16 | 中国计量学院 | Jet flow meter without feedback channel |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113953132A (en) * | 2021-10-20 | 2022-01-21 | 中南大学 | Hydraulic jet oscillator element |
| CN113953132B (en) * | 2021-10-20 | 2022-07-29 | 中南大学 | Hydraulic jet oscillator element |
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| Publication number | Publication date |
|---|---|
| CN102128649B (en) | 2012-11-21 |
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Granted publication date: 20121121 Termination date: 20140303 |