TW580564B - Fluidic flow meter - Google Patents

Abstract

There is provided a fluidic flow meter, which includes three major components: a buffering chamber, a micro flow channel and a fluid oscillating chamber. The buffering chamber makes the fluid smoothly enter the fluidic flow meter from a flow field. Next, the fluid enters the micro flow channel from the buffering chamber. A multi-line micro flow-meter sensor is arranged in the micro flow channel for detecting the value of the micro flow. Finally, the fluid enters into the fluid oscillating chamber via the micro flow channel. When the Reynolds number of the flow field reaches a status of transition flow, the fluid is unstable. By measuring the frequency of the fluid oscillation, it is able to estimate the numeric flow field of the middle and high flows. This fluidic flow meter is combined with the measurements of micro flow and flows of middle and high flow fields to expand the dynamic measurement range of the flow meter.

Description

580564 ___ Incident No. 91138079 Car Moon Day Amendment V. Description of the Invention (1) [Technical Field to which the Invention belongs] The present invention relates to a jet flow meter, which is applied to a gas meter. [Previous technology] At present, the application range of flow is very wide, for example: gas meters used by mothers and families in daily life, gas flow control in respirators used in hospitals, air conditioners for automobiles, Flowmeters for gas cylinders in laboratories or factories need to use flowmeters. However, for different applications, there will be different flow measurement ranges.

The currently developed flowmeters are mainly used in gas meters. The following is a brief introduction to the structure of different types of flowmeters and their measuring principles:

(j) The jet oscillating flowmeter proposed in U.S. Patent No. 4,244,230, as shown in Fig. 1, firstly, a 鬲 depth-width ratio flow channel is formed at the fluid inlet. The cross-sectional shape of this flow channel is both narrow and deep, so that the fluid in the flowing meal forms a surface and the fluid is sprayed out. When the fluid sprays out, it will wait at the outlet 20 to gradually shrink to a wider place, because the main jet impacts the groove 31 of the blocking body 30, which will cause fluid instability, and the fluid shock effect will cause fluid. The phenomenon of deflection, at the first moment when the fluid is ejected from the outlet 20, the fluid may swing to the left or to the right. This phenomenon is called the Coanda Effect. On the left and right sides of the groove 31, two fluid vibration sensors 40 are provided. Since the fluid vibration frequency detected by the fluid vibration sensor 40 is linearly related to the volume flow rate of the fluid, The fluid mass flow rate can be calculated from the fluid oscillating frequency. When the flow resistance is larger, the fluid oscillating effect is better, and the fluid oscillating sensor 4 〇 is also better, so this patent is provided with a blocking body 3 ′ at the front end of the fluid outlet 2 〇 to increase the fluid Instability. The disadvantage of the present invention is that

Page 5 580564

__Case No. 9113807 & V. Description of the invention (2) In exchange for a significant oscillating effect, and there must be sufficient pressure loss to cause the fluid oscillating effect. (2) The flow meter disclosed in US Patent No. 5, 3,96,809 is referenced to the "Figure 2", the design principle is the same as the aforementioned patent, but ^ / dare to be larger than the aforementioned patent The difference is that this patent adds a fluid shock sensor 40 in the middle of the groove 31 of the shock castle chamber. Its main purpose is to improve the sensing resolution of the fluid morning shock, especially in the fluid flow rate. When the earthquake is small and the soil is not obvious, the accuracy of the flowmeter can be effectively improved. (3) For the flowmeter disclosed in U.S. Patent No. 5,3 6 3,704, please refer to "Figure 3", the main purpose of this patent is to improve U.S. Patent No. 5, 3,96, Disadvantages of the flowmeter disclosed in No. 8 0 9: because when the fluid flow speed becomes faster, although the effect of the fluid after the shock becomes better, a turbulent vortex (v 〇 rte X) will be generated in the groove 31. This eddy current will make the fluid in the groove 31 more chaotic, which will affect the signal-to-noise ratio measured by the fluid shock sensor 40. Therefore, in order to improve this shortcoming, a bypass 32 is dug on each side of the groove 31, so that the vortex generated in the groove 31 can flow out of the side passage 32, thereby reducing the fluid in the groove 31. Turbulent flow to increase the signal-to-noise ratio of the fluid when it oscillates. (4) According to the miniaturized microcomputer gas meter disclosed in U.S. Patent No. 5, 1 57, 9 74 ', please refer to "Figure 4", the core technology of which is a jet flow meter. Apply a jet flow meter to gas The biggest advantage in the table is that the gas is basically not very clean and it is easy to accumulate impurities in the flowmeter structure. The jet flowmeter can use the vibration of the fluid to clean the interior of the gas meter, so that the measurement of the flowmeter can be more accurate. . This jet flow meter is to place the fluid shock I ′ Zejie 40 at the outlet of the flow channel 5 q. When the fluid passes through this flow channel 5 〇

