CN102118165B - 原子振荡器及制造方法 - Google Patents

原子振荡器及制造方法 Download PDF

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Publication number
CN102118165B
CN102118165B CN2010105729819A CN201010572981A CN102118165B CN 102118165 B CN102118165 B CN 102118165B CN 2010105729819 A CN2010105729819 A CN 2010105729819A CN 201010572981 A CN201010572981 A CN 201010572981A CN 102118165 B CN102118165 B CN 102118165B
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CN
China
Prior art keywords
light
cavity
transparent member
atomic oscillator
alkali metal
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Expired - Fee Related
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CN2010105729819A
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English (en)
Chinese (zh)
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CN102118165A (zh
Inventor
牧义之
西田哲朗
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Microcore Technology Co
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Seiko Epson Corp
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Publication of CN102118165A publication Critical patent/CN102118165A/zh
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03LAUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00Automatic control of frequency or phase; Synchronisation
    • H03L7/26Automatic control of frequency or phase; Synchronisation using energy levels of molecules, atoms, or subatomic particles as a frequency reference
    • GPHYSICS
    • G04HOROLOGY
    • G04FTIME-INTERVAL MEASURING
    • G04F5/00Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14Apparatus for producing preselected time intervals for use as timing standards using atomic clocks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Semiconductor Lasers (AREA)
CN2010105729819A 2009-12-01 2010-11-30 原子振荡器及制造方法 Expired - Fee Related CN102118165B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009273157A JP5504851B2 (ja) 2009-12-01 2009-12-01 原子発振器及び製造方法
JP2009-273157 2009-12-01

Publications (2)

Publication Number Publication Date
CN102118165A CN102118165A (zh) 2011-07-06
CN102118165B true CN102118165B (zh) 2013-11-27

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Family Applications (1)

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CN2010105729819A Expired - Fee Related CN102118165B (zh) 2009-12-01 2010-11-30 原子振荡器及制造方法

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US (1) US8710934B2 (https=)
EP (1) EP2333958A1 (https=)
JP (1) JP5504851B2 (https=)
CN (1) CN102118165B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105406865A (zh) * 2014-09-08 2016-03-16 精工爱普生株式会社 原子室、原子室的制造方法、量子干涉装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5821439B2 (ja) * 2011-02-16 2015-11-24 セイコーエプソン株式会社 ガスセルの製造方法
US8624682B2 (en) 2011-06-13 2014-01-07 Honeywell International Inc. Vapor cell atomic clock physics package
CN102323738B (zh) * 2011-07-20 2014-04-02 中国科学院上海微系统与信息技术研究所 一种采用mems工艺制作的槽型原子气体腔及其构造的原子钟物理系统
US9568565B2 (en) * 2013-07-23 2017-02-14 Texas Instruments Incorporated Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices
US20160169989A1 (en) * 2013-08-08 2016-06-16 Hitachi, Ltd. Magnetic field measuring apparatus
JP2015118962A (ja) * 2013-12-16 2015-06-25 セイコーエプソン株式会社 量子干渉装置、原子発振器、電子機器および移動体
JP6323650B2 (ja) * 2013-12-20 2018-05-16 セイコーエプソン株式会社 面発光レーザーおよび原子発振器
US9454135B2 (en) * 2014-06-19 2016-09-27 Texas Instruments Incorporated Manufactureable long cell with enhanced sensitivity and good mechanical strength
US9639062B2 (en) * 2015-03-30 2017-05-02 Texas Instruments Incorporated Vapor cell and method for making same
US10718661B2 (en) * 2017-06-14 2020-07-21 Texas Instruments Incorporated Integrated microfabricated vapor cell sensor with transparent body having two intersecting signal paths
US10364144B2 (en) * 2017-11-17 2019-07-30 Texas Instruments Incorporated Hermetically sealed package for mm-wave molecular spectroscopy cell
US10370760B2 (en) * 2017-12-15 2019-08-06 Texas Instruments Incorporated Methods for gas generation in a sealed gas cell cavity
US11600581B2 (en) 2021-04-15 2023-03-07 Texas Instruments Incorporated Packaged electronic device and multilevel lead frame coupler
US12444702B2 (en) 2021-08-02 2025-10-14 Texas Instruments Incorporated Flip-chip enhanced quad flat no-lead electronic device with conductor backed coplanar waveguide transmission line feed in multilevel package substrate
US12519070B2 (en) 2022-12-27 2026-01-06 Texas Instruments Incorporated System, electronic device and package with vertical to horizontal substrate integrated waveguide transition and horizontal grounded coplanar waveguide transition
US12489211B2 (en) 2023-03-15 2025-12-02 Texas Instruments Incorporated Electronic device with patch antenna in packaging substrate
US12559363B2 (en) 2023-08-28 2026-02-24 Texas Instruments Incorporated High reliability sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101223485A (zh) * 2005-07-21 2008-07-16 精工爱普生株式会社 便携式钟表以及电子设备
CN201266923Y (zh) * 2008-09-09 2009-07-01 北京七维航测科技发展有限公司 Gps组合时间频率仪

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6806784B2 (en) * 2001-07-09 2004-10-19 The National Institute Of Standards And Technology Miniature frequency standard based on all-optical excitation and a micro-machined containment vessel
US6900702B2 (en) 2002-08-14 2005-05-31 Honeywell International Inc. MEMS frequency standard for devices such as atomic clock
US7400207B2 (en) * 2004-01-06 2008-07-15 Sarnoff Corporation Anodically bonded cell, method for making same and systems incorporating same
ATE504028T1 (de) * 2004-07-13 2011-04-15 Draper Lab Charles S Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem
US7468637B2 (en) * 2006-04-19 2008-12-23 Sarnoff Corporation Batch-fabricated, RF-interrogated, end transition, chip-scale atomic clock
US7619485B2 (en) * 2007-01-31 2009-11-17 Teledyne Scientific & Imaging, Llc Compact optical assembly for chip-scale atomic clock

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101223485A (zh) * 2005-07-21 2008-07-16 精工爱普生株式会社 便携式钟表以及电子设备
CN201266923Y (zh) * 2008-09-09 2009-07-01 北京七维航测科技发展有限公司 Gps组合时间频率仪

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105406865A (zh) * 2014-09-08 2016-03-16 精工爱普生株式会社 原子室、原子室的制造方法、量子干涉装置

Also Published As

Publication number Publication date
JP2011119325A (ja) 2011-06-16
US20110128082A1 (en) 2011-06-02
EP2333958A1 (en) 2011-06-15
US8710934B2 (en) 2014-04-29
JP5504851B2 (ja) 2014-05-28
CN102118165A (zh) 2011-07-06

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Effective date of registration: 20221102

Address after: Arizona

Patentee after: Microcore Technology Co.

Address before: Tokyo, Japan

Patentee before: Seiko Epson Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131127