CN102117893A - Vacuum heating degassing treatment equipment - Google Patents
Vacuum heating degassing treatment equipment Download PDFInfo
- Publication number
- CN102117893A CN102117893A CN 201010568437 CN201010568437A CN102117893A CN 102117893 A CN102117893 A CN 102117893A CN 201010568437 CN201010568437 CN 201010568437 CN 201010568437 A CN201010568437 A CN 201010568437A CN 102117893 A CN102117893 A CN 102117893A
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- Prior art keywords
- vacuum cavity
- vacuum
- fixed
- heating
- support column
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 54
- 238000007872 degassing Methods 0.000 title abstract description 5
- 230000003028 elevating effect Effects 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims description 22
- 238000009849 vacuum degassing Methods 0.000 claims description 21
- 238000005086 pumping Methods 0.000 claims description 13
- 238000005538 encapsulation Methods 0.000 claims description 12
- 238000002955 isolation Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 5
- 230000033001 locomotion Effects 0.000 claims description 4
- 239000012809 cooling fluid Substances 0.000 claims description 3
- 230000009969 flowable effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000009461 vacuum packaging Methods 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 12
- 229910052760 oxygen Inorganic materials 0.000 description 12
- 239000011368 organic material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses vacuum heating degassing treatment equipment comprising a framework, a vacuum cavity, a heating plate, an elevating assembly, a horizontal conveying assembly, a vacuumizing system and a control system, wherein an inlet and an outlet are respectively arranged at two ends of the vacuum cavity and are respectively provided with a sealed closing valve; the horizontal conveying assembly is transversely arranged in the vacuum cavity; the elevating assembly is provided with a plurality of supporting poles and cylinder motors, and the supporting poles freely extend to the inside of the vacuum cavity in a sealing way; the heating plate is installed in the vacuum cavity; the vacuumizing system is communicated with the vacuum cavity; and the heating plate, the elevating assembly, the horizontal conveying assembly and the vacuumizing system are all electrically connected with the control system. The vacuum heating degassing treatment equipment is simple in structure and convenient to operate, effectively prolongs the service life of a display device, plays a buffer role between the outside and a vacuum packaging production line, and does not need to damage the vacuum state of the production line during working.
Description
Technical field
The present invention relates to a kind of degassing processing equipment, relate in particular to a kind of bonnet to organic light emitting display carries out bake out before encapsulation heating in vacuum degassing processing equipment.
Background technology
The OLED display promptly utilizes Organic Light Emitting Diode (Organic Light-Emitting Diode) to be approved by vast production firm gradually as a kind of new technology of flat.But the OLED technical development be we can say also very unripe so far, and its display device remains in some shortcomings, and the most outstanding defective is that its useful life is shorter at present, and the life problems of device has limited the process of OLED display industryization to a great extent.The life-span of OLED display is depended on the performance and the life-span of selected organic material on the one hand, also depends on method for packing, sealed in unit and the effect etc. of device on the other hand.It is that glue seals the front and back glass substrate in vacuum environment that method for packing now generally is to use encapsulating material, because the instability of the organic material in the OLED display, if the encapsulation of OLED display is bad, along with the increase of organic luminous panel service time of OLED display, in the air and moisture, moisture and oxygen etc. in the encapsulating material enter the chance of OLED display interior also along with lifting.Organic material will react with gases such as water vapour in the vacuum chamber, oxygen, be easy to cause a series of problems such as luminescent layer separates with electrode layer, organic material decomposition, anodizing, this has improved the not generation chance of light-emitting zone virtually, reduce the brightness and the uniformity of luminescent layer, the useful life of also having reduced the OLED display.
At present the most key is exactly that device is carried out the rational and effective encapsulation, and this packaging system to device, method and packaging technology have proposed high requirement.For adapting to this requirement, avoid moisture, moisture and oxygen to enter into the OLED display interior, effective method is exactly before the encapsulation of OLED display, just with eliminating such as the moisture in the encapsulating material, moisture and oxygen and then encapsulate.Yet the not too suitable large-scale production line of method and apparatus of the encapsulation OLED display of adverse effect factors such as moisture, moisture and oxygen is got rid of in traditional being used to, sometimes can't be effectively with the unfavorable air scavenge in the encapsulating material.