580564 ^ S_1U38079 V. Description of the invention (3) ¥ 'fluid instability caused by the sudden expansion of t, flow I5 〇', thus causing the fluid to oscillate and oscillate, the signal measured by the fluid oscillating sensor 40 'Calculate the instantaneous flow rate of different fluids, which can be converted into the fluid flow rate. Compared with the aforementioned patents, the invention of this patent is mainly to avoid the turbulence caused by the fluid turbulence, which will cause the signal-to-noise ratio to decrease. However, the invention of this patent also caused another disadvantage: the weakening of the shock; the idea proposed by this patent could not effectively and obviously improve the signal-to-noise ratio. (5) For the flowmeter disclosed in Japanese Patent No. Jp4-26 2209, please refer to "Figure 5". Its structure design is roughly the same as that of US Patent No. 5, 1 5 7, 9 7 4 The disclosed miniaturized microcomputer gas meter is the same. The main idea is to set the fluid shock sensor 40 at the entrance of the shock chamber 60a, 60b. Its main purpose is to increase the frequency of sensing fluid shock . However, the disadvantage of this patent is that as long as the pressure of the upstream flow field changes, the month b will cause a misjudgment of the signal and cause an inaccurate measurement of the flow value. (6) For the flowmeter disclosed in Japanese Patent No. Jp200-0— "", please refer to "Figure 6" for the structure of the flowmeter. The basic principle of this patent still does not use the phenomenon of fluid instability. To estimate the mass flow rate of the fluid. This tapered section 70 first causes the acceleration of the fluid, and then superimposes the so-called approximately two-dimensional flow field through the high-aspect-ratio flow channel to produce a fluid instability phenomenon, and the fluid oscillates periodically to reach the fluid. Metering functions. However, this $ profit has the same disadvantages as the flowmeter disclosed in the aforementioned Japanese Patent No. JP4-262 20 9: This flowmeter is easily affected by the pressure of the upstream flow field, and the flow rate of the flowmeter is affected by the pressure of the flowmeter. Measurement

Page 7 580564 Case No. 91138079

Rev. J. Description of the invention (4) A large flow range was measured. In addition, when the value of the micro flow rate must be measured, the diameter of the pipe used must be reduced accordingly. This will cause a large pressure loss. In addition, the measurement range of a general domestic flowmeter currently ranges from 0.3 liters / hour to 300 liters / hour, and its dynamic measurement range (dynamic range) reaches 1 0 0 0: 1, however, it is currently being developed There is no single flowmeter that can measure such a wide range of flowmeters. [Summary of the Invention] In view of the problems of the above-mentioned conventional technology, the object of the present invention is to provide-a kind of jet stream 3: meter 'combination 3: micro-pipes and multi-line steam, micro-sensors, Measure medium and high flow fluid oscillators to achieve a dynamic measurement range of 2. The jet flow meter of the present invention includes three main parts: a flushing chamber, a micro-fluid channel and a fluid oscillating chamber. The buffer chamber smooths the fluid entering the flowmeter from the flow field, ",", and the six-J meter, and then the fluid enters it :: connected = a multi-line micro-flow sensing element is set in the microfluidic channel. , Micro-fluid fluid; finally, when the fluid enters the fluid oscillation A to sense the I number and reach the state of the transition flow (Transit ion flow), the flow sculpt w produces an unstable phenomenon, which causes the fluid to deflect the party claws to make 2 The frequency of body shocks can be used to calculate the medium-to-high-flow fluid = measurement using measurement $ ^. The calculation is based on the flow velocity of the fluid through the microchannel and micro = 2 degrees. &lt; <Knowledge Long (1) The jet flow meter developed by the present invention has the following advantages.

