CN102118165B - 原子振荡器及制造方法 - Google Patents
原子振荡器及制造方法 Download PDFInfo
- Publication number
- CN102118165B CN102118165B CN2010105729819A CN201010572981A CN102118165B CN 102118165 B CN102118165 B CN 102118165B CN 2010105729819 A CN2010105729819 A CN 2010105729819A CN 201010572981 A CN201010572981 A CN 201010572981A CN 102118165 B CN102118165 B CN 102118165B
- Authority
- CN
- China
- Prior art keywords
- light
- cavity
- transparent member
- atomic oscillator
- alkali metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 150000001340 alkali metals Chemical group 0.000 claims abstract description 51
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 42
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000010030 laminating Methods 0.000 claims 5
- 239000011521 glass Substances 0.000 abstract description 25
- 238000004904 shortening Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/26—Automatic control of frequency or phase; Synchronisation using energy levels of molecules, atoms, or subatomic particles as a frequency reference
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009273157A JP5504851B2 (ja) | 2009-12-01 | 2009-12-01 | 原子発振器及び製造方法 |
| JP2009-273157 | 2009-12-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102118165A CN102118165A (zh) | 2011-07-06 |
| CN102118165B true CN102118165B (zh) | 2013-11-27 |
Family
ID=43502977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105729819A Expired - Fee Related CN102118165B (zh) | 2009-12-01 | 2010-11-30 | 原子振荡器及制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8710934B2 (https=) |
| EP (1) | EP2333958A1 (https=) |
| JP (1) | JP5504851B2 (https=) |
| CN (1) | CN102118165B (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105406865A (zh) * | 2014-09-08 | 2016-03-16 | 精工爱普生株式会社 | 原子室、原子室的制造方法、量子干涉装置 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5821439B2 (ja) * | 2011-02-16 | 2015-11-24 | セイコーエプソン株式会社 | ガスセルの製造方法 |
| US8624682B2 (en) | 2011-06-13 | 2014-01-07 | Honeywell International Inc. | Vapor cell atomic clock physics package |
| CN102323738B (zh) * | 2011-07-20 | 2014-04-02 | 中国科学院上海微系统与信息技术研究所 | 一种采用mems工艺制作的槽型原子气体腔及其构造的原子钟物理系统 |
| US9568565B2 (en) * | 2013-07-23 | 2017-02-14 | Texas Instruments Incorporated | Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices |
| US20160169989A1 (en) * | 2013-08-08 | 2016-06-16 | Hitachi, Ltd. | Magnetic field measuring apparatus |
| JP2015118962A (ja) * | 2013-12-16 | 2015-06-25 | セイコーエプソン株式会社 | 量子干渉装置、原子発振器、電子機器および移動体 |
| JP6323650B2 (ja) * | 2013-12-20 | 2018-05-16 | セイコーエプソン株式会社 | 面発光レーザーおよび原子発振器 |
| US9454135B2 (en) * | 2014-06-19 | 2016-09-27 | Texas Instruments Incorporated | Manufactureable long cell with enhanced sensitivity and good mechanical strength |
| US9639062B2 (en) * | 2015-03-30 | 2017-05-02 | Texas Instruments Incorporated | Vapor cell and method for making same |
| US10718661B2 (en) * | 2017-06-14 | 2020-07-21 | Texas Instruments Incorporated | Integrated microfabricated vapor cell sensor with transparent body having two intersecting signal paths |
| US10364144B2 (en) * | 2017-11-17 | 2019-07-30 | Texas Instruments Incorporated | Hermetically sealed package for mm-wave molecular spectroscopy cell |
| US10370760B2 (en) * | 2017-12-15 | 2019-08-06 | Texas Instruments Incorporated | Methods for gas generation in a sealed gas cell cavity |
| US11600581B2 (en) | 2021-04-15 | 2023-03-07 | Texas Instruments Incorporated | Packaged electronic device and multilevel lead frame coupler |
| US12444702B2 (en) | 2021-08-02 | 2025-10-14 | Texas Instruments Incorporated | Flip-chip enhanced quad flat no-lead electronic device with conductor backed coplanar waveguide transmission line feed in multilevel package substrate |
| US12519070B2 (en) | 2022-12-27 | 2026-01-06 | Texas Instruments Incorporated | System, electronic device and package with vertical to horizontal substrate integrated waveguide transition and horizontal grounded coplanar waveguide transition |
| US12489211B2 (en) | 2023-03-15 | 2025-12-02 | Texas Instruments Incorporated | Electronic device with patch antenna in packaging substrate |
| US12559363B2 (en) | 2023-08-28 | 2026-02-24 | Texas Instruments Incorporated | High reliability sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101223485A (zh) * | 2005-07-21 | 2008-07-16 | 精工爱普生株式会社 | 便携式钟表以及电子设备 |
| CN201266923Y (zh) * | 2008-09-09 | 2009-07-01 | 北京七维航测科技发展有限公司 | Gps组合时间频率仪 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6806784B2 (en) * | 2001-07-09 | 2004-10-19 | The National Institute Of Standards And Technology | Miniature frequency standard based on all-optical excitation and a micro-machined containment vessel |
| US6900702B2 (en) | 2002-08-14 | 2005-05-31 | Honeywell International Inc. | MEMS frequency standard for devices such as atomic clock |
| US7400207B2 (en) * | 2004-01-06 | 2008-07-15 | Sarnoff Corporation | Anodically bonded cell, method for making same and systems incorporating same |
| ATE504028T1 (de) * | 2004-07-13 | 2011-04-15 | Draper Lab Charles S | Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem |
| US7468637B2 (en) * | 2006-04-19 | 2008-12-23 | Sarnoff Corporation | Batch-fabricated, RF-interrogated, end transition, chip-scale atomic clock |
| US7619485B2 (en) * | 2007-01-31 | 2009-11-17 | Teledyne Scientific & Imaging, Llc | Compact optical assembly for chip-scale atomic clock |
-
2009
- 2009-12-01 JP JP2009273157A patent/JP5504851B2/ja not_active Expired - Fee Related
-
2010
- 2010-11-29 EP EP10192886A patent/EP2333958A1/en not_active Withdrawn
- 2010-11-30 CN CN2010105729819A patent/CN102118165B/zh not_active Expired - Fee Related
- 2010-11-30 US US12/956,193 patent/US8710934B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101223485A (zh) * | 2005-07-21 | 2008-07-16 | 精工爱普生株式会社 | 便携式钟表以及电子设备 |
| CN201266923Y (zh) * | 2008-09-09 | 2009-07-01 | 北京七维航测科技发展有限公司 | Gps组合时间频率仪 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105406865A (zh) * | 2014-09-08 | 2016-03-16 | 精工爱普生株式会社 | 原子室、原子室的制造方法、量子干涉装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011119325A (ja) | 2011-06-16 |
| US20110128082A1 (en) | 2011-06-02 |
| EP2333958A1 (en) | 2011-06-15 |
| US8710934B2 (en) | 2014-04-29 |
| JP5504851B2 (ja) | 2014-05-28 |
| CN102118165A (zh) | 2011-07-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221102 Address after: Arizona Patentee after: Microcore Technology Co. Address before: Tokyo, Japan Patentee before: Seiko Epson Corp. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131127 |