Therefore, need a kind of bonnet before encapsulation, carry out bake out, prevent to encapsulate moisture, moisture and oxygen etc. in the encapsulating material of back and enter that display device is inner to react with organic material and reduce the heating in vacuum degassing processing equipment in the useful life of display device organic light emitting display.
Summary of the invention
The object of the present invention is to provide a kind of bonnet before encapsulation, to carry out bake out, prevent to encapsulate moisture, moisture and oxygen etc. in the encapsulating material of back and enter that display device is inner to react with organic material and reduce the heating in vacuum degassing processing equipment in the useful life of display device organic light emitting display.
To achieve these goals, the invention provides a kind of heating in vacuum degassing processing equipment, be applicable to that the bonnet to organic light emitting display carries out bake out before encapsulation, comprise frame, vacuum cavity, heating plate, lifting assembly, the horizontal feed assembly, vacuum-pumping system and control system, described vacuum cavity is fixed on the described frame, the two ends of described vacuum cavity are respectively arranged with inlet and outlet, described inlet and exit are provided with the seal isolation valve, described seal isolation valve opens or closes described inlet and outlet, described horizontal feed assembly traverses and is arranged at described vacuum cavity inside and two ends and dock with described inlet and outlet respectively and form the bonnet transmission channel of transmitting for bonnet, described lifting assembly is installed on the outer below of described vacuum cavity, described lifting assembly has some support columns and drives the cylinder motor that described support column is done straight reciprocating motion, described support column is and stretches in the described vacuum cavity hermetically and in the elevating movement that can freely make linear reciprocation under the effect of cylinder motor in described vacuum cavity, the free end that stretches into the support column in the described vacuum cavity forms supporting surface, described heating plate be installed on described vacuum cavity inner and be in supporting surface that the free end of described support column forms directly over, described vacuum-pumping system is communicated with described vacuum cavity, described heating plate, lifting assembly, horizontal feed assembly and vacuum-pumping system all are electrically connected with described control system.
Preferably, described heating in vacuum degassing processing equipment also comprises cooling device, and described cooling device is installed on described vacuum cavity inside.Particularly, described cooling device is a coldplate, described coldplate be installed on described vacuum cavity inner and be in described heating plate directly over, described coldplate inside is equipped with cooling water pipe, fills with flowable cooling fluid in the described cooling water pipe.Because the radiation of heating plate, cause whole cavity temperature all can raise, but the side of the just close workpiece of efficient temperature utilization, other places are invalid intensification, therefore, use the temperature in the described vacuum cavity of described coldplate cooling can effectively the reduction, described vacuum cavity is worked under normal temperature.
Preferably, described lifting assembly also comprises supporting bracket and some bellowss, the piston rod of described cylinder motor and described supporting bracket are fixed, described support column is fixed on the described supporting bracket, on the described support column that described bellows is socketed on and the described vacuum cavity bottom be fixed in hermetically of an end, the other end is fixed on the described supporting bracket hermetically.Promote support column on the described supporting bracket by described cylinder motor, making described support column promote bonnet rises, thereby make bonnet nearer from described heating plate, more effectively absorb the heat of described heating plate, temperature is raise rapidly, simple in structure, flexible operation, described bellows more can seal the junction between described support column and the vacuum cavity, prevents that atmosphere from entering in the described vacuum cavity.
Particularly, described lifting assembly also comprises guidance set, described guidance set comprises guide post, fairlead and fixed head, described fixed head is fixed on the cylinder motor, and described fairlead passes and is fixed on the described supporting bracket, and described guide post is socketed in the described fairlead slidably, one end be fixed in described vacuum cavity bottom, the other end is fixed on the described fixed head.Described guidance set can accurately move described support column along the direction that sets, and play the guiding role.
Preferably, described horizontal feed assembly comprises driven unit, base and some conveying rollers, and described driven unit is installed on the described base, and described conveying roller horizontal pivot is connected on the described base.Described driven unit can be transported to described bonnet on the described lifting assembly after driving described conveying roller, prepares near perform the location to described heating plate for rising.