Ren Fubu is a general gas flow meter. There is no internal part in this jet flow meter. Therefore, it will not cause BBmm I due to long-term measurement!

580564 ----- Case No. 91138079 V. Description of Invention (5)

Correct the error and the resulting pressure loss is small. (2) For the measurement of high-fluid fluid oscillation chambers, the flow measurement of different types of liquids can be obtained by simply multiplying the measured results with a correction port (ie, the density of the liquid). Unlike ordinary float flow meters, different floats need to be replaced according to different liquids, which is convenient for users to operate and greatly improves the accuracy of measurement. In addition, when the fluid oscillates in the fluid oscillating chamber, it is also possible to remove the pitfalls in the meter to maintain the accuracy of the measurement. (3) Because this jet flow meter uses a multi-line flow sensing element in conjunction with the time-of-flight (T ime 〇ff 1 i 丨) measurement during micro-flow measurement, the fluid can be accurately measured Instantaneous speed. (4) The multi-line type micro-flow sensing element provided in the micro-pipe of the present invention and the single-line type fluid shock detection element used in the fluid shock chamber are both made of polycrystalline silicon material, so it has low power consumption. High-quality, high-sensitivity, and easy to integrate with complementary metal oxide semiconductor (CMOS) circuits. (5)-The flowmeters that are commonly seen usually cause great pressure loss of the fluid. Ϊ = The radiometer of the present invention is light in weight, low in cost, and can be directly connected to the pipeline without causing pressure resistance in the pipeline. . (6) The jet flow meter of the present invention is applied to a film-type gas meter towel of a tile. Because of its mechanical or movable meter, it can eliminate the problem of internal leakage caused by the conventional gap. Friction resistance or empty of moving part module

In order to make the object of the present invention, the structure and features are described in detail as follows. There are further [embodiments] for its features and functions.

Case No. 580564 91138079_year a amendment____ V. Description of the invention (6) The jet flowmeter developed by the present invention is installed in the flow field to measure the fluid flow in the flow field. Please refer to "Section 7 Figures "and" Figure 8 "are respectively three-dimensional exploded views and top views of the jet flow meter of the present invention. The flow meter body 120 includes three main parts: buffer chamber 8 q, micro-flow Channel 90 and the fluid oscillating chamber 100; the fluid flows into the flowmeter from the inlet 12 and flows out of the flowmeter from the outlet 1222. The main function of the buffer chamber 80 is to stabilize the flow field flowing into the jet flow meter, so that it flows smoothly into the jet flow meter, instead of rushing directly into the micro flow channel 90, so as not to affect the measurement. The result is 0. In the part of the microchannel 90, the microfluid is mainly measured by the sensing elements provided in the microchannel 90. When the sensing element in the microchannel 90 has been When the flow velocity of the fluid cannot be sensed, the medium-high flow fluid is measured by the fluid shock chamber 100 connected to it. Therefore, this jet flow meter can measure not only the value of micro flow, but also the value of medium and high flow. It covers a wider dynamic measurement range than the conventional flow meter. In the buffer chamber 80, it includes a first inlet 81, a first outlet 82, and a baffle body 8 3 placed adjacent to the first inlet 81. The fluid flows from the inlet 121 to the inlet 81, and then Entering the buffer chamber 80 from the first inlet 81, the absence of = :: "month" 3 allows the fluid to smoothly enter the buffer chamber 80, instead of rushing directly into the micro-channel 90. 9 is connected to the first outlet 81 of the buffer chamber 80, and the second flow outlet 81 of the fluid flow is connected to the microchannel 90. The tapered tube is placed on the right body! The flow is accelerated through the microchannel 90. This microflow In the road 90, there is a sensor device 9 1 installed on the holy machine. Through measuring the time of flight of the fluid C T 1 in 6 〇f αλ ---, the micro-fluid flow can be measured.

Bill J ILILAiMU. U. 11 ji u ...... — _________ _ 1

Page 580564

As shown in "Figure 9", this multi-line micro-flow sensing element is composed of several sensing elements. When the fluid flows into the microchannel 90, the i-th sensing The element is a heating element (He a ter) 91a, and /, downstream / is provided with a temperature sensing element 9-1 b at a different distance from the heating element 9 1 a. When the fluid flow rate is changed, it can be at different positions. The temperature sensing element 9 1 b senses its speed. The principle of measuring the flow rate of a fluid is: the heating element 9 丨 a is heated instantaneously for a period of time, and the heat wave generated on the heating element 9 1 a will move downstream with the movement of the fluid, and in the microflow The temperature wave ^ lb downstream of channel 90 will sense this heat wave. Because when setting this temperature sensing element, we know the distance between each temperature sensing element 9 lb and the heating element 91a, and also know the heating element 9 丨 a heating and temperature sensing element g] b sensed The time difference in the middle of the heat wave, so that the flow velocity of the fluid can be calculated and the flow rate of the fluid can be calculated. The fluid shock chamber 100 includes a second inlet, a second outlet 10 2 ′, and a symmetric obstacle 103. The second inlet 1 q 1 is connected to the other end of the microchannel 90 to allow fluid to flow into the fluid oscillating chamber. The second outlet 102 is connected to the outlet 122 to allow the fluid to flow out of the flowmeter body 1. 2 0 and communicate with the flow field. The purpose of setting the obstacle 103 is to separate the fluid oscillating chamber 100 into two feedback flow passages 104, and the fluid passes through the two feedback flow passages 104 respectively from adjacent second passages. Exit 100 goes back to the second entrance 101 along the outer edge of this obstacle, and it can be on one of the obstacles, or on the two obstacles. A single-line fluid oscillating sensing element 1 0 3 a is provided, and this single-line fluid oscillating sensing element 1 0 3 a is a pressure sensor.

Page 11 580564 Anti-Instruction of the Invention (8) When the fluid enters the fluid oscillating chamber 100 from the microfluidic channel 90, if the Reynolds number of the flow field reaches the state of the transitional flow (that is, the fluid flow reaches the middle and high flow) , The fluid will produce an unstable phenomenon, this is the Kongda effect. This effect will cause the jet flowing from the second inlet 101 to oscillate left and right, and the fluid flowing through the two bypass side passages 104 will excite this jet to steadily and continuously oscillate left and right. When this jet oscillates to the right or to the left, the single-line fluid oscillation sensing element 103a disposed on the obstacle 103 will obviously detect the fluid flowing over C because if there is no fluid swinging over, the fluid The flow rate will be very small.) Because this single-line fluid shock sensing element 103a is a pressure sensor, it can be sensitively sensed if there is any fluid passing through it. Signal-to-noise ratio, which improves the accuracy of the flowmeter. In addition, the present invention is designed as a tapered tube structure at the second outlet 100 of the fluid oscillating chamber 100, so that it can start the occurrence of a vibrating disk phenomenon at a small flow rate. According to the known technology, we know that the frequency of fluid oscillations generated by the Kongda effect in the flow field and the volumetric flow rate of the fluid have a linear relationship, so: single-line fluid oscillation sensing elements 1 0 3a The measured oscillation frequency of the jet flow is used to estimate the volume flow rate of the fluid, and then the density of the volume flow fluid can be used to obtain the mass flow rate of the fluid. When the flow rate of the fluid is small, the fluid oscillating chamber is not due to the state of the flow field at this time.