Compared with prior art, because the present invention is transported in the described vacuum cavity by the described bonnet before will encapsulating, utilize described lifting assembly to make described bonnet near described heating plate, and then the encapsulating material on the described bonnet heated, make its inner moisture, impurity such as moisture and oxygen is discharged, utilize the vacuum-evacuate system that it is extracted out again, behind bake out, encapsulate again, thereby prevent to encapsulate the moisture in the encapsulating material of back, moisture and oxygen etc. enter display device inside and react with organic material, entire equipment is simple in structure, easy to operate, effectively improved the life-span of the organic material in the organic display spare of encapsulation back, thus the useful life of having improved display device.
Description of drawings
Fig. 1 is the decomposing schematic representation of heating in vacuum degassing processing equipment of the present invention.
Fig. 2 is the cutaway view figure of heating in vacuum degassing processing equipment of the present invention.
Fig. 3 is the structural representation of lifting assembly in the heating in vacuum degassing processing equipment of the present invention.
Fig. 4 is the working state schematic representation of heating in vacuum degassing processing equipment of the present invention
Embodiment
As shown in Figure 1 and Figure 2, heating in vacuum degassing processing equipment 100 of the present invention comprises frame 1, vacuum cavity 2, heating plate 3, coldplate 4, seal isolation valve 5, lifting assembly 6, horizontal feed assembly 7, vacuum-pumping system 8 and control system (not shown).Described vacuum cavity 2 is fixed on the described frame 1, described vacuum cavity 2 both sides offer inlet 21 respectively and export 22, described lifting assembly 6 is installed on the below of described vacuum cavity 2, described lifting assembly 6 has some support columns 63, described support column 63 stretch into hermetically in the described vacuum cavity 2 and can be freely straight line lifting and described vacuum cavity 2 at free end formation supporting surface, it is inner and be in the top of the supporting surface that the free end of described support column 63 forms that described heating 3 plates are installed on described vacuum cavity 2, described coldplate 4 is installed on described vacuum cavity 2 inside and is in the top of described heating plate 3, described coldplate 4 inside are equipped with cooling water pipe 41, fill with flowable cooling fluid in the described cooling water pipe 41, the side of the just close workpiece that adds heat utilization of heating plate 3, other places are invalid intensification, use described coldplate 4 to cool off the temperature that can effectively reduce in the described vacuum cavity 2, described vacuum cavity 2 is being worked under normal temperature.Described horizontal feed assembly 7 traverses and is arranged at described vacuum cavity 2 inside and two ends respectively with described inlet 21 and export 22 and dock the bonnet transmission channel 7a that forms for bonnet 200 transmission.Described vacuum-pumping system 8 is communicated with described vacuum cavity 2.Described seal isolation valve 5 is installed on described inlet 21 respectively and exports on 22, can open or close described inlet 21 and export 22.Described heating plate 3, seal isolation valve 5, lifting assembly 6, horizontal feed assembly 7 and vacuum-pumping system 8 all are electrically connected with described control system, and described control system is controlled the operating state of described heating plate 3, seal isolation valve 5, lifting assembly 6, horizontal feed assembly 7 and vacuum-pumping system 8.
As shown in Figure 3, described lifting assembly 6 comprises cylinder motor 61, supporting bracket 62, some support columns 63, guidance set 64 and bellows 65, the piston rod 61a of described cylinder motor 61 and described supporting bracket 62 are fixing, described support column 63 is fixed on the described supporting bracket 62, on the described support column 63 that described bellows 65 is socketed on and described vacuum cavity 2 bottoms be fixed in hermetically of an end, the other end is fixed on the described supporting bracket 62 hermetically.Described guidance set 64 comprises guide post 64a, fairlead 64b and fixed head 64c, described fixed head 64c is fixed on the cylinder motor 61, described fairlead 64b passes and is fixed on the described supporting bracket 62, described guide post 64a is socketed in the described fairlead 64b slidably, an end be fixed in described vacuum cavity 2 bottoms, the other end is fixed on the described fixed head 64c, described guidance set 64 can accurately move described support column 63 along the direction that sets, and play the guiding role.By the support column 63 on the described supporting bracket 62 of described cylinder motor 61 promotions, making described support column 63 promote bonnet 200 rises, thereby make bonnet 200 nearer from described heating plate 3, more effectively absorb the heat of described heating plate 3, temperature is raise rapidly, simple in structure, flexible operation, described bellows 65 more can seal the junction between described support column 63 and the vacuum cavity 2, prevents that atmosphere from entering in the described vacuum cavity 2.