At this time, the flow rate of the fluid is measured by the micro-flow channel ▲ limb vibration flow sensing element 91. When the multi-line micro in the flood field i (that is, the state where the Reynolds number reaches the transitional flow), the flow reaches the central station ----for example, when the flow rate page 12

Amendment V. Description of the invention (9) When the vibration f is greater than 0.1 liters / eighth when the shock starts, the cycle% caused by the fluid in the fluid shock chamber 100 will be opened. Instead, calculate the instantaneous volume flow rate of logical bismuth, manual meter &quot; r § 4 with the flow rate of 1000 in the fluid oscillating chamber, and then convert this instantaneous flow rate into instantaneous flow rate. The condition is the benchmark, η t '疋 M the measured fluid flows through the micro-channel 90 so the flow rate is *, 1, and the flow velocity is passed through, and the ambiguity is the measured fluid flowing through the micro-channel 90 Please refer to ^ when calculating the characteristic length of the microchannel 90. The volume diagram, shown in the figure of the "microtubules one", is the actual product of the jet flowmeter of the present invention is 22. 5 X / 〇: the cross-section size is 1.5 mm X 1 5 mm "A square of the accessory", and "Annex II" shows a multi-line micro-flow with a flow rate of 1 to 22 at the outlet of a jet flow meter using a wet type (flow range from 5 to 8- "= liter / hour to 3 ％. 〇litres / hour) and the corresponding voltage (microflow) and fluid shock diagrams measured by the corresponding oscillating sensor element 103a 2 91. Here the relationship between the oscillation frequency (medium and high flow) output and the relationship diagram is obtained by combining the quantity tree of human flow σ using a multi-line micro flow sensing element 91 to perform micro V ο 11 age, vertical sleeve single-color dashed curve ( The unit on the horizontal axis is voltage—in the fluid oscillating chamber (the volume flow rate is -L / hr) and the periodic oscillating frequency caused by the black measured by the measurement fluid. Medium and high flow Frequency, vertical axis ^ line The curve (the unit of the horizontal axis is the oscillation frequency-the micro-flow in the flow field \ is the volume flow rate-L / hr). In the case of multi-line micro-flow, the voltage measured by the fluid flowing through the micro-pipe 9 0120 ’s outlet 122 element 91 is partially equal to the flow rate of the micro-flow sensing element 91 of the flow meter body. Proportional; therefore, multi-line

The body of the micro-fluid is obtained by the voltage calculation on page 13. 580564 Modification ^^ J1138079 V. Description of the invention (10) The accumulated flow rate. The φ ancient and + body vibration chambers of the flow field are placed in the H part for 100 hours. It is directly measured by measuring the frequency of the fluid flowing through the fluid. The frequency is measured by the measuring element 103a. Therefore, 、 The measured flow rate at the exit of 50 points in the machine, 50 points in the machine, 1 20 points, $ 转 ## @, can be estimated from the single-line fluid shock sensor 1 0 3a, μ 2 2 1 * 2 rate can be calculated to be high Volume flow rate of flow fluid. 、, 焉, the measurement of the quantity value, the flow rate (volume flow rate) of the outlet 1 and the extension 1 of the flowmeter body 120 is from the lowest measurement flow rate 9 0 0 Λ ^ / small day guard to the highest measurement The flow is 3 0 0 liters / hour. Since the volumetric flow rate (Q) of the fluid is equal to the product of the cross-sectional area (A) and the flow velocity (V) (Q = A X V), the flow velocity range of the fluid flowing through the microchannel 90 can be derived from the flow range. The minimum flow rate corresponding to the minimum flow rate of the flow channel 90 is: Q = 9 0 0 liters / hour = 2. 5 X ΙΟ-4 cubic meters / second V = Q / A = (2 · 5 X 1 〇- 4) / (2 2 · 5 X 1 0—6) 2 11 · 1 (meters / second) and the micro flow channel 9 0 corresponding to the highest measured flow rate is: Q 2 3 0 0 0 liters / hour = 8. 33 χ 1 〇_4 cubic meters / second V 2 Q / A = (8.33x 1〇-4) / (22 · 5χ 10-6) 2 37 (meters / second) Due to Reynolds number (Re) The calculation system is: V: velocity L ·· characteristic length ^ •• dynamic viscosity coefficient The working fluid used in this experiment is air, and the air dynamic viscosity coefficient 1 &quot; is 1 · 4 5 4 X 1 〇_5 Square meters / second. Therefore, from the obtained flow velocity

580564 ___Case No. 9113807Q YYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYYY etc. 5 x 1 0-3) / (1. 4 5 4 x 1 0 ~ 5) -1146. 2 Rehlgh = (37 x 1.5x 1 〇-3) / (1.454 x 1 〇-5) -3817 by From the experimental data, it can be known that the range of the thunder number of the fluid measured by the fluid shakeout chamber 100 in the jet flow meter of the present invention is 11 4 6 · 2 to 3 81 7 '. Therefore, when the Reynolds number of the fluid is greater than the transient flow When reaching the condition of Turbulent flow (Turbu 1 ent F 1 οw) (that is, Re &gt; 3 00), there will still be fluid shock due to the Kongda effect in the flow field, and the fluid shock can be measured by measuring The frequency is used to estimate the value of medium and high flow. From the experimental data of "Annex II", it can be known that the flow range that this jet flow meter can measure ranges from 1.5 liters / hour to 3 0 0 liters / hour, and the microchannel 90 is used as the basis for calculating the Reynolds number. It can be deduced that the measurable range of Reynolds number is between 1.9 08 5 and 3817. It can be measured regardless of whether the Reynolds number of the flow field is turbulent, transient, or laminar. Therefore, 'the jet flow meter developed by the present invention has a larger dynamic measurement range' can cover the numerical measurement of small flow (turbulent flow, transitional flow, laminar flow), and its mechanical structure is simple and its volume is equivalent to that The size of the float meter used can be directly connected in series in the flow field pipeline. In addition, in the part of the flow sensing element, the material is polycrystalline stone instead of traditional platinum, so that the manufactured heating element and temperature sensor have low power consumption, high sensitivity, and easy and complementary Integrated characteristics of metal oxide semiconductor circuits. The jet flow meter of the present invention has a wide range of applications, such as gas meters, respirators, vehicle gas controllers, mass flow controllers, etc., which are used to measure the instantaneous flow of fluid in a flow field.

580564 Case No. 91138079 Amendment

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580564 _Case No. 9Π38079_ Year Month Revision _ Brief Description of Drawings Figure 1 is a schematic diagram of the structure of a conventional jet oscillating flowmeter; Figure 2 is a schematic diagram of a structure of a conventional flowmeter; Figure 3 is a diagram of a conventional flowmeter Schematic diagram; Figure 4 is a schematic diagram of a conventional miniaturized microcomputer gas meter; Figure 5 is a schematic diagram of a conventional flowmeter; Figure 6 is a schematic diagram of a conventional flowmeter; and Figure 7 is a jet of the present invention A three-dimensional exploded view of the flow meter; and FIG. 8 is a top view of the jet flow meter of the present invention; FIG. 9 is a schematic view of a micro-pipe of the present invention;