Described horizontal feed assembly 7 comprises driven unit 71, base 72 and some conveying rollers 73, and described driven unit 71 is installed on the described base 72, and described conveying roller 73 horizontal pivots are connected on the described base 72.Described bonnet 200 can be transported on the described lifting assembly 6 after described driven unit 71 drives described conveying roller 73, prepare near perform the location to described heating plate 3 for rising.
Comprehensive above-mentioned and in conjunction with Fig. 4, the operation principle to heating in vacuum degassing processing equipment 100 of the present invention is elaborated below, and is as follows:
During work, the outlet 22 of heating in vacuum degassing processing equipment 100 of the present invention is connected with the starting end of Vacuum Package production line, before the encapsulation, described bonnet 200 is transported to inlet 21 1 ends of described vacuum cavity 2, described control system is controlled described seal isolation valve 5 and is opened and control described horizontal feed assembly 7 startups, described bonnet 200 enters described vacuum cavity 2 backs to be stopped after the drive of the conveying roller 73 on the described horizontal feed assembly 7 is moved between described heating plate 3 and the described support column 63, described seal isolation valve 5 cuts out, with described vacuum cavity 2 sealings, control system starts described lifting assembly 6 then, the cylinder motor 61 piston rod 61a of described lifting assembly 6 promote described supporting bracket 62 and rise along described guide post 64a direction, and then make described support column 63 promote described bonnet 200 risings and slowly close described heating plate 3, heating plate 3 starts intensification, encapsulating material 201 on the heating bonnet 200 makes the moisture of encapsulating material 201, moisture and oxygen are discharged in the described vacuum cavity 2, simultaneously, start described vacuum-pumping system 8, the gas in the described vacuum cavity 2 is extracted out.After degasification is finished, the described bonnet 200 of 63 times generals who has surrendered of the support column of described lifting assembly 6 is positioned on the described bonnet transmission channel 7a, described control system is controlled described horizontal feed assembly 7 startups and is controlled described seal isolation valve 5 and open described outlet 22, at last described bonnet 200 is transported in the vacuum lines in described vacuum cavity 2.
Because the present invention is transported in the described vacuum cavity 2 by the described bonnet 200 before will encapsulating, utilize described lifting assembly 6 to make described bonnet 200 near described heating plate 3, and then the encapsulating material 201 on the described bonnet 200 heated, make its inner moisture, impurity such as moisture and oxygen is discharged, utilize vacuum-pumping system 8 with its extraction again, behind bake out, encapsulate again, thereby prevent to encapsulate the moisture in the encapsulating material 201 of back, moisture and oxygen etc. enter display device inside and react with organic material, entire equipment is simple in structure, easy to operate, effectively improved the life-span of the organic material in the organic display spare of encapsulation back, thereby improved the useful life of display device, in addition, because the present invention handles bonnet 200 before bonnet 200 enters the Vacuum Package production line, its inside also is in vacuum state, can after handling, directly bonnet 200 be sent into production line, therefore, heating in vacuum degassing processing equipment 100 of the present invention plays cushioning effect between extraneous and Vacuum Package production line, need not to destroy the vacuum state of production line when bonnet 200 is sent into production line.
The described vacuum-pumping system 8 that heating in vacuum degassing processing equipment of the present invention 100 is involved and the operation principle of control system are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (6)
1. heating in vacuum degassing processing equipment, be applicable to that the bonnet to organic light emitting display carries out bake out before encapsulation, it is characterized in that: comprise frame, vacuum cavity, heating plate, lifting assembly, the horizontal feed assembly, vacuum-pumping system and control system, described vacuum cavity is fixed on the described frame, the two ends of described vacuum cavity are respectively arranged with inlet and outlet, described inlet and exit are provided with the seal isolation valve, described seal isolation valve opens or closes described inlet and outlet, described horizontal feed assembly traverses and is arranged at described vacuum cavity inside and two ends and dock with described inlet and outlet respectively and form the bonnet transmission channel of transmitting for bonnet, described lifting assembly is installed on the outer below of described vacuum cavity, described lifting assembly has some support columns and drives the cylinder motor that described support column is done straight reciprocating motion, described support column is and stretches in the described vacuum cavity hermetically and in the elevating movement that can freely make linear reciprocation under the effect of cylinder motor in described vacuum cavity, the free end that stretches into the support column in the described vacuum cavity forms supporting surface, described heating plate be installed on described vacuum cavity inner and be in supporting surface that the free end of described support column forms directly over, described vacuum-pumping system is communicated with described vacuum cavity, described heating plate, lifting assembly, horizontal feed assembly and vacuum-pumping system all are electrically connected with described control system.
2. heating in vacuum degassing processing equipment as claimed in claim 1 is characterized in that: also comprise cooling device, described cooling device is installed on described vacuum cavity inside.
3. heating in vacuum degassing processing equipment as claimed in claim 2, it is characterized in that: described cooling device is a coldplate, described coldplate be installed on described vacuum cavity inner and be in described heating plate directly over, described coldplate inside is equipped with cooling water pipe, fills with flowable cooling fluid in the described cooling water pipe.
4. heating in vacuum degassing processing equipment as claimed in claim 1, it is characterized in that: described lifting assembly also comprises supporting bracket and some bellowss, the piston rod of described cylinder motor and described supporting bracket are fixed, described support column is fixed on the described supporting bracket, on the described support column that described bellows is socketed on and the described vacuum cavity bottom be fixed in hermetically of an end, the other end is fixed on the described supporting bracket hermetically.
5. heating in vacuum degassing processing equipment as claimed in claim 4, it is characterized in that: described lifting assembly also comprises guidance set, described guidance set comprises guide post, fairlead and fixed head, described fixed head is fixed on the cylinder motor, and described fairlead passes and is fixed on the described supporting bracket, and described guide post is socketed in the described fairlead slidably, one end be fixed in described vacuum cavity bottom, the other end is fixed on the described fixed head.
6. heating in vacuum degassing processing equipment as claimed in claim 1, it is characterized in that: described horizontal feed assembly comprises driven unit, base and some conveying rollers, described driven unit is installed on the described base, and described conveying roller horizontal pivot is connected on the described base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105684377A CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105684377A CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
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| Publication Number | Publication Date |
|---|---|
| CN102117893A true CN102117893A (en) | 2011-07-06 |
| CN102117893B CN102117893B (en) | 2012-07-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105684377A Expired - Fee Related CN102117893B (en) | 2010-12-01 | 2010-12-01 | Vacuum heating degassing treatment equipment |
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| Country | Link |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1265516A (en) * | 1999-03-01 | 2000-09-06 | 中外炉工业株式会社 | Exhaust sealing method for plasma display panel |
| US20010034175A1 (en) * | 2000-02-16 | 2001-10-25 | Toshihiko Miyazaki | Method and apparatus for manufacturing image displaying apparatus |
| CN201298524Y (en) * | 2008-10-17 | 2009-08-26 | 南京华显高科有限公司 | Sealing device for shadow-mask plasma display screen |
| CN201364868Y (en) * | 2008-12-30 | 2009-12-16 | 四川虹欧显示器件有限公司 | Seal and exhaust furnace for shortening sealing and exhaustion time of plasma display screen |
| CN201918432U (en) * | 2010-12-01 | 2011-08-03 | 东莞宏威数码机械有限公司 | Vacuum heating and degassing treatment device |
-
2010
- 2010-12-01 CN CN2010105684377A patent/CN102117893B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1265516A (en) * | 1999-03-01 | 2000-09-06 | 中外炉工业株式会社 | Exhaust sealing method for plasma display panel |
| US20010034175A1 (en) * | 2000-02-16 | 2001-10-25 | Toshihiko Miyazaki | Method and apparatus for manufacturing image displaying apparatus |
| CN201298524Y (en) * | 2008-10-17 | 2009-08-26 | 南京华显高科有限公司 | Sealing device for shadow-mask plasma display screen |
| CN201364868Y (en) * | 2008-12-30 | 2009-12-16 | 四川虹欧显示器件有限公司 | Seal and exhaust furnace for shortening sealing and exhaustion time of plasma display screen |
| CN201918432U (en) * | 2010-12-01 | 2011-08-03 | 东莞宏威数码机械有限公司 | Vacuum heating and degassing treatment device |
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| Publication number | Publication date |
|---|---|
| CN102117893B (en) | 2012-07-04 |
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