Attachment 1 is the physical diagram of the jet flow meter of the present invention; and Attachment 2 is the experimental data obtained from the actual flow measurement of the fluid using the jet flow meter of Annex 1. [Illustration of Symbols] 10 inlet 2 0 outlet 30 blocking body 31 groove 32 side channel 40 fluid shock sensor 50 flow channel

60a shock chamber entrance 60b shock chamber entrance 70 tapered section 80 buffer chamber 81 first entrance

Page 17 580564 Case No. 91138079_Year Month and Day Revised Schematic Brief Description 82 First Exit 83 Block 90 Micro-pipe 91 Multi-line Micro Flow Sensing Element 91a Heating Element 91b Temperature Sensing Element 100 Fluid Oscillation Chamber 101 Second Entrance 102 Second outlet 103 Obstacle 103a Single-line fluid vibration sensing element 104 Bypass channel 120 Flowmeter body 121 Inlet 122 Outlet

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Claims (1)

580564 _Case No. 91138079_ Modification of Year of the Month _ 6. Scope of Patent Application 1. A jet flow meter installed in a first-class field to measure the flow of fluid in the flow field, including: a buffer chamber, which It includes a first inlet, a first outlet, and a blocking body adjacent to the first inlet. The fluid enters the buffer chamber through the first inlet, and is smoothly blocked by the blocking body to enter and exit the buffer chamber. A micro-flow channel connected to the first outlet of the buffer chamber to accelerate the flow of the fluid, and a multi-line micro-flow sensing element is disposed in the micro-flow channel; and A fluid oscillating chamber includes a second inlet and a second outlet, the second inlet is connected to the other end of the microfluidic channel, and the second outlet is connected to the flow field, and the fluid oscillating chamber is provided with two The fluid oscillating chamber is partitioned into two opposite flow barriers, and the fluid passes through the two feedback flow bypass channels and returns along the outer edges of the obstacles adjacent to the second outlet. The second entrance; One of the obstacles is provided with a single-line fluid shock sensor. When the fluid flows into the feedback fluid shock chamber, the fluid will form a jet and oscillate left and right due to the effect of the Kongda effect. The fluid of each of the feedback bypass channels makes the jet oscillate stably, and the oscillation frequency of the jet measured by the single-line fluid oscillation sensing element can estimate the flow rate of the fluid, and the fluid passes through the second outlet Out of the jet flowmeter; and the multi-line micro-flow sensing element is used to measure a micro-flow fluid. When it is unable to measure the flow of the fluid, it is the jet flow measured by the fluid oscillation chamber. The oscillating frequency estimates the flow of the fluid. 2. The jet flowmeter as described in item 1 of the patent application scope, wherein another Page 19 580564 Case No. 911-like 079 6. The patent application scope obstacles are also provided with the single-line fluid vibration sensing element, and the vibration frequency of the jet measured by the two single-line fluid vibration sensing element can be estimated The flow of the fluid. 3. The jet flow meter as described in item 1 of the scope of patent application, wherein the first outlet is a type of tapered tube. 4. The jet flowmeter according to item 1 of the scope of patent application, wherein the second outlet is a type of a tapered tube. 5. The jet flow meter as described in item 1 of the patent application, wherein the multi-linear variable micro-flow sensing element includes a plurality of micro-flow sensing elements. 6 · The jet flow meter as described in item 4 of the patent scope of claim β, wherein the fluid flows through the microfluidic channel, the first contacting microfluidic sensing element is a heating element of 70, and the remaining microfluidic elements The flow sensing element is a temperature sensing element. 7. The jet flowmeter according to item 4 of the scope of patent application, wherein the heating τϋ member is composed of polycrystalline silicon material. Wherein the temperature 8. As described in the jet flow meter described in item 4 of the scope of patent application, the sensing element is composed of polycrystalline silicon material. The single wire 9 · 9 1 please use the jet flow meter described in item 1 of the patent scope. The vibration sensing element is composed of polycrystalline silicon material.